|
@@ -33,276 +33,276 @@
|
|
|
<IO Name="LightTower.BlueLight" IOName="c_Pole_Blue"/>
|
|
|
</Module>
|
|
|
<Module Name="PUF1">
|
|
|
- <IO Name="PUF1.Chuck" IOName="c_PUF_CHUCK" />
|
|
|
- <IO Name="PUF1.SideAChuckOut" IOName="r_PUF_A_CHUCK_OUT" />
|
|
|
- <IO Name="PUF1.SideAChuckIn" IOName="r_PUF_A_CHUCK_IN" />
|
|
|
- <IO Name="PUF1.SideBChuckOut" IOName="r_PUF_B_CHUCK_OUT" />
|
|
|
- <IO Name="PUF1.SideBChuckIn" IOName="r_PUF_B_CHUCK_IN" />
|
|
|
- <IO Name="PUF1.ChuckAVac" IOName="r_DPUF_A_CHUCK_A_VAC" />
|
|
|
- <IO Name="PUF1.ChuckBVac" IOName="r_DPUF_A_CHUCK_B_VAC" />
|
|
|
- <IO Name="PUF1.ChuckARelease" IOName="c_DPUF_A_CHUCK_A_RELEASE" />
|
|
|
- <IO Name="PUF1.ChuckBRelease" IOName="c_DPUF_A_CHUCK_B_RELEASE" />
|
|
|
- <IO Name="PUF1.DistanceSensor1" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_1" />
|
|
|
- <IO Name="PUF1.DistanceSensor2" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_2" />
|
|
|
+ <IO Name="PUF1.Chuck" IOName="c_PUF_CHUCK" />
|
|
|
+ <IO Name="PUF1.SideAChuckOut" IOName="r_PUF_A_CHUCK_OUT" />
|
|
|
+ <IO Name="PUF1.SideAChuckIn" IOName="r_PUF_A_CHUCK_IN" />
|
|
|
+ <IO Name="PUF1.SideBChuckOut" IOName="r_PUF_B_CHUCK_OUT" />
|
|
|
+ <IO Name="PUF1.SideBChuckIn" IOName="r_PUF_B_CHUCK_IN" />
|
|
|
+ <IO Name="PUF1.ChuckAVac" IOName="r_DPUF_A_CHUCK_A_VAC" />
|
|
|
+ <IO Name="PUF1.ChuckBVac" IOName="r_DPUF_A_CHUCK_B_VAC" />
|
|
|
+ <IO Name="PUF1.ChuckARelease" IOName="c_DPUF_A_CHUCK_A_RELEASE" />
|
|
|
+ <IO Name="PUF1.ChuckBRelease" IOName="c_DPUF_A_CHUCK_B_RELEASE" />
|
|
|
+ <IO Name="PUF1.DistanceSensor1" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_1" />
|
|
|
+ <IO Name="PUF1.DistanceSensor2" IOName="r_DPUF_A_CHUCK_A_WFER_SNS_2" />
|
|
|
</Module>
|
|
|
<Module Name="Loader1">
|
|
|
- <IO Name="Loader1.SideA.WaferPresent" IOName="r_LoaderA_Wafer_Present" />
|
|
|
- <IO Name="Loader1.SideA.DoorUnlock" IOName="c_LOADERA_DOOR_UNLOCK" />
|
|
|
- <IO Name="Loader1.SideA.DoorUpperLocked" IOName="r_LOADERA_DOOR_UPPER_LOCKED" />
|
|
|
- <IO Name="Loader1.SideA.DoorUpperUnlocked" IOName="r_LOADERA_DOOR_UPPER_UNLOCKED" />
|
|
|
- <IO Name="Loader1.SideA.DoorLowerLocked" IOName="r_LOADERA_DOOR_LOWER_LOCKED" />
|
|
|
- <IO Name="Loader1.SideA.DoorLowerUnlocked" IOName="r_LOADERA_DOOR_LOWER_UNLOCKED" />
|
|
|
- <IO Name="Loader1.SideA.TransRetracted" IOName="r_LOADERA_TRANSLATION_RETRACTED" />
|
|
|
- <IO Name="Loader1.SideA.BernoulliExtended" IOName="r_LOADERA_BERNOULLI_EXTENDED" />
|
|
|
- <IO Name="Loader1.SideA.CRSVacuumValue" IOName="r_LoaderA_LS_Vacuum_anlg" />
|
|
|
- <IO Name="Loader1.SideA.WHBladderPressure" IOName="r_LOADERA_WS_BLADDER_PRESSURE" />
|
|
|
- <IO Name="Loader1.SideA.TransPressure" IOName="r_LOADERA_TRANSLATION_PRESSURE" />
|
|
|
- <IO Name="Loader1.SideA.BernoulliPressure" IOName="r_LOADERA_BERNOULLI_PRESSURE" />
|
|
|
- <IO Name="Loader1.SideA.BernoulliBladderPressure" IOName="r_LOADERA_CHUCK_BLADDER" />
|
|
|
- <IO Name="Loader1.SideA.CRSVacuum" IOName="c_LoaderA_LS_Vacuum" />
|
|
|
- <IO Name="Loader1.SideA.WHBladder" IOName="c_LOADERA_WS_BLADDER" />
|
|
|
- <IO Name="Loader1.SideA.TransBladder" IOName="c_LOADERA_TRANS_BLADDER" />
|
|
|
- <IO Name="Loader1.SideA.TransHigh" IOName="c_LOADERA_TRANS_HIGH" />
|
|
|
- <IO Name="Loader1.SideA.BernoulliBladder" IOName="c_LOADERA_BERNOULLI_BLADDER" />
|
|
|
- <IO Name="Loader1.SideA.BernoulliN2" IOName="c_LOADERA_BERNOULLI_N2" />
|
|
|
- <IO Name="Loader1.SideA.BernoulliN2Second" IOName="c_LOADERA_BERNOULLI_N2_SECOND" />
|
|
|
- <IO Name="Loader1.SideB.WaferPresent" IOName="r_LoaderB_Wafer_Present" />
|
|
|
- <IO Name="Loader1.SideB.DoorUpperLocked" IOName="r_LOADERB_DOOR_UPPER_LOCKED" />
|
|
|
- <IO Name="Loader1.SideB.DoorUpperUnlocked" IOName="r_LOADERB_DOOR_UPPER_UNLOCKED" />
|
|
|
- <IO Name="Loader1.SideB.DoorLowerLocked" IOName="r_LOADERB_DOOR_LOWER_LOCKED" />
|
|
|
- <IO Name="Loader1.SideB.DoorLowerUnlocked" IOName="r_LOADERB_DOOR_LOWER_UNLOCKED" />
|
|
|
- <IO Name="Loader1.SideB.TransRetracted" IOName="r_LOADERB_TRANSLATION_RETRACTED" />
|
|
|
- <IO Name="Loader1.SideB.BernoulliExtended" IOName="r_LOADERB_BERNOULLI_EXTENDED" />
|
|
|
- <IO Name="Loader1.SideB.CRSVacuumValue" IOName="r_LoaderB_LS_Vacuum_anlg" />
|
|
|
- <IO Name="Loader1.SideB.WHBladderPressure" IOName="r_LOADERB_WS_BLADDER_PRESSURE" />
|
|
|
- <IO Name="Loader1.SideB.TransPressure" IOName="r_LOADERB_TRANSLATION_PRESSURE" />
|
|
|
- <IO Name="Loader1.SideB.BernoulliPressure" IOName="r_LOADERB_BERNOULLI_PRESSURE" />
|
|
|
- <IO Name="Loader1.SideB.BernoulliBladderPressure" IOName="r_LOADERB_CHUCK_BLADDER" />
|
|
|
- <IO Name="Loader1.SideB.DoorUnlock" IOName="c_LOADERB_DOOR_UNLOCK" />
|
|
|
- <IO Name="Loader1.SideB.CRSVacuum" IOName="c_LoaderB_LS_Vacuum" />
|
|
|
- <IO Name="Loader1.SideB.WHBladder" IOName="c_LOADERB_WS_BLADDER" />
|
|
|
- <IO Name="Loader1.SideB.TransBladder" IOName="c_LOADERB_TRANS_BLADDER" />
|
|
|
- <IO Name="Loader1.SideB.TransHigh" IOName="c_LOADERB_TRANS_HIGH" />
|
|
|
- <IO Name="Loader1.SideB.BernoulliBladder" IOName="c_LOADERB_BERNOULLI_BLADDER" />
