niuyx 7cd95698ba Add Robot Wafer display in OperationOverView and EfemView; Modify logs in VacuumLevelCheckRoutine; hai 8 meses
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LoaderCRSAxisInterLock.cs d6ea09db69 revise wago simulator hai 8 meses
LoaderCommonDevice.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderCommonWaferHolderSideClampRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderDeviceTimer.cs e4fd0ff15a update swing to shuttle hai 8 meses
LoaderFlowTestRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderInstallCRSRoutine.cs 715c26c896 Revise LoaderInstallCRS and LoaderRotationAxisInterLock; hai 8 meses
LoaderLeakFirstFlowTestRoutine.cs f7533a737b Initialize hai 9 meses
LoaderLoadRoutine.cs babcab54eb add loader load routine,add Wago simulator DI/DO set ability hai 8 meses
LoaderLotTrackUtil.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderPreTransferUnclampRoutine.cs f7533a737b Initialize hai 9 meses
LoaderReLeakFlowTestRoutine.cs f7533a737b Initialize hai 9 meses
LoaderRotationAxisInterLock.cs 715c26c896 Revise LoaderInstallCRS and LoaderRotationAxisInterLock; hai 8 meses
LoaderShuttleAxisInterLock.cs ca10919375 Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine; hai 8 meses
LoaderSideBernoulliBladderRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderSideBernoulliN2PressureRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderSideCycleRoutine.cs f7533a737b Initialize hai 9 meses
LoaderSideDevice.cs d1f3ab2204 Revise BernoulliN2 action hai 8 meses
LoaderSideDoorLockRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderSideTransBladderRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderSideTransHighRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderSideUnloadVacuumLevelCheckRoutine.cs f7533a737b Initialize hai 9 meses
LoaderSideVacuumAndLevelCheckRoutineRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderSideVacuumLevelCheckRoutine.cs 7cd95698ba Add Robot Wafer display in OperationOverView and EfemView; Modify logs in VacuumLevelCheckRoutine; hai 8 meses
LoaderSideVacuumRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderSideWhBladderRoutine.cs 31c26804e6 add Festo Communication Protocol hai 8 meses
LoaderTiltAxisInterLock.cs d6ea09db69 revise wago simulator hai 8 meses
LoaderUnloadRoutine.cs ca10919375 Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine; hai 8 meses