Начало Каталог Помощ
Регистрация Вход
JetPlasma
/
Kepler-Release
Наблюдаван 2
Харесван 0
Разклонения 0
Файлове Задачи 0 Заявки за сливане 0 Уики
ИН на ревизия: f03139a580
Клонове Маркери
Kepler-Release
/
Venus
/
Venus_RT
/
Config
/
System_VenusDE.sccfg

System_VenusDE.sccfg 381 KB
История Директен файл

123456789101112131415161718192021222324252627282930313233343536373839404142434445464748495051525354555657585960616263646566676869707172737475767778798081828384858687888990919293949596979899100101102103104105106107108109110111112113114115116117118119120121122123124125126127128129130131132133134135136137138139140141142143144145146147148149150151152153154155156157158159160161162163164165166167168169170171172173174175176177178179180181182183184185186187188189190191192193194195196197198199200201202203204205206207208209210211212213214215216217218219220221222223224225226227228229230231232233234235236237238239240241242243244245246247248249250251252253254255256257258259260261262263264265266267268269270271272273274275276277278279280281282283284285286287288289290291292293294295296297298299300301302303304305306307308309310311312313314315316317318319320321322323324325326327328329330331332333334335336337338339340341342343344345346347348349350351352353354355356357358359360361362363364365366367368369370371372373374375376377378379380381382383384385386387388389390391392393394395396397398399400401402403404405406407408409410411412413414415416417418419420421422423424425426427428429430431432433434435436437438439440441442443444445446447448449450451452453454455456457458459460461462463464465466467468469470471472473474475476477478479480481482483484485486487488489490491492493494495496497498499500501502503504505506507508509510511512513514515516517518519520521522523524525526527528529530531532533534535536537538539540541542543544545546547548549550551552553554555556557558559560561562563564565566567568569570571572573574575576577578579580581582583584585586587588589590591592593594595596597598599600601602603604605606607608609610611612613614615616617618619620621622623624625626627628629630631632633634635636637638639640641642643644645646647648649650651652653654655656657658659660661662663664665666667668669670671672673674675676677678679680681682683684685686687688689690691692693694695696697698699700701702703704705706707708709710711712713714715716717718719720721722723724725726727728729730731732733734735736737738739740741742743744745746747748749750751752753754755756757758759760761762763764765766767768769770771772773774775776777778779780781782783784785786787788789790791792793794795796797798799800801802803804805806807808809810811812813814815816817818819820821822823824825826827828829830831832833834835836837838839840841842843844845846847848849850851852853854855856857858859860861862863864865866867868869870871872873874875876877878879880881882883884885886887888889890891892893894895896897898899900901902903904905906907908909910911912913914915916917918919920921922923924925926927928929930931932933934935936937938939940941942943944945946947948949950951952953954955956957958959960961962963964965966967968969970971972973974975976977978979980981982983984985986987988989990991992993994995996997998999100010011002100310041005100610071008100910101011101210131014101510161017101810191020102110221023102410251026102710281029103010311032103310341035103610371038103910401041104210431044104510461047104810491050105110521053105410551056105710581059106010611062106310641065106610671068106910701071107210731074107510761077107810791080108110821083108410851086108710881089109010911092109310941095109610971098109911001101110211031104110511061107110811091110111111121113111411151116111711181119112011211122112311241125112611271128112911301131113211331134113511361137113811391140114111421143114411451146114711481149115011511152115311541155115611571158115911601161116211631164116511661167116811691170117111721173117411751176117711781179118011811182118311841185118611871188118911901191119211931194119511961197119811991200120112021203120412051206120712081209121012111212121312141215121612171218121912201221122212231224122512261227122812291230123112321233123412351236123712381239124012411242124312441245124612471248124912501251125212531254125512561257125812591260126112621263126412651266126712681269127012711272127312741275127612771278127912801281128212831284128512861287128812891290129112921293129412951296129712981299130013011302130313041305130613071308130913101311131213131314131513161317131813191320132113221323132413251326132713281329133013311332133313341335133613371338133913401341134213431344134513461347134813491350135113521353135413551356135713581359136013611362136313641365136613671368136913701371137213731374137513761377137813791380138113821383138413851386138713881389139013911392139313941395139613971398139914001401140214031404140514061407140814091410141114121413141414151416141714181419142014211422142314241425142614271428142914301431143214331434143514361437143814391440144114421443144414451446144714481449145014511452145314541455145614571458145914601461146214631464146514661467146814691470147114721473147414751476147714781479148014811482148314841485148614871488148914901491149214931494149514961497149814991500150115021503150415051506150715081509151015111512151315141515151615171518151915201521152215231524152515261527152815291530153115321533153415351536153715381539154015411542154315441545154615471548154915501551155215531554155515561557155815591560156115621563156415651566156715681569157015711572157315741575157615771578157915801581158215831584158515861587158815891590159115921593159415951596159715981599160016011602160316041605160616071608160916101611161216131614161516161617161816191620162116221623162416251626162716281629163016311632163316341635163616371638163916401641164216431644164516461647164816491650165116521653165416551656165716581659166016611662166316641665166616671668166916701671167216731674167516761677167816791680168116821683168416851686168716881689169016911692169316941695169616971698169917001701170217031704170517061707170817091710171117121713171417151716171717181719172017211722172317241725172617271728172917301731173217331734173517361737173817391740174117421743174417451746174717481749175017511752175317541755175617571758175917601761176217631764176517661767176817691770177117721773177417751776177717781779178017811782178317841785178617871788178917901791179217931794179517961797179817991800180118021803180418051806180718081809181018111812181318141815181618171818181918201821182218231824182518261827182818291830183118321833183418351836183718381839184018411842184318441845184618471848184918501851185218531854185518561857185818591860186118621863186418651866186718681869187018711872187318741875187618771878187918801881188218831884188518861887188818891890189118921893189418951896189718981899190019011902190319041905190619071908190919101911191219131914191519161917191819191920192119221923192419251926192719281929193019311932193319341935193619371938193919401941194219431944194519461947194819491950195119521953195419551956195719581959196019611962196319641965196619671968196919701971197219731974197519761977197819791980198119821983198419851986198719881989199019911992199319941995199619971998199920002001200220032004200520062007200820092010201120122013201420152016201720182019202020212022202320242025202620272028202920302031203220332034203520362037203820392040204120422043204420452046204720482049205020512052205320542055205620572058205920602061206220632064206520662067206820692070207120722073207420752076207720782079208020812082208320842085208620872088208920902091209220932094209520962097209820992100210121022103210421052106210721082109211021112112211321142115211621172118211921202121212221232124212521262127212821292130213121322133213421352136213721382139214021412142214321442145214621472148214921502151215221532154215521562157215821592160216121622163216421652166216721682169217021712172217321742175217621772178217921802181218221832184218521862187218821892190219121922193219421952196219721982199220022012202220322042205220622072208220922102211221222132214221522162217221822192220222122222223222422252226222722282229223022312232223322342235223622372238223922402241224222432244224522462247224822492250225122522253225422552256225722582259226022612262226322642265226622672268226922702271227222732274227522762277227822792280228122822283228422852286228722882289229022912292229322942295229622972298229923002301230223032304230523062307230823092310231123122313231423152316231723182319232023212322232323242325232623272328232923302331233223332334233523362337233823392340234123422343234423452346234723482349235023512352235323542355235623572358235923602361236223632364236523662367236823692370237123722373237423752376237723782379238023812382238323842385238623872388238923902391239223932394239523962397239823992400240124022403240424052406240724082409241024112412241324142415241624172418241924202421242224232424242524262427242824292430243124322433243424352436243724382439244024412442244324442445244624472448244924502451245224532454245524562457245824592460246124622463246424652466246724682469247024712472247324742475247624772478247924802481248224832484248524862487248824892490249124922493249424952496249724982499250025012502250325042505250625072508250925102511251225132514251525162517251825192520252125222523252425252526252725282529253025312532253325342535253625372538253925402541254225432544254525462547254825492550255125522553255425552556255725582559256025612562256325642565256625672568256925702571257225732574257525762577257825792580258125822583258425852586258725882589259025912592259325942595259625972598259926002601260226032604260526062607260826092610261126122613261426152616261726182619262026212622262326242625262626272628262926302631263226332634263526362637263826392640264126422643264426452646264726482649265026512652265326542655265626572658265926602661266226632664266526662667266826692670267126722673267426752676267726782679268026812682268326842685268626872688268926902691269226932694269526962697269826992700270127022703270427052706270727082709271027112712271327142715271627172718271927202721272227232724272527262727272827292730273127322733273427352736273727382739274027412742274327442745274627472748274927502751275227532754275527562757275827592760276127622763276427652766276727682769277027712772277327742775277627772778277927802781278227832784278527862787278827892790279127922793279427952796279727982799280028012802280328042805280628072808280928102811281228132814281528162817281828192820282128222823282428252826282728282829283028312832283328342835283628372838283928402841284228432844284528462847284828492850285128522853285428552856285728582859286028612862286328642865286628672868 
  1. <?xml version="1.0" encoding="utf-8"?>
    2. 

  2. <root system="Venus">
    3. 

  3. 	<configs name="System" nameView="System">
    4. 

  4. 		<config default="True" name="IsSimulatorMode" nameView="Simulator Mode" description="仿真模式" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    5. 

  5. 		<config default="true" name="IsOpenIOEdit" nameView="Simulator Mode" description="RT IO修改开关" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    6. 

  6. 		<config default="True" name="IsOpenDebugLog" nameView="" description="Debug Log" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    7. 

  7. 		<config default="false" name="IsATMMode" nameView="ATM Mode" description="大气压传送测试模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    8. 

  8. 		<config default="false" name="IsCycleMode" nameView="Cycle Mode" description="循环跑片模式" max="" min="" paramter="" tag="" unit="" type="Bool" />
    9. 

  9. 		<config default="3" name="CycleCount" nameView="Cycle Count" description="循环次数" max="999999" min="1" paramter="" tag="" unit="" type="Integer" />
    10. 

  10. 		<config default="5" name="ATMCyclePMDelayTime" nameView="ATM Cycle PM Delay Time" description="ATM循环测试取片延时时间" max="9999" min="1" paramter="" tag="" unit="s" type="Integer" visible="false"/>
    11. 

  11. 		<config default="25" name="MaxTemperatureToleranceTransferWafer" nameView="Max Temperature Tolerance Transfer Wafer" description="传片最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
    12. 

  12. 		<config default="1" name="MaxTemperatureToleranceToTarget" nameView="Max Temperature Tolerance To Target" description="工艺最大温度差" max="100" min="1" paramter="" tag="" unit="℃" type="Double" />
    13. 

  13. 		<!--<config default="30" name="DefaultCoolingTime" nameView="Default Cooling Time" description="晶圆默认冷却时间" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />-->
    14. 

  14. 		<config default="true" name="DisplayPopDialogWhenJobComplete" nameView="Pop Dialog When Job Complete" description="是否弹出Job结束对话框" max="" min="" paramter="" tag="" unit="" type="Bool" />
    15. 

  15. 		<config default="100" name="PMLLMaxPressureDifference" nameView="Max PM/LL Pressure difference for open slit valve" description="" max="500" min="20" paramter="" tag="" unit="mtorr" type="Double" />
    16. 

  16. 		<config default="100" name="TMLLMaxPressureDifference" nameView="Max TM/LL Pressure difference for open slit valve" description="" max="500" min="20" paramter="" tag="" unit="mtorr" type="Double" />
    17. 

  17. 		<config default="100" name="PMTMMaxPressureDifference" nameView="Max PM/TM Pressure difference for open slit valve" description="" max="500" min="20" paramter="" tag="" unit="mtorr" type="Double" />
    18. 

  18. 		<config default="LLA,PMA,EfemRobot" name="InstalledModules" description="安装的模块" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
    19. 

  19. 		<config default="2" name="MaxInternalWaferCount" nameView="Max Internal wafer count" description="系统可允许进入的wafer数" max="8" min="1" paramter="" tag="" unit="" visible="true" type="Integer" />
    20. 

  20. 		<config default="00000000,00000000,00000000,00000000,00000000,00000000,00000000,00000000" name="COMLogFlag" description="Flag for print COM data log" max="" min="" paramter="" tag="" unit="" visible="false" type="String" />
    21. 

  21. 		<config default="True" name="IsIgnoreSaveDB" nameView="IsIgnoreSaveDB" description="IO实时数据是否保存数据库，2023/09/02暂时加参数设计" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    22. 

