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@@ -1,7 +1,7 @@
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<?xml version="1.0" encoding="utf-8"?>
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<root system="Furnace">
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<configs name="System" display="System Parameter">
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- <config default="false" name="IsSimulatorMode" description="Is Simulator Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
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+ <config default="true" name="IsSimulatorMode" description="Is Simulator Mode" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="120" name="BackUpFileMaxNumber" description="BackUpFileMaxNumber" max="1000" min="0" paramter="" tag="" unit="" type="Integer" />
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<!--检测断线报警时间-->
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<config default="10" name="PLCConnectSensorFoolTime" description="PLC Connect Sensor Fool Time" max="1000" min="0" paramter="" tag="" unit="" type="Integer" visible="false"/>
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@@ -4681,61 +4681,54 @@
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<config default="false" name="IsHTR3Enable" description="IsHTR3Enable " max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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- <configs name="RfPower">
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-
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- </configs>
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- <configs name="RfMatch">
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-
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- </configs>
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- <configs name="N2Purge" visible="false">
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- <config default="false" name="EnableAbortN2purge" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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-
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- <config default="1" name="TransferRoomArrivalWaitTime" description="LA O2 CheckTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="TransferRoomStableWaitTime" description="LA O2 OverTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="FOUPOpenerArrivalWaitTime" description="FOUP O2 CheckTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="FOUPOpenerStableWaitTime" description="FOUP O2 OverTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="O2DetectorTransferRoomToFOUPTime" description="Exchange LA TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="O2DetectorFOUPToTransferRoomTime" description="Exchange FOUP TO LA WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="1" name="O2DetectorFOUPToFOUPTime" description="FOUP TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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- <config default="0" name="N2PurgeFOUPO2CheckSV" description="FOUP O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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- <config default="0" name="N2PurgeLAO2CheckSV" description=" LA O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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- <configs name="FoupEnter">
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+ <configs name="N2Purge" >
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+ <config visible="false" default="false" name="EnableAbortN2purge" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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+ <config visible="false" default="1" name="TransferRoomArrivalWaitTime" description="LA O2 CheckTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="1" name="TransferRoomStableWaitTime" description="LA O2 OverTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="1" name="FOUPOpenerArrivalWaitTime" description="FOUP O2 CheckTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="1" name="FOUPOpenerStableWaitTime" description="FOUP O2 OverTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="1" name="O2DetectorTransferRoomToFOUPTime" description="Exchange LA TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="1" name="O2DetectorFOUPToTransferRoomTime" description="Exchange FOUP TO LA WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="1" name="O2DetectorFOUPToFOUPTime" description="FOUP TO FOUP WaitTime" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="0" name="N2PurgeFOUPO2CheckSV" description="FOUP O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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+ <config visible="false" default="0" name="N2PurgeLAO2CheckSV" description=" LA O2 CheckSV" max="999999" min="0" paramter="" tag="" unit="s" type="Double" />
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+ <configs visible="false" name="FoupEnter">
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<config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="FOUPN2PurgeCancelEnable" description="FOUP N2 Purge Cancel Enable When Foup Enter" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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</configs>
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- <configs name="WaferCharge">
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+ <configs visible="false" name="WaferCharge">
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<config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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</configs>
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- <configs name="WaferDischarge">
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+ <configs visible="false" name="WaferDischarge">
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<config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="FOUPN2PurgeEnable" description="FOUP N2 Purge Discharge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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</configs>
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- <configs name="BoatLoad">
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+ <configs visible="false" name="BoatLoad">
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<config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Charge Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="EAxisInhibitEnable" description="E Axis Inhibit Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable When boatloading" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep boatloading Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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</configs>
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- <configs name="FoupInhibit">
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+ <configs visible="false" name="FoupInhibit">
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<config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable After BoatLoad" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="1" name="FoupInhibitTime" description="FOUP TO FOUP WaitTime After BoatLoad" max="360" min="1" paramter="" tag="" unit="s" type="Double" />
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</configs>
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- <configs name="BoatUnLoad">
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+ <configs visible="false" name="BoatUnLoad">
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<config default="true" name="TransferRoomN2PurgeEnable" description="LA N2 Purge Charge Enable Before Boat Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityCheckEnable" description="LA O2 Density Check Charge Enable Before Boat Unload" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="EAxisInhibitEnable" description="E Axis Inhibit Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable When boatUnloading" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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<config default="true" name="TransferRoomO2DensityKeepEnable" description="LA O2 Density Keep boatloading Enable" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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</configs>
