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@@ -1,74 +1,99 @@
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<?xml version="1.0" encoding="utf-8"?>
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<BeckhoffModuleIOCfg xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
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- <Module Name="PUF1">
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- <IO Name="PUF1.ChuckAVac" IOName="r_DPUF_A_CHUCK_A_VAC" />
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- <IO Name="PUF1.ChuckBVac" IOName="r_DPUF_A_CHUCK_B_VAC" />
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- <IO Name="PUF1.ChuckARelease" IOName="c_DPUF_A_CHUCK_A_RELEASE" />
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- <IO Name="PUF1.ChuckBRelease" IOName="c_DPUF_A_CHUCK_B_RELEASE" />
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- <IO Name="PUF1.DistanceSensor1" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_1" />
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- <IO Name="PUF1.DistanceSensor2" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_2" />
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- </Module>
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- <Module Name="PUF2">
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- <IO Name="PUF2.ChuckAVac" IOName="r_DPUF_B_CHUCK_A_VAC" />
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- <IO Name="PUF2.ChuckBVac" IOName="r_DPUF_B_CHUCK_B_VAC" />
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- <IO Name="PUF2.ChuckARelease" IOName="c_DPUF_B_CHUCK_A_RELEASE" />
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- <IO Name="PUF2.ChuckBRelease" IOName="c_DPUF_B_CHUCK_B_RELEASE" />
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- <IO Name="PUF2.DistanceSensor1" IOName="r_DPUF_B_CHUCK_A_WFER_SNS_1" />
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- <IO Name="PUF2.DistanceSensor2" IOName="r_DPUF_B_CHUCK_A_WFER_SNS_2" />
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- </Module>
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- <Module Name="Loader1">
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- <IO Name="Loader1.SideA.WaferPresent" IOName="r_LoaderA_Wafer_Present" />
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- <IO Name="Loader1.SideA.DoorUnlock" IOName="c_LOADERA_DOOR_UNLOCK" />
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- <IO Name="Loader1.SideA.DoorUpperLocked" IOName="r_LOADERA_DOOR_UPPER_LOCKED" />
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- <IO Name="Loader1.SideA.DoorUpperUnlocked" IOName="r_LOADERA_DOOR_UPPER_UNLOCKED" />
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- <IO Name="Loader1.SideA.DoorLowerLocked" IOName="r_LOADERA_DOOR_LOWER_LOCKED" />
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- <IO Name="Loader1.SideA.DoorLowerUnlocked" IOName="r_LOADERA_DOOR_LOWER_UNLOCKED" />
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- <IO Name="Loader1.SideA.TransRetracted" IOName="r_LOADERA_TRANSLATION_RETRACTED" />
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- <IO Name="Loader1.SideA.BernoulliExtended" IOName="r_LOADERA_BERNOULLI_EXTENDED" />
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- <IO Name="Loader1.SideA.CRSVacuumValue" IOName="r_LoaderA_LS_Vacuum_anlg" />
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- <IO Name="Loader1.SideA.WHBladderPressure" IOName="r_LOADERA_WS_BLADDER_PRESSURE" />
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- <IO Name="Loader1.SideA.TransPressure" IOName="r_LOADERA_TRANSLATION_PRESSURE" />
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- <IO Name="Loader1.SideA.BernoulliPressure" IOName="r_LOADERA_BERNOULLI_PRESSURE" />
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- <IO Name="Loader1.SideA.BernoulliBladderPressure" IOName="r_LOADERA_CHUCK_BLADDER" />
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- <IO Name="Loader1.SideA.CRSVacuum" IOName="c_LoaderA_LS_Vacuum" />
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- <IO Name="Loader1.SideA.WHBladder" IOName="c_LOADERA_WS_BLADDER" />
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- <IO Name="Loader1.SideA.TransBladder" IOName="c_LOADERA_TRANS_BLADDER" />
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- <IO Name="Loader1.SideA.TransHigh" IOName="c_LOADERA_TRANS_HIGH" />