|
|
|
- <IO Name="Loader1.SideB.BernoulliN2" IOName="c_LOADERB_BERNOULLI_N2" />
|
|
|
- <IO Name="Loader1.SideB.BernoulliN2Second" IOName="c_LOADERB_BERNOULLI_N2_SECOND" />
|
|
|
- <IO Name="Loader1.WaferHolderPresent" IOName="r_Cathode_Present" />
|
|
|
- <IO Name="Loader1.DripTrayFluid" IOName="r_DRIP_TRAY_FLUID_DETECTION" />
|
|
|
- <IO Name="Loader1.WaferHolderClamp" IOName="c_Cathode_Clamp" />
|
|
|
- <IO Name="Loader1.WSSideABClamp" IOName="c_WAFER_HOLDER_CLAMPED" />
|
|
|
- <IO Name="Loader1.SideAWaferHolderClamp" IOName="r_LOADERA_WS_LOCKED" />
|
|
|
- <IO Name="Loader1.SideBWaferHolderClamp" IOName="r_LOADERB_WS_LOCKED" />
|
|
|
- <IO Name="Loader1.LeakFlow" IOName="r_LOADER_GasFlowSensor_FLOW" />
|
|
|
- <IO Name="Loader1.LeakVacuumValue" IOName="r_LOADER_GasFlowSensor_VACUUM" />
|
|
|
- <IO Name="Loader1.LeakFlowClamp" IOName="c_Flow_Test_Clamp" />
|
|
|
- <IO Name="Loader1.LeakVacuum" IOName="c_VACUUM_TEST" />
|
|
|
+ <IO Name="Loader1.SideA.WaferPresent" IOName="r_LoaderA_Wafer_Present" />
|
|
|
+ <IO Name="Loader1.SideA.DoorUnlock" IOName="c_LOADERA_DOOR_UNLOCK" />
|
|
|
+ <IO Name="Loader1.SideA.DoorUpperLocked" IOName="r_LOADERA_DOOR_UPPER_LOCKED" />
|
|
|
+ <IO Name="Loader1.SideA.DoorUpperUnlocked" IOName="r_LOADERA_DOOR_UPPER_UNLOCKED" />
|
|
|
+ <IO Name="Loader1.SideA.DoorLowerLocked" IOName="r_LOADERA_DOOR_LOWER_LOCKED" />
|
|
|
+ <IO Name="Loader1.SideA.DoorLowerUnlocked" IOName="r_LOADERA_DOOR_LOWER_UNLOCKED" />
|
|
|
+ <IO Name="Loader1.SideA.TransRetracted" IOName="r_LOADERA_TRANSLATION_RETRACTED" />
|
|
|
+ <IO Name="Loader1.SideA.BernoulliExtended" IOName="r_LOADERA_BERNOULLI_EXTENDED" />
|
|
|
+ <IO Name="Loader1.SideA.CRSVacuumValue" IOName="r_LoaderA_LS_Vacuum_anlg" />
|
|
|
+ <IO Name="Loader1.SideA.WHBladderPressure" IOName="r_LOADERA_WS_BLADDER_PRESSURE" />
|
|
|
+ <IO Name="Loader1.SideA.TransPressure" IOName="r_LOADERA_TRANSLATION_PRESSURE" />
|
|
|
+ <IO Name="Loader1.SideA.BernoulliPressure" IOName="r_LOADERA_BERNOULLI_PRESSURE" />
|
|
|
+ <IO Name="Loader1.SideA.BernoulliBladderPressure" IOName="r_LOADERA_CHUCK_BLADDER" />
|
|
|
+ <IO Name="Loader1.SideA.CRSVacuum" IOName="c_LoaderA_LS_Vacuum" />
|
|
|
+ <IO Name="Loader1.SideA.WHBladder" IOName="c_LOADERA_WS_BLADDER" />
|
|
|
+ <IO Name="Loader1.SideA.TransBladder" IOName="c_LOADERA_TRANS_BLADDER" />
|
|
|
+ <IO Name="Loader1.SideA.TransHigh" IOName="c_LOADERA_TRANS_HIGH" />
|
|
|
+ <IO Name="Loader1.SideA.BernoulliBladder" IOName="c_LOADERA_BERNOULLI_BLADDER" />
|
|
|
+ <IO Name="Loader1.SideA.BernoulliN2" IOName="c_LOADERA_BERNOULLI_N2" />
|
|
|
+ <IO Name="Loader1.SideA.BernoulliN2Second" IOName="c_LOADERA_BERNOULLI_N2_SECOND" />
|
|
|
+ <IO Name="Loader1.SideB.WaferPresent" IOName="r_LoaderB_Wafer_Present" />
|
|
|
+ <IO Name="Loader1.SideB.DoorUpperLocked" IOName="r_LOADERB_DOOR_UPPER_LOCKED" />
|
|
|
+ <IO Name="Loader1.SideB.DoorUpperUnlocked" IOName="r_LOADERB_DOOR_UPPER_UNLOCKED" />
|
|
|
+ <IO Name="Loader1.SideB.DoorLowerLocked" IOName="r_LOADERB_DOOR_LOWER_LOCKED" />
|
|
|
+ <IO Name="Loader1.SideB.DoorLowerUnlocked" IOName="r_LOADERB_DOOR_LOWER_UNLOCKED" />
|
|
|
+ <IO Name="Loader1.SideB.TransRetracted" IOName="r_LOADERB_TRANSLATION_RETRACTED" />
|
|
|
+ <IO Name="Loader1.SideB.BernoulliExtended" IOName="r_LOADERB_BERNOULLI_EXTENDED" />
|
|
|
+ <IO Name="Loader1.SideB.CRSVacuumValue" IOName="r_LoaderB_LS_Vacuum_anlg" />
|
|
|
+ <IO Name="Loader1.SideB.WHBladderPressure" IOName="r_LOADERB_WS_BLADDER_PRESSURE" />
|
|
|
+ <IO Name="Loader1.SideB.TransPressure" IOName="r_LOADERB_TRANSLATION_PRESSURE" />
|
|
|
+ <IO Name="Loader1.SideB.BernoulliPressure" IOName="r_LOADERB_BERNOULLI_PRESSURE" />
|
|
|
+ <IO Name="Loader1.SideB.BernoulliBladderPressure" IOName="r_LOADERB_CHUCK_BLADDER" />
|
|
|
+ <IO Name="Loader1.SideB.DoorUnlock" IOName="c_LOADERB_DOOR_UNLOCK" />
|
|
|
+ <IO Name="Loader1.SideB.CRSVacuum" IOName="c_LoaderB_LS_Vacuum" />
|
|
|
+ <IO Name="Loader1.SideB.WHBladder" IOName="c_LOADERB_WS_BLADDER" />
|
|
|
+ <IO Name="Loader1.SideB.TransBladder" IOName="c_LOADERB_TRANS_BLADDER" />
|
|
|
+ <IO Name="Loader1.SideB.TransHigh" IOName="c_LOADERB_TRANS_HIGH" />
|
|
|
+ <IO Name="Loader1.SideB.BernoulliBladder" IOName="c_LOADERB_BERNOULLI_BLADDER" />
|
|
|
+ <IO Name="Loader1.SideB.BernoulliN2" IOName="c_LOADERB_BERNOULLI_N2" />
|
|
|
+ <IO Name="Loader1.SideB.BernoulliN2Second" IOName="c_LOADERB_BERNOULLI_N2_SECOND" />
|
|
|
+ <IO Name="Loader1.WaferHolderPresent" IOName="r_Cathode_Present" />
|
|
|
+ <IO Name="Loader1.DripTrayFluid" IOName="r_DRIP_TRAY_FLUID_DETECTION" />
|
|
|
+ <IO Name="Loader1.WaferHolderClamp" IOName="c_Cathode_Clamp" />
|
|
|
+ <IO Name="Loader1.WSSideABClamp" IOName="c_WAFER_HOLDER_CLAMPED" />
|
|
|
+ <IO Name="Loader1.SideAWaferHolderClamp" IOName="r_LOADERA_WS_LOCKED" />
|
|
|
+ <IO Name="Loader1.SideBWaferHolderClamp" IOName="r_LOADERB_WS_LOCKED" />
|
|
|
+ <IO Name="Loader1.LeakFlow" IOName="r_LOADER_GasFlowSensor_FLOW" />
|
|
|
+ <IO Name="Loader1.LeakVacuumValue" IOName="r_LOADER_GasFlowSensor_VACUUM" />
