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@@ -26,7 +26,7 @@
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<DI_ITEM Index="77" Name="DI_Gasboxexhaustpressurealarm2nd" BufferOffset="77" Addr="D4.13" Description="safe module:Gas box exhaust pressure alarm 2nd(D4.13)" />
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<DI_ITEM Index="78" Name="DI_FS101waterflowalarm" BufferOffset="78" Addr="D4.14" Description="safe module:FS101 water flow alarm(D4.14)" />
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<DI_ITEM Index="79" Name="DI_Frontbodyinterlockresetbutton" BufferOffset="79" Addr="D4.15" Description="safe module:Front body interlock reset button(D4.15)" />
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-
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+
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<DI_ITEM Index="80" Name="DI_LightcurtainOSSD1" BufferOffset="80" Addr="D5.0" Description="safe module:Light curtain OSSD1(D5.0)" />
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<DI_ITEM Index="81" Name="DI_LightcurtainOSSD2" BufferOffset="81" Addr="D5.1" Description="safe module:Light curtain OSSD2(D5.1)" />
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<DI_ITEM Index="82" Name="DI_Lightcurtainfault" BufferOffset="82" Addr="D5.2" Description="safe module:Light curtain fault(D5.2)" />
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@@ -42,7 +42,7 @@
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<DI_ITEM Index="93" Name="DI_TS05004Raxisrotationtempsw" BufferOffset="93" Addr="D5.13" Description="safe module:TS05004 R axis rotation temp sw(D5.13)" />
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<DI_ITEM Index="94" Name="DI_TS05005RHCtempsw" BufferOffset="94" Addr="D5.14" Description="safe module:TS05005 RHC temp sw(D5.14)" />
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<DI_ITEM Index="95" Name="DI_TS05006furnacetempsw" BufferOffset="95" Addr="D5.15" Description="safe module:TS05006 furnace temp sw(D5.15)" />
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-
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+
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<DI_ITEM Index="96" Name="DI_LoadingareaEMS" BufferOffset="96" Addr="D6.0" Description="safe module:Loading area EMS(D6.0)" />
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<DI_ITEM Index="97" Name="DI_GD02001HCL1gasleak1stalarm" BufferOffset="97" Addr="D6.1" Description="safe module:GD02001 HCL-1 gas leak 1st alarm(D6.1)" />
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<DI_ITEM Index="98" Name="DI_GD02001HCL1gasleak2ndalarm" BufferOffset="98" Addr="D6.2" Description="safe module:GD02001 HCL-1 gas leak 2nd alarm(D6.2)" />
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@@ -59,7 +59,7 @@
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<DI_ITEM Index="109" Name="DI_GD02005F21gasleak1stalarm" BufferOffset="109" Addr="D6.13" Description="safe module:GD02005 F2-1 gas leak 1st alarm(D6.13)" />
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<DI_ITEM Index="110" Name="DI_GD02005F21gasleak2ndalarm" BufferOffset="110" Addr="D6.14" Description="safe module:GD02005 F2-1 gas leak 2nd alarm(D6.14)" />
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<DI_ITEM Index="111" Name="DI_GD02005fault" BufferOffset="111" Addr="D6.15" Description="safe module:GD02005 fault(D6.15)" />
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-
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<DI_ITEM Index="112" Name="DI_GD02006F22gasleak1stalarm" BufferOffset="112" Addr="D7.0" Description="safe module:GD02006 F2-2 gas leak 1st alarm(D7.0)" />
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<DI_ITEM Index="113" Name="DI_GD02006F22gasleak2ndalarm" BufferOffset="113" Addr="D7.1" Description="safe module:GD02006 F2-2 gas leak 2nd alarm(D7.1)" />
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<DI_ITEM Index="114" Name="DI_GD02006fault" BufferOffset="114" Addr="D7.2" Description="safe module:GD02006 fault(D7.2)" />
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@@ -76,7 +76,7 @@
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<DI_ITEM Index="125" Name="DI_GD02010C3H62gasleak2ndalarm" BufferOffset="125" Addr="D7.13" Description="safe module:GD02010 C3H6-2 gas leak 2nd alarm(D7.13)" />
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<DI_ITEM Index="126" Name="DI_GD02010fault" BufferOffset="126" Addr="D7.14" Description="safe module:GD02010 fault(D7.14)" />
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<DI_ITEM Index="127" Name="DI_GD02011DMA1gasleak1stalarm" BufferOffset="127" Addr="D7.15" Description="safe module:GD02011 DMA-1 gas leak 1st alarm(D7.15)" />
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-
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<DI_ITEM Index="128" Name="DI_GD02011DMA1gasleak2ndalarm" BufferOffset="128" Addr="D8.0" Description="safe module:GD02011 DMA-1 gas leak 2nd alarm(D8.0)" />
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<DI_ITEM Index="129" Name="DI_GD02011fault" BufferOffset="129" Addr="D8.1" Description="safe module:GD02011 fault(D8.1)" />
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<DI_ITEM Index="130" Name="DI_GD02012DMA2gasleak1stalarm" BufferOffset="130" Addr="D8.2" Description="safe module:GD02012 DMA-2 gas leak 1st alarm(D8.2)" />
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@@ -102,7 +102,7 @@
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<DI_ITEM Index="157" Name="DI_FTRenable2" BufferOffset="157" Addr="D9.13" Description="safe module:FTR enable2(D9.13)" />
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<DI_ITEM Index="158" Name="DI_FTRinterlockreset" BufferOffset="158" Addr="D9.14" Description="safe module:FTR interlock reset(D9.14)" />
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<DI_ITEM Index="159" Name="DI_WTRenable1" BufferOffset="159" Addr="D9.15" Description="safe module:WTR enable1(D9.15)" />
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-
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<DI_ITEM Index="160" Name="DI_WTRenable2" BufferOffset="160" Addr="D10.0" Description="safe module:WTR enable2(D10.0)" />
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<DI_ITEM Index="161" Name="DI_WTRinterlockreset" BufferOffset="161" Addr="D10.1" Description="safe module:WTR interlock reset(D10.1)" />
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<DI_ITEM Index="162" Name="DI_Capheaterenable" BufferOffset="162" Addr="D10.2" Description="safe module:Cap heater enable(D10.2)" />
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@@ -126,7 +126,7 @@
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<DI_ITEM Index="973" Name="DI_GLBoxPG7CNT2Alarm" BufferOffset="973" Addr="D60.13" Description="Gas box PG7 CNT2 alarm(D60.13)" />
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<DI_ITEM Index="974" Name="DI_GLBoxPG8CNT2Alarm" BufferOffset="974" Addr="D60.14" Description="Gas box PG8 CNT1 alarm(D60.14)" />
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<DI_ITEM Index="975" Name="DI_GLBoxPG9CNT2Alarm" BufferOffset="975" Addr="D60.15" Description="Gas box PG8 CNT2 alarm(D60.15)" />
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-
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<DI_ITEM Index="976" Name="DI_GLBoxVG32Status" BufferOffset="976" Addr="D61.0" Description="GL box VG32 status(D61.0)" />
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<DI_ITEM Index="977" Name="DI_GLBoxVG32Output1" BufferOffset="977" Addr="D61.1" Description="GL box VG32 output1(D61.1)" />
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<DI_ITEM Index="978" Name="DI_GLBoxVG32Output2" BufferOffset="978" Addr="D61.2" Description="GL box VG32 output2(D61.2)" />
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@@ -175,7 +175,7 @@
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<DI_ITEM Index="1197" Name="DI_LAExhaust2ndAlarmMS321" BufferOffset="1197" Addr="D74.13" Description="common exhaust 2nd alarm MS321(D74.13)" />
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<DI_ITEM Index="1198" Name="DI_RHC1stAlarmMS8" BufferOffset="1198" Addr="D74.14" Description="RHC 1st alarm MS8(D74.14)" />
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<DI_ITEM Index="1199" Name="DI_RHC2ndAlarmMS8" BufferOffset="1199" Addr="D74.15" Description="RHC 2nd alarm MS8(D74.15)" />
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-
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+
