git-svn-id: http://10.4.3.168:50001/svn/Furnace@87 dbcde07d-dcf5-c148-8a84-ac3097b7778e

Furnace/FurnaceRT/Equipments/FIMSs/FIMSLoadRoutine.cs

@@ -77,10 +77,20 @@ namespace FurnaceRT.Equipments.FIMSs
             _fimsModule.FIMSDevice.IsLoadCompleted = false;
             _fimsModule.FIMSDevice.IsUnloadCompleted = false;
 
+            if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime"))
+            {
+                _timeout = (int)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
+            }
+
             if (_isNeedN2Purge)
+            {
                 _pmModule?.SetN2PurgeParameters();
+                _pmModule?.SetAVParameter(ModuleHelper.Converter(Module), _isNeedN2Purge);
+                _pmModule?.SetN2PurgeProcess(_isNeedN2Purge);
+            }
             _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), _isNeedN2Purge);
 
+
             return Result.RUN;
         }
 
@@ -105,11 +115,14 @@ namespace FurnaceRT.Equipments.FIMSs
             catch (RoutineFaildException)
             {
                 _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
+                _pmModule?.SetAVParameter(ModuleHelper.Converter(Module), false);
                 _fimsModule.Stop();
                 return Result.FAIL;
             }
 
             _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), false);
+            _pmModule?.SetAVParameter(ModuleHelper.Converter(Module), false);
+            _pmModule?.SetN2PurgeProcess(false);
             _fimsModule.FIMSDevice.IsLoadCompleted = true;
             _fimsModule.Stop();
             Notify($"{_fimsModule.Name} {Name} finished");

Furnace/FurnaceRT/Equipments/FIMSs/FIMSUnloadRoutine.cs

@@ -75,7 +75,12 @@ namespace FurnaceRT.Equipments.FIMSs
             Notify($"{_fimsModule.Name} {Name} start");
             _fimsModule.FIMSDevice.IsLoadCompleted = false;
             _fimsModule.FIMSDevice.IsUnloadCompleted = false;
-            
+
+            if (SC.ContainsItem("PM1.N2Purge.FOUPOpenerStableWaitTime"))
+            {
+                _timeout = (int)SC.GetValue<double>("PM1.N2Purge.FOUPOpenerStableWaitTime");
+            }
+
             if (_isNeedN2Purge)
                 _pmModule?.SetN2PurgeParameters();
             _pmModule?.SetN2PurgeFIMS1O2CheckEnable(ModuleHelper.Converter(Module), _isNeedN2Purge);

Furnace/FurnaceUI/Views/Maintenances/FIMSSensorViewModel.cs

@@ -15,6 +15,7 @@ using System;
 using Aitex.Core.RT.Log;
 using System.Linq;
 using System.Windows;
+using MECF.Framework.UI.Client.CenterViews.Configs.SystemConfig;
 
 namespace FurnaceUI.Views.Maintenances
 {
@@ -50,7 +51,8 @@ namespace FurnaceUI.Views.Maintenances
 
         public void Load(object target)
         {
-            InvokeClient.Instance.Service.DoOperation($"{target}.Load");
+            var valueConfig = SystemConfigProvider.Instance.GetValueByName("PM1.N2Purge.WaferCharge.FOUPN2PurgeEnable");
+            InvokeClient.Instance.Service.DoOperation($"{target}.Load", new object[] { valueConfig });
         }
 
         public void Unload(object target)