Kepler-Release/Venus/Venus_RT/Config/LogDefine.json

[
  {
    "Id": 1,
    "Level": "Info",
    "LogEnum": "EV_LOGOFF_INFO",
    "GlobalDescription_zh": "用户'{0}'注销登录",
    "GlobalDescription_en": "",
    "Module": "System",
    "Note": "用户注销登录"

  },
  {
    "Id": 2,
    "Level": "Info",
    "LogEnum": "EV_LOGOUT_INFO",
    "GlobalDescription_zh": "强制用户{0}登出，原因：{1}",
    "GlobalDescription_en": "Force user {0} logout system，reason:{1}。",
    "Module": "System",
    "Note": ""
  },
  {
    "Id": 3,
    "Level": "Error",
    "LogEnum": "ERR_LOGOFF_ERROR",
    "GlobalDescription_zh": "注销用户{0}发生异常",
    "GlobalDescription_en": "",
    "Module": "System",
    "Note": ""
  },
  {
    "Id": 4,
    "Level": "Error",
    "LogEnum": "ERR_UPDATE_PW_ERROR",
    "GlobalDescription_zh": "修改账号{0}的密码失败",
    "GlobalDescription_en": "",
    "Module": "System",
    "Note": ""
  },
  {
    "Id": 5,
    "Level": "Error",
    "LogEnum": "ERR_DELETE_USER_ERROR",
    "GlobalDescription_zh": "删除账号{0}发生异常",
    "GlobalDescription_en": "",
    "Module": "System",
    "Note": ""
  },
  {
    "Id": 6,
    "Level": "Error",
    "LogEnum": "ERR_UPDATE_USER_ERROR",
    "GlobalDescription_zh": "更新账号{0}资料发生异常",
    "GlobalDescription_en": "",
    "Module": "System",
    "Note": ""
  },
  {
    "Id": 9,
    "Level": "Error",
    "LogEnum": "ERR_WCF_OPEN_ERROR",
    "GlobalDescription_zh": "WCF服务{0}未能打开,原因:{1}",
    "GlobalDescription_en": "WCF Service{0}can not open,reason:{1} ",
    "Module": "System",
    "Note": "wcf未能打开"
  },
  {
    "Id": 10,
    "Level": "Info",
    "LogEnum": "EV_ROUTINE_NOTIFY",
    "GlobalDescription_zh": "[{0}] routine, {1}",
    "GlobalDescription_en": "[{0}] routine, {1}",
    "Module": "System",
    "Note": "Routine Notify"
  },
  {
    "Id": 11,
    "Level": "Warning",
    "LogEnum": "WARN_DEFAULT_WARN",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Default Warning"
  },
  {
    "Id": 12,
    "Level": "Error",
    "LogEnum": "ERR_ROUTINE_FAILED",
    "GlobalDescription_zh": "[{0}] routine failed, {1}",
    "GlobalDescription_en": "[{0}] routine failed, {1}",
    "Module": "System",
    "Note": "Routine Failed"
  },
  {
    "Id": 13,
    "Level": "Error",
    "LogEnum": "ERR_SIGNAL_TOWER_UNDEFINE",
    "GlobalDescription_zh": "Undefined light： {0}",
    "GlobalDescription_en": "Undefined light： {0}",
    "Module": "System",
    "Note": "Undefined light： {0}"
  },
  {
    "Id": 14,
    "Level": "Error",
    "LogEnum": "ERR_SIGNAL_TOWER_INVALID_CFG",
    "GlobalDescription_zh": "signal tower config file has invalid set, {0}",
    "GlobalDescription_en": "signal tower config file has invalid set, {0}",
    "Module": "System",
    "Note": "Invalid config"
  },
  {
    "Id": 15,
    "Level": "Error",
    "LogEnum": "ERR_PLC_HEARTBEAT_FAIL",
    "GlobalDescription_zh": "{0}心跳停止,判PLC运行失败，请检查PLC运行情况。",
    "GlobalDescription_en": "{0}HeatBeat Stop,PLC status error, please check it",
    "Module": "System",
    "Note": "Invalid config"
  },
  {
    "Id": 16,
    "Level": "Info",
    "LogEnum": "EV_DEVICE_INFO",
    "GlobalDescription_zh": "Device Info: {0}",
    "GlobalDescription_en": "Device Info: {0}",
    "Module": "System",
    "Note": "Device Info"
  },
  {
    "Id": 17,
    "Level": "Error",
    "LogEnum": "ERR_DEVICE_INFO",
    "GlobalDescription_zh": "Device Error: {0}",
    "GlobalDescription_en": "Device Error: {0}",
    "Module": "System",
    "Note": "Device Error"
  },
  {
    "Id": 18,
    "Level": "Error",
    "LogEnum": "ERR_EXCEPTION",
    "GlobalDescription_zh": "异常：{0}",
    "GlobalDescription_en": "Exception:{0}。",
    "Module": "System",
    "Note": ""
  },
  {
    "Id": 19,
    "Level": "Warning",
    "LogEnum": "WARN_DEVICE_INFO",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Device Warning"
  },
  {
    "Id": 20,
    "Level": "Info",
    "LogEnum": "EV_WAFER_MANAGER_NOTIFY",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Wafermanager Notify"
  },
  {
    "Id": 21,
    "Level": "Warning",
    "LogEnum": "WARN_WAFER_MANAGER_WARN",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Wafermanager Warning"
  },
  {
    "Id": 22,
    "Level": "Error",
    "LogEnum": "ERR_WAFER_MANAGER_FAILED",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Wafermanager Failed"
  },
  {
    "Id": 23,
    "Level": "Info",
    "LogEnum": "EV_FSM_NOTIFY",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "FSM Notify"
  },
  {
    "Id": 24,
    "Level": "Warning",
    "LogEnum": "WARN_FSM_WARN",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "FSM Warning"
  },
  {
    "Id": 25,
    "Level": "Error",
    "LogEnum": "ERR_FSM_FAILED",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "FSM Failed"
  },
  {
    "Id": 26,
    "Level": "Info",
    "LogEnum": "EV_ROUTER",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Router Notify"
  },
  {
    "Id": 27,
    "Level": "Warning",
    "LogEnum": "WARN_ROUTER",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Router Warning"
  },
  {
    "Id": 28,
    "Level": "Error",