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<DI_ITEM Index="1200" Name="DI_REV1stAlarmMS9" BufferOffset="1200" Addr="D75.0" Description="LSC-up 1st alarm MS9(D75.0)" />
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<DI_ITEM Index="1201" Name="DI_REV2ndAlarmMS9" BufferOffset="1201" Addr="D75.1" Description="LSC-up 2nd alarm MS9(D75.1)" />
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<DI_ITEM Index="1202" Name="DI_REV1stAlarmMS10" BufferOffset="1202" Addr="D75.2" Description="LSC-down 1st alarm MS10(D75.2)" />
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@@ -255,7 +255,7 @@
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<DI_ITEM Index="1645" Name="DI_N2PurgeBOXPG14CNT2" BufferOffset="1645" Addr="D102.13" Description="N2 Purge BOX PG14 CNT2(D102.13)" />
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<DI_ITEM Index="1646" Name="DI_N2PurgeBOXPG15CNT1" BufferOffset="1646" Addr="D102.14" Description="N2 Purge BOX PG15 CNT1(D102.14)" />
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<DI_ITEM Index="1647" Name="DI_N2PurgeBOXPG15CNT2" BufferOffset="1647" Addr="D102.15" Description="N2 Purge BOX PG15 CNT2(D102.15)" />
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-
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<DI_ITEM Index="1648" Name="DI_N2PurgeBOXPG16CNT1" BufferOffset="1648" Addr="D103.0" Description="N2 Purge BOX PG16 CNT1(D103.0)" />
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<DI_ITEM Index="1649" Name="DI_N2PurgeBOXPG16CNT2" BufferOffset="1649" Addr="D103.1" Description="N2 Purge BOX PG16 CNT2(D103.1)" />
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<DI_ITEM Index="1650" Name="DI_N2PurgeBOXPG70CNT1" BufferOffset="1650" Addr="D103.2" Description="N2 Purge BOX PG70 CNT1(D103.2)" />
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@@ -286,7 +286,7 @@
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<DI_ITEM Index="1677" Name="DI_FAN01004fanstatus" BufferOffset="1677" Addr="D104.13" Description="FAN01004 fan status(D104.13)" />
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<DI_ITEM Index="1678" Name="DI_FAN01005fanstatus" BufferOffset="1678" Addr="D104.14" Description="FAN01005 fan status(D104.14)" />
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<DI_ITEM Index="1679" Name="DI_FAN01006fanstatus" BufferOffset="1679" Addr="D104.15" Description="FAN01006 fan status(D104.15)" />
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-
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<DI_ITEM Index="1680" Name="DI_KM01101on" BufferOffset="1680" Addr="D105.0" Description="KM01101 on 380V接触器(D105.0)" />
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<DI_ITEM Index="1681" Name="DI_KM01102on" BufferOffset="1681" Addr="D105.1" Description="KM01102 on Furance 变压器接触器(D105.1)" />
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<DI_ITEM Index="1682" Name="DI_KM01104on" BufferOffset="1682" Addr="D105.2" Description="KM01104 on 110V接触器(D105.2)" />
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@@ -302,7 +302,7 @@
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<DI_ITEM Index="1693" Name="DI_LDS1TankBlankAlarm" BufferOffset="1693" Addr="D105.13" Description="LDS1 tank blank alarm(D105.13)" />
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<DI_ITEM Index="1694" Name="DI_LDS2SystemReady" BufferOffset="1694" Addr="D105.14" Description="LDS2 system ready(D105.14)" />
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<DI_ITEM Index="1695" Name="DI_LDS2MajorAlarm" BufferOffset="1695" Addr="D105.15" Description="LDS2 major alarm(D105.15)" />
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-
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+
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<DI_ITEM Index="1696" Name="DI_LDS2MinorWarning" BufferOffset="1696" Addr="D106.0" Description="LDS2 minor warning(D106.0)" />
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<DI_ITEM Index="1697" Name="DI_LDS2LiquidLowWarning" BufferOffset="1697" Addr="D106.1" Description="LDS2 liquid low warning(D106.1)" />
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<DI_ITEM Index="1698" Name="DI_LDS2TankBlankAlarm" BufferOffset="1698" Addr="D106.2" Description="LDS2 tank blank alarm(D106.2)" />
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@@ -387,7 +387,7 @@
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<DI_ITEM Index="1853" Name="DI_WaferRobotEX2AxisHomePosition" BufferOffset="1853" Addr="D115.13" Description="Wafer Robot Axis-EX2 Home Position (Axis-X4)(D115.13)" />
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<DI_ITEM Index="1854" Name="DI_WaferRobotPAxisHomePosition" BufferOffset="1854" Addr="D115.14" Description="Wafer Robot Axis-P Home Hosition (Axis-V)(D115.14)" />
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<DI_ITEM Index="1855" Name="DI_WaferRobotRunning" BufferOffset="1855" Addr="D115.15" Description="Wafer Robot Running(D115.15)" />
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-
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+
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<DI_ITEM Index="1856" Name="DI_LP1FOUPLeftClamp" BufferOffset="1856" Addr="D116.0" Description="AGV loadport1 FOUP left clamp(D116.0)" />
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<DI_ITEM Index="1857" Name="DI_LP1FOUPRightClamp" BufferOffset="1857" Addr="D116.1" Description="AGV loadport1 FOUP right clamp(D116.1)" />
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<DI_ITEM Index="1858" Name="DI_LP1FOUPLeftRelease" BufferOffset="1858" Addr="D116.2" Description="AGV loadport1 FOUP left release(D116.2)" />
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@@ -408,7 +408,7 @@
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<DI_ITEM Index="1885" Name="DI_FOUPRobotWithinFIMS2Area" BufferOffset="1885" Addr="D117.13" Description="FOUP Robot Within POD2 Area(D117.13)" />
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<DI_ITEM Index="1886" Name="DI_FOUPRobotTPEMOButton" BufferOffset="1886" Addr="D117.14" Description="FOUP Robot TP EMO Button(D117.14)" />
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<DI_ITEM Index="1887" Name="DI_FOUPRobotTPServoOn" BufferOffset="1887" Addr="D117.15" Description="FOUP Robot TP Servo On(D117.15)" />
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-
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+
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<DI_ITEM Index="1888" Name="DI_LP3FOUPInPosition1" BufferOffset="1888" Addr="D118.0" Description="OHT1 FOUP in position1(loadport3)(D118.0)" />
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<DI_ITEM Index="1889" Name="DI_LP3FOUPInPosition2" BufferOffset="1889" Addr="D118.1" Description="OHT1 FOUP in position2(loadport3)(D118.1)" />
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<DI_ITEM Index="1890" Name="DI_LP3FOUPInPosition3" BufferOffset="1890" Addr="D118.2" Description="OHT1 FOUP in position3(loadport3)(D118.2)" />
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@@ -437,7 +437,7 @@
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<DI_ITEM Index="1917" Name="DI_FOUPRobotWithinBufferLayer2Area" BufferOffset="1917" Addr="D119.13" Description="FOUP Robot Within Buffer Layer2 Area(D119.13)" />
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<DI_ITEM Index="1918" Name="DI_FOUPRobotWithinBufferLayer3Area" BufferOffset="1918" Addr="D119.14" Description="FOUP Robot Within Buffer Layer3 Area(D119.14)" />
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<DI_ITEM Index="1919" Name="DI_FOUPRobotWithinBufferLayer4Area" BufferOffset="1919" Addr="D119.15" Description="FOUP Robot Within Buffer Layer4 Area(D119.15)" />
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-
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<DI_ITEM Index="1920" Name="DI_Loadport1E84Valid" BufferOffset="1920" Addr="D120.0" Description="Loadport1 E84 Valid(D120.0)" />
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<DI_ITEM Index="1921" Name="DI_Loadport1E84CS0" BufferOffset="1921" Addr="D120.1" Description="Loadport1 E84 CS_0(D120.1)" />
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<DI_ITEM Index="1922" Name="DI_Loadport1E84CS1" BufferOffset="1922" Addr="D120.2" Description="Loadport1 E84 CS_1(D120.2)" />
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@@ -452,7 +452,7 @@
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<DI_ITEM Index="1933" Name="DI_Loadport2E84busy" BufferOffset="1933" Addr="D120.13" Description="Loadport2 E84 busy(D120.13)" />
