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				@@ -59,24 +59,28 @@ 
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				 			<DO Name="DO15"  Address="527" Invert="false"/>
 
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				 		</DOGroup>
 
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				 		<DOGroup Name="N9">
 
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				-			<DO Name="DO16"  Address="527" Invert="false"/>
 
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				-			<DO Name="DO17"  Address="528" Invert="false"/>			
 
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				+			<DO Name="c_HVD_1_HIGH"  Address="528" Invert="false"/>
 
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				+			<DO Name="c_HVD_1_ENABLE"  Address="529" Invert="false"/>			
 
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				 		</DOGroup>
 
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				 		<DOGroup Name="N10">
 
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				-			<DO Name="DO18"  Address="529" Invert="false"/>
 
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				-			<DO Name="DO9"  Address="530" Invert="false"/>			
 
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				+			<DO Name="c_HVD_2_HIGH"  Address="530" Invert="false"/>
 
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				+			<DO Name="c_HVD_2_ENABLE"  Address="531" Invert="false"/>			
 
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				 		</DOGroup>
 
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				 		<DOGroup Name="N11">
 
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				-			<DO Name="DO20"  Address="531" Invert="false"/>
 
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				-			<DO Name="DO21"  Address="532" Invert="false"/>			
 
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				+			<DO Name="\c_Door_Unlock"  Address="532" Invert="false"/>
 
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				+			<DO Name="DO21"  Address="533" Invert="false"/>			
 
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				 		</DOGroup>
 
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				+		<DOGroup Name="N12">
 
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				+			<DO Name="c_CAMERA_1_TRIGGER"  Address="534" Invert="false"/>
 
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				+			<DO Name="c_CAMERA_2_TRIGGER"  Address="535" Invert="false"/>			
 
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				+		</DOGroup>	
 
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				 	</Dig_Out>
 
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				 	<Ano_In>
 
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				 		<AIGroup Name="N1">
 
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				 			<AI Name="AI1"  Address="0" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
 
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				 			<AI Name="AI2"  Address="1" DataType="short"/>
 
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				-			<AI Name="AI3"  Address="2" DataType="short"/>
 
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				-			<AI Name="AI4"  Address="3" DataType="short"/>
 
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				+			<AI Name="r_HVD_1_ANALOG"  Address="2" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
 
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				+			<AI Name="r_HVD_2_ANALOG"  Address="3" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
 
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				 			<AI Name="r_LoaderA_LS_Vacuum_anlg"  Address="4" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
 
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				 			<AI Name="r_LoaderB_LS_Vacuum_anlg"  Address="5" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
 
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				 			<AI Name="AI6"  Address="6" DataType="short"/>
 
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				@@ -143,251 +147,251 @@ 
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				 	</Dig_Out>
 
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				 	<Ano_In>
 
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				 		<AIGroup Name="N60">
 
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				-			<AI Name="r_DPUF_A_CHUCK_A_VAC"  Address="0" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
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				-			<AI Name="r_DPUF_A_CHUCK_B_VAC"  Address="1" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
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				-			<AI Name="r_DIST_FRONT"  Address="2" Scaling="13=0,150=32767" DataType="short"/>
 
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				-			<AI Name="r_DIST_REAR"  Address="3" Scaling="13=0,150=32767" DataType="short"/>
 
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				+			<AI Name="r_DPUF_A_CHUCK_A_VAC"  Address="0" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
 
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				+			<AI Name="r_DPUF_A_CHUCK_B_VAC"  Address="1" Scaling="0=3276.7,-757=16383.5" DataType="short"/>
 
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				+			<AI Name="r_DPUF_A_CHUCK_A_WFER_SNS_1"  Address="2" Scaling="13=0,150=32767" DataType="short"/>
 
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				+			<AI Name="r_DPUF_A_CHUCK_A_WFER_SNS_2"  Address="3" Scaling="13=0,150=32767" DataType="short"/>
 
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				 		</AIGroup>
 
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				 	</Ano_In>
 
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				 	<Ano_Out>
 
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				 	</Ano_Out>
 
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				-  </WagoDeviceConfig>
 
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				-	<WagoDeviceConfig Module="Wago2" IpAddress="10.0.0.10" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1">
 
