 zhouhr
|
16530979b1
DE pendulum set pressure/10 as the difference between SE and DE.
|
1 year ago |
 hecl
|
21d202af0e
Add VenusDE WallChiller UI & ViewModel
|
1 year ago |
|
zhouhr
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
1 year ago |
|
zhouhr
|
cc436f1ac6
add DE shareChiller && add check items before PM Pump down.
|
1 year ago |
|
hecl
|
fedcc95273
1.Venus DE process enhance
|
1 year ago |
|
hecl
|
7fe748b93a
1.Add Venus DE processdefine content
|
1 year ago |
|
hecl
|
f501000473
1.Fix Tru RF/match bugs
|
1 year ago |
|
hecl
|
9d28f8ee7d
1.Add Tru match
|
1 year ago |
|
hecl
|
b3a13fc6c7
1.IoMagnet device Logical supplement
|
1 year ago |
 lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
hecl
|
0b8a98a845
IoDevice IoMagnet Add
|
1 year ago |
|
hecl
|
8b0b067448
Add chamber ISO valve status
|
1 year ago |
|
hecl
|
68754c24af
1.add venuse SE/DE turbopump&pendulum interlock
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
hecl
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
1 year ago |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
|
1 year ago |
|
hecl
|
f9d4a74265
1.Venus DE/SE Gasverification add missing pipes
|
1 year ago |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
hecl
|
1b165a2e61
Venus DE update && Venus SE simulator update
|
1 year ago |
|
hecl
|
df4447c2d2
PMhomeRoutine add VenusDE chambertype
|
1 year ago |
|
lixiang
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 year ago |
|
lixiang
|
fd2d6f9a5c
解决冲突
|
1 year ago |
|
hecl
|
e2c4a51efe
1.Add VenusDE JetVenusDEPM control
|
1 year ago |
