 hecl
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9d28f8ee7d
1.Add Tru match
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1 year ago |
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hecl
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b3a13fc6c7
1.IoMagnet device Logical supplement
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1 year ago |
 lixiang
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552d60ca99
1.Stable与Tolerance 功能优化
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1 year ago |
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lixiang
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7e15cb64a0
1.Recipe 添加 Stable/OverEtch 功能
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1 year ago |
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hecl
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68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
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1 year ago |
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lixiang
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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1 year ago |
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hecl
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c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
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1 year ago |
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hecl
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945ce3c74c
1.Venus SE DE Add PressureControl
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1 year ago |
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hecl
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2ffdf6e535
1Venus DE LinerDoor update
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1 year ago |
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hecl
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d331213da1
1.SETM Pressure Control update
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1 year ago |
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hecl
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f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
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1 year ago |
 zhouhr
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136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
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1 year ago |
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zhouhr
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9d9b666ea4
Venus SE Update
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1 year ago |
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lixiang
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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lixiang
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 year ago |
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zhouhr
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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zhouhr
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57607fb800
add IsHome =>false when error happened in driver of HongHu Robot && Change storage unit from GB to MB in ResourceMonitor
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1 year ago |
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zhouhr
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
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zhouhr
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3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
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1 year ago |
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zhouhr
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e8e04e07b5
Change cast way by Enum Name for SEPMView.
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1 year ago |
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zhouhr
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bcbe6b2cbe
fix bug in PM SlitDoorClosed
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1 year ago |
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zhouhr
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24f1f52056
fix bug in SE PM SetSlitDoor && add deal with SE PM Home
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1 year ago |
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zhouhr
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36cc58e22c
fix bug in Venus SE PM in UI,RT,Simulator
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1 year ago |
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zhouhr
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31bbc4482b
update ui && rt && simu for Venus SE
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1 year ago |
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zhouhr
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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1 year ago |