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- <IO Name="Loader1.SideA.BernoulliBladder" IOName="c_LOADERA_BERNOULLI_BLADDER" />
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- <IO Name="Loader1.SideA.BernoulliN2" IOName="c_LOADERA_BERNOULLI_N2" />
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- <IO Name="Loader1.SideA.BernoulliN2Second" IOName="c_LOADERA_BERNOULLI_N2_SECOND" />
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- <IO Name="Loader1.SideB.WaferPresent" IOName="r_LoaderB_Wafer_Present" />
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- <IO Name="Loader1.SideB.DoorUpperLocked" IOName="r_LOADERB_DOOR_UPPER_LOCKED" />
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- <IO Name="Loader1.SideB.DoorUpperUnlocked" IOName="r_LOADERB_DOOR_UPPER_UNLOCKED" />
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- <IO Name="Loader1.SideB.DoorLowerLocked" IOName="r_LOADERB_DOOR_LOWER_LOCKED" />
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- <IO Name="Loader1.SideB.DoorLowerUnlocked" IOName="r_LOADERB_DOOR_LOWER_UNLOCKED" />
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- <IO Name="Loader1.SideB.TransRetracted" IOName="r_LOADERB_TRANSLATION_RETRACTED" />
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- <IO Name="Loader1.SideB.BernoulliExtended" IOName="r_LOADERB_BERNOULLI_EXTENDED" />
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- <IO Name="Loader1.SideB.CRSVacuumValue" IOName="r_LoaderB_LS_Vacuum_anlg" />
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- <IO Name="Loader1.SideB.WHBladderPressure" IOName="r_LOADERB_WS_BLADDER_PRESSURE" />
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- <IO Name="Loader1.SideB.TransPressure" IOName="r_LOADERB_TRANSLATION_PRESSURE" />
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- <IO Name="Loader1.SideB.BernoulliPressure" IOName="r_LOADERB_BERNOULLI_PRESSURE" />
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- <IO Name="Loader1.SideB.BernoulliBladderPressure" IOName="r_LOADERB_CHUCK_BLADDER" />
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- <IO Name="Loader1.SideB.DoorUnlock" IOName="c_LOADERB_DOOR_UNLOCK" />
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- <IO Name="Loader1.SideB.CRSVacuum" IOName="c_LoaderB_LS_Vacuum" />
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- <IO Name="Loader1.SideB.WHBladder" IOName="c_LOADERB_WS_BLADDER" />
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- <IO Name="Loader1.SideB.TransBladder" IOName="c_LOADERB_TRANS_BLADDER" />
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- <IO Name="Loader1.SideB.TransHigh" IOName="c_LOADERB_TRANS_HIGH" />
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- <IO Name="Loader1.SideB.BernoulliBladder" IOName="c_LOADERB_BERNOULLI_BLADDER" />
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- <IO Name="Loader1.SideB.BernoulliN2" IOName="c_LOADERB_BERNOULLI_N2" />
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- <IO Name="Loader1.SideB.BernoulliN2Second" IOName="c_LOADERB_BERNOULLI_N2_SECOND" />
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- <IO Name="Loader1.WaferHolderPresent" IOName="r_Cathode_Present" />
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- <IO Name="Loader1.DripTrayFluid" IOName="r_DRIP_TRAY_FLUID_DETECTION" />
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- <IO Name="Loader1.WaferHolderClamp" IOName="c_Cathode_Clamp" />
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- <IO Name="Loader1.WSSideABClamp" IOName="c_WAFER_HOLDER_CLAMPED" />
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- <IO Name="Loader1.SideAWaferHolderClamp" IOName="r_LOADERA_WS_LOCKED" />
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- <IO Name="Loader1.SideBWaferHolderClamp" IOName="r_LOADERB_WS_LOCKED" />
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- <IO Name="Loader1.LeakFlow" IOName="r_LOADER_GasFlowSensor_FLOW" />
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- <IO Name="Loader1.LeakVacuumValue" IOName="r_LOADER_GasFlowSensor_VACUUM" />
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- <IO Name="Loader1.LeakFlowClamp" IOName="c_Flow_Test_Clamp" />
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- <IO Name="Loader1.LeakVacuum" IOName="c_VACUUM_TEST" />
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- </Module>
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- <Module Name="Facilities">