  22. 		<config default="10"  name="CheckResourceInterval" nameView="CheckResourceInterval" description="进程资源监视间隔，单位为分钟，0为不监视" max="60" min="0" paramter="" tag="" unit="min" type="Integer"/>
    23. 

  23. 		<config default="1000"  name="DataCollectionInterval" nameView="DataCollectionInterval" description="插入数据时间间隔" max="2000" min="200" paramter="" tag="" unit="ms" type="Integer"/>
    24. 

  24. 		<config default="false" name="IsEnableEthercat" nameView="Is Enable Ethercat" description="是否开启凌华Ethercat" max="" min="" paramter="" tag="" unit="" type="Bool" visible="false"/>
    25. 

  25. 		<configs name="SetUp" nameView="Set Up" visible="false">
    26. 

  26. 			<config default="true" name="EPDInstalled" nameView="Is EPD installed" description="EPD是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" />
    27. 

  27. 		</configs>
    28. 

  28. 

  29. 		<configs name="EndPoint" nameView="EndPoint" visible="false">
    30. 

  30. 			<config default="ExposureTime=222;WaveLengthA=2;BinningA=3;WaveLengthB=4;BinningB=6;WaveLengthC=5;BinningC=8;WaveLengthD=7;BinningD=9;Fd=1;PrefilterTime=2;PostfilterTime=3;AlgorithmType=Valley;Criteria=4;DelayTime=5;ValidationTime=6;ValidationValue=7;TimeWindow=8;MinimalTime=9;PostponeTime=10;Control=True;Normalization=True;EnablePostponePercent=True;EnableCriterialPercent=True;EnableEventTrigger=True;IsFaultIfNoTrigger=True;" name="EndPointDefaultValue" nameView="EndPoint Default Value" description="EndPoint Default Value" max="" min="" paramter="" tag="" unit="" type="String" visible="false" />
    31. 

  31. 		</configs>
    32. 

  32. 

  33. 		<configs name="FDC" nameView="FDC">
    34. 

  34. 			<config default="Fdc" name="DataGroupName"  nameView="FDC Data group" description="FDC data group, defined in DataGroup.xml" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
    35. 

  35. 			<config default="1000" name="DelayTime"  nameView="FDC Sample Delay Time" description="Step Delay time before collection FDC data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    36. 

  36. 			<config default="100" name="SampleInterval" nameView="FDC Sample Interval" description="interval time collection FDC sample data" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    37. 

  37. 		</configs>
    38. 

  38. 

  39. 		<configs name="WaferThickness" nameView="WaferThickness" visible="false">
    40. 

  40. 			<config default="true" name="EnableThickness" nameView="Is active thickness functions" description="是否有厚片薄片功能" max="" min="" paramter="" tag="" unit="" type="Bool" />
    41. 

  41. 			<config default="Thin" name="LP1WaferThicknessType" nameView="LP1 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
    42. 

  42. 			<config default="Thick" name="LP2WaferThicknessType" nameView="LP2 wafer thickness type" description="Thin；Thick" max="" min="" paramter="" tag="" unit="0" type="String" />
    43. 

  43. 		</configs>
    44. 

  44. 

  45. 		<configs name="Job" nameView="Job"  >
    46. 

  46. 			<config default="10" name="BuzzerTimeWhenJobDone" nameView="Buzzer Time When Job Done"  description="buzzer time after job done, -1=never stop, 0=silent,xxx=buzzer time" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    47. 

  47. 		</configs>
    48. 

  48. 	</configs>
    49. 

  49. 

  50. 	<!--FA-->
    51. 

  51. 	<configs name="FA" nameView="FA">
    52. 

  52. 		<config default="Passive" name="ConnectionMode" nameView="Connection Mode" description="Passive  Active" max="0" min="0" paramter="" tag="" unit="" type="String" />
    53. 

  53. 		<config default="127.0.0.1" name="LocalIpAddress" nameView="Local Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    54. 

  54. 		<config default="5000" name="LocalPortNumber" nameView="Local Port Number" description="LocalPortNumber" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    55. 

  55. 		<config default="127.0.0.1" name="RemoteIpAddress" nameView="Remote Ip Address" description=" " max="0" min="0" paramter="" tag="" unit="" type="String" />
    56. 

  56. 		<config default="5001" name="RemotePortNumber" nameView="Remote Port Number" description=" " max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    57. 

  57. 		<config default="45" name="T3Timeout" nameView="T3 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    58. 

  58. 		<config default="10" name="T5Timeout" nameView="T5 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    59. 

  59. 		<config default="5" name="T6Timeout" nameView="T6 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    60. 

  60. 		<config default="10" name="T7Timeout" nameView="T7 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    61. 

  61. 		<config default="5" name="T8Timeout" nameView="T8 Timeout" description=" " max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    62. 

  62. 		<config default="false" name="EnableSpooling" nameView="Enable Spooling" description="EnableSpooling" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    63. 

  63. 		<config default="30" name="LinkTestInterval" nameView="Link Test Interval" description="LinkTestInterval" max="999" min="0" paramter="" tag="" unit="s" type="Integer" />
    64. 

  64. 		<config default="0" name="DeviceId" nameView="Device Id" description="DeviceId" max="0" min="0" paramter="" tag="" unit="" type="String" />
    65. 

  65. 		<config default="0" name="SpoolingCapability" description="Spooling Capacity" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    66. 

  66. 		<config default="0" name="SpoolingMaxTransmit" description="Spooling Max transmit" max="99999" min="0" paramter="" tag="" unit="" type="Integer" />
    67. 

  67. 		<config default="true" name="SpoolingFullOverWrite" description="Spooling Full OverWrite" max="0" min="0" paramter="" tag="" unit="" type="String" />
    68. 

  68. 		<config default="Enabled" name="DefaultCommunicationState" description="Default Communication State" max="0" min="0" paramter="" tag="" unit="" type="String" />
    69. 

  69. 		<config default="Online" name="DefaultControlState" description="Default Control State" max="0" min="0" paramter="" tag="" unit="" type="String" />
    70. 

  70. 		<config default="Remote" name="DefaultControlSubState" description="Default Control SubState" max="0" min="0" paramter="" tag="" unit="" type="String" />
    71. 

  71. 		<config default="ASCII" name="HsmsEncoding" description="HsmsEncoding" max="0" min="0" paramter="" tag="" unit="" type="String" />
    72. 

  72. 		<config default="ASCII" name="SerialEncoding" description="SerialEncoding" max="0" min="0" paramter="" tag="" unit="" type="String" />
    73. 

  73. 		<config default="true" name="EnableReWriteStatusVariable" nameView="EnableReWriteStatusVariable" description="Enable ReWrite Equipment PM Status Variable" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    74. 

  74. 	</configs>
    75. 

  75. 

  76. 	<!--Router-->
    77. 

  77. 	<configs name="Scheduler" nameView="Scheduler" >
    78. 

  78. 		<config default="true" name="GroupWaferBySequence" nameView="Group Wafer By Sequence" description="GroupWaferBySequence" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    79. 

  79. 		<config default="true" name="IsRunInParallelMode" nameView="Is Run In Parallel Mode" description="并行模式1对1，串行模式按顺序" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    80. 

  80. 	</configs>
    81. 

  81. 

  82. 	<!--EFEM-->
    83. 

  83. 	<configs name="EFEM" nameView="EFEM">
    84. 

  84. 		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="EFEM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    85. 

  85. 		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
    86. 

  86. 		<config default="127.0.0.1:13000" name="IPAddress" nameView="IP Address" description="EFEM IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
    87. 

  87. 		<config default="true" name="CheckSideDoorOnEAPMap" nameView="CheckSideDoorOnEAPMap" description="在自动跑货的时候检查侧门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
    88. 

  88. 		<config default="true" name="CheckCassetteDoorOnEAPMap" nameView="CheckCassetteDoorOnEAPMap" description="在自动跑货的时候检查EFEM正门是否关闭" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true"/>
    89. 

  89. 

  90. 

  91. 		<config default="1" name="EfemType" nameView="EFEM Type" description="EFEM类型，1=Future广川 2=Jet自制 3=Brooks" max="300" min="1" paramter="" tag="" unit="" type="Integer" />
    92. 

  92. 

  93. 		<config default="false" name="AutoUnlockAfterUnload" nameView="auto unlock after unload" description="是否自动解锁" max="" min="" paramter="" tag="" unit="" type="Bool" />
    94. 

  94. 

  95. 		<config default="false" name="IgnoreWaterFlowError" nameView="Ignore water flow alarm" description="是否忽略冷却水报警" max="" min="" paramter="" tag="" unit="" type="Bool" />
    96. 

  96. 

  97. 		<config default="40" name="DelayTimeBeforeLiftDown" nameView="Delay Time before lift down" description="冷却前，lift pin停留多久再落下" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    98. 

  98. 		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    99. 

  99. 

  100. 		<config default="4" name="LLAutoPumpInWaferOpt" nameView="Loadlock Auto Pump Option for Raw Wafer" description="Auto Pumping Loadlock while raw wafer number big or equal then this number" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    101. 

  101. 		<config default="0" name="LLAutoPumpOutWaferOpt" nameView="Loadlock Auto Pump Option for Processed Wafer" description="Auto Pumping Loadlock while processed wafer number less or equal than this number" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    102. 

  102. 

  103. 		<configs name="LoadPort" nameView="LoadPort" >
    104. 

  104. 			<config default="30" name="MotionTimeout" nameView="Motion Timeout"  description="Motion Timeout" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    105. 

  105. 			<config default="30" name="HomeTimeout" nameView="Home Timeout"  description="LoadPort初始化超时时间" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    106. 

  106. 			<config default="25" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="s" type="Integer" />
    107. 

  107. 			<config default="true" name="SlotFromBottom" nameView="Slot number from bottom" description="编号顺序从下往上，最下面的是1" max="" min="" paramter="" tag="" unit="" type="Bool" />
    108. 

  108. 

  109. 			<config default="false" name="EnableScanner" nameView="Enable Scanner Reader" description="是否打开扫码枪功能" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    110. 

  110. 

  111. 		</configs>
    112. 

  112. 		<configs name="Aligner" nameView="Aligner">
    113. 

  113. 			<config default ="0" name="AlignAngle" nameView="Align Angle" description="Align Angle" max="360" min="0" parameter="" tag="" unit="" type="Integer" />
    114. 

  114. 			<config default ="0" name="IncreasingAngle" nameView="Increasing Angle" description="Increasing Angle by Wafer"  max="360" min="0" parameter="" tag="" unit="" type="Integer" />
    115. 

  115. 		</configs>
    116. 

  116. 	</configs>
    117. 

  117. 

  118. 	<!--TM-->
    119. 

  119. 	<configs name="TM" nameView="TM">
    120. 

  120. 		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="TM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    121. 

  121. 		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
    122. 

  122. 		<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="TM Robot IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
    123. 

  123. 

  124. 

  125. 		<config default="1" name="TMRobotType" nameView="TM Robot Type" description="TM 类型，1=SIASUN新松 2=HONGHU泓浒 3==Brooks" max="10" min="1" paramter="" tag="" unit="" type="Integer" />
    126. 

  126. 

  127. 		<config default="100" name="SoftVentEndPressure" nameView="Soft Vent End Pressure" description="" max="30000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    128. 

  128. 

  129. 		<config default="1" name="LLAStationNumber" nameView="LLA Station Number" description="LLA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    130. 

  130. 		<config default="2" name="LLBStationNumber" nameView="LLB Station Number" description="LLB Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    131. 

  131. 		<config default="2" name="PMAStationNumber" nameView="PMA Station Number" description="PMA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    132. 

  132. 		<config default="3" name="PMBStationNumber" nameView="PMB Station Number" description="PMB Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    133. 

  133. 		<config default="4" name="PMCStationNumber" nameView="PMC Station Number" description="PMC Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    134. 

  134. 		<config default="6" name="PMDStationNumber" nameView="PMD Station Number" description="PMD Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    135. 

  135. 		<config default="7" name="PMEStationNumber" nameView="PME Station Number" description="PME Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    136. 

  136. 		<config default="8" name="PMFStationNumber" nameView="PMF Station Number" description="PMF Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    137. 

  137. 

  138. 		<config default="1" name="CheckLoadStation" nameView="Check Load Station Number" description="Station Number for Check Load" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    139. 

  139. 

  140. 		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="200" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    141. 

  141. 		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="300000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
    142. 