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				-		<Dig_In>
 
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				-			<DIGroup Name="20">
 
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				-				<DI Name="DI0"  Address="0" Invert="false"/>
 
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				-				<DI Name="DI1"  Address="1" Invert="false"/>
 
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				-				<DI Name="DI2"  Address="2" Invert="false"/>
 
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				-				<DI Name="DI3"  Address="3" Invert="false"/>
 
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				-				<DI Name="DI4"  Address="4" Invert="false"/>
 
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				-				<DI Name="DI5"  Address="5" Invert="false"/>
 
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				-				<DI Name="DI6"  Address="6" Invert="false"/>
 
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				-				<DI Name="DI7"  Address="7" Invert="false"/>
 
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				-				<DI Name="DI8"  Address="8" Invert="false"/>
 
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				-				<DI Name="DI9"  Address="9" Invert="false"/>
 
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				-				<DI Name="DI10"  Address="10" Invert="false"/>
 
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				-				<DI Name="DI11"  Address="11" Invert="false"/>
 
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				-				<DI Name="DI12"  Address="12" Invert="false"/>
 
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				-				<DI Name="DI13"  Address="13" Invert="false"/>
 
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				-				<DI Name="DI14"  Address="14" Invert="false"/>
 
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				-				<DI Name="DI15"  Address="15" Invert="false"/>
 
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				-			</DIGroup>
 
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				-			<DIGroup Name="21">
 
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				-				<DI Name="DI16"  Address="16" Invert="false"/>
 
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				-				<DI Name="DI17"  Address="17" Invert="false"/>
 
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				-				<DI Name="DI18"  Address="18" Invert="false"/>
 
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				-				<DI Name="DI19"  Address="19" Invert="false"/>
 
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				-				<DI Name="DI20"  Address="20" Invert="false"/>
 
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				-				<DI Name="DI21"  Address="21" Invert="false"/>
 
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				-				<DI Name="r_CONTAINMENT_FLUID"  Address="22" Invert="true"/>
 
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				-				<DI Name="r_DOOR_INLK_OK"  Address="23" Invert="false"/>
 
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				-				<DI Name="DI24"  Address="24" Invert="false"/>
 
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				-				<DI Name="DI25"  Address="25" Invert="false"/>
 
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				-				<DI Name="DI26"  Address="26" Invert="false"/>
 
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				-				<DI Name="DI27"  Address="27" Invert="false"/>
 
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				-				<DI Name="r_REAR_DOOR_INTLK"  Address="28" Invert="false"/>
 
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				-				<DI Name="r_SAMPLE_SYS_FLUID_NOT_PRESENT"  Address="29" Invert="false"/>
 
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				-				<DI Name="DI28"  Address="30" Invert="false"/>
 
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				-				<DI Name="DI29"  Address="31" Invert="false"/>
 
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				-			</DIGroup>
 
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				-			<DIGroup Name="22">
 
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				-				<DI Name="r_RES1_HI_LEVEL"  Address="32" Invert="false"/>
 
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				-				<DI Name="r_RES1_LOW_LEVEL"  Address="33" Invert="true"/>
 
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				-				<DI Name="r_RES2_HIGH_LEVEL"  Address="34" Invert="false"/>
 
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				-				<DI Name="r_RES2_LOW_LEVEL"  Address="35" Invert="true"/>
 
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				-				<DI Name="r_RES3_HIGH_LEVEL"  Address="36" Invert="false"/>
 
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				-				<DI Name="r_RES3_LOW_LEVEL"  Address="37" Invert="true"/>
 
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				-				<DI Name="r_RES4_HIGH_LEVEL"  Address="38" Invert="false"/>
 
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				-				<DI Name="r_RES4_LOW_LEVEL"  Address="39" Invert="true"/>
 
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				-				<DI Name="DI38"  Address="40" Invert="false"/>
 
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				-				<DI Name="DI39"  Address="41" Invert="false"/>
 
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				-				<DI Name="DI40"  Address="42" Invert="false"/>
 
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				-				<DI Name="DI41"  Address="43" Invert="false"/>
 
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				-				<DI Name="DI42"  Address="44" Invert="false"/>
 