|
|
|
+ <IO Name="Loader1.LeakFlowClamp" IOName="c_Flow_Test_Clamp" />
|
|
|
+ <IO Name="Loader1.LeakVacuum" IOName="c_VACUUM_TEST" />
|
|
|
</Module>
|
|
|
<Module Name="Facilities">
|
|
|
- <IO Name="Facilities.N2Enable" IOName="c_N2_ENABLE"/>
|
|
|
- <IO Name="Facilities.CDAEnable" IOName="c_CDA_ENABLE"/>
|
|
|
- <IO Name="Facilities.ExternalCDAEnable" IOName="c_EXTERNAL_CDA_ENABLE"/>
|
|
|
- <IO Name="Facilities.DiWaterEnable" IOName="c_DI_MAIN_ENABLE"/>
|
|
|
- <IO Name="Facilities.HouseChilledWaterEnable" IOName="c_HCW_ENABLE"/>
|
|
|
- <IO Name="Facilities.DiReplenEnable" IOName="c_DI_REPLEN_ENABLE"/>
|
|
|
- <IO Name="Facilities.DiFillEnable" IOName="c_DI_FILL_ENABLE"/>
|
|
|
- <IO Name="Facilities.LoaderDiEnable" IOName="c_DI_LOADER_ENABLE"/>
|
|
|
- <IO Name="Facilities.FilterPurgeEnable" IOName="c_FILTER_PURGE_ENABLE"/>
|
|
|
- <IO Name="Facilities.Nitrogen1BPressure" IOName="r_N2_1B_PRESSURE"/>
|
|
|
- <IO Name="Facilities.Nitrogen1APressure" IOName="r_N2_1A_PRESSURE"/>
|
|
|
- <IO Name="Facilities.Nitrogen2BPressure" IOName="r_N2_2B_PRESSURE"/>
|
|
|
- <IO Name="Facilities.Nitrogen2APressure" IOName="r_N2_2A_PRESSURE"/>
|
|
|
- <IO Name="Facilities.CDA2Pressure" IOName="r_CDA_HIGH_PRESSURE"/>
|
|
|
- <IO Name="Facilities.CDA1Pressure" IOName="r_CDA_LOW_PRESSURE"/>
|
|
|
- <IO Name="Facilities.ExternalCDAPressure" IOName="r_CDA_EXTERNAL_PRESSURE"/>
|
|
|
- <IO Name="Facilities.DiWaterPressure" IOName="r_DI_WATER_PRESSURE"/>
|
|
|
- <IO Name="Facilities.HouseChilledWaterPressure" IOName="r_HCW_FLOW"/>
|
|
|
- <IO Name="Facilities.ExhaustPressure" IOName="r_SYSTEM_EXHAUST"/>
|
|
|
- <IO Name="Facilities.VacuumPressure" IOName="r_SYSTEM_VACUUM"/>
|
|
|
- <IO Name="Facilities.N2BlanketPressure" IOName="r_N2_BLANKET_PRESSURE"/>
|
|
|
- <IO Name="Facilities.SampleEnable" IOName="c_SAMPLE_STATION_ENABLE"/>
|
|
|
- <IO Name="Facilities.SampleFlow1Enable" IOName="c_SAMPLE_STATION_FLOW_1_ENABLE"/>
|
|
|
- <IO Name="Facilities.SampleFlow2Enable" IOName="c_SAMPLE_STATION_FLOW_2_ENABLE"/>
|
|
|
- <IO Name="Facilities.SampleFlow3Enable" IOName="c_SAMPLE_STATION_FLOW_3_ENABLE"/>
|
|
|
- <IO Name="Facilities.SampleFlow4Enable" IOName="c_SAMPLE_STATION_FLOW_4_ENABLE"/>
|
|
|
- <IO Name="Facilities.FFULoaderError" IOName="r_FFUFaultLoader"/>
|
|
|
- <IO Name="Facilities.FFUProcessError" IOName="r_FFUFaultProcess"/>
|
|
|
- <IO Name="Facilities.FFULoaderPressure" IOName="r_FFUPressureLoader"/>
|
|
|
- <IO Name="Facilities.FFUProcessPressure" IOName="r_FFUPressureProcess"/>
|
|
|
- <IO Name="Facilities.ArsFluidDetect" IOName="r_SLIPSTREAM_FLUID_PRESENT"/>
|
|
|
- <IO Name="Facilities.ProcessFluidDetect" IOName="r_CONTAINMENT_FLUID"/>
|
|
|
- <IO Name="Facilities.SampleFluidDetect" IOName="r_SAMPLE_SYS_FLUID_PRESENT"/>
|
|
|
+ <IO Name="Facilities.N2Enable" IOName="c_N2_ENABLE"/>
|
|
|
+ <IO Name="Facilities.CDAEnable" IOName="c_CDA_ENABLE"/>
|
|
|
+ <IO Name="Facilities.ExternalCDAEnable" IOName="c_EXTERNAL_CDA_ENABLE"/>
|
|
|
+ <IO Name="Facilities.DiWaterEnable" IOName="c_DI_MAIN_ENABLE"/>
|
|
|
+ <IO Name="Facilities.HouseChilledWaterEnable" IOName="c_HCW_ENABLE"/>
|
|
|
+ <IO Name="Facilities.DiReplenEnable" IOName="c_DI_REPLEN_ENABLE"/>
|
|
|
+ <IO Name="Facilities.DiFillEnable" IOName="c_DI_FILL_ENABLE"/>
|
|
|
+ <IO Name="Facilities.LoaderDiEnable" IOName="c_DI_LOADER_ENABLE"/>
|
|
|
+ <IO Name="Facilities.FilterPurgeEnable" IOName="c_FILTER_PURGE_ENABLE"/>
|
|
|
+ <IO Name="Facilities.Nitrogen1BPressure" IOName="r_N2_1B_PRESSURE"/>
|
|
|
+ <IO Name="Facilities.Nitrogen1APressure" IOName="r_N2_1A_PRESSURE"/>
|
|
|
+ <IO Name="Facilities.Nitrogen2BPressure" IOName="r_N2_2B_PRESSURE"/>
|
|
|
+ <IO Name="Facilities.Nitrogen2APressure" IOName="r_N2_2A_PRESSURE"/>
|
|
|
+ <IO Name="Facilities.CDA2Pressure" IOName="r_CDA_HIGH_PRESSURE"/>
|
|
|
+ <IO Name="Facilities.CDA1Pressure" IOName="r_CDA_LOW_PRESSURE"/>
|
|
|
+ <IO Name="Facilities.ExternalCDAPressure" IOName="r_CDA_EXTERNAL_PRESSURE"/>
|
|
|
+ <IO Name="Facilities.DiWaterPressure" IOName="r_DI_WATER_PRESSURE"/>
|
|
|
+ <IO Name="Facilities.HouseChilledWaterPressure" IOName="r_HCW_FLOW"/>
|
|
|
+ <IO Name="Facilities.ExhaustPressure" IOName="r_SYSTEM_EXHAUST"/>
|
|
|
+ <IO Name="Facilities.VacuumPressure" IOName="r_SYSTEM_VACUUM"/>
|
|
|
+ <IO Name="Facilities.N2BlanketPressure" IOName="r_N2_BLANKET_PRESSURE"/>
|
|
|
+ <IO Name="Facilities.SampleEnable" IOName="c_SAMPLE_STATION_ENABLE"/>
|
|
|
+ <IO Name="Facilities.SampleFlow1Enable" IOName="c_SAMPLE_STATION_FLOW_1_ENABLE"/>
|
|
|
+ <IO Name="Facilities.SampleFlow2Enable" IOName="c_SAMPLE_STATION_FLOW_2_ENABLE"/>
|
|
|
+ <IO Name="Facilities.SampleFlow3Enable" IOName="c_SAMPLE_STATION_FLOW_3_ENABLE"/>
|
|
|
+ <IO Name="Facilities.SampleFlow4Enable" IOName="c_SAMPLE_STATION_FLOW_4_ENABLE"/>
|
|
|
+ <IO Name="Facilities.FFULoaderError" IOName="r_FFUFaultLoader"/>
|
|
|
+ <IO Name="Facilities.FFUProcessError" IOName="r_FFUFaultProcess"/>
|
|
|
+ <IO Name="Facilities.FFULoaderPressure" IOName="r_FFUPressureLoader"/>