  142. 		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    143. 

  143. 		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    144. 

  144. 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    145. 

  145. 		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    146. 

  146. 		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
    147. 

  147. 		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    148. 

  148. 		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    149. 

  149. 		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    150. 

  150. 		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    151. 

  151. 

  152. 		<config default="120" name="PickTimeout" nameView="Pick Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    153. 

  153. 		<config default="120" name="PlaceTimeout" nameView="Place Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    154. 

  154. 		<config default="60" name="ExtendTimeout" nameView="Extend Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    155. 

  155. 		<config default="60" name="RetractTimeout" nameView="Retract Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    156. 

  156. 		<config default="180" name="SwapTimeout" nameView="Swap Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    157. 

  157. 		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="TM Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    158. 

  158. 		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="TM Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    159. 

  159. 		<config default="50"  name="WithLLPressureDifference"   nameView="TM LL Pressure Difference"   description="TM和LL压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    160. 

  160. 		<config default="50"  name="WithPMPressureDifference"   nameView="TM PM Pressure Difference"   description="TM和PM压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    161. 

  161. 		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    162. 

  162. 		<config default="0" name="QueryAWCOption"   nameView="Query AWC Option"   description="0, None; 1, Only TMPick Open; 2, Only TMPlace Open; 3, Both Open" max="3" min="0" paramter="" tag="" unit="" type="Integer" />
    163. 

  163. 

  164. 		<config default="0" name="LLAutoVentInWaferOpt" nameView="Loadlock Aut Vent Option For Raw Wafer" description="Auto Venting Loadlock while raw wafer number less or equal than this number" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    165. 

  165. 		<config default="4" name="LLAutoVentOutWaferOpt" nameView="Loadlock Auto Vent Option For Processed Wafer" description="Auto Venting Loadlock while processed wafer number big or equal than this number" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    166. 

  166. 		<configs name="TM_MFC1" nameView="MFC1" >
    167. 

  167. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    168. 

  168. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    169. 

  169. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    170. 

  170. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    171. 

  171. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    172. 

  172. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    173. 

  173. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    174. 

  174. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    175. 

  175. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    176. 

  176. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    177. 

  177. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    178. 

  178. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    179. 

  179. 

  180. 		</configs>
    181. 

  181. 		
    182. 

  182. 		
    183. 

  183. 		<configs name="DryPump" nameView="Dry Pump" >
    184. 

  184. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    185. 

  185. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    186. 

  186. 			<config default="COM24" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    187. 

  187. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    188. 

  188. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    189. 

  189. 		</configs>
    190. 

  190. 		<configs name="PreRotation" nameView="Pre Rotation definition">
    191. 

  191. 			<config default="PMA" name="PMA" nameView="PMA" description="Pre Rotation Station of PMA" max="" min="" paramter="" tag="" visible="true" unit="" type="String" />
    192. 

  192. 			<config default="PMB" name="PMB" nameView="PMB" description="Pre Rotation Station of PMB" max="" min="" paramter="" tag="" visible="true" unit="" type="String" />
    193. 

  193. 			<config default="PMC" name="PMC" nameView="PMC" description="Pre Rotation Station of PMC" max="" min="" paramter="" tag="" visible="true" unit="" type="String" />
    194. 

  194. 			<config default="PMD" name="PMD" nameView="PMD" description="Pre Rotation Station of PMD" max="" min="" paramter="" tag="" visible="true" unit="" type="String" />
    195. 

  195. 			<config default="LLA" name="LLA" nameView="LLA" description="Pre Rotation Station of LLA" max="" min="" paramter="" tag="" visible="true" unit="" type="String" />
    196. 

  196. 			<config default="LLB" name="LLB" nameView="LLB" description="Pre Rotation Station of LLB" max="" min="" paramter="" tag="" visible="true" unit="" type="String" />
    197. 

  197. 		</configs>
    198. 

  198. 

  199. 	</configs>
    200. 

  200. 

  201. 	<!--LLA-->
    202. 

  202. 	<configs name="LLA" nameView="LLA">
    203. 

  203. 		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    204. 

  204. 		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="500000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
    205. 

  205. 		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    206. 

  206. 		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    207. 

  207. 		<config default="100" name="SoftVentEndPressure" nameView="Soft Vent End Pressure" description="" max="100000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    208. 

  208. 		<config default="500" name="SwitchLLPumpDelay" nameView="Switch LL Pump Delay" description="让渡LL Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    209. 

  209. 

  210. 		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    211. 

  211. 		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
    212. 

  212. 		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    213. 

  213. 		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    214. 

  214. 		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    215. 

  215. 		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    216. 

  216. 		<config default="2" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="" type="Integer" />
    217. 

  217. 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer"/>
    218. 

  218. 		<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    219. 

  219. 		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="LLA Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    220. 

  220. 		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="LLA Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    221. 

  221. 		<configs name="DryPump" nameView="Dry Pump" >
    222. 

  222. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    223. 

  223. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    224. 

  224. 			<config default="COM26" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    225. 

  225. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    226. 

  226. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    227. 

  227. 		</configs>
    228. 

  228. 		<configs name="LLA_MFC1" nameView="MFC1" >
    229. 

  229. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    230. 

  230. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    231. 

  231. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    232. 

  232. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    233. 

  233. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    234. 

  234. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    235. 

  235. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    236. 

  236. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    237. 

  237. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    238. 

  238. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    239. 

  239. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    240. 

  240. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    241. 

  241. 

  242. 		</configs>
    243. 

  243. 	</configs>
    244. 

  244. 

  245. 	<!--LLB-->
    246. 

  246. 	<configs name="LLB" nameView="LLB">
    247. 

  247. 		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    248. 

  248. 		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="500000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
    249. 

  249. 		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    250. 

  250. 		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    251. 

  251. 		<config default="100" name="SoftVentEndPressure" nameView="Soft Vent End Pressure" description="" max="100000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    252. 

  252. 		<config default="500" name="SwitchLLPumpDelay" nameView="Switch LL Pump Delay" description="让渡LL Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    253. 

  253. 

  254. 		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    255. 

  255. 		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
    256. 

  256. 		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    257. 

  257. 		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    258. 

  258. 		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    259. 

  259. 		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    260. 

  260. 		<config default="4" name="SlotNumber" nameView="Slot number"  description="槽位个数" max="60" min="1" paramter="" tag="" unit="" type="Integer" />
    261. 

  261. 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    262. 

  262. 		<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    263. 

  263. 		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="LLA Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    264. 

  264. 		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="LLA Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    265. 

  265. 		<configs name="DryPump" nameView="Dry Pump" >
    266. 

  266. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    267. 

  267. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    268. 

  268. 			<config default="COM26" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    269. 

  269. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    270. 

  270. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    271. 

  271. 		</configs>
    272. 

  272. 		<configs name="LLB_MFC1" nameView="MFC1" >
    273. 

  273. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    274. 

  274. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    275. 

  275. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    276. 

  276. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    277. 

  277. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    278. 

  278. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    279. 

  279. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    280. 

  280. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    281. 

  281. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    282. 

  282. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    283. 

  283. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    284. 

  284. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    285. 

  285. 

  286. 		</configs>
    287. 

  287. 	</configs>
    288. 

  288. 

  289. 	<!--SE TM-->
    290. 

  290. 	<configs name="SETM" nameView="SETM">
    291. 

  291. 		<config default="30" name="HomeTimeout" nameView="Home Timeout" description="TM初始化超时" max="300" min="1" paramter="" tag="" unit="s" type="Integer" />
    292. 

  292. 		<config default="60" name="MotionTimeout" nameView="Motion Timeout" description="motion time out" max="600" min="1" paramter="" tag="" unit="s" type="Integer" />
    293. 

  293. 		<config default="127.0.0.1:1103" name="IPAddress" nameView="IP Address" description="TM Robot IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
    294. 

  294. 		<config default="COM160" name="VPAPort" nameView="VP APort" description="TM PreAligner COM口号" max="" min="" paramter="" tag="" unit="" type="String" />
    295. 

  295. 		<config default="2" name="PMAStationNumber" nameView="PMA Station Number" description="PMA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    296. 

  296. 		<config default="3" name="PMBStationNumber" nameView="PMB Station Number" description="PMB Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    297. 

  297. 		<config default="4" name="PMCStationNumber" nameView="PMC Station Number" description="PMC Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    298. 

  298. 		<config default="6" name="PMDStationNumber" nameView="PMD Station Number" description="PMD Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    299. 

  299. 		<config default="7" name="PMEStationNumber" nameView="PME Station Number" description="PME Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    300. 

  300. 		<config default="8" name="PMFStationNumber" nameView="PMF Station Number" description="PMF Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    301. 

  301. 		<config default="5" name="VCE1StationNumber" nameView="VCE1 Station Number" description="VCE1 Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    302. 

  302. 		<config default="1" name="VPAStationNumber" nameView="VPA Station Number" description="VPA Station Number" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    303. 

  303. 		<config default="760000" name="ATMTargetPressure" nameView="TM ATM Target Pressure" description="TM ATM Target Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    304. 

  304.     <config default="100" name="VACTargetPressure" nameView="TM VAC Target Pressure" description="TM VAC Target Pressure" max="3000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    305. 

  305. 		<config default="100" name="SoftVentEndPressure" nameView="TM Soft Vent End Pressure" description="" max="30000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    306. 

  306. 

  307. 		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="200" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    308. 

  308. 		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="300000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
    309. 

  309. 		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    310. 

  310. 		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    311. 

  311. 		<config default="500" name="SwitchPumpDelay" nameView="Switch Pump Delay" description="让渡Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    312. 

  312. 

  313. 		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    314. 

  314. 		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
    315. 

  315. 		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    316. 

  316. 		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    317. 

  317. 		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    318. 

  318. 		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    319. 

  319. 

  320. 		<config default="120" name="PickTimeout" nameView="Pick Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    321. 

  321. 		<config default="120" name="PlaceTimeout" nameView="Place Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    322. 

  322. 		<config default="60" name="ExtendTimeout" nameView="Extend Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    323. 

  323. 		<config default="60" name="RetractTimeout" nameView="Retract Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    324. 

  324. 		<config default="180" name="SwapTimeout" nameView="Swap Timeout" description="" max="300" min="0" paramter="" tag="" unit="s" type="Integer" />
    325. 

  325. 		<config default="100" name="ControlPressureCheckPoint" nameView="Control Pressure CheckPoint" description="TM Chamber 控压 检测值" max="300" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    326. 

  326. 		<config default="90"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="TM Chamber 控压 设定值" max="200" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    327. 

  327. 		<config default="50"  name="WithLLPressureDifference"   nameView="TM LL Pressure Difference"   description="TM和LL压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    328. 

  328. 		<config default="50"  name="WithPMPressureDifference"   nameView="TM PM Pressure Difference"   description="TM和PM压差" max="100" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    329. 

  329. 		<config default="0" name="SingleArmOption"   nameView="Single Arm Option"   description="0, both; 1, Blade1; 2, Blade2" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    330. 

  330. 		<config default="0" name="QueryAWCOption"   nameView="Query AWC Option"   description="0, None; 1, Only TMPick Open; 2, Only TMPlace Open; 3, Both Open" max="3" min="0" paramter="" tag="" unit="" type="Integer" />
    331. 

  331. 		<configs name="TM_MFC1" nameView="MFC1" >
    332. 

  332. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    333. 

  333. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    334. 

  334. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    335. 

  335. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    336. 

  336. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    337. 

  337. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    338. 

  338. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    339. 

  339. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    340. 

  340. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    341. 

  341. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    342. 

  342. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    343. 

  343. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    344. 

  344. 

  345. 		</configs>
    346. 

  346. 		<configs name="DryPump" nameView="Dry Pump" >
    347. 

  347. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    348. 

  348. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    349. 

  349. 			<config default="COM24" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    350. 

  350. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    351. 

  351. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    352. 

  352. 		</configs>
    353. 

  353.     <configs name="PressureControl" nameView="PressureControl" >
    354. 

  354.       <config default="true" name="ControlWriteMode" nameView="ControlWriteMode" description="Control Write Mode:True is Flow,False is Pressure" tag="" unit="" type="Bool" />
    355. 

  355.       <config default="1" name="TargetMFC" nameView="TargetMFC" description="Target MFC" max="10" min="0" tag="" unit="sccm" type="Double" />
    356. 

  356.       <config default="760000" name="TargetPressure" nameView="TargetPressure" description="Target Pressure" max="760000" min="0" tag="" unit="mTorr" type="Double" />
    357. 