    "LogEnum": "ERR_ROUTER",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Router Failed"
  },
  {
    "Id": 29,
    "Level": "Info",
    "LogEnum": "EV_WAFER_MOVED",
    "GlobalDescription_zh": "Wafer {0} moved from {1} {2} to {3} {4}",
    "GlobalDescription_en": "Wafer {0} moved from {1} {2} to {3} {4}",
    "Module": "System",
    "Note": "Wafer Moved"
  },
  {
    "Id": 30,
    "Level": "Info",
    "LogEnum": "EV_WAFER_CREATE",
    "GlobalDescription_zh": "Wafer created at {0} slot {1}, status is {2}.",
    "GlobalDescription_en": "Wafer created at {0} slot {1}, status is {2}.",
    "Module": "System",
    "Note": "Wafer Created"
  },
  {
    "Id": 31,
    "Level": "Info",
    "LogEnum": "EV_WAFER_DELETE",
    "GlobalDescription_zh": "Wafer deleted from {0} slot {1}.",
    "GlobalDescription_en": "Wafer deleted from {0} slot {1}.",
    "Module": "System",
    "Note": "Wafer Deleted"
  },
  {
    "Id": 32,
    "Level": "Info",
    "LogEnum": "EV_SEQUENCE",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Sequence Info"
  },
  {
    "Id": 33,
    "Level": "Warning",
    "LogEnum": "WARN_SEQUENCE",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Sequence Warning"
  },
  {
    "Id": 34,
    "Level": "Error",
    "LogEnum": "ERR_SEQUENCE",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Sequence Failed"
  },
  {
    "Id": 35,
    "Level": "Error",
    "LogEnum": "ERR_INTERLOCK_FAIL",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Interlock Failed"
  },
  {
    "Id": 36,
    "Level": "Info",
    "LogEnum": "EV_SYSTEM_CONFIG",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Configuration Info"
  },
  {
    "Id": 37,
    "Level": "Warning",
    "LogEnum": "WARN_SYSTEM_CONFIG",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "Configuration Warning"
  },
  {
    "Id": 38,
    "Level": "Info",
    "LogEnum": "EV_SCHEDULER",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": ""
  },
  {
    "Id": 39,
    "Level": "Warning",
    "LogEnum": "WARN_SCHEDULER",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": ""
  },
  {
    "Id": 40,
    "Level": "Warning",
    "LogEnum": "EXCEP_FSM",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "FSM Exception"
  },
  {
    "Id": 41,
    "Level": "Warning",
    "LogEnum": "EV_WAFER_DUPLICATED",
    "GlobalDescription_zh": "Create duplicated wafer {0} at source: {1} {2} destination: {3} {4}, please carefully verify the real wafer position and delete the invalid position wafer",
    "GlobalDescription_en": "Create duplicated wafer {0} at source: {1} {2} destination: {3} {4}, please carefully verify the real wafer position and delete the invalid position wafer",
    "Module": "System",
    "Note": "Wafer Moved"
  },
  {
    "Id": 42,
    "Level": "Info",
    "LogEnum": "INFO_DEVICE_ENTITY",
    "GlobalDescription_zh": "Device Entity Log： {0}",
    "GlobalDescription_en": "Device Entity Log： {0}",
    "Module": "System",
    "Note": "Device Entity Info"
  },
  {
    "Id": 43,
    "Level": "Warning",
    "LogEnum": "WARN_DEVICE_ENTITY",
    "GlobalDescription_zh": "Device Entity Log： {0}",
    "GlobalDescription_en": "Device Entity Log： {0}",
    "Module": "System",
    "Note": "Device Entity Warning"
  },
  {
    "Id": 44,
    "Level": "Error",
    "LogEnum": "ERR_DEVICE_ENTITY",
    "GlobalDescription_zh": "Device Entity Log： {0}",
    "GlobalDescription_en": "Device Entity Log： {0}",
    "Module": "System",
    "Note": "Device Entity ERR"
  },
  {
    "Id": 45,
    "Level": "Info",
    "LogEnum": "INFO_WINRESOURCE",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "System Notify"
  },
  {
    "Id": 46,
    "Level": "Warning",
    "LogEnum": "WARN_WINRESOURCE",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "System  Failed"
  },
  {
    "Id": 47,
    "Level": "Error",
    "LogEnum": "ERR_WINRESOURCE",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "System Failed"
  },
  {
    "Id": 48,
    "Level": "Error",
    "LogEnum": "ERR_PM_SCRUBBER_NOOK_STOPTRANSFER",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "System",
    "Note": "PM SCRUBBER Alarm,stop tranfer"
  },
  {
    "Id": 49,
    "Level": "Warning",
    "LogEnum": "WARN_DATABASE",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "System",
    "Note": "System  DATABASE WARNING"
  },
  {
    "Id": 50,
    "Level": "Error",
    "LogEnum": "ERR_TWINCAT",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "System",
    "Note": "TWINCAT ERROR"
  },
  {
    "Id": 51,
    "Level": "Info",
    "LogEnum": "EV_TWINCAT",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "System",
    "Note": "TWINCAT Info"
  },
  {
    "Id": 1000,
    "Level": "Info",
    "LogEnum": "INFO_DEVICE_IO_HEATER",
    "GlobalDescription_zh": "IO Heater Log： {0}",
    "GlobalDescription_en": "IO Heater Log： {0}",
    "Module": "PM",
    "Note": "IO Heater Info"
  },
  {
    "Id": 1001,
    "Level": "Warning",
    "LogEnum": "WARN_DEVICE_IO_HEATER",
    "GlobalDescription_zh": "IO Heater warning: {0}",