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				-				<DI Name="DI43"  Address="45" Invert="false"/>
 
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				-				<DI Name="DI44"  Address="46" Invert="false"/>
 
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				-				<DI Name="DI45"  Address="47" Invert="false"/>
 
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				-			</DIGroup>
 
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				-			<DIGroup Name="30">
 
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				-				<DI Name="DI46"  Address="48" Invert="false"/>
 
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				-				<DI Name="DI47"  Address="49" Invert="false"/>
 
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				-			</DIGroup>
 
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				-		</Dig_In>
 
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				-		<Dig_Out>
 
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				-			<DOGroup Name="23">
 
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				-				<DO Name="c_CDA_ENABLE"  Address="512" Invert="false"/>
 
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				-				<DO Name="c_DI_ENABLE"  Address="513" Invert="false"/>
 
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				-				<DO Name="c_DI_FILL_ENABLE"  Address="514" Invert="false"/>
 
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				-				<DO Name="c_DI_REPLEN_ENABLE"  Address="515" Invert="false"/>
 
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				-				<DO Name="c_EXTERNAL_CDA_ENABLE"  Address="516" Invert="false"/>
 
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				-				<DO Name="c_HCW_ENABLE"  Address="517" Invert="false"/>
 
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				-				<DO Name="DO6"  Address="518" Invert="false"/>
 
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				-				<DO Name="c_N2_ENABLEc_QDRD1_LO_PRESSURE"  Address="519" Invert="false"/>
 
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				-				<DO Name="c_QDRD1_LO_PRESSURE"  Address="520" Invert="false"/>
 
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				-				<DO Name="c_QDRD2_LO_PRESSURE"  Address="521" Invert="false"/>
 
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				-				<DO Name="c_QDRD3_LO_PRESSURE"  Address="522" Invert="false"/>
 
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				-				<DO Name="c_QDRD4_LO_PRESSURE"  Address="523" Invert="false"/>
 
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				-				<DO Name="DO12"  Address="524" Invert="false"/>
 
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				-				<DO Name="DO13"  Address="525" Invert="false"/>
 
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				-				<DO Name="DO14"  Address="526" Invert="false"/>
 
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				-				<DO Name="DO15"  Address="527" Invert="false"/>
 
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				-			</DOGroup>
 
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				-			<DOGroup Name="24">
 
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				-				<DO Name="DO16"  Address="528" Invert="false"/>
 
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				-				<DO Name="DO17"  Address="529" Invert="false"/>
 
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				-				<DO Name="DO18"  Address="530" Invert="false"/>
 
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				-				<DO Name="DO19"  Address="531" Invert="false"/>
 
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				-				<DO Name="DO20"  Address="532" Invert="false"/>
 
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				-				<DO Name="DO21"  Address="533" Invert="false"/>
 
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				-				<DO Name="DO22"  Address="534" Invert="false"/>
 
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				-				<DO Name="DO23"  Address="535" Invert="false"/>
 
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				-				<DO Name="DO24"  Address="536" Invert="false"/>
 
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				-				<DO Name="DO25"  Address="537" Invert="false"/>
 
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				-				<DO Name="DO26"  Address="538" Invert="false"/>
 
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				-				<DO Name="DO27"  Address="539" Invert="false"/>
 
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				-				<DO Name="DO28"  Address="540" Invert="false"/>
 
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				-				<DO Name="DO29"  Address="541" Invert="false"/>
 
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				-				<DO Name="DO30"  Address="542" Invert="false"/>
 
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				-				<DO Name="DO31"  Address="543" Invert="false"/>
 
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				-			</DOGroup>
 
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				-			<DOGroup Name="25">
 
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				-				<DO Name="c_METAL1_PUMP_ON"  Address="544" Invert="false"/>
 
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				-				<DO Name="DO33"  Address="545" Invert="false"/>
 
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				-			</DOGroup>
 
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				-			<DOGroup Name="26">
 
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				-				<DO Name="c_METAL2_PUMP_ON"  Address="546" Invert="false"/>
 
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				-				<DO Name="c_HED1_POWER_ON"  Address="547" Invert="false"/>
 