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<DI_ITEM Index="1934" Name="DI_Loadport2E84COMPT" BufferOffset="1934" Addr="D120.14" Description="Loadport2 E84 COMPT(D120.14)" />
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<DI_ITEM Index="1935" Name="DI_Loadport2E84CONT" BufferOffset="1935" Addr="D120.15" Description="Loadport2 E84 CONT(D120.15)" />
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-
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<DI_ITEM Index="3200" Name="DI_BoatRAxisRotationBusy" BufferOffset="3200" Addr="D200.0" Description="Boat RAxis Rotation Busy(D200.0)" />
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<DI_ITEM Index="3201" Name="DI_BoatRAxisHomeBusy" BufferOffset="3201" Addr="D200.1" Description="Boat RAxis Home Busy(D200.1)" />
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<DI_ITEM Index="3203" Name="DI_BoatRAxisHomeDone" BufferOffset="3203" Addr="D200.3" Description="Boat RAxis Home Done(D200.3)" />
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@@ -495,7 +495,7 @@
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<DI_ITEM Index="3293" Name="DI_P2DisconnectionAlm" BufferOffset="3293" Addr="D205.13" Description="P2 Disconnection Alm(D205.13)" />
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<DI_ITEM Index="3294" Name="DI_PumpStopInterlockAlm" BufferOffset="3294" Addr="D205.14" Description="Pump Stop Interlock Alm(D205.14)" />
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<DI_ITEM Index="3295" Name="DI_AutoTeachingErr1Alm" BufferOffset="3295" Addr="D205.15" Description="Auto Teaching Err1 Alm(D205.15)" />
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-
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<DI_ITEM Index="3296" Name="DI_AutoTeachingErr2Alm" BufferOffset="3296" Addr="D206.0" Description="Auto Teaching Err2 Alm(D206.0)" />
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<DI_ITEM Index="5216" Name="DI_FIMS1LoadComplete" BufferOffset="5216" Addr="D326.0" Description="FIMS1 Load Complete(D326.0)" />
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<DI_ITEM Index="5217" Name="DI_FIMS1UnloadComplete" BufferOffset="5217" Addr="D326.1" Description="FIMS1 Unload Complete(D326.1)" />
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@@ -526,7 +526,7 @@
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<DI_ITEM Index="5261" Name="DI_BufferInPositionB4" BufferOffset="5261" Addr="D328.13" Description="Buffer in position B4 (D328.13)" />
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<DI_ITEM Index="5262" Name="DI_BufferInPositionC4" BufferOffset="5262" Addr="D328.14" Description="Buffer in position C4 (D328.14)" />
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<DI_ITEM Index="5263" Name="DI_BufferInPositionD4" BufferOffset="5263" Addr="D328.15" Description="Buffer in position D4 (D328.15)" />
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-
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<DI_ITEM Index="5280" Name="DI_LAFFUCommAlarm" BufferOffset="5280" Addr="D330.0" Description="LA FFU Comm Alarm(D330.0)" />
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<DI_ITEM Index="5281" Name="DI_MINI8CommAlarm" BufferOffset="5281" Addr="D330.1" Description="MINI 8 Comm Alarm(D330.1)" />
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<DI_ITEM Index="5282" Name="DI_AVGSwitchStatus" BufferOffset="5282" Addr="D330.2" Description="AVGSwitchStatus(D330.2)" />
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@@ -543,7 +543,7 @@
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<DI_ITEM Index="5447" Name="DI_VAC8" BufferOffset="5447" Addr="D340.7" Description="VAC8(D340.7)" />
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<DI_ITEM Index="5448" Name="DI_NVAC" BufferOffset="5448" Addr="D340.8" Description="NVAC(D340.8)" />
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<DI_ITEM Index="5455" Name="DI_BoatUnloadInterlock" BufferOffset="5455" Addr="D340.15" Description="BoatUnloadInterlock(D340.15)" />
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-
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<DI_ITEM Index="5456" Name="DI_AV60ILK" BufferOffset="5456" Addr="D341.0" Description="AV60ILK(D341.0)" />
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<DI_ITEM Index="5457" Name="DI_AV74ILK" BufferOffset="5457" Addr="D341.1" Description="AV74ILK(D341.1)" />
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<DI_ITEM Index="5458" Name="DI_AV77ILK" BufferOffset="5458" Addr="D341.2" Description="AV77ILK(D341.2)" />
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@@ -570,7 +570,7 @@
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<DI_ITEM Index="5629" Name="DI_AV14ILK" BufferOffset="5629" Addr="D351.13" Description="AV14 ILK(D351.13)" />
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<DI_ITEM Index="5630" Name="DI_AV15ILK" BufferOffset="5630" Addr="D351.14" Description="AV15 ILK(D351.14)" />
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<DI_ITEM Index="5631" Name="DI_AV16ILK" BufferOffset="5631" Addr="D351.15" Description="AV16 ILK(D351.15)" />
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-
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+
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<DI_ITEM Index="5632" Name="DI_AV17ILK" BufferOffset="5632" Addr="D352.0" Description="AV17 ILK(D352.0)" />
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<DI_ITEM Index="5633" Name="DI_AV18ILK" BufferOffset="5633" Addr="D352.1" Description="AV18 ILK(D352.1)" />
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<DI_ITEM Index="5634" Name="DI_AV19ILK" BufferOffset="5634" Addr="D352.2" Description="AV19 ILK(D352.2)" />
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@@ -587,7 +587,7 @@
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<DI_ITEM Index="5645" Name="DI_AV30ILK" BufferOffset="5645" Addr="D352.13" Description="AV30 ILK(D352.13)" />
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<DI_ITEM Index="5646" Name="DI_AV31ILK" BufferOffset="5646" Addr="D352.14" Description="AV31 ILK(D352.14)" />
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<DI_ITEM Index="5647" Name="DI_AV32ILK" BufferOffset="5647" Addr="D352.15" Description="AV32 ILK(D352.15)" />
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-
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+
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<DI_ITEM Index="5648" Name="DI_AV33ILK" BufferOffset="5648" Addr="D353.0" Description="AV33 ILK(D353.0)" />
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<DI_ITEM Index="5649" Name="DI_AV34ILK" BufferOffset="5649" Addr="D353.1" Description="AV34 ILK(D353.1)" />
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<DI_ITEM Index="5650" Name="DI_AV35ILK" BufferOffset="5650" Addr="D353.2" Description="AV35 ILK(D353.2)" />
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@@ -604,7 +604,7 @@
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<DI_ITEM Index="5661" Name="DI_AV46ILK" BufferOffset="5661" Addr="D353.13" Description="AV46 ILK(D353.13)" />
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<DI_ITEM Index="5662" Name="DI_AV47ILK" BufferOffset="5662" Addr="D353.14" Description="AV47 ILK(D353.14)" />
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<DI_ITEM Index="5663" Name="DI_AV48ILK" BufferOffset="5663" Addr="D353.15" Description="AV48 ILK(D353.15)" />
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-
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<DI_ITEM Index="5664" Name="DI_AV49ILK" BufferOffset="5664" Addr="D354.0" Description="AV49 ILK(D354.0)" />
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<DI_ITEM Index="5665" Name="DI_AV50ILK" BufferOffset="5665" Addr="D354.1" Description="AV50 ILK(D354.1)" />
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<DI_ITEM Index="5666" Name="DI_AV51ILK" BufferOffset="5666" Addr="D354.2" Description="AV51 ILK(D354.2)" />
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@@ -620,7 +620,7 @@
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<DI_ITEM Index="5677" Name="DI_AV62ILK" BufferOffset="5677" Addr="D354.13" Description="AV62 ILK(D354.13)" />
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<DI_ITEM Index="5678" Name="DI_AV63ILK" BufferOffset="5678" Addr="D354.14" Description="AV63 ILK(D354.14)" />
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<DI_ITEM Index="5679" Name="DI_AV64ILK" BufferOffset="5679" Addr="D354.15" Description="AV64 ILK(D354.15)" />
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-
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+