    "GlobalDescription_en": "IO Heater warning: {0}",
    "Module": "PM",
    "Note": "IO Heater Warning"
  },
  {
    "Id": 1002,
    "Level": "Error",
    "LogEnum": "ERR_DEVICE_IO_HEATER",
    "GlobalDescription_zh": "IO Heater alarm: {0}",
    "GlobalDescription_en": "IO Heater alarm: {0}",
    "Module": "PM",
    "Note": "IO Heater Alarm"
  },
  {
    "Id": 1003,
    "Level": "Error",
    "LogEnum": "ERR_DRY_PUMP",
    "GlobalDescription_zh": "Dry Pump alarm: {0}",
    "GlobalDescription_en": "Dry Pump alarm: {0}",
    "Module": "PM",
    "Note": "Dry Pump Alarm"
  },
  {
    "Id": 1004,
    "Level": "Error",
    "LogEnum": "ERR_PENDULUM_VALVE",
    "GlobalDescription_zh": "Pendulum Valve alarm: {0}",
    "GlobalDescription_en": "Pendulum Valve alarm: {0}",
    "Module": "PM",
    "Note": "Pendulum Valve Alarm"
  },
  {
    "Id": 1005,
    "Level": "Error",
    "LogEnum": "ERR_ESC_HV",
    "GlobalDescription_zh": "ESC HV alarm: {0}",
    "GlobalDescription_en": "ESC HV alarm: {0}",
    "Module": "PM",
    "Note": "ESC HV Alarm"
  },
  {
    "Id": 1006,
    "Level": "Error",
    "LogEnum": "ERR_TURBO_PUMP",
    "GlobalDescription_zh": "Turbo Pump alarm: {0}",
    "GlobalDescription_en": "Turbo Pump alarm: {0}",
    "Module": "PM",
    "Note": "Turbo Pump Alarm"
  },
  {
    "Id": 1007,
    "Level": "Error",
    "LogEnum": "ERR_RF",
    "GlobalDescription_zh": "RF error: {0}",
    "GlobalDescription_en": "RF error: {0}",
    "Module": "PM",
    "Note": "RF Alarm"
  },
  {
    "Id": 1008,
    "Level": "Info",
    "LogEnum": "INFO_DEVICE_CHILLER",
    "GlobalDescription_zh": "Chiller： {0}",
    "GlobalDescription_en": "Chiller： {0}",
    "Module": "PM",
    "Note": "Chiller Info"
  },
  {
    "Id": 1009,
    "Level": "Warning",
    "LogEnum": "WARN_DEVICE_CHILLER",
    "GlobalDescription_zh": "Chiller warning: {0}",
    "GlobalDescription_en": "Chiller warning: {0}",
    "Module": "PM",
    "Note": "Chiller Warning"
  },
  {
    "Id": 1010,
    "Level": "Error",
    "LogEnum": "ERR_DEVICE_CHILLER",
    "GlobalDescription_zh": "Chiller alarm: {0}",
    "GlobalDescription_en": "Chiller alarm: {0}",
    "Module": "PM",
    "Note": "Chiller Alarm"
  },
  {
    "Id": 1011,
    "Level": "Warning",
    "LogEnum": "WARN_RF",
    "GlobalDescription_zh": "RF warning: {0}",
    "GlobalDescription_en": "RF warning: {0}",
    "Module": "PM",
    "Note": "RF warning"
  },
  {
    "Id": 1012,
    "Level": "Error",
    "LogEnum": "ERR_ENDPOINT",
    "GlobalDescription_zh": "EndPoint alarm: {0}",
    "GlobalDescription_en": "EndPoint alarm: {0}",
    "Module": "PM",
    "Note": "EndPoint Alarm"
  },
  {
    "Id": 1013,
    "Level": "Info",
    "LogEnum": "INFO_ENDPOINT",
    "GlobalDescription_zh": "EndPoint log: {0}",
    "GlobalDescription_en": "EndPoint log: {0}",
    "Module": "PM",
    "Note": "EndPoint log"
  },
  {
    "Id": 1014,
    "Level": "Warning",
    "LogEnum": "WARN_ENDPOINT",
    "GlobalDescription_zh": "EndPoint warning: {0}",
    "GlobalDescription_en": "EndPoint warning: {0}",
    "Module": "PM",
    "Note": "EndPoint warning"
  },
  {
    "Id": 1015,
    "Level": "Error",
    "LogEnum": "ERR_BACKSIDE_HE",
    "GlobalDescription_zh": "BacksideHelium alarm: {0}",
    "GlobalDescription_en": "BacksideHelium alarm: {0}",
    "Module": "PM",
    "Note": "BacksideHelium Alarm"
  },
  {
    "Id": 1016,
    "Level": "Info",
    "LogEnum": "INFO_BACKSIDE_HE",
    "GlobalDescription_zh": "BacksideHelium log: {0}",
    "GlobalDescription_en": "BacksideHelium log: {0}",
    "Module": "PM",
    "Note": "BacksideHelium log"
  },
  {
    "Id": 1017,
    "Level": "Warning",
    "LogEnum": "WARN_BACKSIDE_HE",
    "GlobalDescription_zh": "BacksideHelium warning: {0}",
    "GlobalDescription_en": "BacksideHelium warning: {0}",
    "Module": "PM",
    "Note": "BacksideHelium warning"
  },
  {
    "Id": 1018,
    "Level": "Error",
    "LogEnum": "ERR_PROCESS",
    "GlobalDescription_zh": "Process alarm: {0}",
    "GlobalDescription_en": "Process alarm: {0}",
    "Module": "PM",
    "Note": "Process Alarm"
  },
  {
    "Id": 1019,
    "Level": "Info",
    "LogEnum": "INFO_PROCESS",
    "GlobalDescription_zh": "Process log: {0}",
    "GlobalDescription_en": "Process log: {0}",
    "Module": "PM",
    "Note": "Process log"
  },
  {
    "Id": 1020,
    "Level": "Warning",
    "LogEnum": "WARN_PROCESS",
    "GlobalDescription_zh": "Process warning: {0}",
    "GlobalDescription_en": "Process warning: {0}",
    "Module": "PM",
    "Note": "Process warning"
  },
  {
    "Id": 1021,
    "Level": "Error",
    "LogEnum": "ERR_IoGasValve",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "IoGasValve Error"
  },
  {
    "Id": 1022,
    "Level": "Warning",
    "LogEnum": "WARN_State",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "State warning"
  },
  {
    "Id": 1023,
    "Level": "Error",
    "LogEnum": "ERR_PM",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM Alarm"
  },
  {
    "Id": 1024,
    "Level": "Info",