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				-			</DOGroup>
 
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				-			<DOGroup Name="27">
 
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				-				<DO Name="c_HED2_POWER_ON"  Address="548" Invert="false"/>
 
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				-				<DO Name="DO37"  Address="549" Invert="false"/>
 
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				-			</DOGroup>
 
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				-			<DOGroup Name="28">
 
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				-				<DO Name="c_METAL3_PUMP_ON"  Address="550" Invert="false"/>
 
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				-				<DO Name="DO39"  Address="551" Invert="false"/>
 
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				-			</DOGroup>
 
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				-			<DOGroup Name="29">
 
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				-				<DO Name="c_RES3_POWER_ON"  Address="552" Invert="false"/>
 
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				-				<DO Name="DO41"  Address="553" Invert="false"/>
 
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				-			</DOGroup>
 
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				-		</Dig_Out>
 
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				-		<Ano_In>
 
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				-			<AIGroup Name="1">
 
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				-				<AI Name="r_pH2"  Address="0" Scaling="0=3276.7,14=32767" DataType="short"/>
 
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				-				<AI Name="AI1"  Address="1" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
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				-				<AI Name="AI2"  Address="2" Scaling="13=0,150=32767" DataType="short"/>
 
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				-				<AI Name="AI3"  Address="3" Scaling="13=0,150=32767" DataType="short"/>
 
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				-			</AIGroup>
 
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				-			<AIGroup Name="2">
 
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				-				<AI Name="AI4"  Address="4" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
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				-				<AI Name="AI5"  Address="5" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
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				-				<AI Name="r_PREWET_DI_PRESS"  Address="6" Scaling="0=3276.7,100=32767" DataType="short"/>
 
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				-				<AI Name="AI7"  Address="7" Scaling="13=0,150=32767" DataType="short"/>
 