|
|
|
+ <IO Name="Facilities.FFUProcessPressure" IOName="r_FFUPressureProcess"/>
|
|
|
+ <IO Name="Facilities.ArsFluidDetect" IOName="r_SLIPSTREAM_FLUID_PRESENT"/>
|
|
|
+ <IO Name="Facilities.ProcessFluidDetect" IOName="r_CONTAINMENT_FLUID"/>
|
|
|
+ <IO Name="Facilities.SampleFluidDetect" IOName="r_SAMPLE_SYS_FLUID_PRESENT"/>
|
|
|
</Module>
|
|
|
<Module Name="Transporter2">
|
|
|
- <IO Name="Transporter2.Unlock" IOName="c_ENCLOSED_TRANSPORT2_UNLOCK_SOLENOID"/>
|
|
|
- <IO Name="Transporter2.Locked1" IOName="r_ENCLOSED_TRANSPORT2_WS_LOCKED_1"/>
|
|
|
- <IO Name="Transporter2.Locked2" IOName="r_ENCLOSED_TRANSPORT2_WS_LOCKED_2"/>
|
|
|
- <IO Name="Transporter2.Unlocked1" IOName="r_ENCLOSED_TRANSPORT2_WS_UNLOCKED_1"/>
|
|
|
- <IO Name="Transporter2.Unlocked2" IOName="r_ENCLOSED_TRANSPORT2_WS_UNLOCKED_2"/>
|
|
|
- <IO Name="Transporter2.ImmobilizeActive" IOName="c_ENCLOSED_TRANSPORT2_UPPER_IMMOBILIZER_ACTIVE"/>
|
|
|
- <IO Name="Transporter2.ImmobilizeActive2" IOName="c_ENCLOSED_TRANSPORT2_UPPER_IMMOBILIZER_ACTIVE2"/>
|
|
|
- <IO Name="Transporter2.ImmobilizeRetracted1" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER1_RETRACTED"/>
|
|
|
- <IO Name="Transporter2.ImmobilizeRetracted2" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER2_RETRACTED"/>
|
|
|
- <IO Name="Transporter2.ImmobilizeExtended1" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER1_EXTENDED"/>
|
|
|
- <IO Name="Transporter2.ImmobilizeExtended2" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER2_EXTENDED"/>
|
|
|
- <IO Name="Transporter2.ReadyToLock1" IOName="r_ENCLOSED_TRANSPORT2_WS_READY_TO_LOCK_1"/>
|
|
|
- <IO Name="Transporter2.ReadyToLock2" IOName="r_ENCLOSED_TRANSPORT2_WS_READY_TO_LOCK_2"/>
|
|
|
- <IO Name="Transporter2.WhPresent1" IOName="r_ENCLOSED_TRANSPORT2_WS_PRESENT_1"/>
|
|
|
- <IO Name="Transporter2.WhPresent2" IOName="r_ENCLOSED_TRANSPORT2_WS_PRESENT_2"/>
|
|
|
+ <IO Name="Transporter2.Unlock" IOName="c_ENCLOSED_TRANSPORT2_UNLOCK_SOLENOID"/>
|
|
|
+ <IO Name="Transporter2.Locked1" IOName="r_ENCLOSED_TRANSPORT2_WS_LOCKED_1"/>
|
|
|
+ <IO Name="Transporter2.Locked2" IOName="r_ENCLOSED_TRANSPORT2_WS_LOCKED_2"/>
|
|
|
+ <IO Name="Transporter2.Unlocked1" IOName="r_ENCLOSED_TRANSPORT2_WS_UNLOCKED_1"/>
|
|
|
+ <IO Name="Transporter2.Unlocked2" IOName="r_ENCLOSED_TRANSPORT2_WS_UNLOCKED_2"/>
|
|
|
+ <IO Name="Transporter2.ImmobilizeActive" IOName="c_ENCLOSED_TRANSPORT2_UPPER_IMMOBILIZER_ACTIVE"/>
|
|
|
+ <IO Name="Transporter2.ImmobilizeActive2" IOName="c_ENCLOSED_TRANSPORT2_UPPER_IMMOBILIZER_ACTIVE2"/>
|
|
|
+ <IO Name="Transporter2.ImmobilizeRetracted1" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER1_RETRACTED"/>
|
|
|
+ <IO Name="Transporter2.ImmobilizeRetracted2" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER2_RETRACTED"/>
|
|
|
+ <IO Name="Transporter2.ImmobilizeExtended1" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER1_EXTENDED"/>
|
|
|
+ <IO Name="Transporter2.ImmobilizeExtended2" IOName="r_ENCLOSED_TRANSPORT2_WS_IMMOBILIZER2_EXTENDED"/>
|
|
|
+ <IO Name="Transporter2.ReadyToLock1" IOName="r_ENCLOSED_TRANSPORT2_WS_READY_TO_LOCK_1"/>
|
|
|
+ <IO Name="Transporter2.ReadyToLock2" IOName="r_ENCLOSED_TRANSPORT2_WS_READY_TO_LOCK_2"/>
|
|
|
+ <IO Name="Transporter2.WhPresent1" IOName="r_ENCLOSED_TRANSPORT2_WS_PRESENT_1"/>
|
|
|
+ <IO Name="Transporter2.WhPresent2" IOName="r_ENCLOSED_TRANSPORT2_WS_PRESENT_2"/>
|
|
|
</Module>
|
|
|
<Module Name="Transporter1">
|
|
|
- <IO Name="Transporter1.Unlock" IOName="c_ENCLOSED_TRANSPORT_UNLOCK_SOLENOID"/>
|
|
|
- <IO Name="Transporter1.Unlocked1" IOName="r_ENCLOSED_TRANSPORT_WS_UNLOCKED_1"/>
|
|
|
- <IO Name="Transporter1.Locked2" IOName="r_ENCLOSED_TRANSPORT_WS_LOCKED_2"/>
|
|
|
- <IO Name="Transporter1.Locked1" IOName="r_ENCLOSED_TRANSPORT_WS_LOCKED_1"/>
|
|
|
- <IO Name="Transporter1.Unlocked2" IOName="r_ENCLOSED_TRANSPORT_WS_UNLOCKED_2"/>
|
|
|
- <IO Name="Transporter1.ImmobilizeActive" IOName="c_ENCLOSED_TRANSPORT_UPPER_IMMOBILIZER_ACTIVE"/>
|
|
|
- <IO Name="Transporter1.ImmobilizeActive2" IOName="c_ENCLOSED_TRANSPORT_UPPER_IMMOBILIZER_ACTIVE2"/>
|
|
|
- <IO Name="Transporter1.ImmobilizeRetracted1" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER1_RETRACTED"/>
|
|
|
- <IO Name="Transporter1.ImmobilizeRetracted2" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER2_RETRACTED"/>
|
|
|
- <IO Name="Transporter1.ImmobilizeExtended1" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER1_EXTENDED"/>
|
|
|
- <IO Name="Transporter1.ImmobilizeExtended2" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER2_EXTENDED"/>
|
|
|
- <IO Name="Transporter1.ReadyToLock1" IOName="r_ENCLOSED_TRANSPORT_WS_READY_TO_LOCK_1"/>
|
|
|
- <IO Name="Transporter1.ReadyToLock2" IOName="r_ENCLOSED_TRANSPORT_WS_READY_TO_LOCK_2"/>
|
|
|
- <IO Name="Transporter1.WhPresent1" IOName="r_ENCLOSED_TRANSPORT_WS_PRESENT_1"/>
|
|
|
- <IO Name="Transporter1.WhPresent2" IOName="r_ENCLOSED_TRANSPORT_WS_PRESENT_2"/>
|
|
|
+ <IO Name="Transporter1.Unlock" IOName="c_ENCLOSED_TRANSPORT_UNLOCK_SOLENOID"/>
|
|
|
