 chenkui
|
0b609ee2cd
add EFEM DoorLocked signal
|
vor 2 Monaten |
|
chenkui
|
171e04deeb
update efem
|
vor 3 Monaten |
 niuyx
|
ea1b590024
Modify Prewet RunRecipeRoutine and KeepWetRoutine; Revise SRD Bugs;
|
vor 3 Monaten |
 chenzk
|
a2948247a7
revise reservoir pump structure
|
vor 3 Monaten |
|
chenzk
|
fa59a95e23
revise ph config
|
vor 3 Monaten |
|
chenzk
|
e7f0ca1e68
revise robot cycle bug
|
vor 3 Monaten |
|
chenkui
|
1993396b13
update install crs routine
|
vor 3 Monaten |
|
chenkui
|
c525a0bcf3
update efem vacuum
|
vor 4 Monaten |
|
niuyx
|
662974038d
Modify SrdRecipeView, PrewetHomePage; Modify galil Home step; Add Prewet simulator;
|
vor 4 Monaten |
|
chenzk
|
2b887d9e15
add reservoir regulate pump
|
vor 4 Monaten |
|
chenzk
|
8714d1f457
revise reservoir config
|
vor 4 Monaten |
|
niuyx
|
69d4e6919b
Add SRD UnloaderRoutine、ChuckATMRoutine; Modify EfemView;
|
vor 4 Monaten |
|
chenzk
|
dce33ff7d5
revise reservoir/metal
|
vor 4 Monaten |
|
chenzk
|
9a000dbe19
revise wago simulator
|
vor 4 Monaten |
|
niuyx
|
48517b7d99
Add SRDLiftUpRoutine; Revise IO ModuleIOCfg.xml and SRD UI; Add SRD related Simulator;
|
vor 4 Monaten |
|
chenzk
|
3705df9310
add rinse run recipe
|
vor 4 Monaten |
|
niuyx
|
c7c6f6cccc
Modify SRD UI; Add SRD related Operation;
|
vor 4 Monaten |
|
niuyx
|
fb043274f4
Modify SRD related ModuleIO and variable; Revise fwdLimit display of transporter;
|
vor 4 Monaten |
|
niuyx
|
0c701b0226
Modify TransporterInterLock, TransporterPickUpFromRoutine; Add Transporter IO variable; Modify Transporter UI;
|
vor 4 Monaten |
|
chenkui
|
4c2922bfe9
update puf interlock
|
vor 4 Monaten |
|
chenkui
|
478aa5ec7f
update puf view
|
vor 4 Monaten |
|
chenkui
|
371876b350
add robot map routine
|
vor 5 Monaten |
|
chenkui
|
388b234daf
add X8 EfemRobot
|
vor 5 Monaten |
|
chenkui
|
f7533a737b
Initialize
|
vor 6 Monaten |
