 sangwq
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
il y a 1 an |
 zhouhr
|
1e8077cb6e
Add the driver of HongHuVR
|
il y a 1 an |
 lixiang
|
e0817cb012
现场bug修改
|
il y a 1 an |
|
zhouhr
|
a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
|
il y a 1 an |
|
sangwq
|
587a0094b4
fix logic error.
|
il y a 1 an |
|
sangwq
|
9ba5d70aff
fix abort manual transfer bug.
|
il y a 1 an |
|
sangwq
|
2b6f4986f3
fix Efemrobot scheduler bug.
|
il y a 1 an |
|
sangwq
|
3f1379ff57
Merge branch 'master' of http://git.jetplasma-oa.com/JetPlasma/Venus
|
il y a 1 an |
|
sangwq
|
d49b8f65dd
fix the RouteManager instance initialize bug.
|
il y a 1 an |
|
lixiang
|
1d854ff197
添加Lid Servo CTRL Mode控制lid是否可以开关
|
il y a 1 an |
|
sangwq
|
69eff33372
Force System Restart after change IsATM mode configuration item and add abort process.
|
il y a 1 an |
|
lixiang
|
a62816fc3f
优化efem
|
il y a 1 an |
|
lixiang
|
9f512c69c9
优化efem动画
|
il y a 1 an |
 Intern01
|
987f0abae5
1.Slove TuroN2Flow don't show problem
|
il y a 1 an |
|
sangwq
|
8d21b41b42
AutoCycle enhancement.
|
il y a 1 an |
|
lixiang
|
46aa26403c
优化压差开siltdoor功能
|
il y a 1 an |
|
zhouhr
|
038e0b984a
1.Add LL pump preemptive lock
|
il y a 1 an |
|
lixiang
|
fc317f2d07
添加控压状态，开关slitdoor，check压差的功能
|
il y a 1 an |
|
lixiang
|
00d42e8c17
efem动画优化
|
il y a 1 an |
|
lixiang
|
5888197193
1.efem 添加 foup load/unload动画
|
il y a 1 an |
|
Intern01
|
261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
|
il y a 1 an |
|
sangwq
|
f216c69fcf
Enhance AutoCycle Module.
|
il y a 1 an |
|
lixiang
|
afb706578a
添加CycleCount/WaferCount显示
|
il y a 1 an |
|
lixiang
|
76a22f462f
1.根据tps提供sequence 添加控压功能
|
il y a 1 an |
|
sangwq
|
c223835b1e
enhance AutoCycle module.
|
il y a 1 an |
|
Intern01
|
73729331e4
Simulator Device Update
|
il y a 1 an |
|
Intern01
|
c5abe7c813
Simulator Communication Port Update
|
il y a 1 an |
|
sangwq
|
2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
|
il y a 1 an |
|
lixiang
|
9c46c55950
解决冲突
|
il y a 1 an |
|
lixiang
|
124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
|
il y a 1 an |
