 jiangjy
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9485a62b49
transferJob走 foupEnter判定逻辑以及参数下发
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3 weeks ago |
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jiangjy
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77f9a9c881
fix 去除FIMSLoadRputine模块 FIMSLoadCheckLAO2 方法，当同时压氧load的时候，氧气分析仪只会在一侧，然后另一个等待，但是 Check方法会失败，导致error
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1 month ago |
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jiangjy
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89f1362802
fix 新增fimsManualCheck配置，防止auto 模式下，氧气分析仪切换有问题导致Load Check fail
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1 month ago |
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jiangjy
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2f74be3091
fix fims stop/abort操作 需要关闭压氧
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4 months ago |
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jiangjy
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ba01484f34
FIMS 压氧load 添加LA 浓度检测判断
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4 months ago |
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jiangjy
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7f04b651f3
fix 新增buffer ffu
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4 months ago |
|
jiangjy
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ce32494f1f
update
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4 months ago |
|
jiangjy
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0f9aaa1d69
同步仿真
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4 months ago |
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jiangjy
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7c24d80c1b
门开之后检查是否位移
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4 months ago |
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jiangjy
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97998f5065
应用fims load overtime
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4 months ago |
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jiangjy
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13525e2b67
update FIMS load后检查是否wafer移位
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4 months ago |
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jiangjy
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db05d90757
fims load
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4 months ago |
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jiangjy
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4b8b0a1ed2
update robot 光感
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4 months ago |
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jiangjy
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5d07d1f230
update
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4 months ago |
 Xiongbing
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8a92153c16
|
5 months ago |
 Zhangjian
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ebb8df2be2
|
9 months ago |
|
Zhangjian
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36c89b0e09
|
11 months ago |
 Admin
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5b20d708e9
delete all
|
11 months ago |
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Admin
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ba1a082f9e
init
|
1 year ago |