  357.     </configs>
    358. 

  358. 	</configs>
    359. 

  359. 

  360. 	<!--VCE-->
    361. 

  361. 	<configs  name="VCE1" nameView="VCE1">
    362. 

  362. 		<config default="COM15" name="Port" nameView="Port" description="" max="" min="0" paramter="" tag="" unit="" type="String" />
    363. 

  363. 		<config default="15" name="MotionTimeout" nameView="" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    364. 

  364. 		<config default="100" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="200" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    365. 

  365. 		<config default="2000" name="PumpCrossingPressure" nameView="Pump Crossing Pressure" description="" max="300000" min="200" paramter="" tag="" unit="mTorr" type="Double" />
    366. 

  366. 		<config default="60" name="PumpingTimeout" nameView="Pumping Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    367. 

  367. 		<config default="60" name="VentingTimeout" nameView="Venting Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    368. 

  368. 		<config default="500" name="SwitchPumpDelay" nameView="Switch Pump Delay" description="让渡Pump前延迟" max="50000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    369. 

  369. 		<config default="100" name="SoftVentEndPressure" nameView="VCE Soft Vent End Pressure" description="" max="30000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    370. 

  370. 		<config default="750000" name="OutDoorOpenPressure" nameView="Out Door Open Pressure" description="外门开启时，在ATM信号亮下的最小压力值" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    371. 

  371. 		
    372. 

  372. 		<config default="2000" name="PurgeVentPressure" description="Purge Vent Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    373. 

  373. 		<config default="30" name="PurgeCycleCount" description="Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
    374. 

  374. 		<config default="120" name="PurgePumpTime" description="Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    375. 

  375. 		<config default="180" name="LeakCheckPumpTime" description="Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    376. 

  376. 		<config default="300" name="LeakCheckWaitTime" description="Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    377. 

  377. 		<config default="30" name="LeakRate" description="Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    378. 

  378. 

  379. 		<config default="760000" name="ATMTargetPressure" nameView="VCE ATM Target Pressure" description="VCE ATM Target Pressure" max="760000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    380. 

  380.     <config default="100" name="VACTargetPressure" nameView="VCE VAC Target Pressure" description="VCE VAC Target Pressure" max="3000" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    381. 

  381. 		<config default="25" name="SlotNumber" nameView="VCE SlotNumber" description="槽位个数" max="99" min="0" paramter="" tag="" unit="" type="Integer" />
    382. 

  382. 		<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    383. 

  383. 		<configs name="SMIF" nameView="SMIF" >
    384. 

  384. 			<config default="1" name="Manufacturer" nameView="Manufacturer" description="厂商, 1:Fortrend;" max="2" min="1" paramter="" tag="" unit="" type="Integer" />
    385. 

  385. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    386. 

  386. 			<config default="COM24" name="Port" nameView="Port" description="serial port" max="" min="" paramter="" tag="" unit="" type="String" />
    387. 

  387. 			<config default="15" name="MotionTimeout" nameView="" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    388. 

  388. 		</configs>
    389. 

  389. 	</configs>
    390. 

  390. 

  391. 	<!--PMA-->
    392. 

  392. 	<configs name="PMA" nameView="PMA" >
    393. 

  393. 		<config default="1" name="ChamberType"  nameView="Chamber Type" description="1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="1" paramter="" tag=""  unit="" type="Integer" visible="false"/>
    394. 

  394. 		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
    395. 

  395. 		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    396. 

  396. 		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    397. 

  397. 		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    398. 

  398. 		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    399. 

  399. 		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    400. 

  400. 		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    401. 

  401. 		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    402. 

  402. 		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    403. 

  403. 		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    404. 

  404. 		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    405. 

  405. 		<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    406. 

  406. 		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    407. 

  407. 		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    408. 

  408. 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    409. 

  409. 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    410. 

  410. 		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    411. 

  411. 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    412. 

  412. 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    413. 

  413. 		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
    414. 

  414. 		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    415. 

  415. 		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
    416. 

  416. 		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
    417. 

  417. 		<config default="0" name="PickDelayTime" nameView="Pick Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    418. 

  418. 		<config default="0" name="PlaceDelayTime" nameView="Place Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    419. 

  419. 		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
    420. 

  420. 		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    421. 

  421. 		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    422. 

  422. 		<config default="150" name="PendulumHeaterSetPointLimit" nameView="Pendulum Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    423. 

  423. 

  424. 		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    425. 

  425. 		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    426. 

  426. 		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    427. 

  427. 		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
    428. 

  428. 		<config default="751" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="" max="2000" min="500" paramter="" tag="" unit="°C" type="Double" />
    429. 

  429. 		<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension"  description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    430. 

  430. 		<config default="80"   name="ControlPressureSetPoint"       nameView="Control Pressure SetPoint"   description="PM Chamber 控压 设定值" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    431. 

  431. 		<config default="300"  name="ControlPressureN2FlowSetPoint"   nameView="Control Pressure N2 Flow SetPoint"   description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    432. 

  432. 

  433. 		<configs name="MFCVerification" nameView="MFC Verification" >
    434. 

  434. 			<config default="1" name="BasePressure" nameView="开始条件：腔体压力达到时开始流气" max="100" min="1" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    435. 

  435. 			<config default="180" name="PumpingTime" nameView="抽气时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    436. 

  436. 			<config default="10" name="GasFlowTime" nameView="结束条件：流气多长时间" max="600" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    437. 

  437. 			<config default="180" name="HoldTime" nameView="Hold 时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    438. 

  438. 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    439. 

  439. 			<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    440. 

  440. 			<config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    441. 

  441. 

  442. 			<config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    443. 

  443. 			<config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    444. 

  444. 			<config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    445. 

  445. 			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    446. 

  446. 		</configs>
    447. 

  447. 

  448. 		<configs name="Chiller" nameView="Chiller">
    449. 

  449. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    450. 

  450. 			<!--<config default="false" name="ChillerSameWithPMB" nameView="Chiller Same With PMB" description="enable chiller same with PMB or not" max="1" min="0" tag="" unit="" type="Bool" />-->
    451. 

  451. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    452. 

  452. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    453. 

  453. 			<config default="COM44" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    454. 

  454. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    455. 

  455. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    456. 

  456. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    457. 

  457. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    458. 

  458. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    459. 

  459. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    460. 

  460. 		</configs>
    461. 

  461. 		<configs name="InnerChiller" nameView="InnerChiller" >
    462. 

  462. 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    463. 

  463. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    464. 

  464. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    465. 

  465. 			<config default="COM45" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    466. 

  466. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    467. 

  467. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    468. 

  468. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    469. 

  469. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    470. 

  470. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    471. 

  471. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    472. 

  472. 		</configs>
    473. 

  473. 		<configs name="OuterChiller" nameView="OuterChiller" >
    474. 

  474. 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    475. 

  475. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    476. 

  476. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    477. 

  477. 			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    478. 

  478. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    479. 

  479. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    480. 

  480. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    481. 

  481. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    482. 

  482. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    483. 

  483. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    484. 

  484. 		</configs>
    485. 

  485. 		<configs name="TopChiller" nameView="TopChiller" >
    486. 

  486. 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    487. 

  487. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    488. 

  488. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    489. 

  489. 			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    490. 

  490. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    491. 

  491. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    492. 

  492. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    493. 

  493. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    494. 

  494. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    495. 

  495. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    496. 

  496. 		</configs>
    497. 

  497. 		<configs name="DryPump" nameView="Dry Pump" >
    498. 

  498. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    499. 

  499. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    500. 

  500. 			<config default="COM22" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    501. 

  501. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    502. 

  502. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    503. 

  503. 		</configs>
    504. 

  504.     <configs name="Magnet" nameView="Magnet" visible="false">
    505. 

  505.       <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    506. 

  506.       <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    507. 

  507.       <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
    508. 

  508.       <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
    509. 

  509.       <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    510. 

  510.       <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    511. 

  511.       <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    512. 

  512.       <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
    513. 

  513.     </configs>
    514. 

  514. 		<configs name="Rf" nameView="Source RF" >
    515. 

  515. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    516. 

  516. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    517. 

  517. 			<config default="COM38" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    518. 

  518. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    519. 

  519. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    520. 

  520. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    521. 

  521. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    522. 

  522. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    523. 

  523. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    524. 

  524. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    525. 

  525. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    526. 

  526. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    527. 

  527. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    528. 

  528. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    529. 

  529. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    530. 

  530. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    531. 

  531. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    532. 

  532. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    533. 

  533. 			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    534. 

  534. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    535. 

  535. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    536. 

  536. 

  537. 			<config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    538. 

  538. 			<config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    539. 

  539. 			<config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    540. 

  540. 			<config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
    541. 

  541. 			<config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    542. 

  542. 			<config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    543. 

  543. 

  544. 		</configs>
    545. 

  545. 		<configs name="Match" nameView="Source Match" >
    546. 

  546. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    547. 

  547. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    548. 

  548. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    549. 

  549. 			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    550. 

  550. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    551. 

  551. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    552. 

  552. 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    553. 

  553. 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    554. 

  554. 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    555. 

  555. 		</configs>
    556. 

  556. 		<configs name="RFBox" nameView="RF Box" >
    557. 

  557. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    558. 

  558. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    559. 

  559. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    560. 

  560. 			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    561. 

  561. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    562. 

  562. 		</configs>
    563. 

  563. 		<configs name="BiasRf" nameView="Bias RF" >
    564. 

  564. 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    565. 

  565. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    566. 

  566. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    567. 

  567. 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    568. 

  568. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    569. 

  569. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    570. 

  570. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    571. 

  571. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    572. 

  572. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    573. 

  573. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    574. 

  574. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    575. 

  575. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    576. 

  576. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    577. 

  577. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    578. 

  578. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    579. 

  579. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    580. 

  580. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    581. 

  581. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    582. 

  582. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    583. 

  583. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    584. 

  584. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    585. 

  585. 

  586. 			<config default="" name="GeneratorSerialNumber" nameView="RF电源序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    587. 

  587. 			<config default="" name="SensorSerialNumber" nameView="SensorHead序列号" max="" min="0" paramter="" tag="" unit="" type="String" />
    588. 

  588. 			<config default="2000" name="RFPhysicalMaxPower" nameView="RF Physical Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double"  visible="false"/>
    589. 

  589. 			<config default="2000" name="CurrentRFMaxPower" nameView="Current RF Max Power" description="" max="2200" min="1800" paramter="" tag="" unit="" type="Double" />
    590. 

  590. 			<config default="2000" name="RFCalibratedMaxPower" nameView="RF Calibrated Max Power" description="" max="9999" min="0" paramter="" tag="" unit="" type="Double" />
    591. 

  591. 			<config default="" name="CalibrationTableDetail" nameView="详细校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    592. 

  592. 

  593. 		</configs>
    594. 

  594. 		<configs name="BiasMatch" nameView="Bias Match" >
    595. 

  595. 			<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    596. 

  596. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    597. 

  597. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    598. 

  598. 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    599. 

  599. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    600. 

  600. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    601. 

  601. 			<config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    602. 

  602. 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    603. 

  603. 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    604. 

  604. 		</configs>
    605. 

  605. 		<configs name="MfcGas1" nameView="MFC Gas1" >
    606. 

  606. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    607. 

  607. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    608. 

  608. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    609. 

  609. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    610. 

  610. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    611. 

  611. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    612. 

  612. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    613. 

  613. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    614. 

  614. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    615. 

  615. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    616. 

  616. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    617. 

  617. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    618. 

  618. 		</configs>
    619. 

  619. 		<configs name="MfcGas2" nameView="MFC Gas2" >
    620. 

  620. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    621. 

  621. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    622. 

  622. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    623. 

  623. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    624. 

  624. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    625. 

  625. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    626. 

  626. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    627. 

  627. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    628. 

  628. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    629. 

  629. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    630. 

  630. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    631. 

  631. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    632. 

  632. 

  633. 		</configs>
    634. 

  634. 		<configs name="MfcGas3" nameView="MFC Gas3" >
    635. 

  635. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    636. 

  636. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    637. 

  637. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    638. 

  638. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    639. 

  639. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    640. 

  640. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    641. 

  641. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    642. 

  642. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    643. 

  643. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    644. 

  644. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    645. 

  645. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    646. 

  646. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    647. 

  647. 

  648. 		</configs>
    649. 

  649. 		<configs name="MfcGas4" nameView="MFC Gas4" >
    650. 

