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@@ -9,12 +9,12 @@
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<DI_ITEM Index="5" Name="DI_Water_Leak" Device="" Addr="w20.05" Note="1=OK, 0=alarm" />
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<DI_ITEM Index="6" Name="DI_Slit_Door_Open_Pos" Device="" Addr="w20.06" Note="Interlock-HW" />
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<DI_ITEM Index="7" Name="DI_Slit_Door_Close_Pos" Device="" Addr="w20.07" Note="Interlock-HW" />
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- <DI_ITEM Index="8" Name="DI_Lift_Pin_Up" Device="" Addr="w20.08" Note="1=on,0=off" />
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- <DI_ITEM Index="9" Name="DI_Lift_Pin_Down" Device="" Addr="w20.09" Note="1=on,0=off" />
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- <DI_ITEM Index="10" Name="DI_Guide_Pin_Small_Lifter_Up_Pos" Device="" Addr="w20.10" />
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- <DI_ITEM Index="11" Name="DI_Guide_Pin_Small_Lifter_Down_Pos" Device="" Addr="w20.11" />
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- <DI_ITEM Index="12" Name="DI_Guide_Pin_Medium_Lifter_Up_Pos" Device="" Addr="w20.12" />
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- <DI_ITEM Index="13" Name="DI_Guide_Pin_Medium_Lifter_Down_Pos" Device="" Addr="w20.13" />
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+ <DI_ITEM Index="8" Name="" Device="" Addr="w20.08" Note="1=on,0=off" />
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+ <DI_ITEM Index="9" Name="" Device="" Addr="w20.09" Note="1=on,0=off" />
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+ <DI_ITEM Index="10" Name="" Device="" Addr="w20.10" />
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+ <DI_ITEM Index="11" Name="" Device="" Addr="w20.11" />
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+ <DI_ITEM Index="12" Name="" Device="" Addr="w20.12" />
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+ <DI_ITEM Index="13" Name="" Device="" Addr="w20.13" />
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<DI_ITEM Index="14" Name="DI_ARM_Not_Extend_to_PM" Device="" Addr="w20.14" Note="Interlock-PLC" />
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<DI_ITEM Index="15" Name="DI_Generator_Hardware_Interlock" Device="" Addr="w20.15" Note="1=rf interlock ok,0=rf interlock off" />
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<DI_ITEM Index="16" Name="" />
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@@ -68,11 +68,11 @@
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<DI_ITEM Index="64" Name="" />
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<DI_ITEM Index="65" Name="" />
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<DI_ITEM Index="66" Name="" />
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- <DI_ITEM Index="67" Name="" />
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- <DI_ITEM Index="68" Name="" />
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- <DI_ITEM Index="69" Name="" />
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- <DI_ITEM Index="70" Name="" />
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- <DI_ITEM Index="71" Name="" />
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+ <DI_ITEM Index="67" Name="DI_CHB_Wall_TC_Deviation_out_of_range" Addr="w24.03" />
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+ <DI_ITEM Index="68" Name="DI_Grid_TC_Broken_Alarm" Addr="w24.04"/>
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+ <DI_ITEM Index="69" Name="DI_CHB_Wall_Control_TC_Broken_Alarm" Addr="w24.05"/>
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+ <DI_ITEM Index="70" Name="DI_CHB_Wall_Monitor_TC_Broken_Alarm" Addr="w24.06"/>
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+ <DI_ITEM Index="71" Name="DI_CHB_Wall_Heater_On_FB" Addr="w24.07" />
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<DI_ITEM Index="72" Name="" />
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<DI_ITEM Index="73" Name="" />
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<DI_ITEM Index="74" Name="" />
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@@ -81,23 +81,23 @@
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<DI_ITEM Index="77" Name="" />
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<DI_ITEM Index="78" Name="" />
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<DI_ITEM Index="79" Name="" />
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- <DI_ITEM Index="80" Name="DI_Lift_Servo_with_origin" Addr="w25.00"/>
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- <DI_ITEM Index="81" Name="DI_Lift_Servo_on" Addr="w25.01" />
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- <DI_ITEM Index="82" Name="DI_Lift_Servo_origin_Sensor" Addr="w25.02" />
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- <DI_ITEM Index="83" Name="Lift_Servo_up_Position_Sensor" Addr="w25.03" Note="0=OK, 1=alarm Interlock-PLC"/>