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				-			</AIGroup>
 
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				-			<AIGroup Name="3">
 
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				 | 
				 | 
			
			
				-				<AI Name="AI8"  Address="8" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI9"  Address="9" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_PREWET_FLOW"  Address="10" Scaling="0=3276.7,40=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_DI_WATER_PRESSURE"  Address="11" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="4">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_PUMP1_FLOW"  Address="12" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI13"  Address="13" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_PUMP2_FLOW"  Address="14" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI15"  Address="15" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="5">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_PUMP3_FLOW"  Address="16" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI17"  Address="17" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_PUMP4_FLOW"  Address="18" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI19"  Address="19" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="6">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI20"  Address="20" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI21"  Address="21" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI22"  Address="22" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI23"  Address="23" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="7">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI24"  Address="24" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI25"  Address="25" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI26"  Address="26" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI27"  Address="27" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="8">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_QDRD1_WATER_LEVEL"  Address="28" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_QDRD2_WATER_LEVEL"  Address="29" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_QDRD3_WATER_LEVEL"  Address="30" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_QDRD4_WATER_LEVEL"  Address="31" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="9">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI32"  Address="32" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI33"  Address="33" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI34"  Address="34" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI35"  Address="35" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="10">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_RES_LEVEL_1_raw"  Address="36" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_RES_LEVEL_2_raw"  Address="37" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_RES_LEVEL_3_raw"  Address="38" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_RES_LEVEL_4_raw"  Address="39" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="11">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI40"  Address="40" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI41"  Address="41" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI42"  Address="42" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_HCW_FLOW"  Address="43" Scaling="0=3276.7,40=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="12">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_CDA_EXTERNAL_PRESSURE"  Address="44" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_CDA_HIGH_PRESSURE"  Address="45" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_CDA_LOW_PRESSURE"  Address="46" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI47"  Address="47" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="13">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI48"  Address="48" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_N2_1_LOW_PRESSURE"  Address="49" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_N2_1_PRESSURE"  Address="50" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_N2_2_LOW_PRESSURE"  Address="51" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AIGroup Name="14">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_N2_2_PRESSURE"  Address="52" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_PROC_BALANCE_PRESSURE"  Address="53" Scaling="0=3276.7,14.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="r_SYSTEM_VACUUM"  Address="54" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AI Name="AI55"  Address="55" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-		</Ano_In>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-		<Ano_Out>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AOGroup Name="15">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO1"  Address="512" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO2"  Address="513" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO3"  Address="514" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO4"  Address="515" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AOGroup Name="16">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO5"  Address="516" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO6"  Address="517" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO7"  Address="518" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO8"  Address="519" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AOGroup Name="17">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO9"  Address="516" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO10"  Address="517" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO11"  Address="518" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO8"  Address="519" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AOGroup Name="18">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO12"  Address="516" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO13"  Address="517" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO14"  Address="518" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO15"  Address="519" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			<AOGroup Name="19">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO16"  Address="516" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO17"  Address="517" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO18"  Address="518" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-				<AO Name="AO19"  Address="519" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-			</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-		</Ano_Out>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				-	</WagoDeviceConfig>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+</WagoDeviceConfig>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+<WagoDeviceConfig Module="Wago2" IpAddress="10.0.0.10" Port="502" SendTimeout="2000" RecvTimeout="2000" Channel="1">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+	<Dig_In>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DIGroup Name="20">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI0"  Address="0" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI1"  Address="1" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI2"  Address="2" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI3"  Address="3" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI4"  Address="4" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI5"  Address="5" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI6"  Address="6" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI7"  Address="7" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI8"  Address="8" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI9"  Address="9" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI10"  Address="10" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI11"  Address="11" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI12"  Address="12" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI13"  Address="13" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI14"  Address="14" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI15"  Address="15" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DIGroup Name="21">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI16"  Address="16" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI17"  Address="17" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI18"  Address="18" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI19"  Address="19" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI20"  Address="20" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI21"  Address="21" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_CONTAINMENT_FLUID"  Address="22" Invert="true"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_DOOR_INLK_OK"  Address="23" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI24"  Address="24" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI25"  Address="25" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI26"  Address="26" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI27"  Address="27" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_REAR_DOOR_INTLK"  Address="28" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_SAMPLE_SYS_FLUID_NOT_PRESENT"  Address="29" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI28"  Address="30" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI29"  Address="31" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DIGroup Name="22">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_RES1_HI_LEVEL"  Address="32" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_RES1_LOW_LEVEL"  Address="33" Invert="true"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_RES2_HIGH_LEVEL"  Address="34" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_RES2_LOW_LEVEL"  Address="35" Invert="true"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_RES3_HIGH_LEVEL"  Address="36" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_RES3_LOW_LEVEL"  Address="37" Invert="true"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_RES4_HIGH_LEVEL"  Address="38" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="r_RES4_LOW_LEVEL"  Address="39" Invert="true"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI38"  Address="40" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI39"  Address="41" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI40"  Address="42" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI41"  Address="43" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI42"  Address="44" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI43"  Address="45" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI44"  Address="46" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI45"  Address="47" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DIGroup Name="30">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI46"  Address="48" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DI Name="DI47"  Address="49" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+	</Dig_In>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+	<Dig_Out>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DOGroup Name="23">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_CDA_ENABLE"  