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<DI_ITEM Index="5680" Name="DI_AV65ILK" BufferOffset="5680" Addr="D355.0" Description="AV65 ILK(D355.0)" />
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<DI_ITEM Index="5681" Name="DI_AV66ILK" BufferOffset="5681" Addr="D355.1" Description="AV66 ILK(D355.1)" />
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<DI_ITEM Index="5682" Name="DI_AV67ILK" BufferOffset="5682" Addr="D355.2" Description="AV67 ILK(D355.2)" />
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@@ -647,7 +647,7 @@
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<DI_ITEM Index="5709" Name="DI_AV94ILK" BufferOffset="5709" Addr="D356.13" Description="AV94 ILK(D356.13)" />
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<DI_ITEM Index="5710" Name="DI_AV95ILK" BufferOffset="5710" Addr="D356.14" Description="AV95 ILK(D356.14)" />
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<DI_ITEM Index="5711" Name="DI_AV96ILK" BufferOffset="5711" Addr="D356.15" Description="AV96 ILK(D356.15)" />
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-
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+
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<DI_ITEM Index="5712" Name="DI_AV97ILK" BufferOffset="5712" Addr="D357.0" Description="AV97 ILK(D357.0)" />
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<DI_ITEM Index="5713" Name="DI_AV98ILK" BufferOffset="5713" Addr="D357.1" Description="AV98 ILK(D357.1)" />
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<DI_ITEM Index="5714" Name="DI_AV99ILK" BufferOffset="5714" Addr="D357.2" Description="AV99 ILK(D357.2)" />
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@@ -663,7 +663,7 @@
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<DI_ITEM Index="5725" Name="DI_AV110ILK" BufferOffset="5725" Addr="D357.13" Description="AV110 ILK(D357.13)" />
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<DI_ITEM Index="5726" Name="DI_AV111ILK" BufferOffset="5726" Addr="D357.14" Description="AV111 ILK(D357.14)" />
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<DI_ITEM Index="5727" Name="DI_AV112ILK" BufferOffset="5727" Addr="D357.15" Description="AV112 ILK(D357.15)" />
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-
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+
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<DI_ITEM Index="5728" Name="DI_AV113ILK" BufferOffset="5728" Addr="D358.0" Description="AV113 ILK(D358.0)" />
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<DI_ITEM Index="5729" Name="DI_AV114ILK" BufferOffset="5729" Addr="D358.1" Description="AV114 ILK(D358.1)" />
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<DI_ITEM Index="5730" Name="DI_AV115ILK" BufferOffset="5730" Addr="D358.2" Description="AV115 ILK(D358.2)" />
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@@ -713,7 +713,7 @@
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<DI_ITEM Index="6077" Name="DI_CMNTILK" BufferOffset="6077" Addr="D379.13" Description="CMNT_ILK(D379.13)" />
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<DI_ITEM Index="6078" Name="DI_HZEROILK" BufferOffset="6078" Addr="D379.14" Description="HZERO_ILK(D379.14)" />
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<DI_ITEM Index="6079" Name="DI_CZEROILK" BufferOffset="6079" Addr="D379.15" Description="CZERO_ILK(D379.15)" />
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-
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+
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<DI_ITEM Index="6080" Name="DI_WATILK" BufferOffset="6080" Addr="D380.0" Description="WAT_ILK(D380.0)" />
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<DI_ITEM Index="6081" Name="DI_CEXHILK" BufferOffset="6081" Addr="D380.1" Description="CEXH_ILK(D380.1)" />
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<DI_ITEM Index="6082" Name="DI_NZEROILK" BufferOffset="6082" Addr="D380.2" Description="NZERO_ILK(D380.2)" />
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@@ -744,7 +744,7 @@
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<DI_ITEM Index="6413" Name="DI_AV14Status" BufferOffset="6413" Addr="D400.13" Description="AV14 Status(D400.13)" />
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<DI_ITEM Index="6414" Name="DI_AV15Status" BufferOffset="6414" Addr="D400.14" Description="AV15 Status(D400.14)" />
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<DI_ITEM Index="6415" Name="DI_AV16Status" BufferOffset="6415" Addr="D400.15" Description="AV16 Status(D400.15)" />
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-
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+
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<DI_ITEM Index="6416" Name="DI_AV17Status" BufferOffset="6416" Addr="D401.0" Description="AV17 Status(D401.0)" />
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<DI_ITEM Index="6417" Name="DI_AV18Status" BufferOffset="6417" Addr="D401.1" Description="AV18 Status(D401.1)" />
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<DI_ITEM Index="6418" Name="DI_AV19Status" BufferOffset="6418" Addr="D401.2" Description="AV19 Status(D401.2)" />
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@@ -761,7 +761,7 @@
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<DI_ITEM Index="6429" Name="DI_AV30Status" BufferOffset="6429" Addr="D401.13" Description="AV30 Status(D401.13)" />
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<DI_ITEM Index="6430" Name="DI_AV31Status" BufferOffset="6430" Addr="D401.14" Description="AV31 Status(D401.14)" />
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<DI_ITEM Index="6431" Name="DI_AV32Status" BufferOffset="6431" Addr="D401.15" Description="AV32 Status(D401.15)" />
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-
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+
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<DI_ITEM Index="6432" Name="DI_AV33Status" BufferOffset="6432" Addr="D402.0" Description="AV33 Status(D402.0)" />
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<DI_ITEM Index="6433" Name="DI_AV34Status" BufferOffset="6433" Addr="D402.1" Description="AV34 Status(D402.1)" />
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<DI_ITEM Index="6434" Name="DI_AV35Status" BufferOffset="6434" Addr="D402.2" Description="AV35 Status(D402.2)" />
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@@ -778,7 +778,7 @@
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<DI_ITEM Index="6445" Name="DI_AV46Status" BufferOffset="6445" Addr="D402.13" Description="AV46 Status(D402.13)" />
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<DI_ITEM Index="6446" Name="DI_AV47Status" BufferOffset="6446" Addr="D402.14" Description="AV47 Status(D402.14)" />
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<DI_ITEM Index="6447" Name="DI_AV48Status" BufferOffset="6447" Addr="D402.15" Description="AV48 Status(D402.15)" />
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-
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+
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<DI_ITEM Index="6448" Name="DI_AV49Status" BufferOffset="6448" Addr="D403.0" Description="AV49 Status(D403.0)" />
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<DI_ITEM Index="6449" Name="DI_AV50Status" BufferOffset="6449" Addr="D403.1" Description="AV50 Status(D403.1)" />
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<DI_ITEM Index="6450" Name="DI_AV51Status" BufferOffset="6450" Addr="D403.2" Description="AV51 Status(D403.2)" />
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@@ -795,7 +795,7 @@
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<DI_ITEM Index="6461" Name="DI_AV62Status" BufferOffset="6461" Addr="D403.13" Description="AV62 Status(D403.13)" />
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<DI_ITEM Index="6462" Name="DI_AV63Status" BufferOffset="6462" Addr="D403.14" Description="AV63 Status(D403.14)" />
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<DI_ITEM Index="6463" Name="DI_AV64Status" BufferOffset="6463" Addr="D403.15" Description="AV64 Status(D403.15)" />
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-
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+
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<DI_ITEM Index="6464" Name="DI_AV65Status" BufferOffset="6464" Addr="D404.0" Description="AV65 Status(D404.0)" />
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<DI_ITEM Index="6465" Name="DI_AV66Status" BufferOffset="6465" Addr="D404.1" Description="AV66 Status(D404.1)" />