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- <DI_ITEM Index="84" Name="DI_Lift_Servo_CCW_limit_Sensor_alarm" Addr="w25.04" Note="0=OK, 1=alarm Interlock-PLC"/>
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- <DI_ITEM Index="85" Name="DI_Lift_Servo_alarm" Addr="w25.05" Note="0=OK, 1=alarm Interlock-PLC"/>
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- <DI_ITEM Index="86" Name="DI_Lift_Servo_ORG_fail_alarm" Addr="w25.06" Note="0=OK, 1=alarm Interlock-PLC"/>
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- <DI_ITEM Index="87" Name="DI_Lift_Servo_ABS_fail_alarm" Addr="w25.07" Note="0=OK, 1=alarm Interlock-PLC"/>
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- <DI_ITEM Index="88" Name="DI_Lift_Servo_Over_software_Limit_alarm" Addr="w25.08" Note="0=OK, 1=alarm Interlock-PLC"/>
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- <DI_ITEM Index="89" Name="DI_Lift_Servo_Go_Position1_Complete" Addr="w25.09" Note="定位到位置1完成"/>
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- <DI_ITEM Index="90" Name="DI_Lift_Servo_Go_Position2_Complete" Addr="w25.10" Note="定位到位置2完成"/>
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- <DI_ITEM Index="91" Name="DI_Lift_Servo_Go_Position3_Complete" Addr="w25.11" Note="定位到位置3完成"/>
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- <DI_ITEM Index="92" Name="DI_Lift_Servo_origin_Finished" Addr="w25.12" Note="原点已建立"/>
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- <DI_ITEM Index="93" Name="DI_Lift_Servo_Go_Position4_Complete" Addr="W25.13" Device="" Note="Lift Servo到位置4,定位完成" />
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- <DI_ITEM Index="94" Name="DI_Lift_Servo_Go_Position5_Complete" Addr="W25.14" Device="" Note="Lift Servo到位置5,定位完成" />
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- <DI_ITEM Index="95" Name="DI_Lift_Servo_Pos_Module_Alarm" Addr="W25.15" Device="" Note="0=Normal, 1=Alarm Interlock-PLC" />
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- <DI_ITEM Index="96" Name="DI_Lift_Servo_Over_Software_Limit_Alarm" Addr="W26.00" Device="" Note="0=Normal, 1=Alarm Interlock-PLC" />
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+ <DI_ITEM Index="80" Name="" Addr="w25.00"/>
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+ <DI_ITEM Index="81" Name="" Addr="w25.01" />
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+ <DI_ITEM Index="82" Name="" Addr="w25.02" />
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+ <DI_ITEM Index="83" Name="" Addr="w25.03" Note="0=OK, 1=alarm Interlock-PLC"/>
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+ <DI_ITEM Index="84" Name="" Addr="w25.04" Note="0=OK, 1=alarm Interlock-PLC"/>
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+ <DI_ITEM Index="85" Name="" Addr="w25.05" Note="0=OK, 1=alarm Interlock-PLC"/>
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+ <DI_ITEM Index="86" Name="" Addr="w25.06" Note="0=OK, 1=alarm Interlock-PLC"/>
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+ <DI_ITEM Index="87" Name="" Addr="w25.07" Note="0=OK, 1=alarm Interlock-PLC"/>
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+ <DI_ITEM Index="88" Name="" Addr="w25.08" Note="0=OK, 1=alarm Interlock-PLC"/>
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+ <DI_ITEM Index="89" Name="" Addr="w25.09" Note="定位到位置1完成"/>
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+ <DI_ITEM Index="90" Name="" Addr="w25.10" Note="定位到位置2完成"/>
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+ <DI_ITEM Index="91" Name="" Addr="w25.11" Note="定位到位置3完成"/>
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+ <DI_ITEM Index="92" Name="" Addr="w25.12" Note="原点已建立"/>
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+ <DI_ITEM Index="93" Name="" Addr="W25.13" Device="" Note="Lift Servo到位置4,定位完成" />
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+ <DI_ITEM Index="94" Name="" Addr="W25.14" Device="" Note="Lift Servo到位置5,定位完成" />
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+ <DI_ITEM Index="95" Name="" Addr="W25.15" Device="" Note="0=Normal, 1=Alarm Interlock-PLC" />
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+ <DI_ITEM Index="96" Name="" Addr="W26.00" Device="" Note="0=Normal, 1=Alarm Interlock-PLC" />
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<DI_ITEM Index="97" Name="" />
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<DI_ITEM Index="98" Name="" />
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<DI_ITEM Index="99" Name="DI_YAS_Servo_Controler_COMM_Alarm" Addr="W26.03" Device="" Note="0=OK,1=Alarm 安川PLC与欧姆龙PLC通讯正常" />
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@@ -169,12 +169,12 @@
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<DO_ITEM Index="3" Name="" />
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<DO_ITEM Index="4" Name="DO_Slit_Door_Open" Device="" Addr="w0.04" />
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<DO_ITEM Index="5" Name="DO_Slit_Door_Close" Device="" Addr="w0.05" Note="Interlock-HW" />
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- <DO_ITEM Index="6" Name="DO_Lift_Pin_Up" Device="" Addr="w0.06" />