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+ <Module Name="LP1">
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+ <IO Name="LP1.Cassete200Present" IOName="r_Cassette_1_200"/>
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+ <IO Name="LP1.Cassete150Present" IOName="r_Cassette_1_150"/>
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+ <IO Name="LP1.Cassete100Present" IOName="r_Cassette_1_100"/>
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+ </Module>
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+ <Module Name="LP2">
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+ <IO Name="LP2.Cassete200Present" IOName="r_Cassette_2_200"/>
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+ <IO Name="LP2.Cassete150Present" IOName="r_Cassette_2_150"/>
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+ <IO Name="LP2.Cassete100Present" IOName="r_Cassette_2_100"/>
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+ </Module>
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+ <Module Name="LP3">
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+ <IO Name="LP3.Cassete200Present" IOName="r_Cassette_3_200"/>
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+ <IO Name="LP3.Cassete150Present" IOName="r_Cassette_3_150"/>
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+ <IO Name="LP3.Cassete100Present" IOName="r_Cassette_3_100"/>
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+ </Module>
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+ <Module Name="Dummy1">
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+ <IO Name="Dummy1.Cassete200Present" IOName="r_Dummy_1_200"/>
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+ <IO Name="Dummy1.Cassete150Present" IOName="r_Dummy_1_150"/>
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+ <IO Name="Dummy1.Cassete100Present" IOName="r_Dummy_1_100"/>
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+ </Module>
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+ <Module Name="Dummy2">
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+ <IO Name="Dummy2.Cassete200Present" IOName="r_Dummy_2_200"/>
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+ <IO Name="Dummy2.Cassete150Present" IOName="r_Dummy_2_150"/>
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+ <IO Name="Dummy2.Cassete100Present" IOName="r_Dummy_2_100"/>
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+ </Module>
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+ <Module Name="PUF1">
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+ <IO Name="PUF1.ChuckAVac" IOName="r_DPUF_A_CHUCK_A_VAC" />
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+ <IO Name="PUF1.ChuckBVac" IOName="r_DPUF_A_CHUCK_B_VAC" />
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+ <IO Name="PUF1.ChuckARelease" IOName="c_DPUF_A_CHUCK_A_RELEASE" />
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+ <IO Name="PUF1.ChuckBRelease" IOName="c_DPUF_A_CHUCK_B_RELEASE" />
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+ <IO Name="PUF1.DistanceSensor1" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_1" />
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+ <IO Name="PUF1.DistanceSensor2" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_2" />
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+ </Module>
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+ <Module Name="PUF2">
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+ <IO Name="PUF2.ChuckAVac" IOName="r_DPUF_B_CHUCK_A_VAC" />
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+ <IO Name="PUF2.ChuckBVac" IOName="r_DPUF_B_CHUCK_B_VAC" />
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+ <IO Name="PUF2.ChuckARelease" IOName="c_DPUF_B_CHUCK_A_RELEASE" />
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+ <IO Name="PUF2.ChuckBRelease" IOName="c_DPUF_B_CHUCK_B_RELEASE" />
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+ <IO Name="PUF2.DistanceSensor1" IOName="r_DPUF_B_CHUCK_A_WFER_SNS_1" />
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+ <IO Name="PUF2.DistanceSensor2" IOName="r_DPUF_B_CHUCK_A_WFER_SNS_2" />
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+ </Module>
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+ <Module Name="Loader1">
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+ <IO Name="Loader1.SideA.WaferPresent" IOName="r_LoaderA_Wafer_Present" />