    "LogEnum": "INFO_PM",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM INFO"
  },
  {
    "Id": 1025,
    "Level": "Warning",
    "LogEnum": "WARN_PM",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM warning"
  },

  {
    "Id": 1026,
    "Level": "Info",
    "LogEnum": "INFO_Sensor",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "Sensor log"
  },
  {
    "Id": 1027,
    "Level": "Warning",
    "LogEnum": "WARN_Sensor",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "Sensor warning"
  },
  {
    "Id": 1028,
    "Level": "Error",
    "LogEnum": "ERR_Sensor",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "Sensor Error"
  },
  {
    "Id": 1029,
    "Level": "Info",
    "LogEnum": "INFO_FA",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "FA",
    "Note": "FA INFO"
  },
  {
    "Id": 1030,
    "Level": "Info",
    "LogEnum": "INFO_IOCYLINDER",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "Cylinder INFO"
  },
  {
    "Id": 1031,
    "Level": "Info",
    "LogEnum": "INFO_IO_VALVE",
    "GlobalDescription_zh": "IO Valve: {0}",
    "GlobalDescription_en": "IO Valve: {0}",
    "Module": "PM",
    "Note": "IO Valve:  Info"
  },
  {
    "Id": 1032,
    "Level": "Warning",
    "LogEnum": "WARN_IO_VALVE",
    "GlobalDescription_zh": "IO Valve: {0}",
    "GlobalDescription_en": "IO Valve: {0}",
    "Module": "PM",
    "Note": "IO Valve:  Warning"
  },
  {
    "Id": 1033,
    "Level": "Error",
    "LogEnum": "ERR_IO_VALVE",
    "GlobalDescription_zh": "IO Valve: {0}",
    "GlobalDescription_en": "IO Valve: {0}",
    "Module": "PM",
    "Note": "IO Valve:  Alarm"
  },
  {
    "Id": 1034,
    "Level": "Error",
    "LogEnum": "ERR_MATCH",
    "GlobalDescription_zh": "MATCH error: {0}",
    "GlobalDescription_en": "MATCH error: {0}",
    "Module": "PM",
    "Note": "MATCH Alarm"
  },
  {
    "Id": 1035,
    "Level": "Warning",
    "LogEnum": "WARN_MATCH",
    "GlobalDescription_zh": "MATCH warning: {0}",
    "GlobalDescription_en": "MATCH warning: {0}",
    "Module": "PM",
    "Note": "MATCH Alarm"
  },
  {
    "Id": 1036,
    "Level": "Info",
    "LogEnum": "INFO_MATCH",
    "GlobalDescription_zh": "MATCH Info: {0}",
    "GlobalDescription_en": "MATCH Info: {0}",
    "Module": "PM",
    "Note": "MATCH Info"
  },
  {
    "Id": 1037,
    "Level": "Info",
    "LogEnum": "INFO_RF",
    "GlobalDescription_zh": "RF info: {0}",
    "GlobalDescription_en": "RF info: {0}",
    "Module": "PM",
    "Note": "RF info"
  },
  {
    "Id": 1038,
    "Level": "Info",
    "LogEnum": "INFO_RFBox",
    "GlobalDescription_zh": "RFBox Info: {0}",
    "GlobalDescription_en": "RFBox Info: {0}",
    "Module": "PM",
    "Note": "RFBox Info"
  },
  {
    "Id": 1039,
    "Level": "Warning",
    "LogEnum": "WARN_RFBox",
    "GlobalDescription_zh": "RFBox Warning: {0}",
    "GlobalDescription_en": "RFBox Warning: {0}",
    "Module": "PM",
    "Note": "RFBox Warning"
  },

  {
    "Id": 1040,
    "Level": "Error",
    "LogEnum": "ERR_RFBox",
    "GlobalDescription_zh": "RFBox Error: {0}",
    "GlobalDescription_en": "RFBox Error: {0}",
    "Module": "PM",
    "Note": "RFBox Error"
  },
  {
    "Id": 1041,
    "Level": "Info",
    "LogEnum": "INFO_HighTemperatureHeater",
    "GlobalDescription_zh": "HighTemperatureHeater Info: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Info: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Info"
  },
  {
    "Id": 1042,
    "Level": "Warning",
    "LogEnum": "WARN_HighTemperatureHeater",
    "GlobalDescription_zh": "HighTemperatureHeater Warning: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Warning: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Warning"
  },

  {
    "Id": 1043,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1044,
    "Level": "Warning",
    "LogEnum": "WARN_PM_TOLERANCE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM Tolerance Warning"
  },
  {
    "Id": 1045,
    "Level": "Error",
    "LogEnum": "ERR_PM_TOLERANCE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM Tolerance Error"
  },
  {
    "Id": 1046,
    "Level": "Error",
    "LogEnum": "ERR_PM_PLC_HEARTBEAT_FAIL",
    "GlobalDescription_zh": "{0}心跳停止,判PLC运行失败，请检查PLC运行情况。",
    "GlobalDescription_en": "{0}HeatBeat Stop,PLC status error, please check it",
    "Module": "PM",
    "Note": "Invalid config"
  },
  {
    "Id": 1050,
    "Level": "Error",
    "LogEnum": "ERR_PM_PROCESSNOWAFER",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM PROCESS NO WAFER"
  },
  {
    "Id": 1051,
    "Level": "Error",
    "LogEnum": "ERR_PM_CLEANWITHWAFER",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM CLEAN WITH WAFER"
  },
  {
    "Id": 1052,
    "Level": "Error",
    "LogEnum": "ERR_PM_SCRUBBER_NOOK_STOPPROCESS",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM SCRUBBER Alarm"
  },
  {
    "Id": 1053,
    "Level": "Error",
    "LogEnum": "ERR_PM_SCRUBBER_NOOK_CONTINUEPROCESS",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM SCRUBBER Alarm"
  },
  {
    "Id": 1054,
    "Level": "Warning",
