 lixiang
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46aa26403c
优化压差开siltdoor功能
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2 years ago |
 zhouhr
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038e0b984a
1.Add LL pump preemptive lock
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2 years ago |
|
lixiang
|
5888197193
1.efem 添加 foup load/unload动画
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2 years ago |
 Intern01
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261ef38430
solve errors in TMRobot Action&& update Serial ports in simulator
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2 years ago |
|
lixiang
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
 sangwq
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2fb8490f3a
Update TM software interlock about Loadlock slit door open issue.
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2 years ago |
|
lixiang
|
28b8f5e03a
根据最新的TM sequence修改代码，修改DO-04功能为Vent Valve TM
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2 years ago |
|
lixiang
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b96ac701fb
1.添加TM Simulator
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2 years ago |
|
lixiang
|
edcd7c0ba1
1.根据tps最新sequence 优化TM，更新界面及rt
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2 years ago |
|
lixiang
|
4ffafb6001
EFEM界面优化
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2 years ago |
|
lixiang
|
be22c5112d
TM 添加两个pump 串口23/24/25/26
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2 years ago |
|
lixiang
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8f80478982
1.添加IoSwitch
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2 years ago |
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sangwq
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f211c4242f
Efem module raw design.
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2 years ago |
|
sangwq
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bdee4a05ba
TM Robot Pick/Place/Swap simulation ready.
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2 years ago |
|
sangwq
|
241a8a2f5d
UPDATE 20230324
|
2 years ago |
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sangwq
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e1226fdd9e
update for disable difference pressure checking under atm mode according electrical team request.
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2 years ago |
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sangwq
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5b037046f9
Add TM/LL modules.
|
2 years ago |