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<DI_ITEM Index="6466" Name="DI_AV67Status" BufferOffset="6466" Addr="D404.2" Description="AV67 Status(D404.2)" />
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@@ -812,7 +812,7 @@
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<DI_ITEM Index="6477" Name="DI_AV78Status" BufferOffset="6477" Addr="D404.13" Description="AV78 Status(D404.13)" />
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<DI_ITEM Index="6478" Name="DI_AV79Status" BufferOffset="6478" Addr="D404.14" Description="AV79 Status(D404.14)" />
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<DI_ITEM Index="6479" Name="DI_AV80Status" BufferOffset="6479" Addr="D404.15" Description="AV80 Status(D404.15)" />
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-
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+
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<DI_ITEM Index="6480" Name="DI_AV81Status" BufferOffset="6480" Addr="D405.0" Description="AV81 Status(D405.0)" />
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<DI_ITEM Index="6481" Name="DI_AV82Status" BufferOffset="6481" Addr="D405.1" Description="AV82 Status(D405.1)" />
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<DI_ITEM Index="6482" Name="DI_AV83Status" BufferOffset="6482" Addr="D405.2" Description="AV83 Status(D405.2)" />
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@@ -829,7 +829,7 @@
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<DI_ITEM Index="6493" Name="DI_AV94Status" BufferOffset="6493" Addr="D405.13" Description="AV94 Status(D405.13)" />
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<DI_ITEM Index="6494" Name="DI_AV95Status" BufferOffset="6494" Addr="D405.14" Description="AV95 Status(D405.14)" />
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<DI_ITEM Index="6495" Name="DI_AV96Status" BufferOffset="6495" Addr="D405.15" Description="AV96 Status(D405.15)" />
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-
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+
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<DI_ITEM Index="6496" Name="DI_AV97Status" BufferOffset="6496" Addr="D406.0" Description="AV97 Status(D406.0)" />
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<DI_ITEM Index="6497" Name="DI_AV98Status" BufferOffset="6497" Addr="D406.1" Description="AV98 Status(D406.1)" />
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<DI_ITEM Index="6498" Name="DI_AV99Status" BufferOffset="6498" Addr="D406.2" Description="AV99 Status(D406.2)" />
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@@ -846,7 +846,7 @@
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<DI_ITEM Index="6509" Name="DI_AV110Status" BufferOffset="6509" Addr="D406.13" Description="AV110 Status(D406.13)" />
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<DI_ITEM Index="6510" Name="DI_AV111Status" BufferOffset="6510" Addr="D406.14" Description="AV111 Status(D406.14)" />
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<DI_ITEM Index="6511" Name="DI_AV112Status" BufferOffset="6511" Addr="D406.15" Description="AV112 Status(D406.15)" />
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-
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+
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<DI_ITEM Index="6512" Name="DI_AV113Status" BufferOffset="6512" Addr="D407.0" Description="AV113 Status(D407.0)" />
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<DI_ITEM Index="6513" Name="DI_AV114Status" BufferOffset="6513" Addr="D407.1" Description="AV114 Status(D407.1)" />
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<DI_ITEM Index="6514" Name="DI_AV115Status" BufferOffset="6514" Addr="D407.2" Description="AV115 Status(D407.2)" />
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@@ -863,7 +863,7 @@
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<DI_ITEM Index="6525" Name="DI_AV126Status" BufferOffset="6525" Addr="D407.13" Description="AV126 Status(D407.13)" />
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<DI_ITEM Index="6526" Name="DI_AV127Status" BufferOffset="6526" Addr="D407.14" Description="AV127 Status(D407.14)" />
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<DI_ITEM Index="6527" Name="DI_AV128Status" BufferOffset="6527" Addr="D407.15" Description="AV128 Status(D407.15)" />
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-
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+
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<DI_ITEM Index="6528" Name="DI_AV129Status" BufferOffset="6528" Addr="D408.0" Description="AV129 Status(D408.0)" />
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<DI_ITEM Index="6529" Name="DI_AV130Status" BufferOffset="6529" Addr="D408.1" Description="AV130 Status(D408.1)" />
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<DI_ITEM Index="6530" Name="DI_AV131Status" BufferOffset="6530" Addr="D408.2" Description="AV131 Status(D408.2)" />
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@@ -880,7 +880,7 @@
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<DI_ITEM Index="6541" Name="DI_AV142Status" BufferOffset="6541" Addr="D408.13" Description="AV142 Status(D408.13)" />
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<DI_ITEM Index="6542" Name="DI_AV143Status" BufferOffset="6542" Addr="D408.14" Description="AV143 Status(D408.14)" />
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<DI_ITEM Index="6543" Name="DI_AV144Status" BufferOffset="6543" Addr="D408.15" Description="AV144 Status(D408.15)" />
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-
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+
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<DI_ITEM Index="6544" Name="DI_AV145Status" BufferOffset="6544" Addr="D409.0" Description="AV145 Status(D409.0)" />
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<DI_ITEM Index="6545" Name="DI_AV146Status" BufferOffset="6545" Addr="D409.1" Description="AV146 Status(D409.1)" />
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<DI_ITEM Index="6546" Name="DI_AV147Status" BufferOffset="6546" Addr="D409.2" Description="AV147 Status(D409.2)" />
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@@ -897,7 +897,7 @@
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<DI_ITEM Index="6557" Name="DI_AV158Status" BufferOffset="6557" Addr="D409.13" Description="AV158 Status(D409.13)" />
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<DI_ITEM Index="6558" Name="DI_AV159Status" BufferOffset="6558" Addr="D409.14" Description="AV159 Status(D409.14)" />
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<DI_ITEM Index="6559" Name="DI_AV160Status" BufferOffset="6559" Addr="D409.15" Description="AV160 Status(D409.15)" />
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-
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+
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<DI_ITEM Index="6560" Name="DI_AV161Status" BufferOffset="6560" Addr="D410.0" Description="AV161 Status(D410.0)" />
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<DI_ITEM Index="6561" Name="DI_AV162Status" BufferOffset="6561" Addr="D410.1" Description="AV162 Status(D410.1)" />
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<DI_ITEM Index="6562" Name="DI_AV163Status" BufferOffset="6562" Addr="D410.2" Description="AV163 Status(D410.2)" />
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@@ -914,7 +914,7 @@
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<DI_ITEM Index="6573" Name="DI_AV174Status" BufferOffset="6573" Addr="D410.13" Description="AV174 Status(D410.13)" />
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<DI_ITEM Index="6574" Name="DI_AV175Status" BufferOffset="6574" Addr="D410.14" Description="AV175 Status(D410.14)" />
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<DI_ITEM Index="6575" Name="DI_AV176Status" BufferOffset="6575" Addr="D410.15" Description="AV176 Status(D410.15)" />
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-
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+
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<DI_ITEM Index="6576" Name="DI_AV177Status" BufferOffset="6576" Addr="D411.0" Description="AV177 Status(D411.0)" />
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<DI_ITEM Index="6577" Name="DI_AV178Status" BufferOffset="6577" Addr="D411.1" Description="AV178 Status(D411.1)" />
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<DI_ITEM Index="6578" Name="DI_AV179Status" BufferOffset="6578" Addr="D411.2" Description="AV179 Status(D411.2)" />
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@@ -931,7 +931,7 @@