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+ <IO Name="Loader1.SideA.DoorUnlock" IOName="c_LOADERA_DOOR_UNLOCK" />
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+ <IO Name="Loader1.SideA.DoorUpperLocked" IOName="r_LOADERA_DOOR_UPPER_LOCKED" />
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+ <IO Name="Loader1.SideA.DoorUpperUnlocked" IOName="r_LOADERA_DOOR_UPPER_UNLOCKED" />
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+ <IO Name="Loader1.SideA.DoorLowerLocked" IOName="r_LOADERA_DOOR_LOWER_LOCKED" />
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+ <IO Name="Loader1.SideA.DoorLowerUnlocked" IOName="r_LOADERA_DOOR_LOWER_UNLOCKED" />
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+ <IO Name="Loader1.SideA.TransRetracted" IOName="r_LOADERA_TRANSLATION_RETRACTED" />
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+ <IO Name="Loader1.SideA.BernoulliExtended" IOName="r_LOADERA_BERNOULLI_EXTENDED" />
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+ <IO Name="Loader1.SideA.CRSVacuumValue" IOName="r_LoaderA_LS_Vacuum_anlg" />
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+ <IO Name="Loader1.SideA.WHBladderPressure" IOName="r_LOADERA_WS_BLADDER_PRESSURE" />
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+ <IO Name="Loader1.SideA.TransPressure" IOName="r_LOADERA_TRANSLATION_PRESSURE" />
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+ <IO Name="Loader1.SideA.BernoulliPressure" IOName="r_LOADERA_BERNOULLI_PRESSURE" />
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+ <IO Name="Loader1.SideA.BernoulliBladderPressure" IOName="r_LOADERA_CHUCK_BLADDER" />
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+ <IO Name="Loader1.SideA.CRSVacuum" IOName="c_LoaderA_LS_Vacuum" />
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+ <IO Name="Loader1.SideA.WHBladder" IOName="c_LOADERA_WS_BLADDER" />
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+ <IO Name="Loader1.SideA.TransBladder" IOName="c_LOADERA_TRANS_BLADDER" />
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+ <IO Name="Loader1.SideA.TransHigh" IOName="c_LOADERA_TRANS_HIGH" />
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+ <IO Name="Loader1.SideA.BernoulliBladder" IOName="c_LOADERA_BERNOULLI_BLADDER" />
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+ <IO Name="Loader1.SideA.BernoulliN2" IOName="c_LOADERA_BERNOULLI_N2" />
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+ <IO Name="Loader1.SideA.BernoulliN2Second" IOName="c_LOADERA_BERNOULLI_N2_SECOND" />
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+ <IO Name="Loader1.SideB.WaferPresent" IOName="r_LoaderB_Wafer_Present" />
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+ <IO Name="Loader1.SideB.DoorUpperLocked" IOName="r_LOADERB_DOOR_UPPER_LOCKED" />
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+ <IO Name="Loader1.SideB.DoorUpperUnlocked" IOName="r_LOADERB_DOOR_UPPER_UNLOCKED" />
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+ <IO Name="Loader1.SideB.DoorLowerLocked" IOName="r_LOADERB_DOOR_LOWER_LOCKED" />
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+ <IO Name="Loader1.SideB.DoorLowerUnlocked" IOName="r_LOADERB_DOOR_LOWER_UNLOCKED" />
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+ <IO Name="Loader1.SideB.TransRetracted" IOName="r_LOADERB_TRANSLATION_RETRACTED" />
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+ <IO Name="Loader1.SideB.BernoulliExtended" IOName="r_LOADERB_BERNOULLI_EXTENDED" />
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+ <IO Name="Loader1.SideB.CRSVacuumValue" IOName="r_LoaderB_LS_Vacuum_anlg" />
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+ <IO Name="Loader1.SideB.WHBladderPressure" IOName="r_LOADERB_WS_BLADDER_PRESSURE" />
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+ <IO Name="Loader1.SideB.TransPressure" IOName="r_LOADERB_TRANSLATION_PRESSURE" />
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+ <IO Name="Loader1.SideB.BernoulliPressure" IOName="r_LOADERB_BERNOULLI_PRESSURE" />
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+ <IO Name="Loader1.SideB.BernoulliBladderPressure" IOName="r_LOADERB_CHUCK_BLADDER" />
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+ <IO Name="Loader1.SideB.DoorUnlock" IOName="c_LOADERB_DOOR_UNLOCK" />
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+ <IO Name="Loader1.SideB.CRSVacuum" IOName="c_LoaderB_LS_Vacuum" />