+ <IO Name="Transporter1.Unlocked1" IOName="r_ENCLOSED_TRANSPORT_WS_UNLOCKED_1"/>
|
|
|
+ <IO Name="Transporter1.Locked2" IOName="r_ENCLOSED_TRANSPORT_WS_LOCKED_2"/>
|
|
|
+ <IO Name="Transporter1.Locked1" IOName="r_ENCLOSED_TRANSPORT_WS_LOCKED_1"/>
|
|
|
+ <IO Name="Transporter1.Unlocked2" IOName="r_ENCLOSED_TRANSPORT_WS_UNLOCKED_2"/>
|
|
|
+ <IO Name="Transporter1.ImmobilizeActive" IOName="c_ENCLOSED_TRANSPORT_UPPER_IMMOBILIZER_ACTIVE"/>
|
|
|
+ <IO Name="Transporter1.ImmobilizeActive2" IOName="c_ENCLOSED_TRANSPORT_UPPER_IMMOBILIZER_ACTIVE2"/>
|
|
|
+ <IO Name="Transporter1.ImmobilizeRetracted1" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER1_RETRACTED"/>
|
|
|
+ <IO Name="Transporter1.ImmobilizeRetracted2" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER2_RETRACTED"/>
|
|
|
+ <IO Name="Transporter1.ImmobilizeExtended1" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER1_EXTENDED"/>
|
|
|
+ <IO Name="Transporter1.ImmobilizeExtended2" IOName="r_ENCLOSED_TRANSPORT_WS_IMMOBILIZER2_EXTENDED"/>
|
|
|
+ <IO Name="Transporter1.ReadyToLock1" IOName="r_ENCLOSED_TRANSPORT_WS_READY_TO_LOCK_1"/>
|
|
|
+ <IO Name="Transporter1.ReadyToLock2" IOName="r_ENCLOSED_TRANSPORT_WS_READY_TO_LOCK_2"/>
|
|
|
+ <IO Name="Transporter1.WhPresent1" IOName="r_ENCLOSED_TRANSPORT_WS_PRESENT_1"/>
|
|
|
+ <IO Name="Transporter1.WhPresent2" IOName="r_ENCLOSED_TRANSPORT_WS_PRESENT_2"/>
|
|
|
</Module>
|
|
|
<Module Name="SRD">
|
|
|
- <IO Name="SRD.FluidContainment" IOName="r_SRD_FLUID_CONTAINMENT"/>
|
|
|
- <IO Name="SRD.WaterPressure" IOName="r_SRD_SUPPLY_WATER_PRESS"/>
|
|
|
+ <IO Name="SRD.FluidContainment" IOName="r_SRD_FLUID_CONTAINMENT"/>
|
|
|
+ <IO Name="SRD.WaterPressure" IOName="r_SRD_SUPPLY_WATER_PRESS"/>
|
|
|
</Module>
|
|
|
<Module Name="SRD1">
|
|
|
- <IO Name="SRD1.VacuumValue" IOName="r_SRD1_CHUCK_VACUUM_anlg"/>
|
|
|
- <IO Name="SRD1.WaferPresence" IOName="r_SRD1_WAFER_PRESENT_anlg"/>
|
|
|
- <IO Name="SRD1.DoorClose" IOName="c_SRD1_Shutter_Close"/>
|
|
|
- <IO Name="SRD1.DoorClosed" IOName="r_SRD1_SHUTTER_CLOSED"/>
|
|
|
- <IO Name="SRD1.DoorOpened" IOName="r_SRD1_SHUTTER_OPEN"/>
|
|
|
- <IO Name="SRD1.WaterAbove" IOName="c_SRD1_Water_Above_Wafer"/>
|
|
|
- <IO Name="SRD1.WaterBelow" IOName="c_SRD1_Water_Below_Wafer"/>
|
|
|
- <IO Name="SRD1.ChuckVacuum" IOName="c_SRD1_CHUCK_VACUUM"/>
|
|
|
- <IO Name="SRD1.ExhaustOn" IOName="c_SRD1_Exhaust_Fan_On"/>
|
|
|
+ <IO Name="SRD1.VacuumValue" IOName="r_SRD1_CHUCK_VACUUM_anlg"/>
|
|
|
+ <IO Name="SRD1.WaferPresence" IOName="r_SRD1_WAFER_PRESENT_anlg"/>
|
|
|
+ <IO Name="SRD1.DoorClose" IOName="c_SRD1_Shutter_Close"/>
|
|
|
+ <IO Name="SRD1.DoorClosed" IOName="r_SRD1_SHUTTER_CLOSED"/>
|
|
|
+ <IO Name="SRD1.DoorOpened" IOName="r_SRD1_SHUTTER_OPEN"/>
|
|
|
+ <IO Name="SRD1.WaterAbove" IOName="c_SRD1_Water_Above_Wafer"/>
|
|
|
+ <IO Name="SRD1.WaterBelow" IOName="c_SRD1_Water_Below_Wafer"/>
|
|
|
+ <IO Name="SRD1.ChuckVacuum" IOName="c_SRD1_CHUCK_VACUUM"/>
|
|
|
+ <IO Name="SRD1.ExhaustOn" IOName="c_SRD1_Exhaust_Fan_On"/>
|
|
|
</Module>
|
|
|
<Module Name="SRD2">
|
|
|
- <IO Name="SRD2.VacuumValue" IOName="r_SRD2_CHUCK_VACUUM_anlg"/>
|
|
|
- <IO Name="SRD2.WaferPresence" IOName="r_SRD2_WAFER_PRESENT_anlg"/>
|
|
|
- <IO Name="SRD2.DoorClose" IOName="c_SRD2_Shutter_Close"/>
|
|
|
- <IO Name="SRD2.DoorClosed" IOName="r_SRD2_SHUTTER_CLOSED"/>
|
|
|
- <IO Name="SRD2.DoorOpened" IOName="r_SRD2_SHUTTER_OPEN"/>
|
|
|
- <IO Name="SRD2.WaterAbove" IOName="c_SRD2_Water_Above_Wafer"/>
|
|
|
- <IO Name="SRD2.WaterBelow" IOName="c_SRD2_Water_Below_Wafer"/>
|
|
|
- <IO Name="SRD2.ChuckVacuum" IOName="c_SRD2_CHUCK_VACUUM"/>
|
|
|
- <IO Name="SRD2.ExhaustOn" IOName="c_SRD2_Exhaust_Fan_On"/>
|
|
|
+ <IO Name="SRD2.VacuumValue" IOName="r_SRD2_CHUCK_VACUUM_anlg"/>
|
|
|
+ <IO Name="SRD2.WaferPresence" IOName="r_SRD2_WAFER_PRESENT_anlg"/>
|
|
|
+ <IO Name="SRD2.DoorClose" IOName="c_SRD2_Shutter_Close"/>
|
|
|
+ <IO Name="SRD2.DoorClosed" IOName="r_SRD2_SHUTTER_CLOSED"/>
|
|
|
+ <IO Name="SRD2.DoorOpened" IOName="r_SRD2_SHUTTER_OPEN"/>
|
|
|
+ <IO Name="SRD2.WaterAbove" IOName="c_SRD2_Water_Above_Wafer"/>
|
|
|
+ <IO Name="SRD2.WaterBelow" IOName="c_SRD2_Water_Below_Wafer"/>
|
|
|
+ <IO Name="SRD2.ChuckVacuum" IOName="c_SRD2_CHUCK_VACUUM"/>
|
|
|
+ <IO Name="SRD2.ExhaustOn" IOName="c_SRD2_Exhaust_Fan_On"/>
|
|
|
</Module>
|
|
|
<Module Name="Dryer1">
|
|
|
- <IO Name="Dryer1.ExhaustPressure" IOName="r_HVD_1_ANALOG"/>
|
|
|
- <IO Name="Dryer1.PowerControl" IOName="c_HVD_1_ENABLE"/>
|
|
|
- <IO Name="Dryer1.BlowerHigh" IOName="c_HVD_1_HIGH"/>
|
|
|
+ <IO Name="Dryer1.ExhaustPressure" IOName="r_HVD_1_ANALOG"/>
|
|
|
+ <IO Name="Dryer1.PowerControl" IOName="c_HVD_1_ENABLE"/>
|
|
|
+ <IO Name="Dryer1.BlowerHigh" IOName="c_HVD_1_HIGH"/>
|
|
|
</Module>
|
|
|
<Module Name="Dryer2">
|
|
|
- <IO Name="Dryer2.ExhaustPressure" IOName="r_HVD_2_ANALOG"/>
|
|
|
- <IO Name="Dryer2.PowerControl" IOName="c_HVD_2_ENABLE"/>
|
|
|
- <IO Name="Dryer2.BlowerHigh" IOName="c_HVD_2_HIGH"/>
|
|
|
+ <IO Name="Dryer2.ExhaustPressure" IOName="r_HVD_2_ANALOG"/>