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- <configs name="WaferCooling">
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+ <configs visible="false" name="WaferCooling">
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<config default="true" name="FoupInhibitEnable" description="Foup Inhibit Enable When Wafer Cooling" max="0" min="0" paramter="" tag="" unit="" type="Bool"/>
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</configs>
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@@ -4753,20 +4746,20 @@
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<config type="Bool" default="false" name="TrigMS521" />
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<config type="Bool" default="false" name="TrigMS522" />
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</configs>
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- <configs name="Manual_phase2" visible="false">
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- <config type="Double" default="400" max="1000" min="0" name="MFC51" />
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- <config type="Bool" default="true" name="ValveAV56" />
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- <config type="Bool" default="false" name="ValveAV57" />
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- <config type="Bool" default="false" name="ValveAV65" />
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- <config type="Bool" default="false" name="ValveAV66" />
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- <config type="Bool" default="true" name="ValveSV227" />
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- <config type="Bool" default="false" name="ValveAV202" />
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- <config type="Bool" default="false" name="ValveAV201" />
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- <config type="Bool" default="true" name="TrigMS501" />
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- <config type="Bool" default="false" name="TrigMS520" />
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- <config type="Bool" default="false" name="TrigMS521" />
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- <config type="Bool" default="false" name="TrigMS522" />
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- <config default="60" name="StabilityTime" description="StabilityTime" max="999999" min="0" paramter="" tag="" unit="rpm" type="Double" />
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+ <configs name="Manual_phase2">
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+ <config visible="false" type="Double" default="400" max="1000" min="0" name="MFC51" />
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+ <config visible="false" type="Bool" default="true" name="ValveAV56" />
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+ <config visible="false" type="Bool" default="false" name="ValveAV57" />
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+ <config visible="false" type="Bool" default="false" name="ValveAV65" />
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+ <config visible="false" type="Bool" default="false" name="ValveAV66" />
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+ <config visible="false" type="Bool" default="true" name="ValveSV227" />
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+ <config visible="false" type="Bool" default="false" name="ValveAV202" />
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+ <config visible="false" type="Bool" default="false" name="ValveAV201" />
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+ <config visible="false" type="Bool" default="true" name="TrigMS501" />
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+ <config visible="false" type="Bool" default="false" name="TrigMS520" />
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+ <config visible="false" type="Bool" default="false" name="TrigMS521" />
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+ <config visible="false" type="Bool" default="false" name="TrigMS522" />
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+ <config default="60" name="StabilityTime" description="phase2 keep time" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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</configs>
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<configs name="Manual_phase3" visible="false">
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@@ -4782,19 +4775,19 @@
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<config type="Bool" default="true" name="TrigMS521" />
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<config type="Bool" default="true" name="TrigMS522" />
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</configs>
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- <configs name="Manual_phase4" visible="false">
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- <config type="Bool" default="false" name="ValveAV56" />
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- <config type="Bool" default="false" name="ValveAV57" />
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- <config type="Bool" default="true" name="ValveAV65" />
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- <config type="Bool" default="true" name="ValveAV66" />
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- <config type="Bool" default="true" name="ValveSV227" />
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- <config type="Bool" default="true" name="ValveAV202" />
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- <config type="Bool" default="true" name="ValveAV201" />
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- <config type="Bool" default="true" name="TrigMS501" />
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- <config type="Bool" default="true" name="TrigMS520" />
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- <config type="Bool" default="true" name="TrigMS521" />
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- <config type="Bool" default="true" name="TrigMS522" />
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- <config default="60" name="StabilityTime" description="StabilityTime" max="999999" min="0" paramter="" tag="" unit="rpm" type="Double" visible="false" />
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+ <configs name="Manual_phase4">
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+ <config visible="false" type="Bool" default="false" name="ValveAV56" />
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+ <config visible="false" type="Bool" default="false" name="ValveAV57" />
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+ <config visible="false" type="Bool" default="true" name="ValveAV65" />
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+ <config visible="false" type="Bool" default="true" name="ValveAV66" />
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+ <config visible="false" type="Bool" default="true" name="ValveSV227" />
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+ <config visible="false" type="Bool" default="true" name="ValveAV202" />
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+ <config visible="false" type="Bool" default="true" name="ValveAV201" />
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+ <config visible="false" type="Bool" default="true" name="TrigMS501" />
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+ <config visible="false" type="Bool" default="true" name="TrigMS520" />
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+ <config visible="false" type="Bool" default="true" name="TrigMS521" />
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+ <config visible="false" type="Bool" default="true" name="TrigMS522" />
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+ <config default="60" name="StabilityTime" description="phase3 into phase4 waitTime" max="999999" min="0" paramter="" tag="" unit="" type="Double" />
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</configs>
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<configs name="Manual_phase5" visible="false">
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<config type="Bool" default="false" name="ValveAV56" />
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