  650. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    651. 

  651. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    652. 

  652. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    653. 

  653. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    654. 

  654. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    655. 

  655. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    656. 

  656. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    657. 

  657. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    658. 

  658. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    659. 

  659. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    660. 

  660. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    661. 

  661. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    662. 

  662. 

  663. 		</configs>
    664. 

  664. 		<configs name="MfcGas5" nameView="MFC Gas5" >
    665. 

  665. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    666. 

  666. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    667. 

  667. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    668. 

  668. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    669. 

  669. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    670. 

  670. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    671. 

  671. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    672. 

  672. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    673. 

  673. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    674. 

  674. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    675. 

  675. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    676. 

  676. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    677. 

  677. 

  678. 		</configs>
    679. 

  679. 		<configs name="MfcGas6" nameView="MFC Gas6" >
    680. 

  680. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    681. 

  681. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    682. 

  682. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    683. 

  683. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    684. 

  684. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    685. 

  685. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    686. 

  686. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    687. 

  687. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    688. 

  688. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    689. 

  689. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    690. 

  690. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    691. 

  691. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    692. 

  692. 

  693. 		</configs>
    694. 

  694. 		<configs name="MfcGas7" nameView="MFC Gas7" >
    695. 

  695. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 7 or not" tag="" unit="" type="Bool" />
    696. 

  696. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.7 gas stick" tag="" unit="" type="String" />
    697. 

  697. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    698. 

  698. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    699. 

  699. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    700. 

  700. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    701. 

  701. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    702. 

  702. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    703. 

  703. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    704. 

  704. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    705. 

  705. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    706. 

  706. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    707. 

  707. 

  708. 		</configs>
    709. 

  709. 		<configs name="MfcGas8" nameView="MFC Gas8" >
    710. 

  710. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 8 or not" tag="" unit="" type="Bool" />
    711. 

  711. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.8 gas stick" tag="" unit="" type="String" />
    712. 

  712. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    713. 

  713. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    714. 

  714. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    715. 

  715. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    716. 

  716. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    717. 

  717. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    718. 

  718. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    719. 

  719. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    720. 

  720. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    721. 

  721. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    722. 

  722. 

  723. 		</configs>
    724. 

  724. 		<configs name="MfcGas9" nameView="MFC Gas9" >
    725. 

  725. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 9 or not" tag="" unit="" type="Bool" />
    726. 

  726. 			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.9 gas stick" tag="" unit="" type="String" />
    727. 

  727. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    728. 

  728. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    729. 

  729. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    730. 

  730. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    731. 

  731. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    732. 

  732. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    733. 

  733. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    734. 

  734. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    735. 

  735. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    736. 

  736. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    737. 

  737. 		</configs>
    738. 

  738. 		<configs name="MfcGas10" nameView="MFC Gas10" >
    739. 

  739. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
    740. 

  740. 			<config default="Gas7" name="GasName" nameView="Gas Name" description="Name of NO.10 gas stick" tag="" unit="" type="String" />
    741. 

  741. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    742. 

  742. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    743. 

  743. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    744. 

  744. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    745. 

  745. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    746. 

  746. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    747. 

  747. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    748. 

  748. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    749. 

  749. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    750. 

  750. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    751. 

  751. 		</configs>
    752. 

  752. 		<configs name="MfcGas11" nameView="MFC Gas8" >
    753. 

  753. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
    754. 

  754. 			<config default="Gas8" name="GasName" nameView="Gas Name" description="Name of NO.11 gas stick" tag="" unit="" type="String" />
    755. 

  755. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    756. 

  756. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    757. 

  757. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    758. 

  758. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    759. 

  759. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    760. 

  760. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    761. 

  761. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    762. 

  762. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    763. 

  763. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    764. 

  764. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    765. 

  765. 		</configs>
    766. 

  766. 		<configs name="MfcGas12" nameView="MFC Gas12" >
    767. 

  767. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
    768. 

  768. 			<config default="Gas9" name="GasName" nameView="Gas Name" description="Name of NO.12 gas stick" tag="" unit="" type="String" />
    769. 

  769. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    770. 

  770. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    771. 

  771. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    772. 

  772. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    773. 

  773. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    774. 

  774. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    775. 

  775. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    776. 

  776. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    777. 

  777. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    778. 

  778. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    779. 

  779. 		</configs>
    780. 

  780. 		<configs name="MfcN2" nameView="MFC N2" >
    781. 

  781. 			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
    782. 

  782. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
    783. 

  783. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    784. 

  784. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    785. 

  785. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    786. 

  786. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    787. 

  787. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    788. 

  788. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    789. 

  789. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    790. 

  790. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    791. 

  791. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    792. 

  792. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    793. 

  793. 

  794. 		</configs>
    795. 

  795. 		<configs name="MfcHe" nameView="MFC He" >
    796. 

  796. 			<config default="true" name="Enable" nameView="Enable" description="Enable He or not" tag="" unit="" type="Bool" />
    797. 

  797. 			<config default="He" name="GasName" nameView="Gas Name" description="Name of He stick" tag="" unit="" type="String" />
    798. 

  798. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    799. 

  799. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    800. 

  800. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    801. 

  801. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    802. 

  802. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    803. 

  803. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    804. 

  804. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    805. 

  805. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    806. 

  806. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    807. 

  807. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    808. 

  808. 

  809. 		</configs>
    810. 

  810. 		<configs name="Pump" nameView="Pump">
    811. 

  811. 			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    812. 

  812. 			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    813. 

  813. 			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    814. 

  814. 			<config default="10" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    815. 

  815. 			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="" max="100" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    816. 

  816. 			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="GasLine numbers for Leak Check" tag="" unit="" type="String" />
    817. 

  817. 			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    818. 

  818. 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    819. 

  819. 			<config default="75000" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    820. 

  820. 			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="400" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    821. 

  821. 			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    822. 

  822. 			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
    823. 

  823. 			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
    824. 

  824. 			<config default="30" name="LoadLockPurgeCycleCount" description="LoadLock Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
    825. 

  825. 			<config default="120" name="LoadLockPurgePumpTime" description="LoadLock Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    826. 

  826. 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    827. 

  827. 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    828. 

  828. 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    829. 

  829. 		</configs>
    830. 

  830. 		<configs name="Purge" nameView="Purge" >
    831. 

  831. 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
    832. 

  832. 			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    833. 

  833. 			<config default="75" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    834. 

  834. 			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    835. 

  835. 			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    836. 

  836. 			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    837. 

  837. 			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    838. 

  838. 			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
    839. 

  839. 			<config default="5" name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
    840. 

  840. 			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
    841. 

  841. 		</configs>
    842. 

  842. 		<configs name="HeaterChamber" nameView="Heater Substrate" >
    843. 

  843. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    844. 

  844. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    845. 

  845. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    846. 

  846. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    847. 

  847. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    848. 

  848. 

  849. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    850. 

  850. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    851. 

  851. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    852. 

  852. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    853. 

  853. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    854. 

  854. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    855. 

  855. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    856. 

  856. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    857. 

  857. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    858. 

  858. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    859. 

  859. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    860. 

  860. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    861. 

  861. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    862. 

  862. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    863. 

  863. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    864. 

  864. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    865. 

  865. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    866. 

  866. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    867. 

  867. 		</configs>
    868. 

  868. 		<configs name="WallHeater" nameView="Heater Wall" >
    869. 

  869. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    870. 

  870. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    871. 

  871. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    872. 

  872. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    873. 

  873. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    874. 

  874. 

  875. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    876. 

  876. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    877. 

  877. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    878. 

  878. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    879. 

  879. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    880. 

  880. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    881. 

  881. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    882. 

  882. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    883. 

  883. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    884. 

  884. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    885. 

  885. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    886. 

  886. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    887. 

  887. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    888. 

  888. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    889. 

  889. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    890. 

  890. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    891. 

  891. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    892. 

  892. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    893. 

  893. 		</configs>
    894. 

  894. 		<configs name="ForelineHeater" nameView="Heater Foreline" >
    895. 

  895. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    896. 

  896. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    897. 

  897. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    898. 

  898. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    899. 

  899. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    900. 

  900. 

  901. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    902. 

  902. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    903. 

  903. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    904. 

  904. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    905. 

  905. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    906. 

  906. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    907. 

  907. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    908. 

  908. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    909. 

  909. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    910. 

  910. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    911. 

  911. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    912. 

  912. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    913. 

  913. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    914. 

  914. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    915. 

  915. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    916. 

  916. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    917. 

  917. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    918. 

  918. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    919. 

  919. 		</configs>
    920. 

  920. 		<configs name="ValveHeater" nameView="Valve Heater" >
    921. 

  921. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    922. 

  922. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    923. 

  923. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    924. 

  924. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    925. 

  925. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    926. 

  926. 

  927. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    928. 

  928. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    929. 

  929. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    930. 

  930. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    931. 

  931. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    932. 

  932. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    933. 

  933. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    934. 

  934. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    935. 

  935. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    936. 

  936. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    937. 

  937. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    938. 

  938. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    939. 

  939. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    940. 

  940. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    941. 

  941. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    942. 

  942. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    943. 

  943. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    944. 

  944. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    945. 

  945. 		</configs>
    946. 

  946. 		<configs name="PendulumHeater" nameView="Heater Pendulum" >
    947. 

  947. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    948. 

  948. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    949. 

  949. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    950. 

  950. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    951. 

  951. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    952. 

  952. 

  953. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    954. 

  954. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    955. 

  955. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    956. 

  956. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    957. 

  957. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    958. 

  958. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    959. 

  959. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    960. 

  960. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    961. 

  961. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    962. 

  962. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    963. 

  963. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    964. 

  964. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    965. 

  965. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    966. 

  966. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    967. 

  967. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    968. 

  968. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    969. 

  969. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    970. 

  970. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    971. 

  971. 		</configs>
    972. 

  972. 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
    973. 

  973. 			<config default="COM64" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
    974. 

  974. 		</configs>
    975. 

  975. 		<configs name="TurboPump" nameView="Turbo Pump">
    976. 

  976. 			<config default="COM62" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
    977. 

  977. 			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    978. 

  978. 			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    979. 

  979. 		</configs>
    980. 

  980. 		<configs name="PendulumValve" nameView="Pendulum Valve">
    981. 

  981. 			<config default="COM66" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
    982. 

  982. 			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    983. 

  983. 			<config default="750"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    984. 

  984. 			<config default="600"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    985. 

  985. 			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    986. 

  986. 

  987. 		</configs>
    988. 

  988. 		<!--Clean-->
    989. 

  989. 		<configs name="IdleClean" nameView="Idle Clean" visible="false">
    990. 

  990. 			<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    991. 

  991. 			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Idle Clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    992. 

  992. 			<config default="10" name="IdleCleanTime" nameView="Idle Clean Time(Hours)" description="Chamber Idle Time(hours) which trigger Idle Clean" max="720" min="1" paramter="" tag="" unit="h" type="Integer" />
    993. 

  993. 			<config default="100" name="IdleCleanWaferCount" nameView="Idle Clean Wafer Count" description="Wafer Count which trigger Idle Clean" max="100000" min="1" paramter="" tag="" unit="pcs" type="Integer" />
    994. 

  994. 			<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="Wafer Count Since Last Runing Clean" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
    995. 

  995. 			<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="The Time Chamber Last Run Wafer" max="" min="" paramter="" tag="" unit="" type="String" />
    996. 

  996. 		</configs>
    997. 

  997. 		<configs name="EPD" nameView="EPD Setting">
    998. 

  998. 			<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    999. 

  999. 			<config default="0" name="ChannelNumber" nameView="EPD Channel Number" description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    1000. 

  1000. 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
    1001. 

  1001. 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    1002. 

  1002. 		</configs>
    1003. 

  1003. 		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
    1004. 

  1004. 			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1005. 

  1005. 			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1006. 

  1006. 			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1007. 

  1007. 			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1008. 

  1008. 			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1009. 

  1009. 			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1010. 

  1010. 			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1011. 

  1011. 			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1012. 

  1012. 			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1013. 

  1013. 			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1014. 

  1014. 			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1015. 

  1015. 		</configs>
    1016. 

  1016. 	</configs>
    1017. 

  1017. 

  1018. 	<!--PMB-->
    1019. 

  1019. 	<configs name="PMB" nameView="PMB" >
    1020. 

  1020. 		<config default="1" name="ChamberType"  nameView="Chamber Type" description="1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="1" paramter="" tag=""  unit="" type="Integer" visible="false"/>
    1021. 