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- <DO_ITEM Index="7" Name="DO_Lift_Pin_Down" Device="" Addr="w0.07" />
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- <DO_ITEM Index="8" Name="DO_Guide_Pin_Small_Lifter_Up" Device="" Addr="w0.08" />
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- <DO_ITEM Index="9" Name="DO_Guide_Pin_Small_Lifter_Down" Device="" Addr="w0.09" />
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- <DO_ITEM Index="10" Name="DO_Guide_Pin_Medium_Lifter_Up" Device="" Addr="w0.10" />
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- <DO_ITEM Index="11" Name="DO_Guide_Pin_Medium_Lifter_Down" Device="" Addr="w0.11" />
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+ <DO_ITEM Index="6" Name="" Device="" Addr="w0.06" />
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+ <DO_ITEM Index="7" Name="" Device="" Addr="w0.07" />
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+ <DO_ITEM Index="8" Name="" Device="" Addr="w0.08" />
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+ <DO_ITEM Index="9" Name="" Device="" Addr="w0.09" />
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+ <DO_ITEM Index="10" Name="" Device="" Addr="w0.10" />
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+ <DO_ITEM Index="11" Name="" Device="" Addr="w0.11" />
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<DO_ITEM Index="12" Name="" />
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<DO_ITEM Index="13" Name="" />
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<DO_ITEM Index="14" Name="DO_MFC1_Valve" Device="" Addr="w0.14" />
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@@ -219,13 +219,13 @@
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<DO_ITEM Index="53" Name="" />
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<DO_ITEM Index="54" Name="" />
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<DO_ITEM Index="55" Name="" />
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- <DO_ITEM Index="56" Name="DO_Lift_Servo_Go_Position1" Addr="w3.08" Note="有需求才置On,到达位置后或者停止置Off,反馈信号DI-89"/>
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- <DO_ITEM Index="57" Name="DO_Lift_Servo_Go_Position2" Addr="w3.09" Note="有需求才置On,到达位置后或者停止置Off,反馈信号DI-90" />
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- <DO_ITEM Index="58" Name="DO_Lift_Servo_Go_Position3" Addr="w3.10" Note="有需求才置On,到达位置后或者停止置Off,反馈信号DI-91" />
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- <DO_ITEM Index="59" Name="DO_Lift_Servo_origin" Addr="w3.11" Note="有自动手动需求时置on;,DI-80标志位上升沿或者需要停止置Off" />
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- <DO_ITEM Index="60" Name="DO_Lift_Servo_stop" Addr="w3.12" Note="有需求置1,一定时间后置off" />
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- <DO_ITEM Index="61" Name="DO_Lift_Servo_manaul_UP" Addr="w3.13" Note="切换型按钮,按住置1,再按置off,非手动模式下强制置off" />
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- <DO_ITEM Index="62" Name="DO_Lift_Servo_manaul_DOWN" Addr="w3.14" Note="切换型按钮,按住置1,再按置off,非手动模式下强制置off" />
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+ <DO_ITEM Index="56" Name="" Addr="w3.08" Note="有需求才置On,到达位置后或者停止置Off,反馈信号DI-89"/>
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+ <DO_ITEM Index="57" Name="" Addr="w3.09" Note="有需求才置On,到达位置后或者停止置Off,反馈信号DI-90" />
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+ <DO_ITEM Index="58" Name="" Addr="w3.10" Note="有需求才置On,到达位置后或者停止置Off,反馈信号DI-91" />
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+ <DO_ITEM Index="59" Name="" Addr="w3.11" Note="有自动手动需求时置on;,DI-80标志位上升沿或者需要停止置Off" />
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+ <DO_ITEM Index="60" Name="" Addr="w3.12" Note="有需求置1,一定时间后置off" />
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+ <DO_ITEM Index="61" Name="" Addr="w3.13" Note="切换型按钮,按住置1,再按置off,非手动模式下强制置off" />
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+ <DO_ITEM Index="62" Name="" Addr="w3.14" Note="切换型按钮,按住置1,再按置off,非手动模式下强制置off" />
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<DO_ITEM Index="63" Name="" />
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<DO_ITEM Index="64" Name="" />
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<DO_ITEM Index="65" Name="" />
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@@ -337,16 +337,16 @@
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<AO_ITEM Index="25" Name="AO_BaisRF_Enable" BufferOffset="50" Device="" Addr="d1050" Note="0=Substrate heater mode ,1=Bais RF mode" />
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<AO_ITEM Index="26" Name="AO_Grid_TC_Enable" BufferOffset="52" Device="" Addr="d1052" Note="1=Grid TC"/>
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<AO_ITEM Index="27" Name="AO_Lift_Servo_Enable" BufferOffset="54" Device="" Addr="d1054" Note="0=Lift Pin ,1=Lift Servo"/>
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- <AO_ITEM Index="28" Name="AO_Lift_Servo_Auto_speed" BufferOffset="56" Device="" Addr="d1056" Note="mm/s"/>