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+ <IO Name="Loader1.SideB.WHBladder" IOName="c_LOADERB_WS_BLADDER" />
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+ <IO Name="Loader1.SideB.TransBladder" IOName="c_LOADERB_TRANS_BLADDER" />
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+ <IO Name="Loader1.SideB.TransHigh" IOName="c_LOADERB_TRANS_HIGH" />
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+ <IO Name="Loader1.SideB.BernoulliBladder" IOName="c_LOADERB_BERNOULLI_BLADDER" />
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+ <IO Name="Loader1.SideB.BernoulliN2" IOName="c_LOADERB_BERNOULLI_N2" />
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+ <IO Name="Loader1.SideB.BernoulliN2Second" IOName="c_LOADERB_BERNOULLI_N2_SECOND" />
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+ <IO Name="Loader1.WaferHolderPresent" IOName="r_Cathode_Present" />
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+ <IO Name="Loader1.DripTrayFluid" IOName="r_DRIP_TRAY_FLUID_DETECTION" />
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+ <IO Name="Loader1.WaferHolderClamp" IOName="c_Cathode_Clamp" />
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+ <IO Name="Loader1.WSSideABClamp" IOName="c_WAFER_HOLDER_CLAMPED" />
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+ <IO Name="Loader1.SideAWaferHolderClamp" IOName="r_LOADERA_WS_LOCKED" />
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+ <IO Name="Loader1.SideBWaferHolderClamp" IOName="r_LOADERB_WS_LOCKED" />
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+ <IO Name="Loader1.LeakFlow" IOName="r_LOADER_GasFlowSensor_FLOW" />
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+ <IO Name="Loader1.LeakVacuumValue" IOName="r_LOADER_GasFlowSensor_VACUUM" />
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+ <IO Name="Loader1.LeakFlowClamp" IOName="c_Flow_Test_Clamp" />
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+ <IO Name="Loader1.LeakVacuum" IOName="c_VACUUM_TEST" />
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+ </Module>
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+ <Module Name="Facilities">
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<IO Name="Facilities.N2Enable" IOName="c_N2_ENABLE"/>
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<IO Name="Facilities.CDAEnable" IOName="c_CDA_ENABLE"/>
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<IO Name="Facilities.ExternalCDAEnable" IOName="c_EXTERNAL_CDA_ENABLE"/>
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@@ -102,8 +127,8 @@
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<IO Name="Facilities.ArsFluidDetect" IOName="r_SLIPSTREAM_FLUID_PRESENT"/>
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<IO Name="Facilities.ProcessFluidDetect" IOName="r_CONTAINMENT_FLUID"/>
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<IO Name="Facilities.SampleFluidDetect" IOName="r_SAMPLE_SYS_FLUID_PRESENT"/>
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- </Module>
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- <Module Name="Transporter2">
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+ </Module>
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+ <Module Name="Transporter2">
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<IO Name="Transporter2.Unlock" IOName="c_ENCLOSED_TRANSPORT2_UNLOCK_SOLENOID"/>
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<IO Name="Transporter2.Locked1" IOName="r_ENCLOSED_TRANSPORT2_WS_LOCKED_1"/>
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<IO Name="Transporter2.Locked2" IOName="r_ENCLOSED_TRANSPORT2_WS_LOCKED_2"/>
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@@ -119,8 +144,8 @@
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<IO Name="Transporter2.ReadyToLock2" IOName="r_ENCLOSED_TRANSPORT2_WS_READY_TO_LOCK_2"/>
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<IO Name="Transporter2.WhPresent1" IOName="r_ENCLOSED_TRANSPORT2_WS_PRESENT_1"/>
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<IO Name="Transporter2.WhPresent2" IOName="r_ENCLOSED_TRANSPORT2_WS_PRESENT_2"/>
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- </Module>
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- <Module Name="Transporter1">
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+ </Module>
