.. |
LoaderCRSAxisInterLock.cs
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d6ea09db69
revise wago simulator
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1 hónapja%!(EXTRA string=óta) |
LoaderCommonDevice.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderCommonWaferHolderSideClampRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderDeviceTimer.cs
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e4fd0ff15a
update swing to shuttle
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1 hónapja%!(EXTRA string=óta) |
LoaderFlowTestRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderInstallCRSRoutine.cs
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715c26c896
Revise LoaderInstallCRS and LoaderRotationAxisInterLock;
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1 hónapja%!(EXTRA string=óta) |
LoaderLeakFirstFlowTestRoutine.cs
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f7533a737b
Initialize
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2 hónapja%!(EXTRA string=óta) |
LoaderLoadRoutine.cs
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babcab54eb
add loader load routine,add Wago simulator DI/DO set ability
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1 hónapja%!(EXTRA string=óta) |
LoaderLotTrackUtil.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderPreTransferUnclampRoutine.cs
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f7533a737b
Initialize
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2 hónapja%!(EXTRA string=óta) |
LoaderReLeakFlowTestRoutine.cs
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f7533a737b
Initialize
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2 hónapja%!(EXTRA string=óta) |
LoaderRotationAxisInterLock.cs
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715c26c896
Revise LoaderInstallCRS and LoaderRotationAxisInterLock;
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1 hónapja%!(EXTRA string=óta) |
LoaderShuttleAxisInterLock.cs
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ca10919375
Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine;
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1 hónapja%!(EXTRA string=óta) |
LoaderSideBernoulliBladderRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderSideBernoulliN2PressureRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderSideCycleRoutine.cs
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f7533a737b
Initialize
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2 hónapja%!(EXTRA string=óta) |
LoaderSideDevice.cs
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d1f3ab2204
Revise BernoulliN2 action
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1 hónapja%!(EXTRA string=óta) |
LoaderSideDoorLockRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderSideTransBladderRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderSideTransHighRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderSideUnloadVacuumLevelCheckRoutine.cs
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f7533a737b
Initialize
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2 hónapja%!(EXTRA string=óta) |
LoaderSideVacuumAndLevelCheckRoutineRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderSideVacuumLevelCheckRoutine.cs
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7cd95698ba
Add Robot Wafer display in OperationOverView and EfemView; Modify logs in VacuumLevelCheckRoutine;
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1 hónapja%!(EXTRA string=óta) |
LoaderSideVacuumRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderSideWhBladderRoutine.cs
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31c26804e6
add Festo Communication Protocol
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2 hónapja%!(EXTRA string=óta) |
LoaderTiltAxisInterLock.cs
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d6ea09db69
revise wago simulator
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1 hónapja%!(EXTRA string=óta) |
LoaderUnloadRoutine.cs
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ca10919375
Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine;
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1 hónapja%!(EXTRA string=óta) |