 JET-GZX
|
fd0aa241f7
change role
|
1 week ago |
 JET-YDB\JET-YANGDB
|
f92e4e963f
1.修改efem界面，把Aligner1 改成 Aligner，buffer改成cooling
|
2 weeks ago |
|
JET-YDB\JET-YANGDB
|
ff5db94875
1.增加IO信号，修改报警过程
|
2 weeks ago |
|
JET-GZX
|
21c5483113
Revert "modify bias error"
|
2 weeks ago |
|
JET-GZX
|
7fde4b7f76
modify bias error
|
2 weeks ago |
|
JET-YDB\JET-YANGDB
|
1fb2217bb6
1.修改名称 2.增加unload
|
2 weeks ago |
|
JET-GZX
|
ecef0b497c
change chinese
|
2 weeks ago |
|
JET-GZX
|
b21955b14d
change chinese
|
2 weeks ago |
|
JET-GZX
|
46cefcb133
leakcheck change chinese
|
2 weeks ago |
|
JET-GZX
|
9b0e5a32e5
change Chinese
|
2 weeks ago |
|
JET-GZX
|
fb7a79cd09
del merging
|
2 weeks ago |
|
JET-GZX
|
29df32f3c4
translate from Chinese to English
|
2 weeks ago |
|
JET-YDB\JET-YANGDB
|
33002a0938
去掉不需要的IO
|
2 weeks ago |
|
JET-GZX
|
18f93e94f4
fix bug of placing wafers
|
3 weeks ago |
 JET-GZX
|
285246cd6a
robot control
|
1 month ago |
|
JET-GZX
|
0a7f94d6f9
change LP2 wafer count
|
1 month ago |
|
intern04
|
966b2e6d21
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Virgo_Mask
|
1 month ago |
|
intern04
|
d3a5b3c320
add EfemRobotArmType control
|
1 month ago |
|
JET-YDB\JET-YANGDB
|
f79574ead6
调试修改
|
1 month ago |
|
JET-YDB\JET-YANGDB
|
ef6f73344e
1.增加单臂，双臂，Ignore Ionizer error， gas1~5 warning range and time ，双轴伺服pos diff 配置
|
1 month ago |
|
intern04
|
6247f152b9
add Virgo UI change
|
1 month ago |
|
intern04
|
a916d81320
Change VirgoUI Langrage
|
1 month ago |
|
intern04
|
2f1dc5bb0f
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Virgo_Mask
|
1 month ago |
 chenkui
|
78877e2d5e
修复了EAP中E94 FAControlJob的异常
|
1 month ago |
|
JET-YDB\JET-YANGDB
|
b49c308376
1.增加自学习文件
|
1 month ago |
|
JET-YDB\JET-YANGDB
|
fca2bab62f
1.修改双轴电机回到原点的条件
|
1 month ago |
|
intern04
|
97beaa7e7b
delete Logo
|
1 month ago |
|
JET-YDB\JET-YANGDB
|
e74a40f753
1.增加腔体自学习
|
1 month ago |
|
JET-YDB\JET-YANGDB
|
738eac65f7
1.中文改成英文
|
1 month ago |
|
JET-YDB\JET-YANGDB
|
5b5945bffa
1.把系统配置中文改成英语
|
1 month ago |
