 chenkui
|
0b609ee2cd
add EFEM DoorLocked signal
|
6 maanden geleden |
|
chenkui
|
171e04deeb
update efem
|
6 maanden geleden |
 chenzk
|
ccde2b587e
revise metal loop run recipe ，add TC monitor，revise pump flow scaling
|
6 maanden geleden |
 niuyx
|
b0beffaf5a
Optimize GalilSimulator; Modify SRD simulator;
|
7 maanden geleden |
|
chenzk
|
a2948247a7
revise reservoir pump structure
|
7 maanden geleden |
|
niuyx
|
690b52a232
Revise SRD related Bugs; Modify SRD Rotation deceleration
|
7 maanden geleden |
|
chenzk
|
e7f0ca1e68
revise robot cycle bug
|
7 maanden geleden |
|
chenzk
|
2b887d9e15
add reservoir regulate pump
|
7 maanden geleden |
|
chenzk
|
8714d1f457
revise reservoir config
|
7 maanden geleden |
|
chenkui
|
aa349d89f3
update WagoControllerCfg.xml
|
7 maanden geleden |
|
niuyx
|
69d4e6919b
Add SRD UnloaderRoutine、ChuckATMRoutine; Modify EfemView;
|
7 maanden geleden |
|
niuyx
|
58c7513e6c
Modify SRD related Routines; Modify SRD recipes;
|
7 maanden geleden |
|
chenzk
|
f34c069c2e
revise UI
|
7 maanden geleden |
|
chenkui
|
18048c3726
update robot place aligner home
|
7 maanden geleden |
|
niuyx
|
48517b7d99
Add SRDLiftUpRoutine; Revise IO ModuleIOCfg.xml and SRD UI; Add SRD related Simulator;
|
7 maanden geleden |
|
niuyx
|
fb043274f4
Modify SRD related ModuleIO and variable; Revise fwdLimit display of transporter;
|
7 maanden geleden |
|
chenkui
|
374bc8bc8e
add srd wago
|
7 maanden geleden |
|
chenkui
|
2b8af86fbd
update RouteManager
|
7 maanden geleden |
|
chenkui
|
40d22dfd74
add Galil DI
|
7 maanden geleden |
|
chenkui
|
e2d5bb5c5d
update galil controller inputs
|
7 maanden geleden |
|
chenkui
|
0f6f0fbadc
update efem pick and place wafer size
|
7 maanden geleden |
|
chenkui
|
4c2922bfe9
update puf interlock
|
8 maanden geleden |
|
chenkui
|
478aa5ec7f
update puf view
|
8 maanden geleden |
|
chenkui
|
63d3440eab
update SunWayRobot
|
8 maanden geleden |
|
chenkui
|
b0887a27aa
update wago scaling
|
8 maanden geleden |
|
chenkui
|
56c86c7a9c
update Efem MapRoutine
|
8 maanden geleden |
|
chenkui
|
72b8196b8c
update wago and festo xml
|
8 maanden geleden |
|
chenkui
|
371876b350
add robot map routine
|
8 maanden geleden |
|
chenkui
|
388b234daf
add X8 EfemRobot
|
8 maanden geleden |
|
chenkui
|
136a058316
wago add group
|
8 maanden geleden |
