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@@ -67,7 +67,7 @@
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<DO Name="c_HVD_2_ENABLE" Address="531" Invert="false"/>
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</DOGroup>
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<DOGroup Name="N11">
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- <DO Name="\c_Door_Unlock" Address="532" Invert="false"/>
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+ <DO Name="c_Door_Unlock" Address="532" Invert="false"/>
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<DO Name="DO21" Address="533" Invert="false"/>
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</DOGroup>
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<DOGroup Name="N12">
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@@ -83,7 +83,7 @@
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<AI Name="r_HVD_2_ANALOG" Address="3" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
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<AI Name="r_LoaderA_LS_Vacuum_anlg" Address="4" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
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<AI Name="r_LoaderB_LS_Vacuum_anlg" Address="5" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
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- <AI Name="AI6" Address="6" DataType="short"/>
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+ <AI Name="r_EFEM_VACUUM" Address="6" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
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<AI Name="r_LOADER_GasFlowSensor_FLOW" Address="7" Scaling="0=3370, 500=17000" DataType="short"/>
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</AIGroup>
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<AIGroup Name="N2">
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@@ -96,11 +96,17 @@
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<AI Name="r_SPUF_VAC" Address="14" Scaling="1=0,5=-757.5" DataType="short"/>
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<AI Name="r_LOADER_GasFlowSensor_VACUUM" Address="15" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
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</AIGroup>
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+ <AIGroup Name="N3">
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+ <AI Name="r_SYSTEM_EXHAUST" Address="16" Scaling="0=0, 2=32767" DataType="short"/>
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+ <AI Name="AI17" Address="17" DataType="short"/>
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+ <AI Name="AI18" Address="18" DataType="short"/>
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+ <AI Name="AI19" Address="19" DataType="short"/>
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+ </AIGroup>
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</Ano_In>
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<Ano_Out>
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- <AOGroup Name="N3">
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- <AO Name="AO1" Address="512" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
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- <AO Name="AO2" Address="513" DataType="short"/>
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+ <AOGroup Name="N4">
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+ <AO Name="AO1" Address="512" DataType="short"/>
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+ <AO Name="A02" Address="513" DataType="short"/>
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<AO Name="AO3" Address="514" DataType="short"/>
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<AO Name="AO4" Address="515" DataType="short"/>
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<AO Name="AO5" Address="516" DataType="short"/>
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@@ -108,7 +114,7 @@
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<AO Name="AO7" Address="518" DataType="short"/>
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<AO Name="AO8" Address="519" DataType="short"/>
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</AOGroup>
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- <AOGroup Name="N4">
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+ <AOGroup Name="N5">
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<AO Name="AO9" Address="520" DataType="short"/>
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<AO Name="AO10" Address="521" DataType="short"/>
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<AO Name="AO11" Address="522" DataType="short"/>
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@@ -268,10 +274,10 @@
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</DOGroup>
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<DOGroup Name="28">
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<DO Name="c_METAL4_PUMP_ON" Address="550" Invert="false"/>
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- <DO Name="DO39" Address="551" Invert="false"/>
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+ <DO Name="c_RES1_POWER_ON" Address="551" Invert="false"/>
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</DOGroup>
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<DOGroup Name="29">
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- <DO Name="c_RES1_POWER_ON" Address="552" Invert="false"/>
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+ <DO Name="DO40" Address="552" Invert="false"/>
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<DO Name="DO41" Address="553" Invert="false"/>
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</DOGroup>
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</Dig_Out>
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@@ -290,20 +296,20 @@
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</AIGroup>
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<AIGroup Name="3">
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<AI Name="AI8" Address="8" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
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- <AI Name="r_SYSTEM_EXHAUST" Address="9" Scaling="0=0, 2=32767" DataType="short"/>
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+ <AI Name="AI9" Address="9" Scaling="0=0, 2=32767" DataType="short"/>
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<AI Name="r_PREWET_FLOW" Address="10" Scaling="0=3276.7,40=32767" DataType="short"/>
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<AI Name="r_DI_WATER_PRESSURE" Address="11" Scaling="0=0, 100=32767" DataType="short"/>
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</AIGroup>
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<AIGroup Name="4">
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- <AI Name="r_PUMP1_FLOW" Address="12" Scaling="0=3276.7,100=16383.5" DataType="short"/>
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+ <AI Name="r_PUMP1_FLOW" Address="12" Scaling="0=0,100=32767" DataType="short"/>
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<AI Name="AI13" Address="13" Scaling="0=3276.7,40=16383.5" DataType="short"/>
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- <AI Name="r_PUMP2_FLOW" Address="14" Scaling="0=3276.7,100=16383.5" DataType="short"/>
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+ <AI Name="r_PUMP2_FLOW" Address="14" Scaling="0=0,100=32767" DataType="short"/>
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<AI Name="AI15" Address="15" Scaling="0=3276.7,40=16383.5" DataType="short"/>
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</AIGroup>
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<AIGroup Name="5">
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- <AI Name="r_PUMP3_FLOW" Address="16" Scaling="0=3276.7,100=16383.5" DataType="short"/>
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+ <AI Name="r_PUMP3_FLOW" Address="16" Scaling="0=0,100=32767" DataType="short"/>
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<AI Name="AI17" Address="17" Scaling="0=3276.7,40=16383.5" DataType="short"/>
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- <AI Name="r_PUMP4_FLOW" Address="18" Scaling="0=3276.7,100=16383.5" DataType="short"/>
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+ <AI Name="r_PUMP4_FLOW" Address="18" Scaling="0=0,100=32767" DataType="short"/>
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<AI Name="AI19" Address="19" Scaling="0=3276.7,40=16383.5" DataType="short"/>
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</AIGroup>
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<AIGroup Name="6">
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@@ -316,7 +322,7 @@
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<AI Name="AI24" Address="24" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
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<AI Name="AI25" Address="25" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
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<AI Name="AI26" Address="26" Scaling="13=0,150=32767" DataType="short"/>
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- <AI Name="r_MBS3_FLOW" Address="27" Scaling="0=0,20=32767" DataType="short"/>
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+ <AI Name="r_MBS3_FLOW" Address="27" Scaling="0=0,40=32767" DataType="short"/>
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</AIGroup>
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<AIGroup Name="8">
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<AI Name="r_QDRD1_WATER_LEVEL" Address="28" Scaling="0=0,100=32767" DataType="short"/>
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