 hecl
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f814cf53a8
1.Add simulator read RF ConfigType function
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1 year ago |
 lixiang
|
d33079596b
1.优化新版跑片动画
|
1 year ago |
|
hecl
|
aed602cdc9
1.Add Tru rf/match Reconnect function
|
1 year ago |
|
hecl
|
0a2d5ac547
Venus DE TM simulator add
|
1 year ago |
|
lixiang
|
552d60ca99
1.Stable与Tolerance 功能优化
|
1 year ago |
|
lixiang
|
3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
|
1 year ago |
|
lixiang
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 year ago |
|
hecl
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
1 year ago |
|
hecl
|
2ffdf6e535
1Venus DE LinerDoor update
|
1 year ago |
|
lixiang
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 year ago |
|
hecl
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
|
1 year ago |
|
lixiang
|
5c5936c32c
1.修复mfc verification单点ui不显示bug
|
1 year ago |
|
hecl
|
ea59788c5a
Venuse DE routine update &fix config can't hide bugs
|
1 year ago |
|
lixiang
|
1929a3510b
1.新版ui界面开发
|
1 year ago |
|
hecl
|
bb939f4cb1
Venus DE he flow update
|
1 year ago |
|
hecl
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
1 year ago |
|
hecl
|
1b165a2e61
Venus DE update && Venus SE simulator update
|
1 year ago |
|
hecl
|
8d8b960858
Venus DE chamber UI change && Venus SE simulator update
|
1 year ago |
|
hecl
|
7875fff8f4
1Venus DE UI Update && Venus SE Simulator update
|
1 year ago |
|
lixiang
|
33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
|
1 year ago |
|
hecl
|
091efd8f64
1.enhance PMdataRecord about waferstatus update
|
1 year ago |
|
hecl
|
eb71335c9e
1.VenusDE UI Viewmodel update and fix pipelines switch bugs
|
1 year ago |
|
hecl
|
e2c4a51efe
1.Add VenusDE JetVenusDEPM control
|
1 year ago |
|
lixiang
|
5c995238da
1.修复kepler流气模拟器bug
|
1 year ago |
|
lixiang
|
407ebcf41c
1.kepler2200控压模拟器修改
|
1 year ago |
|
lixiang
|
4338503e2a
1.添加霍庭格RF Device
|
1 year ago |
|
hecl
|
d18b2c8e6a
Add VenusDE PM UI, Viewmodel, Simulator
|
1 year ago |
|
lixiang
|
818383115c
UI优化
|
1 year ago |
 zhouhr
|
3e18a3a534
Add compatibility for VenusSE in Process,GasFlowRoutine && add More Gas define in config for VenusSE PM && fix bug in IoDefine
|
1 year ago |
|
hecl
|
1b4faf274b
Improve VenusSE pm viewmodel and vent function
|
1 year ago |