  1021. 		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
    1022. 

  1022. 		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1023. 

  1023. 		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1024. 

  1024. 		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1025. 

  1025. 		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1026. 

  1026. 		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1027. 

  1027. 		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1028. 

  1028. 		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1029. 

  1029. 		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1030. 

  1030. 		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1031. 

  1031. 		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1032. 

  1032. 		<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1033. 

  1033. 		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1034. 

  1034. 		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    1035. 

  1035. 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1036. 

  1036. 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    1037. 

  1037. 		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1038. 

  1038. 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    1039. 

  1039. 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1040. 

  1040. 		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
    1041. 

  1041. 		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    1042. 

  1042. 		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
    1043. 

  1043. 		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
    1044. 

  1044. 		<config default="0" name="PickDelayTime" nameView="Pick Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    1045. 

  1045. 		<config default="0" name="PlaceDelayTime" nameView="Place Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    1046. 

  1046. 		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
    1047. 

  1047. 		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    1048. 

  1048. 		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1049. 

  1049. 		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1050. 

  1050. 		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1051. 

  1051. 		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    1052. 

  1052. 		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
    1053. 

  1053. 		<config default="751" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="" max="2000" min="500" paramter="" tag="" unit="°C" type="Double" />
    1054. 

  1054. 		<config default="150" name="PendulumHeaterSetPointLimit" nameView="Pendulum Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1055. 

  1055. 		<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension"  description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1056. 

  1056. 		<config default="80"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="PM Chamber 控压 设定值" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1057. 

  1057. 		<config default="300"  name="ControlPressureN2FlowSetPoint"   nameView="Control Pressure N2 Flow SetPoint"   description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1058. 

  1058. 

  1059. 		<configs name="MFCVerification" nameView="MFC Verification" >
    1060. 

  1060. 			<config default="1" name="BasePressure" nameView="开始条件：腔体压力达到时开始流气" max="100" min="1" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    1061. 

  1061. 			<config default="180" name="PumpingTime" nameView="抽气时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    1062. 

  1062. 			<config default="10" name="GasFlowTime" nameView="结束条件：流气多长时间" max="600" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    1063. 

  1063. 			<config default="180" name="HoldTime" nameView="Hold 时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    1064. 

  1064. 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    1065. 

  1065. 			<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    1066. 

  1066. 			<config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    1067. 

  1067. 

  1068. 			<config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1069. 

  1069. 			<config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    1070. 

  1070. 			<config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1071. 

  1071. 			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    1072. 

  1072. 		</configs>
    1073. 

  1073. 

  1074. 		<configs name="Chiller" nameView="Chiller" >
    1075. 

  1075. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1076. 

  1076. 			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
    1077. 

  1077. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1078. 

  1078. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1079. 

  1079. 			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1080. 

  1080. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1081. 

  1081. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1082. 

  1082. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1083. 

  1083. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1084. 

  1084. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1085. 

  1085. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1086. 

  1086. 		</configs>
    1087. 

  1087. 		<configs name="InnerChiller" nameView="InnerChiller" >
    1088. 

  1088. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1089. 

  1089. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1090. 

  1090. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1091. 

  1091. 			<config default="COM71" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1092. 

  1092. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1093. 

  1093. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1094. 

  1094. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1095. 

  1095. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1096. 

  1096. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1097. 

  1097. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1098. 

  1098. 		</configs>
    1099. 

  1099. 		<configs name="OuterChiller" nameView="OuterChiller" >
    1100. 

  1100. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1101. 

  1101. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1102. 

  1102. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1103. 

  1103. 			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1104. 

  1104. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1105. 

  1105. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1106. 

  1106. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1107. 

  1107. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1108. 

  1108. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1109. 

  1109. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1110. 

  1110. 		</configs>
    1111. 

  1111. 		<configs name="TopChiller" nameView="TopChiller" >
    1112. 

  1112. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1113. 

  1113. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1114. 

  1114. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1115. 

  1115. 			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1116. 

  1116. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1117. 

  1117. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1118. 

  1118. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1119. 

  1119. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1120. 

  1120. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1121. 

  1121. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1122. 

  1122. 		</configs>
    1123. 

  1123. 		<configs name="DryPump" nameView="Dry Pump" >
    1124. 

  1124. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1125. 

  1125. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1126. 

  1126. 			<config default="COM34" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1127. 

  1127. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1128. 

  1128. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1129. 

  1129. 		</configs>
    1130. 

  1130.     <configs name="Magnet" nameView="Magnet" visible="false">
    1131. 

  1131.       <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    1132. 

  1132.       <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    1133. 

  1133.       <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
    1134. 

  1134.       <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
    1135. 

  1135.       <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    1136. 

  1136.       <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    1137. 

  1137.       <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    1138. 

  1138.       <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
    1139. 

  1139.     </configs>
    1140. 

  1140. 		<configs name="Rf" nameView="Source RF" >
    1141. 

  1141. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1142. 

  1142. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1143. 

  1143. 			<config default="COM36" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1144. 

  1144. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1145. 

  1145. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1146. 

  1146. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1147. 

  1147. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1148. 

  1148. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1149. 

  1149. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1150. 

  1150. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1151. 

  1151. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1152. 

  1152. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1153. 

  1153. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1154. 

  1154. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1155. 

  1155. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1156. 

  1156. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1157. 

  1157. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    1158. 

  1158. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    1159. 

  1159. 			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1160. 

  1160. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1161. 

  1161. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1162. 

  1162. 		</configs>
    1163. 

  1163. 		<configs name="Match" nameView="Source Match" >
    1164. 

  1164. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1165. 

  1165. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1166. 

  1166. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1167. 

  1167. 			<config default="COM42" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1168. 

  1168. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1169. 

  1169. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1170. 

  1170. 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1171. 

  1171. 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1172. 

  1172. 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1173. 

  1173. 		</configs>
    1174. 

  1174. 		<configs name="RFBox" nameView="RF Box" >
    1175. 

  1175. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1176. 

  1176. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1177. 

  1177. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1178. 

  1178. 			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1179. 

  1179. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1180. 

  1180. 		</configs>
    1181. 

  1181. 		<configs name="BiasRf" nameView="Bias RF" >
    1182. 

  1182. 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    1183. 

  1183. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1184. 

  1184. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1185. 

  1185. 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1186. 

  1186. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1187. 

  1187. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1188. 

  1188. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1189. 

  1189. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1190. 

  1190. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1191. 

  1191. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1192. 

  1192. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1193. 

  1193. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1194. 

  1194. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1195. 

  1195. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1196. 

  1196. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1197. 

  1197. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1198. 

  1198. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1199. 

  1199. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    1200. 

  1200. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    1201. 

  1201. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1202. 

  1202. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1203. 

  1203. 		</configs>
    1204. 

  1204. 		<configs name="BiasMatch" nameView="Bias Match" >
    1205. 

  1205. 			<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1206. 

  1206. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1207. 

  1207. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1208. 

  1208. 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1209. 

  1209. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1210. 

  1210. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1211. 

  1211. 			<config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1212. 

  1212. 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1213. 

  1213. 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1214. 

  1214. 		</configs>
    1215. 

  1215. 		<configs name="MfcGas1" nameView="MFC Gas1" >
    1216. 

  1216. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    1217. 

  1217. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    1218. 

  1218. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1219. 

  1219. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1220. 

  1220. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1221. 

  1221. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1222. 

  1222. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1223. 

  1223. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1224. 

  1224. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1225. 

  1225. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1226. 

  1226. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1227. 

  1227. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1228. 

  1228. 

  1229. 		</configs>
    1230. 

  1230. 		<configs name="MfcGas2" nameView="MFC Gas2" >
    1231. 

  1231. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    1232. 

  1232. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    1233. 

  1233. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1234. 

  1234. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1235. 

  1235. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1236. 

  1236. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1237. 

  1237. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1238. 

  1238. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1239. 

  1239. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1240. 

  1240. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1241. 

  1241. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1242. 

  1242. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1243. 

  1243. 

  1244. 		</configs>
    1245. 

  1245. 		<configs name="MfcGas3" nameView="MFC Gas3" >
    1246. 

  1246. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    1247. 

  1247. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    1248. 

  1248. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1249. 

  1249. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1250. 

  1250. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1251. 

  1251. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1252. 

  1252. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1253. 

  1253. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1254. 

  1254. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1255. 

  1255. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1256. 

  1256. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1257. 

  1257. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1258. 

  1258. 

  1259. 		</configs>
    1260. 

  1260. 		<configs name="MfcGas4" nameView="MFC Gas4" >
    1261. 

  1261. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    1262. 

  1262. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    1263. 

  1263. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1264. 

  1264. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1265. 

  1265. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1266. 

  1266. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1267. 

  1267. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1268. 

  1268. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1269. 

  1269. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1270. 

  1270. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1271. 

  1271. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1272. 

  1272. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1273. 

  1273. 

  1274. 		</configs>
    1275. 

  1275. 		<configs name="MfcGas5" nameView="MFC Gas5" >
    1276. 

  1276. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    1277. 

  1277. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    1278. 

  1278. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1279. 

  1279. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1280. 

  1280. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1281. 

  1281. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1282. 

  1282. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1283. 

  1283. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1284. 

  1284. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1285. 

  1285. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1286. 

  1286. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1287. 

  1287. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1288. 

  1288. 

  1289. 		</configs>
    1290. 

  1290. 		<configs name="MfcGas6" nameView="MFC Gas6" >
    1291. 

  1291. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    1292. 

  1292. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    1293. 

  1293. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1294. 

  1294. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1295. 

  1295. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1296. 

  1296. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1297. 

  1297. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1298. 

  1298. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1299. 

  1299. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1300. 

  1300. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1301. 

  1301. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1302. 

  1302. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1303. 

  1303. 

  1304. 		</configs>
    1305. 

  1305. 		<configs name="MfcGas7" nameView="MFC Gas7" >
    1306. 

  1306. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 7 or not" tag="" unit="" type="Bool" />
    1307. 

  1307. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.7 gas stick" tag="" unit="" type="String" />
    1308. 

  1308. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1309. 

  1309. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1310. 

  1310. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1311. 

  1311. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1312. 

  1312. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1313. 

  1313. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1314. 

  1314. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1315. 

  1315. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1316. 

  1316. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1317. 

  1317. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1318. 

  1318. 

  1319. 		</configs>
    1320. 

  1320. 		<configs name="MfcGas8" nameView="MFC Gas8" >
    1321. 

  1321. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 8 or not" tag="" unit="" type="Bool" />
    1322. 

  1322. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.8 gas stick" tag="" unit="" type="String" />
    1323. 

  1323. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1324. 

  1324. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1325. 

  1325. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1326. 

  1326. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1327. 

  1327. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1328. 

  1328. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1329. 

  1329. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1330. 

  1330. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1331. 

  1331. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1332. 

  1332. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1333. 

  1333. 

  1334. 		</configs>
    1335. 

  1335. 		<configs name="MfcGas9" nameView="MFC Gas9" >
    1336. 

  1336. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 9 or not" tag="" unit="" type="Bool" />
    1337. 

  1337. 			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.9 gas stick" tag="" unit="" type="String" />
    1338. 

  1338. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1339. 

  1339. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1340. 

  1340. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1341. 

  1341. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1342. 

  1342. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1343. 

  1343. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1344. 

  1344. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1345. 

  1345. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1346. 

  1346. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1347. 

  1347. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1348. 

  1348. 		</configs>
    1349. 

  1349. 		<configs name="MfcGas10" nameView="MFC Gas10" >
    1350. 

  1350. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
    1351. 

  1351. 			<config default="Gas7" name="GasName" nameView="Gas Name" description="Name of NO.10 gas stick" tag="" unit="" type="String" />
    1352. 

  1352. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1353. 

  1353. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1354. 

  1354. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1355. 

  1355. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1356. 

  1356. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1357. 

  1357. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1358. 

  1358. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1359. 

  1359. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1360. 

  1360. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1361. 

  1361. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1362. 

  1362. 		</configs>
    1363. 

  1363. 		<configs name="MfcGas11" nameView="MFC Gas8" >
    1364. 

  1364. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
    1365. 

  1365. 			<config default="Gas8" name="GasName" nameView="Gas Name" description="Name of NO.11 gas stick" tag="" unit="" type="String" />
    1366. 

  1366. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1367. 

  1367. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1368. 

  1368. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1369. 

