Revert "modify bias error"

This reverts commit 7fde4b7f76962d3d94bfbad66ac10ffd3187937e.

VirgoRT/Config/_ioDefineVirgo.xml

@@ -28,7 +28,7 @@
 		<DI_ITEM Index="24" Name="DI_SourceFan1" Device="" Addr="w21.08" />
 		<DI_ITEM Index="25" Name="DI_CTRL_Box_Fans_Running" Device="" Addr="W21.09" />
 		<DI_ITEM Index="26" Name="DI_Source_Match_Interlock" Device="" Addr="W21.10"/>
-		<DI_ITEM Index="27" Name="DI_Bias_Match_Interlock" Device="" Addr="W21.11"/>
+		<DI_ITEM Index="27" Name="DI_Bais_Match_Interlock" Device="" Addr="W21.11"/>
 		<DI_ITEM Index="28" Name="" />
     <DI_ITEM Index="29" Name="DI_GB_Interlock_Alarm" Device="" Addr="w21.13" Note="0=OK，1=Warning" />
     <DI_ITEM Index="30" Name="DI_GB_Pressure_Interlock" Device="" Addr="W21.14" />
@@ -334,7 +334,7 @@
 		<AO_ITEM Index="22" Name="AO_Process_Pressure_Offset_Value" BufferOffset="44" Device="" Addr="d1044" Note="0-20" />
 		<AO_ITEM Index="23" Name="" />
 		<AO_ITEM Index="24" Name="" />
-		<AO_ITEM Index="25" Name="AO_BiasRF_Enable" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bais RF mode" />
+		<AO_ITEM Index="25" Name="AO_BaisRF_Enable" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bais RF mode" />
 		<AO_ITEM Index="26" Name="AO_Grid_TC_Enable" BufferOffset="52" Device=""  Addr="d1052" Note="1=Grid TC"/>
 		<AO_ITEM Index="27" Name="AO_Lift_Servo_Enable" BufferOffset="54" Device=""  Addr="d1054" Note="0=Lift Pin ,1=Lift  Servo"/>
 		<AO_ITEM Index="28" Name="" BufferOffset="56" Device=""  Addr="d1056" Note="mm/s"/>

VirgoRT/Config/_ioDefineVirgo_R.xml

@@ -384,7 +384,7 @@
     <AO_ITEM Index="18" Name="AO_Heartbeat" BufferOffset="36" Device=""  Addr="d1036" Note="From PC to PLC" />
     <AO_ITEM Index="19" Name="" />
     <AO_ITEM Index="20" Name="" />
-    <AO_ITEM Index="21" Name="AO_BiasRF_Enable" BufferOffset="42" Device="" Addr="d1042" Note="下电极加热或双射频配置切换" />
+    <AO_ITEM Index="21" Name="AO_BaisRF_Enable" BufferOffset="42" Device="" Addr="d1042" Note="下电极加热或双射频配置切换" />
     <AO_ITEM Index="22" Name="AO_Grid_TC_Enable" BufferOffset="44" Device="" Addr="d1044" Note="1=Grid TC" />
     <AO_ITEM Index="23" Name="" />
     <AO_ITEM Index="24" Name="" />
@@ -426,7 +426,7 @@
     <AO_ITEM Index="60" Name="" />
     <!--<AO_ITEM Index="0" Name="AO_Generator_Power_Setpoint" BufferOffset="0" Device="" Addr="d1000" Note="0-6000W" />
     <AO_ITEM Index="22" Name="AO_Process_Pressure_Offset_Value" BufferOffset="44" Device="" Addr="d1044" Note="0-20" />
-    <AO_ITEM Index="25" Name="" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bias RF mode" />
+    <AO_ITEM Index="25" Name="" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bais RF mode" />
     <AO_ITEM Index="26" Name="AO_Pump_IO_CTRL_Enable" BufferOffset="52" Addr="d1052" Note="0=Comm CTRL ,1=IO CTRL" />
     <AO_ITEM Index="49" Name="" />-->
   </Ana_Out>