    "LogEnum": "WARN_PM_SCRUBBER_NOOK",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "PM SCRUBBER Warning"
  },
  {
    "Id": 1100,
    "Level": "Info",
    "LogEnum": "INFO_RF_Connect",
    "GlobalDescription_zh": "{0} 连接成功，连接信息: {1}",
    "GlobalDescription_en": "{0} 连接成功，连接信息: {1}",
    "Module": "PM",
    "Note": "RF Connect Success"
  },
  {
    "Id": 1101,
    "Level": "Error",
    "LogEnum": "ERR_RF_Connect",
    "GlobalDescription_zh": "{0} 连接失败，连接信息: {1}",
    "GlobalDescription_en": "{0} 连接失败，连接信息: {1}",
    "Module": "PM",
    "Note": "RF Connect Failed"
  },
  {
    "Id": 1102,
    "Level": "Error",
    "LogEnum": "ERR_RF_WaterFlow",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "RF stop power"
  },
  {
    "Id": 1103,
    "Level": "Error",
    "LogEnum": "ERR_RF_RFGInterlock",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "RF stop power"
  },
  {
    "Id": 1104,
    "Level": "Error",
    "LogEnum": "ERR_RF_GASOFF",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "RF stop power"
  },
  {
    "Id": 1180,
    "Level": "Error",
    "LogEnum": "ERR_PV_INTERLOCK_FORELINRPRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "Pendulum Valve Error"
  },
  {
    "Id": 1182,
    "Level": "Error",
    "LogEnum": "ERR_PV_INTERLOCK_TURBOPUMPNOTATSPEED",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "Pendulum Valve Error"
  },
  {
    "Id": 1183,
    "Level": "Error",
    "LogEnum": "ERR_PV_PARITY",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "Pendulum Valve Error"
  },
  {
    "Id": 1220,
    "Level": "Error",
    "LogEnum": "ERR_MFC_MFC1FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC1 FLOW OVER RANGE"
  },
  {
    "Id": 1221,
    "Level": "Error",
    "LogEnum": "ERR_MFC_MFC2FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC2 FLOW OVER RANGE"
  },
  {
    "Id": 1222,
    "Level": "Error",
    "LogEnum": "ERR_MFC_MFC3FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC3 FLOW OVER RANGE"
  },
  {
    "Id": 1223,
    "Level": "Error",
    "LogEnum": "ERR_MFC_MFC4FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC4 FLOW OVER RANGE"
  },
  {
    "Id": 1224,
    "Level": "Error",
    "LogEnum": "ERR_MFC_MFC5FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC5 FLOW OVER RANGE"
  },
  {
    "Id": 1225,
    "Level": "Error",
    "LogEnum": "ERR_MFC_MFC6FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC6 FLOW OVER RANGE"
  },
  {
    "Id": 1226,
    "Level": "Error",
    "LogEnum": "ERR_MFC_MFC7FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC7 FLOW OVER RANGE"
  },
  {
    "Id": 1227,
    "Level": "Error",
    "LogEnum": "ERR_MFC_MFC8FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC8 FLOW OVER RANGE"
  },
  {
    "Id": 1228,
    "Level": "Error",
    "LogEnum": "ERR_MFC_N2FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "N2 FLOW OVER RANGE"
  },
  {
    "Id": 1229,
    "Level": "Error",
    "LogEnum": "ERR_MFC1_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC1 PRESSURE"
  },
  {
    "Id": 1230,
    "Level": "Error",
    "LogEnum": "ERR_MFC2_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC2 PRESSURE"
  },
  {
    "Id": 1231,
    "Level": "Error",
    "LogEnum": "ERR_MFC3_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC3 PRESSURE"
  },
  {
    "Id": 1232,
    "Level": "Error",
    "LogEnum": "ERR_MFC4_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC4 PRESSURE"
  },
  {
    "Id": 1233,
    "Level": "Error",
    "LogEnum": "ERR_MFC5_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC5 PRESSURE"
  },
  {
    "Id": 1234,
    "Level": "Error",
    "LogEnum": "ERR_MFC6_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC6 PRESSURE"
  },
  {
    "Id": 1235,
    "Level": "Error",
    "LogEnum": "ERR_MFC7_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC7 PRESSURE"
  },
  {
    "Id": 1238,
    "Level": "Error",
    "LogEnum": "ERR_MFC8_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC8 PRESSURE"
  },
  {
    "Id": 1239,
    "Level": "Error",
    "LogEnum": "ERR_N2_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "N2 PRESSURE"
  },
  {
    "Id": 1240,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_SetRatio_OverRange",
    "GlobalDescription_zh": "HighTemperatureHeater Set Ratio Failed, {0} Over Range [{1}-{2}]",
    "GlobalDescription_en": "HighTemperatureHeater Set Ratio Failed, {0} Over Range [{1}-{2}]",
    "Module": "PM",
    "Note": "HighTemperatureHeater Set Ratio Failed"
  },
  {
    "Id": 1241,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_SetTemperature_OverRange",
    "GlobalDescription_zh": "HighTemperatureHeater Set Temperature Failed, {0} Over Range [{1}-{2}]",
    "GlobalDescription_en": "HighTemperatureHeater Set Temperature Failed, {0} Over Range [{1}-{2}]",
    "Module": "PM",
    "Note": "HighTemperatureHeater Set Temperature Failed"
  },
  {
    "Id": 1242,
    "Level": "Warning",
    "LogEnum": "WARN_HighTemperatureHeater_N2",
    "GlobalDescription_zh": "Gas Box N2 Flow Trigger Warning,HighTemperatureHeater Cool Down to {0} ℃,Current Purge N2 Flow {1} sccm",