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<DI_ITEM Index="6589" Name="DI_AV190Status" BufferOffset="6589" Addr="D411.13" Description="AV190 Status(D411.13)" />
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<DI_ITEM Index="6590" Name="DI_AV191Status" BufferOffset="6590" Addr="D411.14" Description="AV191 Status(D411.14)" />
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<DI_ITEM Index="6591" Name="DI_AV192Status" BufferOffset="6591" Addr="D411.15" Description="AV192 Status(D411.15)" />
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-
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+
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<DI_ITEM Index="6592" Name="DI_AV193Status" BufferOffset="6592" Addr="D412.0" Description="AV193 Status(D412.0)" />
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<DI_ITEM Index="6593" Name="DI_AV194Status" BufferOffset="6593" Addr="D412.1" Description="AV194 Status(D412.1)" />
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<DI_ITEM Index="6594" Name="DI_AV195Status" BufferOffset="6594" Addr="D412.2" Description="AV195 Status(D412.2)" />
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@@ -948,7 +948,7 @@
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<DI_ITEM Index="6605" Name="DI_AV206Status" BufferOffset="6605" Addr="D412.13" Description="AV206 Status(D412.13)" />
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<DI_ITEM Index="6606" Name="DI_AV207Status" BufferOffset="6606" Addr="D412.14" Description="AV207 Status(D412.14)" />
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<DI_ITEM Index="6607" Name="DI_AV208Status" BufferOffset="6607" Addr="D412.15" Description="AV208 Status(D412.15)" />
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-
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+
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<DI_ITEM Index="6608" Name="DI_AV209Status" BufferOffset="6608" Addr="D413.0" Description="AV209 Status(D413.0)" />
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<DI_ITEM Index="6609" Name="DI_AV210Status" BufferOffset="6609" Addr="D413.1" Description="AV210 Status(D413.1)" />
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<DI_ITEM Index="6610" Name="DI_AV211Status" BufferOffset="6610" Addr="D413.2" Description="AV211 Status(D413.2)" />
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@@ -965,7 +965,7 @@
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<DI_ITEM Index="6621" Name="DI_AV222Status" BufferOffset="6621" Addr="D413.13" Description="AV222 Status(D413.13)" />
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<DI_ITEM Index="6622" Name="DI_AV223Status" BufferOffset="6622" Addr="D413.14" Description="AV223 Status(D413.14)" />
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<DI_ITEM Index="6623" Name="DI_AV224Status" BufferOffset="6623" Addr="D413.15" Description="AV224 Status(D413.15)" />
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-
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+
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<DI_ITEM Index="6624" Name="DI_AV225Status" BufferOffset="6624" Addr="D414.0" Description="AV225 Status(D414.0)" />
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<DI_ITEM Index="6625" Name="DI_AV226Status" BufferOffset="6625" Addr="D414.1" Description="AV226 Status(D414.1)" />
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<DI_ITEM Index="6626" Name="DI_AV227Status" BufferOffset="6626" Addr="D414.2" Description="AV227 Status(D414.2)" />
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@@ -982,7 +982,7 @@
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<DI_ITEM Index="6637" Name="DI_AV238Status" BufferOffset="6637" Addr="D414.13" Description="AV238 Status(D414.13)" />
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<DI_ITEM Index="6638" Name="DI_AV239Status" BufferOffset="6638" Addr="D414.14" Description="AV239 Status(D414.14)" />
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<DI_ITEM Index="6639" Name="DI_AV240Status" BufferOffset="6639" Addr="D414.15" Description="AV240 Status(D414.15)" />
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-
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+
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<DI_ITEM Index="6640" Name="DI_AV241Status" BufferOffset="6640" Addr="D415.0" Description="AV241 Status(D415.0)" />
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<DI_ITEM Index="6641" Name="DI_AV242Status" BufferOffset="6641" Addr="D415.1" Description="AV242 Status(D415.1)" />
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<DI_ITEM Index="6642" Name="DI_AV243Status" BufferOffset="6642" Addr="D415.2" Description="AV243 Status(D415.2)" />
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@@ -997,7 +997,7 @@
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<DI_ITEM Index="6701" Name="DI_DGZEROStatus" BufferOffset="6701" Addr="D418.13" Description="DGZERO Status(D418.13)" />
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<DI_ITEM Index="6702" Name="DI_DP1Status" BufferOffset="6702" Addr="D418.14" Description="DP1 Status(D418.14)" />
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<DI_ITEM Index="6703" Name="DI_DP2Status" BufferOffset="6703" Addr="D418.15" Description="DP2 Status(D418.15)" />
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-
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<DI_ITEM Index="6704" Name="DI_BWRStatus" BufferOffset="6704" Addr="D419.00" Description="BWR Status(D419.00)" />
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<DI_ITEM Index="6705" Name="DI_DPRStatus" BufferOffset="6705" Addr="D419.01" Description="DPR Status(D419.01)" />
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<DI_ITEM Index="6706" Name="DI_CLNStatus" BufferOffset="6706" Addr="D419.02" Description="CLN Status(D419.02)" />
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@@ -1014,7 +1014,7 @@
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<DI_ITEM Index="6717" Name="DI_CEXHStatus" BufferOffset="6717" Addr="D419.13" Description="CEXH Status(D419.13)" />
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<DI_ITEM Index="6718" Name="DI_NZEROStatus" BufferOffset="6718" Addr="D419.14" Description="NZERO Status(D419.14)" />
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<DI_ITEM Index="6719" Name="DI_MZEROStatus" BufferOffset="6719" Addr="D419.15" Description="MZERO Status(D419.15)" />
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-
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+
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<DI_ITEM Index="6720" Name="DI_DEPOOKStatus" BufferOffset="6720" Addr="D420.00" Description="DEPO_OK Status(D420.00)" />
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<DI_ITEM Index="6721" Name="DI_CLNOKLightStatus" BufferOffset="6721" Addr="D420.01" Description="CLN OK Light Status(D420.01)" />
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<DI_ITEM Index="6722" Name="DI_NVACLEDStatus" BufferOffset="6722" Addr="D420.02" Description="NVAC LED Status(D420.02)" />
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@@ -1055,7 +1055,7 @@
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<DO_ITEM Index="1357" Name="DO_Vaccum2PumpAUCOn" BufferOffset="1357" Addr="D1084.13" Description="Vaccum 2Pump AUC On(D1084.13)" />
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<DO_ITEM Index="1358" Name="DO_Vaccum2PumpAGVOpen" BufferOffset="1358" Addr="D1084.14" Description="Vaccum 2Pump AGV Open(D1084.14)" />
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<DO_ITEM Index="1359" Name="DO_DEPOSW" BufferOffset="1359" Addr="D1084.15" Description="DEPO SW(D1084.15)" />
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-
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+
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<DO_ITEM Index="1408" Name="DO_BoatRAxisDriverStart" BufferOffset="1408" Addr="D1088.0" Description="Boat R Axis driver start(D1088.0)" />
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<DO_ITEM Index="1409" Name="DO_BoatRAxisAlarmReset" BufferOffset="1409" Addr="D1088.1" Description="Boat R Axis alarm reset(D1088.1)" />
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<DO_ITEM Index="1410" Name="DO_BoatRAxisAllWindingsOff" BufferOffset="1410" Addr="D1088.2" Description="Boat R Axis all windings off(D1088.2)" />
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@@ -1072,7 +1072,7 @@
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<DO_ITEM Index="1421" Name="DO_TransferRoomLedLightBar" BufferOffset="1421" Addr="D1088.13" Description="Transfer room led light bar(D1088.13)" />