|
|
|
+ <IO Name="Dryer2.PowerControl" IOName="c_HVD_2_ENABLE"/>
|
|
|
+ <IO Name="Dryer2.BlowerHigh" IOName="c_HVD_2_HIGH"/>
|
|
|
</Module>
|
|
|
<Module Name="Prewet1">
|
|
|
- <IO Name="Prewet1.PumpValve" IOName="c_SPW1_LEV_PUMP_VALVE"/>
|
|
|
- <IO Name="Prewet1.PumpCurrent" IOName="r_SPW1_LEV_PUMP_CURRENT"/>
|
|
|
- <IO Name="Prewet1.PumpEnable" IOName="c_SPW1_LEV_PUMP_ENB"/>
|
|
|
- <IO Name="Prewet1.PumpStatus" IOName="r_SPW1_LEV_PUMP_STATUS"/>
|
|
|
- <IO Name="Prewet1.PumpFlow" IOName="r_SPW1_LEV_PUMP_FLOW"/>
|
|
|
- <IO Name="Prewet1.PumpPressure" IOName="r_SPW1_LEV_PUMP_PRES"/>
|
|
|
- <IO Name="Prewet1.PumpSpeed" IOName="c_SPW1_LEV_PUMP_SPEED"/>
|
|
|
+ <IO Name="Prewet1.PumpValve" IOName="c_SPW1_LEV_PUMP_VALVE"/>
|
|
|
+ <IO Name="Prewet1.PumpCurrent" IOName="r_SPW1_LEV_PUMP_CURRENT"/>
|
|
|
+ <IO Name="Prewet1.PumpEnable" IOName="c_SPW1_LEV_PUMP_ENB"/>
|
|
|
+ <IO Name="Prewet1.PumpStatus" IOName="r_SPW1_LEV_PUMP_STATUS"/>
|
|
|
+ <IO Name="Prewet1.PumpFlow" IOName="r_SPW1_LEV_PUMP_FLOW"/>
|
|
|
+ <IO Name="Prewet1.PumpPressure" IOName="r_SPW1_LEV_PUMP_PRES"/>
|
|
|
+ <IO Name="Prewet1.PumpSpeed" IOName="c_SPW1_LEV_PUMP_SPEED"/>
|
|
|
</Module>
|
|
|
<Module Name="Safety">
|
|
|
- <IO Name="Safety.MainCommErr" IOName="r_Safety_ComErr"/>
|
|
|
- <IO Name="Safety.LoaderPufCommErr" IOName="r_Safety_ComErr_LdrPuf"/>
|
|
|
- <IO Name="Safety.SrdCommErr" IOName="r_Safety_ComErr_Srd"/>
|
|
|
- <IO Name="Safety.TransportCommErr" IOName="r_Safety_ComErr_Transp"/>
|
|
|
- <IO Name="Safety.MainFunctionBlockErr" IOName="r_Safety_FbErr"/>
|
|
|
- <IO Name="Safety.LoaderPufFunctionBlockErr" IOName="r_Safety_FbErr_LdrPuf"/>
|
|
|
- <IO Name="Safety.SrdFunctionBlockErr" IOName="r_Safety_FbErr_Srd"/>
|
|
|
- <IO Name="Safety.TransporterFunctionBlockErr" IOName="r_Safety_FbErr_Transp"/>
|
|
|
- <IO Name="Safety.TwincatState" IOName="r_EtherCat_State"/>
|
|
|
- <IO Name="Safety.LoaderHotConnectState" IOName="r_EtherCat_State_Loader"/>
|
|
|
- <IO Name="Safety.LdrHotConnectState" IOName="r_EtherCat_State_LdrTxIO"/>
|
|
|
- <IO Name="Safety.PrcHotConnectState" IOName="r_EtherCat_State_PrcTxIO"/>
|
|
|
- <IO Name="Safety.TransporterHotConnectState" IOName="r_EtherCat_State_Transporter"/>
|
|
|
- <IO Name="Safety.PufHotConnectState" IOName="r_EtherCat_State_Puf"/>
|
|
|
- <IO Name="Safety.SrdHotConnectState" IOName="r_EtherCat_State_Srd"/>
|
|
|
- <IO Name="Safety.Reservoir1HotConnectState" IOName="r_EtherCat_State_Reservoir1"/>
|
|
|
- <IO Name="Safety.Reservoir2HotConnectState" IOName="r_EtherCat_State_Reservoir2"/>
|
|
|
- <IO Name="Safety.FFUHotConnectState" IOName="r_EtherCat_State_FFU"/>
|
|
|
- <IO Name="Safety.RunStop" IOName="c_Safety_RunStop"/>
|
|
|
- <IO Name="Safety.ErrAck" IOName="c_Safety_ErrAck"/>
|
|
|
- <IO Name="Safety.SlsRestart" IOName="c_Safety_SLS_Restart"/>
|
|
|
- <IO Name="Safety.TxStoMonRestart" IOName="c_Safety_TX_STO_MON_Restart"/>
|
|
|
- <IO Name="Safety.TxSto1EstopRestart" IOName="c_Safety_TX_STO1_ESTOP_Restart"/>
|
|
|
- <IO Name="Safety.TxSto2EstopRestart" IOName="c_Safety_TX_STO2_ESTOP_Restart"/>
|
|
|
- <IO Name="Safety.LdrPufStoMonRestart" IOName="c_Safety_LDRPUF_STO_MON_Restart"/>
|
|
|
- <IO Name="Safety.LdrPufSto1EstopRestart" IOName="c_Safety_LDRPUF_STO1_ESTOP_Restart"/>
|
|
|
- <IO Name="Safety.LdrPufSto2EstopRestart" IOName="c_Safety_LDRPUF_STO2_ESTOP_Restart"/>
|
|
|
- <IO Name="Safety.SrdStoEstopRestart" IOName="c_Safety_SRD_STO_ESTOP_Restart"/>
|
|
|
- <IO Name="Safety.PumpStoEstopRestart" IOName="c_Safety_PUMP_STO_ESTOP_Restart"/>
|
|
|
- <IO Name="Safety.FluidEstopRestart" IOName="c_Safety_FLUID_ESTOP_Restart"/>
|
|
|
- <IO Name="Safety.LoaderDoorLock" IOName="c_REQUEST_LDR_DOOR_OPEN"/>
|
|
|
- <IO Name="Safety.LoaderDoorLocked" IOName="r_LDR_Door_Locked"/>
|
|
|
- <IO Name="Safety.BufferDoorLock" IOName="c_REQUEST_BFFR_DOOR_OPEN"/>
|
|
|
- <IO Name="Safety.BufferDoorLocked" IOName="r_BFFR_Door_Locked"/>
|
|
|
- <IO Name="Safety.LowerLoaderPanelRemoved" IOName="r_LWR_LDR_PNL_REMOVED"/>
|
|
|
- <IO Name="Safety.LoaderPanelRemoved" IOName="r_XPRTR_LDR_PNL_REMOVED"/>
|
|
|
- <IO Name="Safety.BufferPanelRemoved" IOName="r_XPRTR_BFFR_PNL_REMOVED"/>
|
|
|
- <IO Name="Safety.ProcessDoorLock" IOName="c_REQUEST_PROC_DOORS_OPEN"/>
|
|
|
- <IO Name="Safety.ProcessDoor1Locked" IOName="r_PROC_DOOR_1_SAFE_LOCK"/>
|
|
|
- <IO Name="Safety.ProcessDoor2Locked" IOName="r_PROC_DOOR_2_SAFE_LOCK"/>
|
|
|
- <IO Name="Safety.ProcessDoor3Locked" IOName="r_PROC_DOOR_3_SAFE_LOCK"/>
|
|
|
- <IO Name="Safety.ProcessDoor4Locked" IOName="r_PROC_DOOR_4_SAFE_LOCK"/>
|
|
|
- <IO Name="Safety.ProcessUpperPanelsOn" IOName="r_PROC_DOORS_UPPR_PNLS_ON"/>
|
|
|
- <IO Name="Safety.SrdTopPanelRemoved" IOName="r_SRD_TOP_PNL_REMOVED"/>
|
|
|
- <IO Name="Safety.SrdLowerPanelRemoved" IOName="r_SRD_LWR_PNL_REMOVED"/>
|
|
|
- <IO Name="Safety.PlumbingDoorClosed" IOName="r_PLUMBING_DOORS_CLOSED"/>
|
|
|
- <IO Name="Safety.ProcessHaltButton1" IOName="r_PROCESS_HALT_BUTTON_1"/>
|
|
|
- <IO Name="Safety.ProcessHaltButton2" IOName="r_PROCESS_HALT_BUTTON_2"/>