Address="512" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_DI_ENABLE"  Address="513" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_DI_FILL_ENABLE"  Address="514" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_DI_REPLEN_ENABLE"  Address="515" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_EXTERNAL_CDA_ENABLE"  Address="516" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_HCW_ENABLE"  Address="517" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO6"  Address="518" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_N2_ENABLEc_QDRD1_LO_PRESSURE"  Address="519" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_QDRD1_LO_PRESSURE"  Address="520" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_QDRD2_LO_PRESSURE"  Address="521" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_QDRD3_LO_PRESSURE"  Address="522" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_QDRD4_LO_PRESSURE"  Address="523" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO12"  Address="524" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO13"  Address="525" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO14"  Address="526" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO15"  Address="527" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DOGroup Name="24">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO16"  Address="528" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO17"  Address="529" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO18"  Address="530" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO19"  Address="531" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO20"  Address="532" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO21"  Address="533" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO22"  Address="534" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO23"  Address="535" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO24"  Address="536" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO25"  Address="537" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO26"  Address="538" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO27"  Address="539" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO28"  Address="540" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO29"  Address="541" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO30"  Address="542" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO31"  Address="543" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DOGroup Name="25">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_METAL1_PUMP_ON"  Address="544" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO33"  Address="545" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DOGroup Name="26">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_METAL2_PUMP_ON"  Address="546" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_HED1_POWER_ON"  Address="547" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DOGroup Name="27">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_HED2_POWER_ON"  Address="548" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO37"  Address="549" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DOGroup Name="28">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_METAL3_PUMP_ON"  Address="550" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO39"  Address="551" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<DOGroup Name="29">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="c_RES3_POWER_ON"  Address="552" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<DO Name="DO41"  Address="553" Invert="false"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</DOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+	</Dig_Out>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+	<Ano_In>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="1">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_pH2"  Address="0" Scaling="0=3276.7,14=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI1"  Address="1" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI2"  Address="2" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI3"  Address="3" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="2">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI4"  Address="4" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI5"  Address="5" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_PREWET_DI_PRESS"  Address="6" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI7"  Address="7" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="3">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI8"  Address="8" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI9"  Address="9" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_PREWET_FLOW"  Address="10" Scaling="0=3276.7,40=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_DI_WATER_PRESSURE"  Address="11" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="4">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_PUMP1_FLOW"  Address="12" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI13"  Address="13" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_PUMP2_FLOW"  Address="14" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI15"  Address="15" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="5">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_PUMP3_FLOW"  Address="16" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI17"  Address="17" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_PUMP4_FLOW"  Address="18" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI19"  Address="19" Scaling="0=3276.7,40=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="6">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI20"  Address="20" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI21"  Address="21" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI22"  Address="22" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI23"  Address="23" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="7">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI24"  Address="24" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI25"  Address="25" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI26"  Address="26" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI27"  Address="27" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="8">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_QDRD1_WATER_LEVEL"  Address="28" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_QDRD2_WATER_LEVEL"  Address="29" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_QDRD3_WATER_LEVEL"  Address="30" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_QDRD4_WATER_LEVEL"  Address="31" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="9">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI32"  Address="32" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI33"  Address="33" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI34"  Address="34" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI35"  Address="35" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="10">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_RES_LEVEL_1_raw"  Address="36" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_RES_LEVEL_2_raw"  Address="37" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_RES_LEVEL_3_raw"  Address="38" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_RES_LEVEL_4_raw"  Address="39" Scaling="0=3276.7,100=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="11">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI40"  Address="40" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI41"  Address="41" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI42"  Address="42" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_HCW_FLOW"  Address="43" Scaling="0=3276.7,40=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="12">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_CDA_EXTERNAL_PRESSURE"  Address="44" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_CDA_HIGH_PRESSURE"  Address="45" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_CDA_LOW_PRESSURE"  Address="46" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI47"  Address="47" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="13">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI48"  Address="48" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_N2_1_LOW_PRESSURE"  Address="49" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_N2_1_PRESSURE"  Address="50" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_N2_2_LOW_PRESSURE"  Address="51" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AIGroup Name="14">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_N2_2_PRESSURE"  Address="52" Scaling="0=3276.7,145=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_PROC_BALANCE_PRESSURE"  Address="53" Scaling="0=3276.7,14.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="r_SYSTEM_VACUUM"  Address="54" Scaling="0=3276.7,-757.5=16383.5" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AI Name="AI55"  Address="55" Scaling="13=0,150=32767" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AIGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+	</Ano_In>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+	<Ano_Out>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AOGroup Name="15">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO1"  Address="512" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO2"  Address="513" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO3"  Address="514" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO4"  Address="515" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AOGroup Name="16">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO5"  Address="516" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO6"  Address="517" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO7"  Address="518" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO8"  Address="519" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AOGroup Name="17">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO9"  Address="516" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO10"  Address="517" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO11"  Address="518" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO8"  Address="519" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AOGroup Name="18">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO12"  Address="516" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO13"  Address="517" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO14"  Address="518" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO15"  Address="519" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		<AOGroup Name="19">
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO16"  Address="516" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO17"  Address="517" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO18"  Address="518" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+			<AO Name="AO19"  Address="519" DataType="short"/>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+		</AOGroup>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+	</Ano_Out>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				+</WagoDeviceConfig>
 
			 | 
		
	
		
			
				 | 
				 | 
			
			
				 </WagoControllerConfig> 
			 |