    "GlobalDescription_en": "Gas Box N2 Flow Trigger Warning,HighTemperatureHeater Cool Down to {0} ℃,Current Purge N2 Flow {1} sccm",
    "Module": "PM",
    "Note": "HighTemperatureHeater N2 Warning"
  },
  {
    "Id": 1246,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_GoPosition1TimeOut",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1247,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_GoPosition2TimeOut",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1248,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_GoPosition3TimeOut",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1249,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_GoPosition4TimeOut",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1250,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_GoPosition5TimeOut",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1251,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_TransferPosition",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1252,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_LiftDriverAlarm",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1253,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_LiftPosiModuleAlarm",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1254,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_LiftORGAlarm",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1255,
    "Level": "Error",
    "LogEnum": "ERR_HighTemperatureHeater_GoOriginTimeOut",
    "GlobalDescription_zh": "HighTemperatureHeater Error: {0}",
    "GlobalDescription_en": "HighTemperatureHeater Error: {0}",
    "Module": "PM",
    "Note": "HighTemperatureHeater Error"
  },
  {
    "Id": 1260,
    "Level": "Info",
    "LogEnum": "INFO_DEVICE_IO_MAGNET",
    "GlobalDescription_zh": "IO Magnet Log： {0}",
    "GlobalDescription_en": "IO Magnet Log： {0}",
    "Module": "PM",
    "Note": "IO Magnet Info"
  },
  {
    "Id": 1280,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_WATERLEAK",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1281,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_WATERFLOW",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1282,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_CDAPRESSURE",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1283,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_N2PRESSURE",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1284,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_GASBOXDOOR",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1285,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_GASBOXPRESSURE",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1286,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_CHBWALLOTSWALARM",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1287,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_GASBOXN2FLOW",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1288,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_PVPURGEPRESSUREALARM",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1289,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_N2PURGEPRESSURE",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1290,
    "Level": "Error",
    "LogEnum": "ERR_SENSOR_WATERFLOW_STOP_CURRENTPROCESS",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1291,
    "Level": "Error",
    "LogEnum": "ERR_SENSOR_WATERFLOW_STOP_NEXTPROCESS",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1292,
    "Level": "Warning",
    "LogEnum": "WARN_MFC1_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC1 PRESSURE"
  },
  {
    "Id": 1293,
    "Level": "Warning",
    "LogEnum": "WARN_MFC2_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC2 PRESSURE"
  },
  {
    "Id": 1294,
    "Level": "Warning",
    "LogEnum": "WARN_MFC3_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC3 PRESSURE"
  },
  {
    "Id": 1295,
    "Level": "Warning",
    "LogEnum": "WARN_MFC4_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC4 PRESSURE"
  },
  {
    "Id": 1296,
    "Level": "Warning",
    "LogEnum": "WARN_MFC5_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC5 PRESSURE"
  },
  {
    "Id": 1297,
    "Level": "Warning",
    "LogEnum": "WARN_MFC6_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC6 PRESSURE"
  },
  {
    "Id": 1298,
    "Level": "Warning",
    "LogEnum": "WARN_MFC7_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC7 PRESSURE"
  },
  {
    "Id": 1299,
    "Level": "Warning",
    "LogEnum": "WARN_MFC8_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "MFC8 PRESSURE"
  },
  {
    "Id": 1300,
    "Level": "Error",
    "LogEnum": "WARN_N2_PRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "N2 PRESSURE"
  },
  {
    "Id": 1301,
    "Level": "Warning",
    "LogEnum": "WARN_GASBOX_N2_FLOW",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "PM",
    "Note": "GASBOX N2 FLOW"
  },
  {