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+ <Module Name="Transporter1">
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<IO Name="Transporter1.Unlock" IOName="c_ENCLOSED_TRANSPORT_UNLOCK_SOLENOID"/>
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<IO Name="Transporter1.Unlocked1" IOName="r_ENCLOSED_TRANSPORT_WS_UNLOCKED_1"/>
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<IO Name="Transporter1.Locked2" IOName="r_ENCLOSED_TRANSPORT_WS_LOCKED_2"/>
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@@ -136,12 +161,12 @@
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<IO Name="Transporter1.ReadyToLock2" IOName="r_ENCLOSED_TRANSPORT_WS_READY_TO_LOCK_2"/>
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<IO Name="Transporter1.WhPresent1" IOName="r_ENCLOSED_TRANSPORT_WS_PRESENT_1"/>
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<IO Name="Transporter1.WhPresent2" IOName="r_ENCLOSED_TRANSPORT_WS_PRESENT_2"/>
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- </Module>
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- <Module Name="SRD">
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+ </Module>
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+ <Module Name="SRD">
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<IO Name="SRD.FluidContainment" IOName="r_SRD_FLUID_CONTAINMENT"/>
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<IO Name="SRD.WaterPressure" IOName="r_SRD_SUPPLY_WATER_PRESS"/>
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- </Module>
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- <Module Name="SRD1">
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+ </Module>
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+ <Module Name="SRD1">
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<IO Name="SRD1.VacuumValue" IOName="r_SRD1_CHUCK_VACUUM_anlg"/>
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<IO Name="SRD1.WaferPresence" IOName="r_SRD1_WAFER_PRESENT_anlg"/>
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<IO Name="SRD1.DoorClose" IOName="c_SRD1_Shutter_Close"/>
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@@ -151,8 +176,8 @@
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<IO Name="SRD1.WaterBelow" IOName="c_SRD1_Water_Below_Wafer"/>
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<IO Name="SRD1.ChuckVacuum" IOName="c_SRD1_CHUCK_VACUUM"/>
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|
|
<IO Name="SRD1.ExhaustOn" IOName="c_SRD1_Exhaust_Fan_On"/>
|
|
|
- </Module>
|
|
|
- <Module Name="SRD2">
|
|
|
+ </Module>
|
|
|
+ <Module Name="SRD2">
|
|
|
<IO Name="SRD2.VacuumValue" IOName="r_SRD2_CHUCK_VACUUM_anlg"/>
|
|
|
<IO Name="SRD2.WaferPresence" IOName="r_SRD2_WAFER_PRESENT_anlg"/>
|
|
|
<IO Name="SRD2.DoorClose" IOName="c_SRD2_Shutter_Close"/>
|
|
@@ -162,18 +187,18 @@
|
|
|
<IO Name="SRD2.WaterBelow" IOName="c_SRD2_Water_Below_Wafer"/>
|
|
|
<IO Name="SRD2.ChuckVacuum" IOName="c_SRD2_CHUCK_VACUUM"/>
|
|
|
<IO Name="SRD2.ExhaustOn" IOName="c_SRD2_Exhaust_Fan_On"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Dryer1">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Dryer1">
|
|
|
<IO Name="Dryer1.ExhaustPressure" IOName="r_HVD_1_ANALOG"/>
|
|
|
<IO Name="Dryer1.PowerControl" IOName="c_HVD_1_ENABLE"/>
|
|
|
<IO Name="Dryer1.BlowerHigh" IOName="c_HVD_1_HIGH"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Dryer2">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Dryer2">
|
|
|
<IO Name="Dryer2.ExhaustPressure" IOName="r_HVD_2_ANALOG"/>
|
|
|
<IO Name="Dryer2.PowerControl" IOName="c_HVD_2_ENABLE"/>
|
|
|
<IO Name="Dryer2.BlowerHigh" IOName="c_HVD_2_HIGH"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Prewet1">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Prewet1">
|
|
|
<IO Name="Prewet1.PumpValve" IOName="c_SPW1_LEV_PUMP_VALVE"/>
|
|
|
<IO Name="Prewet1.PumpCurrent" IOName="r_SPW1_LEV_PUMP_CURRENT"/>
|
|
|
<IO Name="Prewet1.PumpEnable" IOName="c_SPW1_LEV_PUMP_ENB"/>
|
|
@@ -181,8 +206,8 @@
|
|
|
<IO Name="Prewet1.PumpFlow" IOName="r_SPW1_LEV_PUMP_FLOW"/>
|
|
|
<IO Name="Prewet1.PumpPressure" IOName="r_SPW1_LEV_PUMP_PRES"/>
|
|
|
<IO Name="Prewet1.PumpSpeed" IOName="c_SPW1_LEV_PUMP_SPEED"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Safety">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Safety">
|
|
|
<IO Name="Safety.MainCommErr" IOName="r_Safety_ComErr"/>
|
|
|
<IO Name="Safety.LoaderPufCommErr" IOName="r_Safety_ComErr_LdrPuf"/>
