 JET-YDB\JET-YANGDB
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339af868f1
1.修改单位mtorr 2.修改IO信号 3.导出列表按钮改成英语 4.Message.
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2 weken geleden |
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JET-YDB\JET-YANGDB
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f92e4e963f
1.修改efem界面，把Aligner1 改成 Aligner，buffer改成cooling
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3 weken geleden |
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JET-YDB\JET-YANGDB
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ff5db94875
1.增加IO信号，修改报警过程
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3 weken geleden |
 JET-GZX
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21c5483113
Revert "modify bias error"
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3 weken geleden |
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JET-GZX
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7fde4b7f76
modify bias error
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3 weken geleden |
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JET-YDB\JET-YANGDB
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1fb2217bb6
1.修改名称 2.增加unload
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3 weken geleden |
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JET-GZX
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ecef0b497c
change chinese
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3 weken geleden |
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JET-GZX
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b21955b14d
change chinese
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3 weken geleden |
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JET-GZX
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46cefcb133
leakcheck change chinese
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3 weken geleden |
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JET-GZX
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9b0e5a32e5
change Chinese
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3 weken geleden |
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JET-GZX
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fb7a79cd09
del merging
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3 weken geleden |
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JET-GZX
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29df32f3c4
translate from Chinese to English
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3 weken geleden |
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JET-YDB\JET-YANGDB
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33002a0938
去掉不需要的IO
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3 weken geleden |
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JET-GZX
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18f93e94f4
fix bug of placing wafers
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4 weken geleden |
 JET-GZX
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285246cd6a
robot control
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1 maand geleden |
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JET-GZX
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0a7f94d6f9
change LP2 wafer count
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1 maand geleden |
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intern04
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966b2e6d21
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Virgo_Mask
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1 maand geleden |
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intern04
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d3a5b3c320
add EfemRobotArmType control
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1 maand geleden |
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JET-YDB\JET-YANGDB
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f79574ead6
调试修改
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1 maand geleden |
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JET-YDB\JET-YANGDB
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ef6f73344e
1.增加单臂，双臂，Ignore Ionizer error， gas1~5 warning range and time ，双轴伺服pos diff 配置
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1 maand geleden |
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intern04
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6247f152b9
add Virgo UI change
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1 maand geleden |
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intern04
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a916d81320
Change VirgoUI Langrage
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1 maand geleden |
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intern04
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2f1dc5bb0f
Merge branch 'master' of http://10.4.3.168:3000/JetPlasma/Virgo_Mask
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1 maand geleden |
 chenkui
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78877e2d5e
修复了EAP中E94 FAControlJob的异常
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1 maand geleden |
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JET-YDB\JET-YANGDB
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b49c308376
1.增加自学习文件
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1 maand geleden |
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JET-YDB\JET-YANGDB
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fca2bab62f
1.修改双轴电机回到原点的条件
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1 maand geleden |
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intern04
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97beaa7e7b
delete Logo
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1 maand geleden |
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JET-YDB\JET-YANGDB
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e74a40f753
1.增加腔体自学习
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1 maand geleden |
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JET-YDB\JET-YANGDB
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738eac65f7
1.中文改成英文
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2 maanden geleden |
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JET-YDB\JET-YANGDB
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5b5945bffa
1.把系统配置中文改成英语
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2 maanden geleden |