|
|
|
- <IO Name="Safety.LoaderHaltButton" IOName="r_HALT_LDR_SECTION"/>
|
|
|
- <IO Name="Safety.ModeSelectorSwitch" IOName="r_MODE_SELECTOR_SWITCH"/>
|
|
|
- <IO Name="Safety.ModeSiren" IOName="c_MODE_SIREN"/>
|
|
|
- <IO Name="Safety.LoaderRotationSls" IOName="r_Rotate_AMP_SLS"/>
|
|
|
- <IO Name="Safety.LoaderSwingASls" IOName="r_Door_A_AMP_SLS"/>
|
|
|
- <IO Name="Safety.LoaderSwingBSls" IOName="r_Door_B_AMP_SLS"/>
|
|
|
- <IO Name="Safety.LoaderTiltASls" IOName="r_SUP_A_AMP_SLS"/>
|
|
|
- <IO Name="Safety.LoaderTiltBSls" IOName="r_SUP_B_AMP_SLS"/>
|
|
|
- <IO Name="Safety.Puf1VerticalSls" IOName="r_DPUF_A_VERT_SAFE_SLS"/>
|
|
|
- <IO Name="Safety.Puf2VerticalSls" IOName="r_DPUF_B_VERT_SAFE_SLS"/>
|
|
|
- <IO Name="Safety.LoaderGantrySls" IOName="r_Gantry_Zone_Safe_SLS_1"/>
|
|
|
- <IO Name="Safety.LoaderElevatorSls" IOName="r_Gantry_Zone_Safe_SLS_2"/>
|
|
|
- <IO Name="Safety.ProcessGantrySls" IOName="r_Gantry_Zone_Safe_SLS_3"/>
|
|
|
- <IO Name="Safety.ProcessElevatorSls" IOName="r_Gantry_Zone_Safe_SLS_4"/>
|
|
|
- <IO Name="Safety.PufVerticalDisable" IOName="r_DPUF_VERT_SAFE_Disable"/>
|
|
|
- <IO Name="Safety.Puf1FlipRotationDisable" IOName="r_DPUF_A_PIVSUP_Disable"/>
|
|
|
- <IO Name="Safety.Puf2FlipRotationDisable" IOName="r_DPUF_B_PIVSUP_Disable"/>
|
|
|
- <IO Name="Safety.LoaderDisable" IOName="r_Loader_Zone_Safe_Disable"/>
|
|
|
- <IO Name="Safety.TransporterDisable" IOName="r_Gantry_Zone_Safe_Disable"/>
|
|
|
- <IO Name="Safety.SrdArmDisable" IOName="r_SRD_WASH_ARMS_Disable"/>
|
|
|
- <IO Name="Safety.SrdRotationDisable" IOName="r_SRD_ROTATE_Disable"/>
|
|
|
- <IO Name="Safety.TransporterSafeSls" IOName="r_Gantry_Zone_Safe_SLS"/>
|
|
|
- <IO Name="Safety.LoaderSafeSls" IOName="r_Loader_Zone_Safe_SLS"/>
|
|
|
- <IO Name="Safety.PufVerticalSafeSls" IOName="r_DPUF_VERT_SAFE_SLS"/>
|
|
|
- <IO Name="Safety.LoaderSafeSto" IOName="r_Loader_Zone_Safe_STO"/>
|
|
|
- <IO Name="Safety.PufVerticalSafeSto" IOName="r_DPUF_VERT_SAFE_STO"/>
|
|
|
- <IO Name="Safety.Puf1FlipRotationSafeSto" IOName="r_DPUF_A_PIVSUP_STO"/>
|
|
|
- <IO Name="Safety.Puf2FlipRotationSafeSto" IOName="r_DPUF_B_PIVSUP_STO"/>
|
|
|
- <IO Name="Safety.TransporterSafeSto" IOName="r_Gantry_Zone_Safe_STO"/>
|
|
|
- <IO Name="Safety.SrdArmSafeSto" IOName="r_SRD_WASH_STO"/>
|
|
|
- <IO Name="Safety.SrdRotationSafeSto" IOName="r_SRD_ROTATE_STO"/>
|
|
|
- <IO Name="Safety.PumpEdm" IOName="r_PUMP_EDM"/>
|
|
|
- <IO Name="Safety.ReservoirHighLevel" IOName="r_SAFETY_HIGH_LEVEL"/>
|
|
|
- <IO Name="Safety.FluidEnableEdm" IOName="r_EXT_FLUID_ENABLE_EDM"/>
|
|
|
- <IO Name="Safety.SRDArmReset" IOName="c_Safety_SRD_Arm_Reset"/>
|
|
|
+ <IO Name="Safety.MainCommErr" IOName="r_Safety_ComErr"/>
|
|
|
+ <IO Name="Safety.LoaderPufCommErr" IOName="r_Safety_ComErr_LdrPuf"/>
|
|
|
+ <IO Name="Safety.SrdCommErr" IOName="r_Safety_ComErr_Srd"/>
|
|
|
+ <IO Name="Safety.TransportCommErr" IOName="r_Safety_ComErr_Transp"/>
|
|
|
+ <IO Name="Safety.MainFunctionBlockErr" IOName="r_Safety_FbErr"/>
|
|
|
+ <IO Name="Safety.LoaderPufFunctionBlockErr" IOName="r_Safety_FbErr_LdrPuf"/>
|
|
|
+ <IO Name="Safety.SrdFunctionBlockErr" IOName="r_Safety_FbErr_Srd"/>
|
|
|
+ <IO Name="Safety.TransporterFunctionBlockErr" IOName="r_Safety_FbErr_Transp"/>
|
|
|
+ <IO Name="Safety.TwincatState" IOName="r_EtherCat_State"/>
|
|
|
+ <IO Name="Safety.LoaderHotConnectState" IOName="r_EtherCat_State_Loader"/>
|
|
|
+ <IO Name="Safety.LdrHotConnectState" IOName="r_EtherCat_State_LdrTxIO"/>
|
|
|
+ <IO Name="Safety.PrcHotConnectState" IOName="r_EtherCat_State_PrcTxIO"/>
|
|
|
+ <IO Name="Safety.TransporterHotConnectState" IOName="r_EtherCat_State_Transporter"/>
|
|
|
+ <IO Name="Safety.PufHotConnectState" IOName="r_EtherCat_State_Puf"/>
|
|
|
+ <IO Name="Safety.SrdHotConnectState" IOName="r_EtherCat_State_Srd"/>
|
|
|
+ <IO Name="Safety.Reservoir1HotConnectState" IOName="r_EtherCat_State_Reservoir1"/>
|
|
|
+ <IO Name="Safety.Reservoir2HotConnectState" IOName="r_EtherCat_State_Reservoir2"/>
|
|
|
+ <IO Name="Safety.FFUHotConnectState" IOName="r_EtherCat_State_FFU"/>
|
|
|
+ <IO Name="Safety.RunStop" IOName="c_Safety_RunStop"/>
|
|
|
+ <IO Name="Safety.ErrAck" IOName="c_Safety_ErrAck"/>
|
|
|
+ <IO Name="Safety.SlsRestart" IOName="c_Safety_SLS_Restart"/>
|
|
|
+ <IO Name="Safety.TxStoMonRestart" IOName="c_Safety_TX_STO_MON_Restart"/>
|
|
|
+ <IO Name="Safety.TxSto1EstopRestart" IOName="c_Safety_TX_STO1_ESTOP_Restart"/>
|
|
|
+ <IO Name="Safety.TxSto2EstopRestart" IOName="c_Safety_TX_STO2_ESTOP_Restart"/>
|
|
|
+ <IO Name="Safety.LdrPufStoMonRestart" IOName="c_Safety_LDRPUF_STO_MON_Restart"/>
|
|
|
+ <IO Name="Safety.LdrPufSto1EstopRestart" IOName="c_Safety_LDRPUF_STO1_ESTOP_Restart"/>
|
|
|
+ <IO Name="Safety.LdrPufSto2EstopRestart" IOName="c_Safety_LDRPUF_STO2_ESTOP_Restart"/>
|
|
|
+ <IO Name="Safety.SrdStoEstopRestart" IOName="c_Safety_SRD_STO_ESTOP_Restart"/>
|
|
|
+ <IO Name="Safety.PumpStoEstopRestart" IOName="c_Safety_PUMP_STO_ESTOP_Restart"/>
|
|
|
+ <IO Name="Safety.FluidEstopRestart" IOName="c_Safety_FLUID_ESTOP_Restart"/>
