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PM
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0b8a98a845
IoDevice IoMagnet Add
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il y a 1 an |
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TM
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3ac2e3bc3a
1.删除/注释 PMEntity 里面关于 LoadLock 的代码（Venus样机独有功能）
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il y a 1 an |
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ClusterGemModel.xml
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60e9a04892
Simulator LP3 Update
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il y a 1 an |
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DBModel.sql
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df4447c2d2
PMhomeRoutine add VenusDE chambertype
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il y a 1 an |
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DataGroup.xml
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b2406d6f78
1.添加signalTonwer ui界面
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il y a 1 an |
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DeviceModel.xsd
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d8e5f1dc2c
2022 last update
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il y a 2 ans |
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EquipmentVariables.xml
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7dc2089ceb
1、add PortWaferStart/PortWaferEnd event sequence name parameter;
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il y a 1 an |
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EventDefine.xml
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3f9c41937a
update for event module enhancement
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il y a 2 ans |
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IoProviderConfig.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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il y a 1 an |
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LogDefine.json
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0b8a98a845
IoDevice IoMagnet Add
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il y a 1 an |
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RecipeFormat.xml
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9760d40cf7
port simulator
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il y a 2 ans |
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SESequenceFormat.xml
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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il y a 1 an |
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SVID.xls
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63d58afa42
1、SecsGem增加了UTF-8编码的支持；
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il y a 1 an |
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SequenceFormat.xml
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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il y a 1 an |
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SignalTower.xml
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b2406d6f78
1.添加signalTonwer ui界面
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il y a 1 an |
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System.sccfg
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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System_Kepler2200.sccfg
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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System_Kepler2300.sccfg
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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System_VenusDE.sccfg
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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System_VenusSE.sccfg
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f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存
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il y a 1 an |
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VenusPreProcess.py
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64c7ef574e
log
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il y a 2 ans |
lixiang
f03139a580
1.应tps需求添加，VenusSE工艺结束，PM主界面信息保存