    "Id": 1302,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_TMP_WATERFLOW",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 1303,
    "Level": "Warning",
    "LogEnum": "WARNING_SENSOR_LID_WATERFLOW",
    "GlobalDescription_zh": "IO Sensor ： {0}",
    "GlobalDescription_en": "IO Sensor ： {0}",
    "Module": "PM",
    "Note": "IO Sensor"
  },
  {
    "Id": 2000,
    "Level": "Error",
    "LogEnum": "ERR_TM",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2001,
    "Level": "Info",
    "LogEnum": "INFO_TM",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM INFO"
  },
  {
    "Id": 2002,
    "Level": "Warning",
    "LogEnum": "WARN_TM",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM warning"
  },
  {
    "Id": 2003,
    "Level": "Error",
    "LogEnum": "ERR_TM_MFC1FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2004,
    "Level": "Error",
    "LogEnum": "ERR_TM_MFCPRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2005,
    "Level": "Error",
    "LogEnum": "ERR_TM_PLC_HEARTBEAT_FAIL",
    "GlobalDescription_zh": "{0}心跳停止,判PLC运行失败，请检查PLC运行情况。",
    "GlobalDescription_en": "{0}HeatBeat Stop,PLC status error, please check it",
    "Module": "TM",
    "Note": "TM HEARTBEAT ERROR"
  },
  {
    "Id": 2100,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT",
    "GlobalDescription_zh": "TM Robot receive an error:{0}",
    "GlobalDescription_en": "TM Robot receive an error:{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2101,
    "Level": "Info",
    "LogEnum": "INFO_TM_ROBOT",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Info"
  },
  {
    "Id": 2102,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PICKSLOTOVERRANGE",
    "GlobalDescription_zh": "TM Robot receive an error:{0}",
    "GlobalDescription_en": "TM Robot receive an error:{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2103,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PLACESLOTOVERRange",
    "GlobalDescription_zh": "TM Robot receive an error:{0}",
    "GlobalDescription_en": "TM Robot receive an error:{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2104,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_SETINTLOCKWAF_SEN",
    "GlobalDescription_zh": "TM Robot receive an error:{0}",
    "GlobalDescription_en": "TM Robot receive an error:{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2105,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_SETINTLOCKRZ",
    "GlobalDescription_zh": "TM Robot receive an error:{0}",
    "GlobalDescription_en": "TM Robot receive an error:{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2106,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_SETINTLOCK",
    "GlobalDescription_zh": "TM Robot receive an error:{0}",
    "GlobalDescription_en": "TM Robot receive an error:{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2107,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_SETIOECHO",
    "GlobalDescription_zh": "TM Robot receive an error:{0}",
    "GlobalDescription_en": "TM Robot receive an error:{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2108,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_SETIOSTATE",
    "GlobalDescription_zh": "TM Robot receive an error:{0}",
    "GlobalDescription_en": "TM Robot receive an error:{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2109,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_LLA_PICK_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2110,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_LLB_PICK_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2111,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PMA_PICK_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2112,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PMB_PICK_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2113,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PMC_PICK_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2114,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PMD_PICK_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2115,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_LLA_PLACE_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2116,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_LLB_PLACE_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2117,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PMA_PLACE_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2118,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PMB_PLACE_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2119,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PMC_PLACE_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2120,
    "Level": "Error",
    "LogEnum": "ERR_TM_ROBOT_PMD_PLACE_AWCOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2121,
    "Level": "Error",
    "LogEnum": "ERR_TM_LLA_PressureDifference",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2122,
    "Level": "Error",
    "LogEnum": "ERR_TM_LLB_PressureDifference",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2123,
    "Level": "Error",