|
|
|
<IO Name="Safety.SrdCommErr" IOName="r_Safety_ComErr_Srd"/>
|
|
@@ -266,66 +291,66 @@
|
|
|
<IO Name="Safety.ReservoirHighLevel" IOName="r_SAFETY_HIGH_LEVEL"/>
|
|
|
<IO Name="Safety.FluidEnableEdm" IOName="r_EXT_FLUID_ENABLE_EDM"/>
|
|
|
<IO Name="Safety.SRDArmReset" IOName="c_Safety_SRD_Arm_Reset"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Rinse1">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Rinse1">
|
|
|
<IO Name="Rinse1.WaterLevel" IOName="r_QDRD1_WATER_LEVEL"/>
|
|
|
<IO Name="Rinse1.WaferHolderClamp" IOName="c_QDRD1_WS_CLAMP"/>
|
|
|
<IO Name="Rinse1.N2Valve" IOName="c_QDRD1_LO_PRESSURE"/>
|
|
|
<IO Name="Rinse1.FillValve" IOName="c_QDRD1_DI_FILL"/>
|
|
|
<IO Name="Rinse1.DrainValve" IOName="c_QDRD1_DUMP"/>
|
|
|
<IO Name="Rinse1.WasteValve" IOName="c_QDRD1_MDRAIN"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Rinse2">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Rinse2">
|
|
|
<IO Name="Rinse2.WaterLevel" IOName="r_QDRD2_WATER_LEVEL"/>
|
|
|
<IO Name="Rinse2.WaferHolderClamp" IOName="c_QDRD2_WS_CLAMP"/>
|
|
|
<IO Name="Rinse2.N2Valve" IOName="c_QDRD2_LO_PRESSURE"/>
|
|
|
<IO Name="Rinse2.FillValve" IOName="c_QDRD2_DI_FILL"/>
|
|
|
<IO Name="Rinse2.DrainValve" IOName="c_QDRD2_DUMP"/>
|
|
|
<IO Name="Rinse2.WasteValve" IOName="c_QDRD2_MDRAIN"/>
|
|
|
- </Module>
|
|
|
+ </Module>
|
|
|
|
|
|
- <Module Name="Rinse3">
|
|
|
+ <Module Name="Rinse3">
|
|
|
<IO Name="Rinse3.WaterLevel" IOName="r_QDRD3_WATER_LEVEL"/>
|
|
|
<IO Name="Rinse3.WaferHolderClamp" IOName="c_QDRD3_WS_CLAMP"/>
|
|
|
<IO Name="Rinse3.N2Valve" IOName="c_QDRD3_LO_PRESSURE"/>
|
|
|
<IO Name="Rinse3.FillValve" IOName="c_QDRD3_DI_FILL"/>
|
|
|
<IO Name="Rinse3.DrainValve" IOName="c_QDRD3_DUMP"/>
|
|
|
<IO Name="Rinse3.WasteValve" IOName="c_QDRD3_MDRAIN"/>
|
|
|
- </Module>
|
|
|
+ </Module>
|
|
|
|
|
|
- <Module Name="Rinse4">
|
|
|
+ <Module Name="Rinse4">
|
|
|
<IO Name="Rinse4.WaterLevel" IOName="r_QDRD4_WATER_LEVEL"/>
|
|
|
<IO Name="Rinse4.WaferHolderClamp" IOName="c_QDRD4_WS_CLAMP"/>
|
|
|
<IO Name="Rinse4.N2Valve" IOName="c_QDRD4_LO_PRESSURE"/>
|
|
|
<IO Name="Rinse4.FillValve" IOName="c_QDRD4_DI_FILL"/>
|
|
|
<IO Name="Rinse4.DrainValve" IOName="c_QDRD4_DUMP"/>
|
|
|
<IO Name="Rinse4.WasteValve" IOName="c_QDRD4_MDRAIN"/>
|
|
|
- </Module>
|
|
|
+ </Module>
|
|
|
|
|
|
- <Module Name="Rinse5">
|
|
|
+ <Module Name="Rinse5">
|
|
|
<IO Name="Rinse5.WaterLevel" IOName="r_QDRD5_WATER_LEVEL"/>
|
|
|
<IO Name="Rinse5.WaferHolderClamp" IOName="c_QDRD5_WS_CLAMP"/>
|
|
|
<IO Name="Rinse5.N2Valve" IOName="c_QDRD5_LO_PRESSURE"/>
|
|
|
<IO Name="Rinse5.FillValve" IOName="c_QDRD5_DI_FILL"/>
|
|
|
<IO Name="Rinse5.DrainValve" IOName="c_QDRD5_DUMP"/>
|
|
|
<IO Name="Rinse5.WasteValve" IOName="c_QDRD5_MDRAIN"/>
|
|
|
- </Module>
|
|
|
+ </Module>
|
|
|
|
|
|
- <Module Name="Rinse6">
|
|
|
+ <Module Name="Rinse6">
|
|
|
<IO Name="Rinse6.WaterLevel" IOName="r_QDRD6_WATER_LEVEL"/>
|
|
|
<IO Name="Rinse6.WaferHolderClamp" IOName="c_QDRD6_WS_CLAMP"/>
|
|
|
<IO Name="Rinse6.N2Valve" IOName="c_QDRD6_LO_PRESSURE"/>
|
|
|
<IO Name="Rinse6.FillValve" IOName="c_QDRD6_DI_FILL"/>
|
|
|
<IO Name="Rinse6.DrainValve" IOName="c_QDRD6_DUMP"/>
|
|
|
<IO Name="Rinse6.WasteValve" IOName="c_QDRD6_MDRAIN"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Reservoir">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Reservoir">
|
|
|
<IO Name="Reservoir.DiReplenFlow" IOName="r_DIREPLEN_FLOW"/>
|
|
|
<IO Name="Reservoir.HighLevel" IOName="r_RES_HIGH_LEVEL"/>
|
|
|
|
|
|
- </Module>
|
|
|
+ </Module>
|
|
|
|
|
|
- <Module Name="Reservoir1">
|
|
|
+ <Module Name="Reservoir1">
|
|
|
<IO Name="Reservoir1.EvaporatorLevel" IOName="r_DI_EVAPORATOR_LEVEL"/>
|
|
|
<IO Name="Reservoir1.CADiReplen" IOName="c_RES1_CA_DI_REPLEN"/>
|
|
|
<IO Name="Reservoir1.ANDiReplen" IOName="c_RES1_AN_DI_REPLEN"/>
|
|
@@ -356,8 +381,8 @@
|
|
|
<IO Name="Reservoir1.CDAFlowValve" IOName="c_RES1_DI_EVAP_FLOW_ENABLE"/>
|
|
|
<IO Name="Reservoir1.ANSampleFlow" IOName="c_RES1_AN_SAMPLE_FLOW_ENABLE"/>
|
|
|
<IO Name="Reservoir1.CASampleFlow" IOName="c_RES1_CA_SAMPLE_FLOW_ENABLE"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Reservoir2">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Reservoir2">
|
|
|
<IO Name="Reservoir2.Flow" IOName="r_RES2_CMM_FLOW"/>
|
|
|
<IO Name="Reservoir2.DiReplen" IOName="c_RES2_DI_REPLEN"/>
|
|
|
<IO Name="Reservoir2.PHFlowValve" IOName="c_PH2_FLOW_VALVE"/>
