解决冲突

Venus/Venus_RT/Devices/JetVenusDEPM.cs

@@ -699,7 +699,7 @@ namespace Venus_RT.Devices
         public override bool CheckSlitDoorOpen()
         => !IsSlitDoorClosed;
 
-        public override void CloseValves()
+        public override void CloseValves(int? delayTime = null)
         {
             _PVN21Valve.TurnValve(false, out _);
             //_PVN22Valve.TurnValve(false, out _);

Venus/Venus_RT/Modules/PMs/PMProcessRoutine.cs

@@ -500,7 +500,7 @@ namespace Venus_RT.Modules.PMs
             _stepTime.Stop();
             WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Idle);
             WaferManager.Instance.UpdateWaferProcessStatus(Module, 0, EnumWaferProcessStatus.Completed);
-            CloseAllValves();
+            CloseAllValves(500);
             _chamber.GeneratorSetpower(0);
             _chamber.GeneratorBiasSetpower(0);
             _chamber.GeneratorBiasPowerOn(false);
@@ -547,7 +547,7 @@ namespace Venus_RT.Modules.PMs
             _chamber.GeneratorBiasPowerOn(false);
             _chamber.GeneratorPowerOn(false);
             _chamber.TurnPendulumValve(false);
-            CloseAllValves();
+            CloseAllValves(500);
             _chamber.OpenValve(ValveType.TurboPumpPumping, true);
             _chamber.OpenValve(ValveType.TurboPumpPurge, true);
             if (_chamber.ChamberType == JetChamber.Venus)