fix fims stop/abort操作 需要关闭压氧

Furnace/FurnaceRT/Equipments/FIMSs/FIMSLoadRoutine.cs

@@ -67,10 +67,10 @@ namespace FurnaceRT.Equipments.FIMSs
                     return Result.FAIL;
                 }
                 _pmModule?.SetN2PurgeParameters();
+
             }
 
-            _pmModule?.SetN2PurgeProcess(_isNeedN2Purge);
-          
+
             if (_fimsModule.FIMSDevice.IsLoadCompleted)
             {
                 EV.PostInfoLog(Module, $"{Module} already at load position");
@@ -78,6 +78,7 @@ namespace FurnaceRT.Equipments.FIMSs
                 _fimsModule.FIMSDevice.IsUnloadCompleted = false;
                 return Result.DONE;
             }
+            _pmModule?.SetN2PurgeProcess(_isNeedN2Purge);
 
             if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime"))
             {
@@ -119,13 +120,9 @@ namespace FurnaceRT.Equipments.FIMSs
             }
             catch (RoutineFaildException)
             {
-
                 _fimsModule.Stop();
                 return Result.FAIL;
             }
-
-
-            _pmModule?.SetN2PurgeProcess(false);
             _fimsModule.FIMSDevice.IsLoadCompleted = true;
             _fimsModule.Stop();
             Notify($"{_fimsModule.Name} {Name} finished");

Furnace/FurnaceRT/Equipments/FIMSs/FIMSModule.cs

@@ -11,6 +11,8 @@ using Aitex.Core.RT.SCCore;
 using Aitex.Core.Util;
 using Aitex.Core.Utilities;
 using Aitex.Sorter.Common;
+using FurnaceRT.Equipments.PMs;
+using FurnaceRT.Equipments.Systems;
 using MECF.Framework.Common.Alarms;
 using MECF.Framework.Common.Device.Bases;
 using MECF.Framework.Common.Equipment;
@@ -348,6 +350,7 @@ namespace FurnaceRT.Equipments.FIMSs
         }
         private bool FsmAbortTask(object[] param)
         {
+            (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule)?.SetN2PurgeProcess(false);
             return true;
         }
 

Furnace/FurnaceRT/Equipments/FIMSs/FIMSModuleDevice.cs

@@ -4,9 +4,12 @@ using Aitex.Core.RT.Device.Unit;
 using Aitex.Core.RT.Event;
 using Aitex.Core.RT.OperationCenter;
 using Aitex.Core.RT.SCCore;
+using Aitex.Core.Util;
 using Aitex.Core.Utilities;
 using Aitex.Sorter.Common;
 using FurnaceRT.Devices;
+using FurnaceRT.Equipments.PMs;
+using FurnaceRT.Equipments.Systems;
 using MECF.Framework.Common.Alarms;
 using MECF.Framework.Common.Equipment;
 using MECF.Framework.Common.Event;
@@ -87,6 +90,7 @@ namespace FurnaceRT.Equipments.FIMSs
         public void Stop()
         {
             FIMSDevice.Stop();
+            (Singleton<EquipmentManager>.Instance.Modules[ModuleName.PM1] as PMModule)?.SetN2PurgeProcess(false);
             return;
         }
     }

Furnace/FurnaceRT/Equipments/FIMSs/FIMSUnloadRoutine.cs

@@ -87,8 +87,8 @@ namespace FurnaceRT.Equipments.FIMSs
             }
             if (_isNeedN2Purge)
                 _pmModule?.SetN2PurgeParameters();
-            _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), _isNeedN2Purge);
 
+        
             return Result.RUN;
         }