lixiang 031a4236bf 1.添加TMP Water Flow与Lid Water Flow 报警 il y a 1 mois
..
PM 031a4236bf 1.添加TMP Water Flow与Lid Water Flow 报警 il y a 1 mois
TM 031a4236bf 1.添加TMP Water Flow与Lid Water Flow 报警 il y a 1 mois
ClusterGemModel.xml 60e9a04892 Simulator LP3 Update il y a 1 an
DBModel.sql a9d8e56970 1.扩展alarm list il y a 7 mois
DataGroup.xml a98efc8a0b 1.修改kepler2300 FDC 运行报错bug il y a 11 mois
DeviceModel.xsd d8e5f1dc2c 2022 last update il y a 2 ans
EquipmentVariables.xml 031a4236bf 1.添加TMP Water Flow与Lid Water Flow 报警 il y a 1 mois
EventDefine.xml 3f9c41937a update for event module enhancement il y a 2 ans
IoProviderConfig.xml f92e6abb17 1.添加Kepler2300 功能代码 il y a 2 mois
IoProviderConfig_Kepler2300.xml f92e6abb17 1.添加Kepler2300 功能代码 il y a 2 mois
LogDefine.json 031a4236bf 1.添加TMP Water Flow与Lid Water Flow 报警 il y a 1 mois
RecipeFormat.xml 9760d40cf7 port simulator il y a 2 ans
SVID.xls 25954d684c update EquipmentVariables.xml and Secsgem dll il y a 9 mois
SequenceFormat.xml add331513f 1.WaferHistory与ProcessHistory 添加 Carrier ID,Process History 切recipe 保留原查询信息 il y a 5 mois
SignalTower.xml 33d0cd73dd 1.修复Pump Counter 显示错误bug il y a 8 mois
System_Kepler2200.sccfg f92e6abb17 1.添加Kepler2300 功能代码 il y a 2 mois
System_Kepler2300.sccfg 031a4236bf 1.添加TMP Water Flow与Lid Water Flow 报警 il y a 1 mois
VenusPreProcess.py 64c7ef574e log il y a 2 ans
VenusSignalTower.xml b6309f712c upload for Venus SE/DE il y a 5 mois