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@@ -434,7 +434,7 @@
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<config default="751" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="" max="2000" min="500" paramter="" tag="" unit="°C" type="Double" />
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<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
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<config default="80" name="ControlPressureSetPoint" nameView="Control Pressure SetPoint" description="PM Chamber 控压 设定值" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
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- <config default="80" name="ControlPressureoffset" nameView="Control Pressure offset" description="PM Chamber 控压 误差范围" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
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+ <config default="80" name="ControlPressureOffset" nameView="Control Pressure offset" description="PM Chamber 控压 误差范围" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
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<config default="300" name="ControlPressureN2FlowSetPoint" nameView="Control Pressure N2 Flow SetPoint" description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
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<configs name="MFCVerification" nameView="MFC Verification" >
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@@ -509,13 +509,13 @@
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<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="Magnet" nameView="Magnet" visible="true">
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- <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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- <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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- <config default="4" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
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- <config default="50" name="Magnet_1A_output_full_scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
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- <config default="50" name="Magnet_1B_output_full_scale" nameView="Magnet 1B output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="50" name="Magnet_2A_output_full_scale" nameView="Magnet 2A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="50" name="Magnet_2B_output_full_scale" nameView="Magnet 2B output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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+ <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="波形, 0:Single,1:Squre" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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+ <config default="25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="100" min="0" paramter="" tag="" unit="%" type="Integer" visible="true"/>
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+ <config default="4" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="Integer" visible="true"/>
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+ <config default="50" name="Magnet_1A_output_full_scale" nameView="Magnet 1A output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true"/>
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+ <config default="50" name="Magnet_1B_output_full_scale" nameView="Magnet 1B output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true" />
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+ <config default="50" name="Magnet_2A_output_full_scale" nameView="Magnet 2A output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true" />
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+ <config default="50" name="Magnet_2B_output_full_scale" nameView="Magnet 2B output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true" />
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<config default="3" name="Min_Magnet_Coil_Current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
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</configs>
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<configs name="Rf" nameView="Source RF" visible="false">
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@@ -569,7 +569,7 @@
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</configs>
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<configs name="BiasRf" nameView="Bias RF" >
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<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
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- <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Tru_Eth;4:Tru" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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+ <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet;3:Tru;4:Tru_Eth" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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@@ -601,7 +601,7 @@
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</configs>
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<configs name="BiasMatch" nameView="Bias Match" >
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<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
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- <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech; 4:Tru" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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+ <config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech; 4:Tru;5:Tru_Eth" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
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@@ -1146,16 +1146,16 @@
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<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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- <configs name="Magnet" nameView="Magnet" visible="false">
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- <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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- <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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- <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
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- <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
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- <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
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- </configs>
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+ <configs name="Magnet" nameView="Magnet" visible="true">
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+ <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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+ <config default="25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="100" min="0" paramter="" tag="" unit="%" type="Integer" visible="true"/>
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+ <config default="4" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="Integer" visible="true"/>
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+ <config default="50" name="Magnet_1A_output_full_scale" nameView="Magnet 1A output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Double" visible="true"/>
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+ <config default="50" name="Magnet_1B_output_full_scale" nameView="Magnet 1B output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true" />
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+ <config default="50" name="Magnet_2A_output_full_scale" nameView="Magnet 2A output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true" />
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+ <config default="50" name="Magnet_2B_output_full_scale" nameView="Magnet 2B output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true" />
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+ <config default="3" name="Min_Magnet_Coil_Current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
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+ </configs>
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<configs name="Rf" nameView="Source RF" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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@@ -1788,16 +1788,16 @@
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<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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- <configs name="Magnet" nameView="Magnet" visible="false">
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- <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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- <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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- <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
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- <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
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- <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
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- </configs>
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+ <configs name="Magnet" nameView="Magnet" visible="true">
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+ <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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+ <config default="25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="100" min="0" paramter="" tag="" unit="%" type="Integer" visible="true"/>
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+ <config default="4" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="Integer" visible="true"/>
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+ <config default="50" name="Magnet_1A_output_full_scale" nameView="Magnet 1A output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Double" visible="true"/>
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+ <config default="50" name="Magnet_1B_output_full_scale" nameView="Magnet 1B output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true" />
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+ <config default="50" name="Magnet_2A_output_full_scale" nameView="Magnet 2A output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true" />
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+ <config default="50" name="Magnet_2B_output_full_scale" nameView="Magnet 2B output full scale" description="" max="100" min="-100" paramter="" tag="" unit="%" type="Integer" visible="true" />
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+ <config default="3" name="Min_Magnet_Coil_Current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
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+ </configs>
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<configs name="Rf" nameView="Source RF" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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@@ -2419,16 +2419,6 @@
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<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
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<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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- <configs name="Magnet" nameView="Magnet" visible="false">
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- <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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- <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
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- <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
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- <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
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- <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
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- <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
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- </configs>
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<configs name="Rf" nameView="Source RF" >
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<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
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