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- <AO_ITEM Index="29" Name="AO_Lift_Servo_manual_speed" BufferOffset="58" Device="" Addr="d1058" Note="mm/s" />
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- <AO_ITEM Index="30" Name="AO_Lift_Servo_Acc_time" BufferOffset="60" Device="" Addr="d1060" Note="ms"/>
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- <AO_ITEM Index="31" Name="AO_Lift_Servo_Dec_time" BufferOffset="62" Device="" Addr="d1062" Note="ms" />
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- <AO_ITEM Index="32" Name="AO_Lift_Servo_CCW_limit_position" BufferOffset="64" Device="" Addr="d1064" Note="mm"/>
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- <AO_ITEM Index="33" Name="AO_Lift_Servo_CW_limit_position" BufferOffset="66" Device="" Addr="d1066" Note="mm" />
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- <AO_ITEM Index="34" Name="AO_Lift_Servo_Correction_value" BufferOffset="68" Device="" Addr="d1068" Note="mm"/>
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- <AO_ITEM Index="35" Name="AO_Lift_Servo_Position1" BufferOffset="70" Device="" Addr="d1070" Note="mm"/>
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- <AO_ITEM Index="36" Name="AO_Lift_Servo_Position2" BufferOffset="72" Device="" Addr="d1072" Note="mm" />
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- <AO_ITEM Index="37" Name="AO_Lift_Servo_Position3" BufferOffset="74" Device="" Addr="d1074" Note="mm" />
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+ <AO_ITEM Index="28" Name="" BufferOffset="56" Device="" Addr="d1056" Note="mm/s"/>
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+ <AO_ITEM Index="29" Name="" BufferOffset="58" Device="" Addr="d1058" Note="mm/s" />
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+ <AO_ITEM Index="30" Name="" BufferOffset="60" Device="" Addr="d1060" Note="ms"/>
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+ <AO_ITEM Index="31" Name="" BufferOffset="62" Device="" Addr="d1062" Note="ms" />
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+ <AO_ITEM Index="32" Name="" BufferOffset="64" Device="" Addr="d1064" Note="mm"/>
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+ <AO_ITEM Index="33" Name="" BufferOffset="66" Device="" Addr="d1066" Note="mm" />
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+ <AO_ITEM Index="34" Name="" BufferOffset="68" Device="" Addr="d1068" Note="mm"/>
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+ <AO_ITEM Index="35" Name="" BufferOffset="70" Device="" Addr="d1070" Note="mm"/>
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+ <AO_ITEM Index="36" Name="" BufferOffset="72" Device="" Addr="d1072" Note="mm" />
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+ <AO_ITEM Index="37" Name="" BufferOffset="74" Device="" Addr="d1074" Note="mm" />
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<AO_ITEM Index="38" Name="" />
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<AO_ITEM Index="39" Name="" />
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<AO_ITEM Index="40" Name="" />
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@@ -427,10 +427,10 @@
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<AI_ITEM Index="37" Name="AI_CHB_Wall_Monitor_TC_Temp" BufferOffset="74" Device="" Addr="d2074" Note="TC temp" />
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<AI_ITEM Index="38" Name="" />
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<AI_ITEM Index="39" Name="" />
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- <AI_ITEM Index="40" Name="NC_Error_Code" BufferOffset="80" Addr="d2080" Note="定位模块错误代码"/>
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- <AI_ITEM Index="41" Name="AI_Lift_Servo_current_value" BufferOffset="82" Addr="d2082"/>
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- <AI_ITEM Index="42" Name="AI_Generator_Forward_Power" BufferOffset="84" Device="" Addr="d2084" Note="ICP Souce/RPS" />
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- <AI_ITEM Index="43" Name="AI_Generator_Reflect_Power" BufferOffset="86" Device="" Addr="d2086" />
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+ <AI_ITEM Index="40" Name="" BufferOffset="80" Addr="d2080" Note="定位模块错误代码"/>
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+ <AI_ITEM Index="41" Name="" BufferOffset="82" Addr="d2082"/>
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+ <AI_ITEM Index="42" Name="" BufferOffset="84" Device="" Addr="d2084" Note="ICP Souce/RPS" />
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+ <AI_ITEM Index="43" Name="" BufferOffset="86" Device="" Addr="d2086" />
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<AI_ITEM Index="44" Name="" />
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<AI_ITEM Index="45" Name="AI_Lift_Virtual_Servo_Current_Position" Addr="d2090" Device="" Note="UNIT:MM" />
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<AI_ITEM Index="46" Name="AI_Lift_Servo_1_Current_Position" Addr="d2092" Device="" />
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