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<DO_ITEM Index="1422" Name="DO_ShutterOpen" BufferOffset="1422" Addr="D1088.14" Description="Furnace shutter Open(D1088.14)" />
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<DO_ITEM Index="1423" Name="DO_ShutterClose" BufferOffset="1423" Addr="D1088.15" Description="Furnace shutter Close(D1088.15)" />
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-
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+
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<DO_ITEM Index="1424" Name="DO_WaferRobotAlarmReset" BufferOffset="1424" Addr="D1089.0" Description="Wafer Robot Alarm Reset(D1089.0)" />
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<DO_ITEM Index="1425" Name="DO_WaferRobotActionHold" BufferOffset="1425" Addr="D1089.1" Description="Wafer Robot Action Hold(D1089.1)" />
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<DO_ITEM Index="1426" Name="DO_WaferRobotTPEnable" BufferOffset="1426" Addr="D1089.2" Description="Wafer Robot TP Enable(D1089.2)" />
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@@ -1086,7 +1086,7 @@
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<DO_ITEM Index="1437" Name="DO_SV62Open" BufferOffset="1437" Addr="D1089.13" Description="SV62 Open(D1089.13)" />
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<DO_ITEM Index="1438" Name="DO_SV63Open" BufferOffset="1438" Addr="D1089.14" Description="SV63 Open(D1089.14)" />
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<DO_ITEM Index="1439" Name="DO_SV64Open" BufferOffset="1439" Addr="D1089.15" Description="SV64 Open(D1089.15)" />
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-
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+
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<DO_ITEM Index="1472" Name="DO_MechaStopRed" BufferOffset="1472" Addr="D1092.0" Description="mecha stop red(D1092.0)" />
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<DO_ITEM Index="1473" Name="DO_MechaPause" BufferOffset="1473" Addr="D1092.1" Description="mecha pause(D1092.1)" />
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<DO_ITEM Index="1474" Name="DO_HandOffLeft" BufferOffset="1474" Addr="D1092.2" Description="hand off left(D1092.2)" />
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@@ -1102,7 +1102,7 @@
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<DO_ITEM Index="1485" Name="DO_FOUPRobotActionHold" BufferOffset="1485" Addr="D1092.13" Description="FOUP Robot Action Hold(D1092.13)" />
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<DO_ITEM Index="1486" Name="DO_FOUPRobotTPEnable" BufferOffset="1486" Addr="D1092.14" Description="FOUP Robot TP Enable(D1092.14)" />
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<DO_ITEM Index="1487" Name="DO_FOUPRobotBufferInterlock" BufferOffset="1487" Addr="D1092.15" Description="FOUP Robot BuffeInterlock(D1092.15)" />
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-
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+
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<DO_ITEM Index="1488" Name="DO_LP1FOUPPresence" BufferOffset="1488" Addr="D1093.0" Description="Load Port1 FOUP presence(D1093.0)" />
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<DO_ITEM Index="1489" Name="DO_LP1FOUPPlacement" BufferOffset="1489" Addr="D1093.1" Description="Load Port1 FOUP placement(D1093.1)" />
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<DO_ITEM Index="1490" Name="DO_LP1FOUPLoad" BufferOffset="1490" Addr="D1093.2" Description="Load Port1 FOUP load(D1093.2)" />
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@@ -1126,7 +1126,7 @@
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<DO_ITEM Index="1515" Name="DO_loadport2E84Ready" BufferOffset="1515" Addr="D1094.11" Description="loadport 2 E84 ready(D1094.11)" />
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<DO_ITEM Index="1518" Name="DO_loadport2E84HOAVBL" BufferOffset="1518" Addr="D1094.14" Description="loadport 2 E84 HO_AVBL(D1094.14)" />
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<DO_ITEM Index="1519" Name="DO_loadport2E84ES" BufferOffset="1519" Addr="D1094.15" Description="loadport 2 E84 ES(D1094.15)" />
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-
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+
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<DO_ITEM Index="1616" Name="DO_FORELINEHEATERON/OFF" BufferOffset="1616" Addr="D1101.0" Description="FORELINE HEATER ON/OFF(D1101.0)" />
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<DO_ITEM Index="1620" Name="DO_EXTERNALBMOOUT" BufferOffset="1620" Addr="D1101.4" Description="EXTERNAL EMO OUT(D1101.4)" />
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<DO_ITEM Index="1621" Name="DO_HREF" BufferOffset="1621" Addr="D1101.5" Description="AUTOREFILL-1 REQUEST Or VALVE OPEN(HREF)(D1101.5)" />
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@@ -1334,7 +1334,7 @@
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<DO_ITEM Index="3869" Name="DO_NZERO" BufferOffset="3869" Addr="D1241.13" Description="N.ZERO(D1241.13)" />
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<DO_ITEM Index="3870" Name="DO_MZERO" BufferOffset="3870" Addr="D1241.14" Description="M.ZERO(D1241.14)" />
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<DO_ITEM Index="3871" Name="DO_NDIR" BufferOffset="3871" Addr="D1241.15" Description="NDIR(D1241.15)" />
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-
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+
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<DO_ITEM Index="3872" Name="DO_HMNTAV113" BufferOffset="3872" Addr="D1242.0" Description="HMNT_AV113(D1242.0)" />
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<DO_ITEM Index="3873" Name="DO_HMNTAV131" BufferOffset="3873" Addr="D1242.1" Description="HMNT_AV131(D1242.1)" />
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<DO_ITEM Index="3874" Name="DO_HMNTAV132" BufferOffset="3874" Addr="D1242.2" Description="HMNT_AV132(D1242.2)" />
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@@ -1423,14 +1423,35 @@
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<AI_ITEM Index="342" Name="AI_VG13Pressure" BufferOffset="342" Addr="D5684" Description="VG13 Pressure(D5684)" />
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<AI_ITEM Index="344" Name="AI_VG32Pressure" BufferOffset="344" Addr="D5688" Description="VG32 Pressure(D5688)" />
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<AI_ITEM Index="345" Name="AI_VG33Pressure" BufferOffset="345" Addr="D5690" Description="VG33 Pressure(D5690)" />
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- <AI_ITEM Index="387" Name="AI_FFU1CurrentSpeed" BufferOffset="387" Addr="D5774" Description="FFU4 Current speed(D5774)" />
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- <AI_ITEM Index="388" Name="AI_FFU1Status" BufferOffset="388" Addr="D5776" Description="FFU4 voltage(D5776)" />
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- <AI_ITEM Index="397" Name="AI_FFU2CurrentSpeed" BufferOffset="397" Addr="D5794" Description="FFU5 Current speed(D5794)" />
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- <AI_ITEM Index="398" Name="AI_FFU2Status" BufferOffset="398" Addr="D5796" Description="FFU5 voltage(D5796)" />
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- <AI_ITEM Index="407" Name="AI_FFU3CurrentSpeed" BufferOffset="407" Addr="D5814" Description="FFU6 Current speed(D5814)" />
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- <AI_ITEM Index="408" Name="AI_FFU3Status" BufferOffset="408" Addr="D5816" Description="FFU6 voltage(D5816)" />
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- <AI_ITEM Index="417" Name="AI_FFU4CurrentSpeed" BufferOffset="417" Addr="D5834" Description="FFU7 Current speed(D5834)" />
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- <AI_ITEM Index="418" Name="AI_FFU4Status" BufferOffset="418" Addr="D5836" Description="FFU7 voltage(D5836)" />
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+
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+
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+
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+ <AI_ITEM Index="350" Name="AI_BufferFFU1Status" BufferOffset="350" Addr="D5700" Description="Buffer FFU1 Status(D5700)" />
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+ <AI_ITEM Index="351" Name="AI_BufferFFU2Status" BufferOffset="351" Addr="D5702" Description="Buffer FFU2 Status(D5702)" />
