niuyx 7cd95698ba Add Robot Wafer display in OperationOverView and EfemView; Modify logs in VacuumLevelCheckRoutine; 1 ay önce
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LoaderCRSAxisInterLock.cs d6ea09db69 revise wago simulator 1 ay önce
LoaderCommonDevice.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderCommonWaferHolderSideClampRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderDeviceTimer.cs e4fd0ff15a update swing to shuttle 1 ay önce
LoaderFlowTestRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderInstallCRSRoutine.cs 715c26c896 Revise LoaderInstallCRS and LoaderRotationAxisInterLock; 1 ay önce
LoaderLeakFirstFlowTestRoutine.cs f7533a737b Initialize 2 ay önce
LoaderLoadRoutine.cs babcab54eb add loader load routine,add Wago simulator DI/DO set ability 1 ay önce
LoaderLotTrackUtil.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderPreTransferUnclampRoutine.cs f7533a737b Initialize 2 ay önce
LoaderReLeakFlowTestRoutine.cs f7533a737b Initialize 2 ay önce
LoaderRotationAxisInterLock.cs 715c26c896 Revise LoaderInstallCRS and LoaderRotationAxisInterLock; 1 ay önce
LoaderShuttleAxisInterLock.cs ca10919375 Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine; 1 ay önce
LoaderSideBernoulliBladderRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderSideBernoulliN2PressureRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderSideCycleRoutine.cs f7533a737b Initialize 2 ay önce
LoaderSideDevice.cs d1f3ab2204 Revise BernoulliN2 action 1 ay önce
LoaderSideDoorLockRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderSideTransBladderRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderSideTransHighRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderSideUnloadVacuumLevelCheckRoutine.cs f7533a737b Initialize 2 ay önce
LoaderSideVacuumAndLevelCheckRoutineRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderSideVacuumLevelCheckRoutine.cs 7cd95698ba Add Robot Wafer display in OperationOverView and EfemView; Modify logs in VacuumLevelCheckRoutine; 1 ay önce
LoaderSideVacuumRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderSideWhBladderRoutine.cs 31c26804e6 add Festo Communication Protocol 2 ay önce
LoaderTiltAxisInterLock.cs d6ea09db69 revise wago simulator 1 ay önce
LoaderUnloadRoutine.cs ca10919375 Modify LoaderRotationAxisInterLock and LoaderShuttleAxisInterLock; Add LoaderUnloadRoutine and LoaderInstallCRSRoutine; 1 ay önce