  1369. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1370. 

  1370. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1371. 

  1371. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1372. 

  1372. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1373. 

  1373. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1374. 

  1374. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1375. 

  1375. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1376. 

  1376. 		</configs>
    1377. 

  1377. 		<configs name="MfcGas12" nameView="MFC Gas12" >
    1378. 

  1378. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
    1379. 

  1379. 			<config default="Gas9" name="GasName" nameView="Gas Name" description="Name of NO.12 gas stick" tag="" unit="" type="String" />
    1380. 

  1380. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1381. 

  1381. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1382. 

  1382. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1383. 

  1383. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1384. 

  1384. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1385. 

  1385. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1386. 

  1386. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1387. 

  1387. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1388. 

  1388. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1389. 

  1389. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1390. 

  1390. 		</configs>
    1391. 

  1391. 		<configs name="MfcN2" nameView="MFC N2" >
    1392. 

  1392. 			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
    1393. 

  1393. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
    1394. 

  1394. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1395. 

  1395. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1396. 

  1396. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1397. 

  1397. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1398. 

  1398. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1399. 

  1399. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1400. 

  1400. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1401. 

  1401. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1402. 

  1402. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1403. 

  1403. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1404. 

  1404. 

  1405. 		</configs>
    1406. 

  1406. 		<configs name="MfcHe" nameView="MFC He" >
    1407. 

  1407. 			<config default="true" name="Enable" nameView="Enable" description="Enable He or not" tag="" unit="" type="Bool" />
    1408. 

  1408. 			<config default="He" name="GasName" nameView="Gas Name" description="Name of He stick" tag="" unit="" type="String" />
    1409. 

  1409. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1410. 

  1410. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1411. 

  1411. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1412. 

  1412. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1413. 

  1413. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1414. 

  1414. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1415. 

  1415. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1416. 

  1416. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1417. 

  1417. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1418. 

  1418. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1419. 

  1419. 

  1420. 		</configs>
    1421. 

  1421. 		<configs name="Pump" nameView="Pump" >
    1422. 

  1422. 			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    1423. 

  1423. 			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1424. 

  1424. 			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1425. 

  1425. 			<config default="10" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1426. 

  1426. 			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="" max="100" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    1427. 

  1427. 			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="GasLine numbers for Leak Check" tag="" unit="" type="String" />
    1428. 

  1428. 			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    1429. 

  1429. 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1430. 

  1430. 			<config default="75000" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1431. 

  1431. 			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1432. 

  1432. 			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1433. 

  1433. 			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
    1434. 

  1434. 			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
    1435. 

  1435. 			<config default="30" name="LoadLockPurgeCycleCount" description="LoadLock Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
    1436. 

  1436. 			<config default="120" name="LoadLockPurgePumpTime" description="LoadLock Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    1437. 

  1437. 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    1438. 

  1438. 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    1439. 

  1439. 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    1440. 

  1440. 		</configs>
    1441. 

  1441. 		<configs name="Purge" nameView="Purge" >
    1442. 

  1442. 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
    1443. 

  1443. 			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    1444. 

  1444. 			<config default="75" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    1445. 

  1445. 			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1446. 

  1446. 			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1447. 

  1447. 			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1448. 

  1448. 			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    1449. 

  1449. 			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
    1450. 

  1450. 			<config default="5" name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
    1451. 

  1451. 			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
    1452. 

  1452. 		</configs>
    1453. 

  1453. 		<configs name="HeaterChamber" nameView="Heater Substrate" >
    1454. 

  1454. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1455. 

  1455. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1456. 

  1456. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1457. 

  1457. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1458. 

  1458. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1459. 

  1459. 

  1460. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1461. 

  1461. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1462. 

  1462. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1463. 

  1463. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1464. 

  1464. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1465. 

  1465. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1466. 

  1466. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1467. 

  1467. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1468. 

  1468. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1469. 

  1469. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1470. 

  1470. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1471. 

  1471. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1472. 

  1472. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1473. 

  1473. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1474. 

  1474. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1475. 

  1475. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1476. 

  1476. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1477. 

  1477. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1478. 

  1478. 		</configs>
    1479. 

  1479. 

  1480. 		<configs name="WallHeater" nameView="Heater Wall" >
    1481. 

  1481. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1482. 

  1482. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1483. 

  1483. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1484. 

  1484. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1485. 

  1485. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1486. 

  1486. 

  1487. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1488. 

  1488. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1489. 

  1489. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1490. 

  1490. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1491. 

  1491. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1492. 

  1492. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1493. 

  1493. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1494. 

  1494. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1495. 

  1495. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1496. 

  1496. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1497. 

  1497. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1498. 

  1498. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1499. 

  1499. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1500. 

  1500. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1501. 

  1501. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1502. 

  1502. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1503. 

  1503. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1504. 

  1504. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1505. 

  1505. 		</configs>
    1506. 

  1506. 

  1507. 		<configs name="ForelineHeater" nameView="Heater Foreline" >
    1508. 

  1508. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1509. 

  1509. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1510. 

  1510. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1511. 

  1511. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1512. 

  1512. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1513. 

  1513. 

  1514. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1515. 

  1515. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1516. 

  1516. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1517. 

  1517. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1518. 

  1518. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1519. 

  1519. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1520. 

  1520. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1521. 

  1521. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1522. 

  1522. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1523. 

  1523. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1524. 

  1524. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1525. 

  1525. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1526. 

  1526. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1527. 

  1527. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1528. 

  1528. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1529. 

  1529. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1530. 

  1530. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1531. 

  1531. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1532. 

  1532. 		</configs>
    1533. 

  1533. 

  1534. 		<configs name="ValveHeater" nameView="Valve Heater" >
    1535. 

  1535. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1536. 

  1536. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1537. 

  1537. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1538. 

  1538. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1539. 

  1539. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1540. 

  1540. 

  1541. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1542. 

  1542. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1543. 

  1543. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1544. 

  1544. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1545. 

  1545. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1546. 

  1546. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1547. 

  1547. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1548. 

  1548. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1549. 

  1549. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1550. 

  1550. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1551. 

  1551. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1552. 

  1552. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1553. 

  1553. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1554. 

  1554. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1555. 

  1555. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1556. 

  1556. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1557. 

  1557. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1558. 

  1558. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1559. 

  1559. 		</configs>
    1560. 

  1560. 		<configs name="PendulumHeater" nameView="Heater Pendulum" >
    1561. 

  1561. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1562. 

  1562. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1563. 

  1563. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1564. 

  1564. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1565. 

  1565. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    1566. 

  1566. 

  1567. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    1568. 

  1568. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    1569. 

  1569. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    1570. 

  1570. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    1571. 

  1571. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    1572. 

  1572. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    1573. 

  1573. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    1574. 

  1574. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    1575. 

  1575. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    1576. 

  1576. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    1577. 

  1577. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    1578. 

  1578. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    1579. 

  1579. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    1580. 

  1580. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    1581. 

  1581. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    1582. 

  1582. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    1583. 

  1583. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    1584. 

  1584. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    1585. 

  1585. 		</configs>
    1586. 

  1586. 

  1587. 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
    1588. 

  1588. 			<config default="COM82" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
    1589. 

  1589. 		</configs>
    1590. 

  1590. 		<configs name="TurboPump" nameView="Turbo Pump">
    1591. 

  1591. 			<config default="COM8" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
    1592. 

  1592. 			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1593. 

  1593. 			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1594. 

  1594. 		</configs>
    1595. 

  1595. 		<configs name="PendulumValve" nameView="Pendulum Valve">
    1596. 

  1596. 			<config default="COM74" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
    1597. 

  1597. 			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    1598. 

  1598. 			<config default="750"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    1599. 

  1599. 			<config default="600"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    1600. 

  1600. 			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    1601. 

  1601. 		</configs>
    1602. 

  1602. 

  1603. 		<!--Clean-->
    1604. 

  1604. 		<configs name="IdleClean" nameView="Idle Clean" visible="false">
    1605. 

  1605. 			<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    1606. 

  1606. 			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Idle Clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    1607. 

  1607. 			<config default="10" name="IdleCleanTime" nameView="Idle Clean Time(Hours)" description="Chamber Idle Time(hours) which trigger Idle Clean" max="720" min="1" paramter="" tag="" unit="h" type="Integer" />
    1608. 

  1608. 			<config default="100" name="IdleCleanWaferCount" nameView="Idle Clean Wafer Count" description="Wafer Count which trigger Idle Clean" max="100000" min="1" paramter="" tag="" unit="pcs" type="Integer" />
    1609. 

  1609. 			<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="Wafer Count Since Last Runing Clean" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
    1610. 

  1610. 			<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="The Time Chamber Last Run Wafer" max="" min="" paramter="" tag="" unit="" type="String" />
    1611. 

  1611. 		</configs>
    1612. 

  1612. 

  1613. 		<configs name="EPD" nameView="EPD Setting">
    1614. 

  1614. 			<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    1615. 

  1615. 			<config default="0" name="ChannelNumber" nameView="EPD Channel Number"  description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    1616. 

  1616. 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
    1617. 

  1617. 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    1618. 

  1618. 		</configs>
    1619. 

  1619. 		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
    1620. 

  1620. 			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1621. 

  1621. 			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1622. 

  1622. 			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1623. 

  1623. 			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1624. 

  1624. 			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1625. 

  1625. 			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1626. 

  1626. 			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1627. 

  1627. 			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1628. 

  1628. 			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1629. 

  1629. 			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1630. 

  1630. 			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    1631. 

  1631. 		</configs>
    1632. 

  1632. 	</configs>
    1633. 

  1633. 

  1634. 	<!--PMC-->
    1635. 

  1635. 	<configs name="PMC" nameView="PMC" >
    1636. 

  1636. 		<config default="5" name="ChamberType"  nameView="Chamber Type" description="0=>Venus,1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="1" paramter="" tag=""  unit="" type="Integer" visible="false"/>
    1637. 

  1637. 		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
    1638. 

  1638. 		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1639. 

  1639. 		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    1640. 

  1640. 		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1641. 

  1641. 		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1642. 

  1642. 		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1643. 

  1643. 		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1644. 

  1644. 		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1645. 

  1645. 		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1646. 

  1646. 		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    1647. 

  1647. 		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1648. 

  1648. 		<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1649. 

  1649. 		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1650. 

  1650. 		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    1651. 

  1651. 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1652. 

  1652. 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1653. 

  1653. 		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1654. 

  1654. 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    1655. 

  1655. 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1656. 

  1656. 		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
    1657. 

  1657. 		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    1658. 

  1658. 		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
    1659. 

  1659. 		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
    1660. 

  1660. 		<config default="0" name="PickDelayTime" nameView="Pick Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    1661. 

  1661. 		<config default="0" name="PlaceDelayTime" nameView="Place Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    1662. 

  1662. 		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
    1663. 

  1663. 		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    1664. 

  1664. 		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1665. 

  1665. 		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1666. 

  1666. 		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1667. 

  1667. 		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    1668. 

  1668. 		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
    1669. 

  1669. 		<config default="751" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="" max="2000" min="500" paramter="" tag="" unit="°C" type="Double" />
    1670. 

  1670. 		<config default="150" name="PendulumHeaterSetPointLimit" nameView="Pendulum Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    1671. 

  1671. 		<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension"  description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1672. 

  1672. 		<config default="80"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="PM Chamber 控压 设定值" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    1673. 

  1673. 		<config default="300"  name="ControlPressureN2FlowSetPoint"   nameView="Control Pressure N2 Flow SetPoint"   description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1674. 

  1674. 

  1675. 		<configs name="MFCVerification" nameView="MFC Verification" >
    1676. 

  1676. 			<config default="1" name="BasePressure" nameView="开始条件：腔体压力达到时开始流气" max="100" min="1" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    1677. 

  1677. 			<config default="180" name="PumpingTime" nameView="抽气时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    1678. 

  1678. 			<config default="10" name="GasFlowTime" nameView="结束条件：流气多长时间" max="600" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    1679. 

  1679. 			<config default="180" name="HoldTime" nameView="Hold 时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    1680. 

  1680. 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    1681. 

  1681. 			<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    1682. 

  1682. 			<config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    1683. 

  1683. 

  1684. 			<config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1685. 

  1685. 			<config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    1686. 

  1686. 			<config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    1687. 

  1687. 			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    1688. 

  1688. 		</configs>
    1689. 

  1689. 

  1690. 		<configs name="Chiller" nameView="Chiller" >
    1691. 

