lixiang f03139a580 1.应tps需求添加,VenusSE工艺结束,PM主界面信息保存 1 year ago
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PM 0b8a98a845 IoDevice IoMagnet Add 1 year ago
TM 3ac2e3bc3a 1.删除/注释 PMEntity 里面关于 LoadLock 的代码(Venus样机独有功能) 1 year ago
ClusterGemModel.xml 60e9a04892 Simulator LP3 Update 1 year ago
DBModel.sql df4447c2d2 PMhomeRoutine add VenusDE chambertype 1 year ago
DataGroup.xml b2406d6f78 1.添加signalTonwer ui界面 1 year ago
DeviceModel.xsd d8e5f1dc2c 2022 last update 2 years ago
EquipmentVariables.xml 7dc2089ceb 1、add PortWaferStart/PortWaferEnd event sequence name parameter; 1 year ago
EventDefine.xml 3f9c41937a update for event module enhancement 2 years ago
IoProviderConfig.xml a5542b5c2c add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule 1 year ago
LogDefine.json 0b8a98a845 IoDevice IoMagnet Add 1 year ago
RecipeFormat.xml 9760d40cf7 port simulator 2 years ago
SESequenceFormat.xml a5542b5c2c add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule 1 year ago
SVID.xls 63d58afa42 1、SecsGem增加了UTF-8编码的支持; 1 year ago
SequenceFormat.xml 4259958c23 Remove the Align angle definition in sequence and implement the Loadlock delay function. 1 year ago
SignalTower.xml b2406d6f78 1.添加signalTonwer ui界面 1 year ago
System.sccfg f03139a580 1.应tps需求添加,VenusSE工艺结束,PM主界面信息保存 1 year ago
System_Kepler2200.sccfg f03139a580 1.应tps需求添加,VenusSE工艺结束,PM主界面信息保存 1 year ago
System_Kepler2300.sccfg f03139a580 1.应tps需求添加,VenusSE工艺结束,PM主界面信息保存 1 year ago
System_VenusDE.sccfg f03139a580 1.应tps需求添加,VenusSE工艺结束,PM主界面信息保存 1 year ago
System_VenusSE.sccfg f03139a580 1.应tps需求添加,VenusSE工艺结束,PM主界面信息保存 1 year ago
VenusPreProcess.py 64c7ef574e log 2 years ago