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@@ -73,10 +73,11 @@
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<config default="4" name="EfemType" nameView="EFEM Type" description="EFEM type,1=Future 2=Jet 3=Brooks 4=BeamSUNWAY" max="300" min="1" paramter="" tag="" unit="" type="Integer" />
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-
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+ <config default="1" name="EfemRobotArmType" nameView="EFEM robot arm type" description="EFEM robot arm type,1=Double arm 2=Single arm" max="300" min="1" paramter="" tag="" unit="" type="Integer" />
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<config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="auto unlock after unload" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="Ignore water flow alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
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+ <config default="false" name="IgnoreIonizerError" nameView="Ignore Ionizer alarm" description="Ignore Ionizer alarm" max="" min="" paramter="" tag="" unit="" type="Bool" />
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<config default="false" name ="VerifyWaferExistenceAtferRetract" nameView="Auto Verify Wafer existance after retract robot arm" description="Auto Verify Wafer existance after retract robot arm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
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<config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="Delay Time before lift down" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
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@@ -274,6 +275,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="MfcGas2" nameView="MFC Gas2" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
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@@ -285,6 +288,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="MfcGas3" nameView="MFC Gas3" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
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@@ -296,6 +301,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="MfcGas4" nameView="MFC Gas4" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
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@@ -307,6 +314,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="MfcGas5" nameView="MFC Gas5" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
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@@ -318,6 +327,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="Pump" nameView="Pump" >
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<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
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@@ -498,6 +509,7 @@
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<config default="0" name="Position1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position2" nameView="Lift Servo Position2" description="Lift Servo Position2" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position3" nameView="Lift Servo Position3" description="Lift Servo Position3" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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+ <config default="0" name="PosDiff" nameView="Lift Servo Pos Diff" description="Lift Servo Pos Diff" max="5" min="0" paramter="" tag="" unit="mm" type="Double" />
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</configs>
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<configs name="TriStateLiftPin4" nameView="Double Group TriState LiftPin Setting" visible="true">
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<config default="5" name="AutoSpeed" nameView="Lift Servo Auto speed" description="Lift Servo Auto speed" max="100" min="0" paramter="" tag="" unit="mm/s" type="Double" />
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@@ -681,6 +693,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="MfcGas2" nameView="MFC Gas2" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
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@@ -692,6 +706,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="MfcGas3" nameView="MFC Gas3" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
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@@ -703,6 +719,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="MfcGas4" nameView="MFC Gas4" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
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@@ -714,6 +732,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="MfcGas5" nameView="MFC Gas5" >
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<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
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@@ -725,6 +745,8 @@
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<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="MFC Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="MFC Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="MFC Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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+ <config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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+ <config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
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</configs>
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<configs name="Pump" nameView="Pump" >
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<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
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@@ -906,6 +928,7 @@
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<config default="0" name="Position1" nameView="Lift Servo Position1" description="Lift Servo Position1" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position2" nameView="Lift Servo Position2" description="Lift Servo Position2" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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<config default="0" name="Position3" nameView="Lift Servo Position3" description="Lift Servo Position3" max="1000" min="-100" paramter="" tag="" unit="mm" type="Double" />
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+ <config default="0" name="PosDiff" nameView="Lift Servo Pos Diff" description="Lift Servo Pos Diff" max="5" min="0" paramter="" tag="" unit="mm" type="Double" />
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</configs>
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<configs name="TriStateLiftPin4" nameView="Double Group TriState LiftPin Setting" visible="true">
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<config default="5" name="AutoSpeed" nameView="Lift Servo Auto speed" description="Lift Servo Auto speed" max="100" min="0" paramter="" tag="" unit="mm/s" type="Double" />
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