| .. |
|
PM
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
1 mês atrás |
|
TM
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
1 mês atrás |
|
ClusterGemModel.xml
|
60e9a04892
Simulator LP3 Update
|
1 ano atrás |
|
DBModel.sql
|
a9d8e56970
1.扩展alarm list
|
7 meses atrás |
|
DataGroup.xml
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
11 meses atrás |
|
DeviceModel.xsd
|
d8e5f1dc2c
2022 last update
|
2 anos atrás |
|
EquipmentVariables.xml
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
1 mês atrás |
|
EventDefine.xml
|
3f9c41937a
update for event module enhancement
|
2 anos atrás |
|
IoProviderConfig.xml
|
f92e6abb17
1.添加Kepler2300 功能代码
|
2 meses atrás |
|
IoProviderConfig_Kepler2300.xml
|
f92e6abb17
1.添加Kepler2300 功能代码
|
2 meses atrás |
|
LogDefine.json
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
1 mês atrás |
|
RecipeFormat.xml
|
9760d40cf7
port simulator
|
2 anos atrás |
|
SVID.xls
|
25954d684c
update EquipmentVariables.xml and Secsgem dll
|
9 meses atrás |
|
SequenceFormat.xml
|
add331513f
1.WaferHistory与ProcessHistory 添加 Carrier ID，Process History 切recipe 保留原查询信息
|
5 meses atrás |
|
SignalTower.xml
|
33d0cd73dd
1.修复Pump Counter 显示错误bug
|
8 meses atrás |
|
System_Kepler2200.sccfg
|
f92e6abb17
1.添加Kepler2300 功能代码
|
2 meses atrás |
|
System_Kepler2300.sccfg
|
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警
|
1 mês atrás |
|
VenusPreProcess.py
|
64c7ef574e
log
|
2 anos atrás |
|
VenusSignalTower.xml
|
b6309f712c
upload for Venus SE/DE
|
5 meses atrás |
lixiang
031a4236bf
1.添加TMP Water Flow与Lid Water Flow 报警