    "LogEnum": "ERR_TM_PMA_PressureDifference",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2124,
    "Level": "Error",
    "LogEnum": "ERR_TM_PMB_PressureDifference",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2125,
    "Level": "Error",
    "LogEnum": "ERR_TM_PMC_PressureDifference",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 2126,
    "Level": "Error",
    "LogEnum": "ERR_TM_PMD_PressureDifference",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "TM",
    "Note": "TM Alarm"
  },
  {
    "Id": 4000,
    "Level": "Info",
    "LogEnum": "EV_EFEM_COMMON_INFO",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM Notify"
  },
  {
    "Id": 4001,
    "Level": "Warning",
    "LogEnum": "WARN_EFEM_COMMON_WARN",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM Warning"
  },
  {
    "Id": 4002,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_COMMON_FAILED",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM Failed"
  },
  {
    "Id": 4003,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_VAC_SOURCE_PRESSURE_LOW",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM SYSTEM Failed"
  },
  {
    "Id": 4004,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_IONIZER_COMPRESSED_AIR",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM SYSTEM Failed"
  },
  {
    "Id": 4005,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_COMPRESSED_AIR_PRESSURE_LOW",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM SYSTEM Failed"
  },
  {
    "Id": 4006,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_FLOW_GUAGE_SENSOR",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM SYSTEM Failed"
  },
  {
    "Id": 4007,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_LEAKAGE",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM SYSTEM Failed"
  },
  {
    "Id": 4008,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_IONIZER",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM SYSTEM Failed"
  },
  {
    "Id": 4009,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_FFU",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM SYSTEM Failed"
  },
  {
    "Id": 4010,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_SWITCH_TO_MAINTAIN_MODE",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM SYSTEM Failed"
  },
  {
    "Id": 4100,
    "Level": "Info",
    "LogEnum": "EV_EFEM_ROBOT",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM Notify"
  },
  {
    "Id": 4101,
    "Level": "Warning",
    "LogEnum": "WARN_EFEM_ROBOT",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM Warning"
  },
  {
    "Id": 4102,
    "Level": "Error",
    "LogEnum": "ERR_EFEM_ROBOT",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "EFEM",
    "Note": "EFEM Failed"
  },
  {
    "Id": 4200,
    "Level": "Info",
    "LogEnum": "EV_VCE_COMMON_INFO",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "VCE",
    "Note": "VCE Notify"
  },
  {
    "Id": 4201,
    "Level": "Warning",
    "LogEnum": "WARN_VCE_COMMON_WARN",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "VCE",
    "Note": "VCE Warning"
  },
  {
    "Id": 4202,
    "Level": "Error",
    "LogEnum": "ERR_VCE_COMMON_Failed",
    "GlobalDescription_zh": "{0}。",
    "GlobalDescription_en": "{0}.",
    "Module": "VCE",
    "Note": "VCE Failed"
  },
  {
    "Id": 5003,
    "Level": "Error",
    "LogEnum": "ERR_FA",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "FA",
    "Note": "FA Alarm"
  },
  {
    "Id": 5004,
    "Level": "Warning",
    "LogEnum": "WARN_FA",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "FA",
    "Note": "FA warning"
  },
  {
    "Id": 6000,
    "Level": "Error",
    "LogEnum": "ERR_LL",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "LL",
    "Note": "LL Alarm"
  },
  {
    "Id": 6001,
    "Level": "Info",
    "LogEnum": "INFO_LL",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "LL",
    "Note": "LL INFO"
  },
  {
    "Id": 6002,
    "Level": "Warning",
    "LogEnum": "WARN_LL",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "LL",
    "Note": "LL warning"
  },
  {
    "Id": 6003,
    "Level": "Error",
    "LogEnum": "ERR_LLA_MFC1FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "LL",
    "Note": "LLA Alarm"
  },
  {
    "Id": 6004,
    "Level": "Error",
    "LogEnum": "ERR_LLB_MFC1FLOWOVERRANGE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "LL",
    "Note": "LLB Alarm"
  },
  {
    "Id": 6005,
    "Level": "Error",
    "LogEnum": "ERR_LLA_MFCPRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "LL",
    "Note": "LLA Alarm"
  },
  {
    "Id": 6006,
    "Level": "Error",
    "LogEnum": "ERR_LLB_MFCPRESSURE",
    "GlobalDescription_zh": "{0}",
    "GlobalDescription_en": "{0}",
    "Module": "LL",
    "Note": "LLB Alarm"
  },
  {
    "Id": 8888,
    "Level": "Info",
    "LogEnum": "INFO_TROUGHPUT_ENHANCE_TRACE",
    "GlobalDescription_zh": "Throughput enhancement: {0}",
    "GlobalDescription_en": "Throughput enhancement: {0}",
    "Module": "System",
    "Note": "Throughput enhancement: "
  }
]