|
|
@@ -369,8 +394,8 @@
|
|
|
<IO Name="Reservoir2.Replen2PumpSpeed" IOName="c_M3_REPLEN2_SPEED"/>
|
|
|
<IO Name="Reservoir2.Replen1Level" IOName="r_M3_REPLEN1_LEVEL"/>
|
|
|
<IO Name="Reservoir2.Replen2Level" IOName="r_M3_REPLEN2_LEVEL"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Reservoir3">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Reservoir3">
|
|
|
<IO Name="Reservoir3.CADiReplen" IOName="c_RES3_CA_DI_REPLEN"/>
|
|
|
<IO Name="Reservoir3.ANDiReplen" IOName="c_RES3_AN_DI_REPLEN"/>
|
|
|
<IO Name="Reservoir3.CAWaterLevel" IOName="r_RES3_CA_LEVEL_raw"/>
|
|
@@ -401,9 +426,9 @@
|
|
|
<IO Name="Reservoir3.ANTransferFlow" IOName="r_RES3_AN_TRANSFER_FLOW"/>
|
|
|
<IO Name="Reservoir3.ANSampleFlow" IOName="c_RES3_AN_SAMPLE_FLOW_ENABLE"/>
|
|
|
<IO Name="Reservoir3.CASampleFlow" IOName="c_RES3_CA_SAMPLE_FLOW_ENABLE"/>
|
|
|
- </Module>
|
|
|
+ </Module>
|
|
|
|
|
|
- <Module Name="Metal1">
|
|
|
+ <Module Name="Metal1">
|
|
|
<IO Name="Metal1.ANAPinEnable" IOName="c_CELL1_AN_A_PIN_ENABLE"/>
|
|
|
<IO Name="Metal1.ANBPinEnable" IOName="c_CELL1_AN_B_PIN_ENABLE"/>
|
|
|
<IO Name="Metal1.ANAPoutEnable" IOName="c_CELL1_AN_A_POUT_ENABLE"/>
|
|
@@ -414,8 +439,8 @@
|
|
|
<IO Name="Metal1.WHClamp" IOName="c_METAL1_WS_CLAMP_ON"/>
|
|
|
<IO Name="Metal1.WHUnclamp" IOName="c_METAL1_WS_CLAMP_OFF"/>
|
|
|
<IO Name="Metal1.CellFlowValve" IOName="c_CELL1_FLOW"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Metal2">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Metal2">
|
|
|
<IO Name="Metal2.ANAPinEnable" IOName="c_CELL2_AN_A_PIN_ENABLE"/>
|
|
|
<IO Name="Metal2.ANBPinEnable" IOName="c_CELL2_AN_B_PIN_ENABLE"/>
|
|
|
<IO Name="Metal2.ANAPoutEnable" IOName="c_CELL2_AN_A_POUT_ENABLE"/>
|
|
@@ -426,8 +451,8 @@
|
|
|
<IO Name="Metal2.WHClamp" IOName="c_METAL2_WS_CLAMP_ON"/>
|
|
|
<IO Name="Metal2.WHUnclamp" IOName="c_METAL2_WS_CLAMP_OFF"/>
|
|
|
<IO Name="Metal2.CellFlowValve" IOName="c_CELL2_FLOW"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Metal3">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Metal3">
|
|
|
<IO Name="Metal3.ANAPinEnable" IOName="c_CELL3_AN_A_PIN_ENABLE"/>
|
|
|
<IO Name="Metal3.ANBPinEnable" IOName="c_CELL3_AN_B_PIN_ENABLE"/>
|
|
|
<IO Name="Metal3.ANAPoutEnable" IOName="c_CELL3_AN_A_POUT_ENABLE"/>
|
|
@@ -438,20 +463,20 @@
|
|
|
<IO Name="Metal3.WHClamp" IOName="c_METAL3_WS_CLAMP_ON"/>
|
|
|
<IO Name="Metal3.WHUnclamp" IOName="c_METAL3_WS_CLAMP_OFF"/>
|
|
|
<IO Name="Metal3.CellFlowValve" IOName="c_CELL3_FLOW"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Metal4">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Metal4">
|
|
|
<IO Name="Metal4.CellFlow" IOName="r_PUMP4_FLOW"/>
|
|
|
<IO Name="Metal4.CellPump" IOName="c_METAL4_PUMP_ON"/>
|
|
|
<IO Name="Metal4.Circulation" IOName="c_METAL4_CIRCULATION"/>
|
|
|
<IO Name="Metal4.WaferHolderClamp" IOName="c_METAL4_WS_CLAMP"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Metal5">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Metal5">
|
|
|
<IO Name="Metal5.CellFlow" IOName="r_PUMP5_FLOW"/>
|
|
|
<IO Name="Metal5.CellPump" IOName="c_METAL5_PUMP_ON"/>
|
|
|
<IO Name="Metal5.Circulation" IOName="c_METAL5_CIRCULATION"/>
|
|
|
<IO Name="Metal5.WaferHolderClamp" IOName="c_METAL5_WS_CLAMP"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Metal6">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Metal6">
|
|
|
<IO Name="Metal6.ANAPinEnable" IOName="c_CELL6_AN_A_PIN_ENABLE"/>
|
|
|
<IO Name="Metal6.ANBPinEnable" IOName="c_CELL6_AN_B_PIN_ENABLE"/>
|
|
|
<IO Name="Metal6.ANAPoutEnable" IOName="c_CELL6_AN_A_POUT_ENABLE"/>
|
|
@@ -462,8 +487,8 @@
|
|
|
<IO Name="Metal6.WHClamp" IOName="c_METAL6_WS_CLAMP_ON"/>
|
|
|
<IO Name="Metal6.WHUnclamp" IOName="c_METAL6_WS_CLAMP_OFF"/>
|
|
|
<IO Name="Metal6.CellFlowValve" IOName="c_CELL6_FLOW"/>
|
|
|
- </Module>
|
|
|
- <Module Name="Metal7">
|
|
|
+ </Module>
|
|
|
+ <Module Name="Metal7">
|
|
|
<IO Name="Metal7.ANAPinEnable" IOName="c_CELL7_AN_A_PIN_ENABLE"/>
|
|
|
<IO Name="Metal7.ANBPinEnable" IOName="c_CELL7_AN_B_PIN_ENABLE"/>
|
|
|
<IO Name="Metal7.ANAPoutEnable" IOName="c_CELL7_AN_A_POUT_ENABLE"/>
|
|
@@ -474,5 +499,5 @@
|
|
|
<IO Name="Metal7.WHClamp" IOName="c_METAL7_WS_CLAMP_ON"/>
|
|
|
<IO Name="Metal7.WHUnclamp" IOName="c_METAL7_WS_CLAMP_OFF"/>
|
|
|
<IO Name="Metal7.CellFlowValve" IOName="c_CELL7_FLOW"/>
|
|
|
- </Module>
|
|
|
+ </Module>
|
|
|
</BeckhoffModuleIOCfg>
|