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+ <AI_ITEM Index="352" Name="AI_BufferFFU3Status" BufferOffset="352" Addr="D5704" Description="Buffer FFU3 Status(D5704)" />
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+ <AI_ITEM Index="353" Name="AI_BufferFFU4Status" BufferOffset="353" Addr="D5706" Description="Buffer FFU4 Status(D5706)" />
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+ <AI_ITEM Index="354" Name="AI_BufferFFU5Status" BufferOffset="354" Addr="D5708" Description="Buffer FFU5 Status(D5708)" />
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+ <AI_ITEM Index="355" Name="AI_BufferFFU6Status" BufferOffset="355" Addr="D5710" Description="Buffer FFU6 Status(D5710)" />
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+ <AI_ITEM Index="356" Name="AI_BufferFFU1CurrentSpeed" BufferOffset="356" Addr="D5712" Description="Buffer FFU1 Current speed(D5712)" />
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+ <AI_ITEM Index="357" Name="AI_BufferFFU2CurrentSpeed" BufferOffset="357" Addr="D5714" Description="Buffer FFU2 Current speed(D5714)" />
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+ <AI_ITEM Index="358" Name="AI_BufferFFU3CurrentSpeed" BufferOffset="358" Addr="D5716" Description="Buffer FFU3 Current speed(D5716)" />
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+ <AI_ITEM Index="359" Name="AI_BufferFFU4CurrentSpeed" BufferOffset="359" Addr="D5718" Description="Buffer FFU4 Current speed(D5718)" />
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+ <AI_ITEM Index="360" Name="AI_BufferFFU5CurrentSpeed" BufferOffset="360" Addr="D5720" Description="Buffer FFU5 Current speed(D5720)" />
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+ <AI_ITEM Index="361" Name="AI_BufferFFU6CurrentSpeed" BufferOffset="361" Addr="D5722" Description="Buffer FFU6 Current speed(D5722)" />
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+
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+ <AI_ITEM Index="387" Name="AI_FFU1CurrentSpeed" BufferOffset="387" Addr="D5774" Description="FFU1 Current speed(D5774)" />
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+ <AI_ITEM Index="388" Name="AI_FFU1Status" BufferOffset="388" Addr="D5776" Description="FFU1 voltage(D5776)" />
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+ <AI_ITEM Index="397" Name="AI_FFU2CurrentSpeed" BufferOffset="397" Addr="D5794" Description="FFU2 Current speed(D5794)" />
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+ <AI_ITEM Index="398" Name="AI_FFU2Status" BufferOffset="398" Addr="D5796" Description="FFU2 voltage(D5796)" />
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+ <AI_ITEM Index="407" Name="AI_FFU3CurrentSpeed" BufferOffset="407" Addr="D5814" Description="FFU3 Current speed(D5814)" />
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+ <AI_ITEM Index="408" Name="AI_FFU3Status" BufferOffset="408" Addr="D5816" Description="FFU3 voltage(D5816)" />
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+ <AI_ITEM Index="417" Name="AI_FFU4CurrentSpeed" BufferOffset="417" Addr="D5834" Description="FFU4 Current speed(D5834)" />
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+ <AI_ITEM Index="418" Name="AI_FFU4Status" BufferOffset="418" Addr="D5836" Description="FFU4 voltage(D5836)" />
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+
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+ <AI_ITEM Index="418" Name="AI_FFU5CurrentSpeed" BufferOffset="418" Addr="D5836" Description="FFU5 CurrentSpeed(D5836)" />
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+
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+
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+
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<AI_ITEM Index="430" Name="AI_VFDCurrentSpeed" BufferOffset="430" Addr="D5860" Description="VFD Current speed(D5860)" />
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<AI_ITEM Index="450" Name="AI_MFC1AirFlowPV" BufferOffset="450" Addr="D5900" Description="MFC1 air flow PV(D5900)" />
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<AI_ITEM Index="451" Name="AI_MFC2AirFlowPV" BufferOffset="451" Addr="D5902" Description="MFC2 air flow PV(D5902)" />
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@@ -1623,10 +1644,25 @@
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<AO_ITEM Index="112" Name="AO_LAO2checkSV" BufferOffset="112" Addr="D10224" Description="LA O2 check SV(D10224)" />
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<AO_ITEM Index="113" Name="AO_FOUPO2CheckSV" BufferOffset="113" Addr="D10226" Description="FOUP O2 Check SV(D10226)" />
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<AO_ITEM Index="114" Name="AO_BufferPurgeTimeSV" BufferOffset="114" Addr="D10228" Description="Buffer Purge Time SV(D10228)" />
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- <AO_ITEM Index="176" Name="AO_FFU1SetSpeed" BufferOffset="176" Addr="D10352" Description="FFU4 Set speed(D10352)" />
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- <AO_ITEM Index="182" Name="AO_FFU2SetSpeed" BufferOffset="182" Addr="D10364" Description="FFU5 Set speed(D10364)" />
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- <AO_ITEM Index="188" Name="AO_FFU3SetSpeed" BufferOffset="188" Addr="D10376" Description="FFU6 Set speed(D10376)" />
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- <AO_ITEM Index="194" Name="AO_FFU4SetSpeed" BufferOffset="194" Addr="D10388" Description="FFU7 Set speed(D10388)" />
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+
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+ <AO_ITEM Index="114" Name="AO_BufferFFU1SV" BufferOffset="155" Addr="D10310" Description="Buffer FFU1 SV(D10310)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU2SV" BufferOffset="156" Addr="D10312" Description="Buffer FFU2 SV(D10312)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU3SV" BufferOffset="157" Addr="D10314" Description="Buffer FFU3 SV(D10314)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU4SV" BufferOffset="158" Addr="D10316" Description="Buffer FFU4 SV(D10316)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU5SV" BufferOffset="159" Addr="D10318" Description="Buffer FFU5 SV(D10318)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU6SV" BufferOffset="160" Addr="D10320" Description="Buffer FFU6 SV(D10320)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU1Switch" BufferOffset="161" Addr="D10322" Description="Buffer FFU1 Switch(D10322)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU2Switch" BufferOffset="162" Addr="D10324" Description="Buffer FFU2 Switch(D10324)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU3Switch" BufferOffset="163" Addr="D10326" Description="Buffer FFU3 Switch(D10326)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU4Switch" BufferOffset="164" Addr="D10328" Description="Buffer FFU4 Switch(D10328)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU5Switch" BufferOffset="165" Addr="D10330" Description="Buffer FFU5 Switch(D10330)" />
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+ <AO_ITEM Index="114" Name="AO_BufferFFU6Switch" BufferOffset="166" Addr="D10332" Description="Buffer FFU6 Switch(D10332)" />
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+
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+
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+ <AO_ITEM Index="176" Name="AO_FFU1SetSpeed" BufferOffset="176" Addr="D10352" Description="FFU1 Set speed(D10352)" />
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+ <AO_ITEM Index="182" Name="AO_FFU2SetSpeed" BufferOffset="182" Addr="D10364" Description="FFU2 Set speed(D10364)" />
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+ <AO_ITEM Index="188" Name="AO_FFU3SetSpeed" BufferOffset="188" Addr="D10376" Description="FFU3 Set speed(D10376)" />
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+ <AO_ITEM Index="194" Name="AO_FFU4SetSpeed" BufferOffset="194" Addr="D10388" Description="FFU4 Set speed(D10388)" />
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<AO_ITEM Index="203" Name="AO_VFDSetValue" BufferOffset="203" Addr="D10406" Description="VFD Set Value(D10406)" />
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<AO_ITEM Index="215" Name="AO_MFC1AirFlowSV" BufferOffset="215" Addr="D10430" Description="MFC1 air flow SV(D10430)" />
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<AO_ITEM Index="216" Name="AO_MFC2AirFlowSV" BufferOffset="216" Addr="D10432" Description="MFC2 air flow SV(D10432)" />
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jiangjy