niuyx 7cd95698ba Add Robot Wafer display in OperationOverView and EfemView; Modify logs in VacuumLevelCheckRoutine; 1 月之前
..
LoaderCRSAxisInterLock.cs d6ea09db69 revise wago simulator 1 月之前
LoaderCommonDevice.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderCommonWaferHolderSideClampRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderDeviceTimer.cs e4fd0ff15a update swing to shuttle 1 月之前
LoaderFlowTestRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderInstallCRSRoutine.cs 715c26c896 Revise LoaderInstallCRS and LoaderRotationAxisInterLock; 1 月之前
LoaderLeakFirstFlowTestRoutine.cs f7533a737b Initialize 2 月之前
LoaderLoadRoutine.cs babcab54eb add loader load routine,add Wago simulator DI/DO set ability 1 月之前
LoaderLotTrackUtil.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderPreTransferUnclampRoutine.cs f7533a737b Initialize 2 月之前
LoaderReLeakFlowTestRoutine.cs f7533a737b Initialize 2 月之前
LoaderRotationAxisInterLock.cs 715c26c896 Revise LoaderInstallCRS and LoaderRotationAxisInterLock; 1 月之前
LoaderShuttleAxisInterLock.cs ca10919375 Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine; 1 月之前
LoaderSideBernoulliBladderRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderSideBernoulliN2PressureRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderSideCycleRoutine.cs f7533a737b Initialize 2 月之前
LoaderSideDevice.cs d1f3ab2204 Revise BernoulliN2 action 1 月之前
LoaderSideDoorLockRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderSideTransBladderRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderSideTransHighRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderSideUnloadVacuumLevelCheckRoutine.cs f7533a737b Initialize 2 月之前
LoaderSideVacuumAndLevelCheckRoutineRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderSideVacuumLevelCheckRoutine.cs 7cd95698ba Add Robot Wafer display in OperationOverView and EfemView; Modify logs in VacuumLevelCheckRoutine; 1 月之前
LoaderSideVacuumRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderSideWhBladderRoutine.cs 31c26804e6 add Festo Communication Protocol 2 月之前
LoaderTiltAxisInterLock.cs d6ea09db69 revise wago simulator 1 月之前
LoaderUnloadRoutine.cs ca10919375 Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine; 1 月之前