|
|
|
+ <IO Name="Safety.LoaderDoorLock" IOName="c_REQUEST_LDR_DOOR_OPEN"/>
|
|
|
+ <IO Name="Safety.LoaderDoorLocked" IOName="r_LDR_Door_Locked"/>
|
|
|
+ <IO Name="Safety.BufferDoorLock" IOName="c_REQUEST_BFFR_DOOR_OPEN"/>
|
|
|
+ <IO Name="Safety.BufferDoorLocked" IOName="r_BFFR_Door_Locked"/>
|
|
|
+ <IO Name="Safety.LowerLoaderPanelRemoved" IOName="r_LWR_LDR_PNL_REMOVED"/>
|
|
|
+ <IO Name="Safety.LoaderPanelRemoved" IOName="r_XPRTR_LDR_PNL_REMOVED"/>
|
|
|
+ <IO Name="Safety.BufferPanelRemoved" IOName="r_XPRTR_BFFR_PNL_REMOVED"/>
|
|
|
+ <IO Name="Safety.ProcessDoorLock" IOName="c_REQUEST_PROC_DOORS_OPEN"/>
|
|
|
+ <IO Name="Safety.ProcessDoor1Locked" IOName="r_PROC_DOOR_1_SAFE_LOCK"/>
|
|
|
+ <IO Name="Safety.ProcessDoor2Locked" IOName="r_PROC_DOOR_2_SAFE_LOCK"/>
|
|
|
+ <IO Name="Safety.ProcessDoor3Locked" IOName="r_PROC_DOOR_3_SAFE_LOCK"/>
|
|
|
+ <IO Name="Safety.ProcessDoor4Locked" IOName="r_PROC_DOOR_4_SAFE_LOCK"/>
|
|
|
+ <IO Name="Safety.ProcessUpperPanelsOn" IOName="r_PROC_DOORS_UPPR_PNLS_ON"/>
|
|
|
+ <IO Name="Safety.SrdTopPanelRemoved" IOName="r_SRD_TOP_PNL_REMOVED"/>
|
|
|
+ <IO Name="Safety.SrdLowerPanelRemoved" IOName="r_SRD_LWR_PNL_REMOVED"/>
|
|
|
+ <IO Name="Safety.PlumbingDoorClosed" IOName="r_PLUMBING_DOORS_CLOSED"/>
|
|
|
+ <IO Name="Safety.ProcessHaltButton1" IOName="r_PROCESS_HALT_BUTTON_1"/>
|
|
|
+ <IO Name="Safety.ProcessHaltButton2" IOName="r_PROCESS_HALT_BUTTON_2"/>
|
|
|
+ <IO Name="Safety.LoaderHaltButton" IOName="r_HALT_LDR_SECTION"/>
|
|
|
+ <IO Name="Safety.ModeSelectorSwitch" IOName="r_MODE_SELECTOR_SWITCH"/>
|
|
|
+ <IO Name="Safety.ModeSiren" IOName="c_MODE_SIREN"/>
|
|
|
+ <IO Name="Safety.LoaderRotationSls" IOName="r_Rotate_AMP_SLS"/>
|
|
|
+ <IO Name="Safety.LoaderSwingASls" IOName="r_Door_A_AMP_SLS"/>
|
|
|
+ <IO Name="Safety.LoaderSwingBSls" IOName="r_Door_B_AMP_SLS"/>
|
|
|
+ <IO Name="Safety.LoaderTiltASls" IOName="r_SUP_A_AMP_SLS"/>
|
|
|
+ <IO Name="Safety.LoaderTiltBSls" IOName="r_SUP_B_AMP_SLS"/>
|
|
|
+ <IO Name="Safety.Puf1VerticalSls" IOName="r_DPUF_A_VERT_SAFE_SLS"/>
|
|
|
+ <IO Name="Safety.Puf2VerticalSls" IOName="r_DPUF_B_VERT_SAFE_SLS"/>
|
|
|
+ <IO Name="Safety.LoaderGantrySls" IOName="r_Gantry_Zone_Safe_SLS_1"/>
|
|
|
+ <IO Name="Safety.LoaderElevatorSls" IOName="r_Gantry_Zone_Safe_SLS_2"/>
|
|
|
+ <IO Name="Safety.ProcessGantrySls" IOName="r_Gantry_Zone_Safe_SLS_3"/>
|
|
|
+ <IO Name="Safety.ProcessElevatorSls" IOName="r_Gantry_Zone_Safe_SLS_4"/>
|
|
|
+ <IO Name="Safety.PufVerticalDisable" IOName="r_DPUF_VERT_SAFE_Disable"/>
|
|
|
+ <IO Name="Safety.Puf1FlipRotationDisable" IOName="r_DPUF_A_PIVSUP_Disable"/>
|
|
|
+ <IO Name="Safety.Puf2FlipRotationDisable" IOName="r_DPUF_B_PIVSUP_Disable"/>
|
|
|
+ <IO Name="Safety.LoaderDisable" IOName="r_Loader_Zone_Safe_Disable"/>
|
|
|
+ <IO Name="Safety.TransporterDisable" IOName="r_Gantry_Zone_Safe_Disable"/>
|
|
|
+ <IO Name="Safety.SrdArmDisable" IOName="r_SRD_WASH_ARMS_Disable"/>
|
|
|
+ <IO Name="Safety.SrdRotationDisable" IOName="r_SRD_ROTATE_Disable"/>
|
|
|
+ <IO Name="Safety.TransporterSafeSls" IOName="r_Gantry_Zone_Safe_SLS"/>
|
|
|
+ <IO Name="Safety.LoaderSafeSls" IOName="r_Loader_Zone_Safe_SLS"/>
|
|
|
+ <IO Name="Safety.PufVerticalSafeSls" IOName="r_DPUF_VERT_SAFE_SLS"/>
|
|
|
+ <IO Name="Safety.LoaderSafeSto" IOName="r_Loader_Zone_Safe_STO"/>
|
|
|
+ <IO Name="Safety.PufVerticalSafeSto" IOName="r_DPUF_VERT_SAFE_STO"/>
|
|
|
+ <IO Name="Safety.Puf1FlipRotationSafeSto" IOName="r_DPUF_A_PIVSUP_STO"/>
|
|
|
+ <IO Name="Safety.Puf2FlipRotationSafeSto" IOName="r_DPUF_B_PIVSUP_STO"/>
|
|
|
+ <IO Name="Safety.TransporterSafeSto" IOName="r_Gantry_Zone_Safe_STO"/>
|
|
|
+ <IO Name="Safety.SrdArmSafeSto" IOName="r_SRD_WASH_STO"/>
|
|
|
+ <IO Name="Safety.SrdRotationSafeSto" IOName="r_SRD_ROTATE_STO"/>
|
|
|
+ <IO Name="Safety.PumpEdm" IOName="r_PUMP_EDM"/>
|
|
|
+ <IO Name="Safety.ReservoirHighLevel" IOName="r_SAFETY_HIGH_LEVEL"/>
|
|
|
+ <IO Name="Safety.FluidEnableEdm" IOName="r_EXT_FLUID_ENABLE_EDM"/>
|
|
|
+ <IO Name="Safety.SRDArmReset" IOName="c_Safety_SRD_Arm_Reset"/>
|
|
|
</Module>
|
|
|
<Module Name="Rinse1">
|
|
|
- <IO Name="Rinse1.WaterLevel" IOName="r_QDRD1_WATER_LEVEL"/>
|
|
|
- <IO Name="Rinse1.WaferHolderClamp" IOName="c_QDRD1_WS_CLAMP"/>
|
|
|
- <IO Name="Rinse1.N2Valve" IOName="c_QDRD1_LO_PRESSURE"/>
|
|
|
- <IO Name="Rinse1.FillValve" IOName="c_QDRD1_DI_FILL"/>
|
|
|
- <IO Name="Rinse1.DrainValve" IOName="c_QDRD1_DUMP"/>
|
|
|
- <IO Name="Rinse1.WasteValve" IOName="c_QDRD1_MDRAIN"/>
|
|
|
+ <IO Name="Rinse1.WaterLevel" IOName="r_QDRD1_WATER_LEVEL"/>
|
|
|
+ <IO Name="Rinse1.WaferHolderClamp" IOName="c_QDRD1_WS_CLAMP"/>
|
|
|
+ <IO Name="Rinse1.N2Valve" IOName="c_QDRD1_LO_PRESSURE"/>
|
|
|
+ <IO Name="Rinse1.FillValve" IOName="c_QDRD1_DI_FILL"/>
|
|
|
+ <IO Name="Rinse1.DrainValve" IOName="c_QDRD1_DUMP"/>
|
|
|
+ <IO Name="Rinse1.WasteValve" IOName="c_QDRD1_MDRAIN"/>
|
|
|
</Module>
|
|
|
<Module Name="Rinse2">
|
|
|
<IO Name="Rinse2.WaterLevel" IOName="r_QDRD2_WATER_LEVEL"/>
|