@@ -2491,6 +2491,7 @@
<ECID id="10090020" valueType="Ascii" logicalName="System.Recipe.SupportedSubType" value="" min="" max="" eventTrigger="" units="" description="Supported Sub Recipe Type" isArray="false" />
<ECID id="10090021" valueType="Ascii" logicalName="System.Recipe.DefaultFileName" value="" min="" max="" eventTrigger="" units="" description="Default File Name" isArray="false" />
<ECID id="10090022" valueType="Ascii" logicalName="System.Recipe.SingleRecipeFileType" value="" min="" max="" eventTrigger="" units="" description="Single Recipe File Type" isArray="false" />
+ <ECID id="10090023" valueType="Ascii" logicalName="System.Recipe.FASupportedRecipeType" value="" min="" max="" eventTrigger="" units="" description="Supported Chamber Type" isArray="false" />
<ECID id="10100001" valueType="Ascii" logicalName="System.Scheduler.GroupWaferBySequence" value="" min="" max="" eventTrigger="" units="" description="Group Wafer By Sequence" isArray="false" />
<ECID id="10100002" valueType="Ascii" logicalName="System.Scheduler.IsRunInParallelMode" value="" min="" max="" eventTrigger="" units="" description="IsRunInParallelMode" isArray="false" />
<ECID id="10100003" valueType="Ascii" logicalName="System.Scheduler.WaferCountBelowWhichStartNewProcessJob" value="" min="" max="" eventTrigger="" units="" description="Wafer Count Below Which Start New Process Job" isArray="false" />
@@ -258,6 +258,7 @@
</configs>
<configs name="Recipe">
+ <config default="abort,alarm,idle,Job,Layout,Process,reset,sub" name="FASupportedRecipeType" description="Supported Chamber Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="Furnace" name="SupportedChamberType" description="Supported Chamber Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="Job" name="SupportedJobType" description="Supported Job Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="Process" name="SupportedProcessType" description="Supported Process Recipe Type" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
@@ -637,7 +637,7 @@ namespace FurnaceRT.Equipments.Systems
{
List<string> namelist = new List<string>();
- var processType = SC.GetStringValue("System.Recipe.SupportedProcessType");
+ var processType = SC.GetStringValue("System.Recipe.FASupportedRecipeType");
if (processType == null)
processType = "WaferFlow,COT,DEV,ADH,Oven,Pump,WEE,System,Dummy,Wash";