  1691. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1692. 

  1692. 			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
    1693. 

  1693. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1694. 

  1694. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1695. 

  1695. 			<config default="COM86" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1696. 

  1696. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1697. 

  1697. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1698. 

  1698. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1699. 

  1699. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1700. 

  1700. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1701. 

  1701. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1702. 

  1702. 		</configs>
    1703. 

  1703. 		<configs name="InnerChiller" nameView="InnerChiller" >
    1704. 

  1704. 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1705. 

  1705. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1706. 

  1706. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1707. 

  1707. 			<config default="COM45" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1708. 

  1708. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1709. 

  1709. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1710. 

  1710. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1711. 

  1711. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1712. 

  1712. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1713. 

  1713. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1714. 

  1714. 		</configs>
    1715. 

  1715. 		<configs name="OuterChiller" nameView="OuterChiller" >
    1716. 

  1716. 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1717. 

  1717. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1718. 

  1718. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1719. 

  1719. 			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1720. 

  1720. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1721. 

  1721. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1722. 

  1722. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1723. 

  1723. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1724. 

  1724. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1725. 

  1725. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1726. 

  1726. 		</configs>
    1727. 

  1727. 		<configs name="TopChiller" nameView="TopChiller" >
    1728. 

  1728. 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    1729. 

  1729. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1730. 

  1730. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1731. 

  1731. 			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1732. 

  1732. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    1733. 

  1733. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1734. 

  1734. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    1735. 

  1735. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1736. 

  1736. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    1737. 

  1737. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1738. 

  1738. 		</configs>
    1739. 

  1739. 		<configs name="DryPump" nameView="Dry Pump" >
    1740. 

  1740. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1741. 

  1741. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1742. 

  1742. 			<config default="COM96" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    1743. 

  1743. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    1744. 

  1744. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    1745. 

  1745. 		</configs>
    1746. 

  1746.     <configs name="Magnet" nameView="Magnet" visible="false">
    1747. 

  1747.       <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    1748. 

  1748.       <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    1749. 

  1749.       <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
    1750. 

  1750.       <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
    1751. 

  1751.       <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    1752. 

  1752.       <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    1753. 

  1753.       <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    1754. 

  1754.       <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
    1755. 

  1755.     </configs>
    1756. 

  1756. 		<configs name="Rf" nameView="Source RF" >
    1757. 

  1757. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1758. 

  1758. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1759. 

  1759. 			<config default="COM59" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1760. 

  1760. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1761. 

  1761. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1762. 

  1762. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1763. 

  1763. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1764. 

  1764. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1765. 

  1765. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1766. 

  1766. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1767. 

  1767. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1768. 

  1768. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1769. 

  1769. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1770. 

  1770. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1771. 

  1771. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1772. 

  1772. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1773. 

  1773. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    1774. 

  1774. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    1775. 

  1775. 			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    1776. 

  1776. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1777. 

  1777. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1778. 

  1778. 		</configs>
    1779. 

  1779. 

  1780. 		<configs name="Match" nameView="Source Match" >
    1781. 

  1781. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1782. 

  1782. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1783. 

  1783. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1784. 

  1784. 			<config default="COM75" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1785. 

  1785. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1786. 

  1786. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1787. 

  1787. 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1788. 

  1788. 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1789. 

  1789. 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1790. 

  1790. 		</configs>
    1791. 

  1791. 		<configs name="RFBox" nameView="RF Box" >
    1792. 

  1792. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1793. 

  1793. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1794. 

  1794. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1795. 

  1795. 			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1796. 

  1796. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1797. 

  1797. 		</configs>
    1798. 

  1798. 		<configs name="BiasRf" nameView="Bias RF" >
    1799. 

  1799. 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    1800. 

  1800. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1801. 

  1801. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1802. 

  1802. 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    1803. 

  1803. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1804. 

  1804. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1805. 

  1805. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1806. 

  1806. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1807. 

  1807. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1808. 

  1808. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    1809. 

  1809. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1810. 

  1810. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    1811. 

  1811. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    1812. 

  1812. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1813. 

  1813. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1814. 

  1814. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1815. 

  1815. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1816. 

  1816. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    1817. 

  1817. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    1818. 

  1818. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    1819. 

  1819. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    1820. 

  1820. 		</configs>
    1821. 

  1821. 		<configs name="BiasMatch" nameView="Bias Match" >
    1822. 

  1822. 			<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    1823. 

  1823. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1824. 

  1824. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1825. 

  1825. 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    1826. 

  1826. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    1827. 

  1827. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1828. 

  1828. 			<config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1829. 

  1829. 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    1830. 

  1830. 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    1831. 

  1831. 		</configs>
    1832. 

  1832. 		<configs name="MfcGas1" nameView="MFC Gas1" >
    1833. 

  1833. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    1834. 

  1834. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    1835. 

  1835. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1836. 

  1836. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1837. 

  1837. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1838. 

  1838. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1839. 

  1839. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1840. 

  1840. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1841. 

  1841. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1842. 

  1842. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1843. 

  1843. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1844. 

  1844. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1845. 

  1845. 

  1846. 		</configs>
    1847. 

  1847. 		<configs name="MfcGas2" nameView="MFC Gas2" >
    1848. 

  1848. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    1849. 

  1849. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    1850. 

  1850. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1851. 

  1851. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1852. 

  1852. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1853. 

  1853. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1854. 

  1854. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1855. 

  1855. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1856. 

  1856. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1857. 

  1857. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1858. 

  1858. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1859. 

  1859. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1860. 

  1860. 

  1861. 		</configs>
    1862. 

  1862. 		<configs name="MfcGas3" nameView="MFC Gas3" >
    1863. 

  1863. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    1864. 

  1864. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    1865. 

  1865. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1866. 

  1866. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1867. 

  1867. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1868. 

  1868. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1869. 

  1869. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1870. 

  1870. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1871. 

  1871. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1872. 

  1872. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1873. 

  1873. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1874. 

  1874. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1875. 

  1875. 

  1876. 		</configs>
    1877. 

  1877. 		<configs name="MfcGas4" nameView="MFC Gas4" >
    1878. 

  1878. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    1879. 

  1879. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    1880. 

  1880. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1881. 

  1881. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1882. 

  1882. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1883. 

  1883. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1884. 

  1884. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1885. 

  1885. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1886. 

  1886. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1887. 

  1887. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1888. 

  1888. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1889. 

  1889. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1890. 

  1890. 

  1891. 		</configs>
    1892. 

  1892. 		<configs name="MfcGas5" nameView="MFC Gas5" >
    1893. 

  1893. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    1894. 

  1894. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    1895. 

  1895. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1896. 

  1896. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1897. 

  1897. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1898. 

  1898. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1899. 

  1899. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1900. 

  1900. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1901. 

  1901. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1902. 

  1902. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1903. 

  1903. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1904. 

  1904. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1905. 

  1905. 

  1906. 		</configs>
    1907. 

  1907. 		<configs name="MfcGas6" nameView="MFC Gas6" >
    1908. 

  1908. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    1909. 

  1909. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    1910. 

  1910. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1911. 

  1911. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1912. 

  1912. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1913. 

  1913. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1914. 

  1914. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1915. 

  1915. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1916. 

  1916. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1917. 

  1917. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1918. 

  1918. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1919. 

  1919. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1920. 

  1920. 

  1921. 		</configs>
    1922. 

  1922. 		<configs name="MfcGas7" nameView="MFC Gas7" >
    1923. 

  1923. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 7 or not" tag="" unit="" type="Bool" />
    1924. 

  1924. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.7 gas stick" tag="" unit="" type="String" />
    1925. 

  1925. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1926. 

  1926. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1927. 

  1927. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1928. 

  1928. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1929. 

  1929. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1930. 

  1930. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1931. 

  1931. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1932. 

  1932. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1933. 

  1933. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1934. 

  1934. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1935. 

  1935. 

  1936. 		</configs>
    1937. 

  1937. 		<configs name="MfcGas8" nameView="MFC Gas8" >
    1938. 

  1938. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 8 or not" tag="" unit="" type="Bool" />
    1939. 

  1939. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.8 gas stick" tag="" unit="" type="String" />
    1940. 

  1940. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1941. 

  1941. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1942. 

  1942. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1943. 

  1943. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1944. 

  1944. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1945. 

  1945. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1946. 

  1946. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1947. 

  1947. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1948. 

  1948. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1949. 

  1949. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1950. 

  1950. 

  1951. 		</configs>
    1952. 

  1952. 		<configs name="MfcGas9" nameView="MFC Gas9" >
    1953. 

  1953. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 9 or not" tag="" unit="" type="Bool" />
    1954. 

  1954. 			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.9 gas stick" tag="" unit="" type="String" />
    1955. 

  1955. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1956. 

  1956. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1957. 

  1957. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1958. 

  1958. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1959. 

  1959. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1960. 

  1960. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1961. 

  1961. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1962. 

  1962. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1963. 

  1963. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1964. 

  1964. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1965. 

  1965. 		</configs>
    1966. 

  1966. 		<configs name="MfcGas10" nameView="MFC Gas10" >
    1967. 

  1967. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
    1968. 

  1968. 			<config default="Gas7" name="GasName" nameView="Gas Name" description="Name of NO.10 gas stick" tag="" unit="" type="String" />
    1969. 

  1969. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1970. 

  1970. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1971. 

  1971. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1972. 

  1972. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1973. 

  1973. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1974. 

  1974. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1975. 

  1975. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1976. 

  1976. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1977. 

  1977. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1978. 

  1978. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1979. 

  1979. 		</configs>
    1980. 

  1980. 		<configs name="MfcGas11" nameView="MFC Gas8" >
    1981. 

  1981. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
    1982. 

  1982. 			<config default="Gas8" name="GasName" nameView="Gas Name" description="Name of NO.11 gas stick" tag="" unit="" type="String" />
    1983. 

  1983. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1984. 

  1984. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1985. 

  1985. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    1986. 

  1986. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    1987. 

  1987. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    1988. 

  1988. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1989. 

  1989. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1990. 

  1990. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    1991. 

  1991. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    1992. 

  1992. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    1993. 

  1993. 		</configs>
    1994. 

  1994. 		<configs name="MfcGas12" nameView="MFC Gas12" >
    1995. 

  1995. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
    1996. 

  1996. 			<config default="Gas9" name="GasName" nameView="Gas Name" description="Name of NO.12 gas stick" tag="" unit="" type="String" />
    1997. 

  1997. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    1998. 

  1998. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    1999. 

  1999. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2000. 

  2000. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2001. 

  2001. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2002. 

  2002. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2003. 

  2003. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2004. 

  2004. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2005. 

  2005. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2006. 

  2006. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2007. 

  2007. 		</configs>
    2008. 

  2008. 		<configs name="MfcN2" nameView="MFC N2" >
    2009. 

  2009. 			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
    2010. 

  2010. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
    2011. 

  2011. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2012. 

  2012. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2013. 

  2013. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2014. 

  2014. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2015. 

  2015. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2016. 

  2016. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2017. 

  2017. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2018. 

  2018. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2019. 

  2019. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2020. 

  2020. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2021. 

  2021. 

  2022. 		</configs>
    2023. 

  2023. 		<configs name="MfcHe" nameView="MFC He" >
    2024. 

  2024. 			<config default="true" name="Enable" nameView="Enable" description="Enable He or not" tag="" unit="" type="Bool" />
    2025. 

  2025. 			<config default="He" name="GasName" nameView="Gas Name" description="Name of He stick" tag="" unit="" type="String" />
    2026. 

  2026. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2027. 

  2027. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2028. 

  2028. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2029. 

  2029. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2030. 

  2030. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2031. 

  2031. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2032. 

  2032. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2033. 

  2033. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2034. 

  2034. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2035. 

  2035. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2036. 

  2036. 

  2037. 		</configs>
    2038. 

  2038. 		<configs name="Pump" nameView="Pump" >
    2039. 

  2039. 			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    2040. 

  2040. 			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    2041. 

  2041. 			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    2042. 

  2042. 			<config default="10" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    2043. 

  2043. 			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="" max="100" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    2044. 

  2044. 			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="GasLine numbers for Leak Check" tag="" unit="" type="String" />
    2045. 

  2045. 			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    2046. 

  2046. 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    2047. 

  2047. 			<config default="75000" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    2048. 

  2048. 			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    2049. 

  2049. 			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    2050. 

  2050. 			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
    2051. 

  2051. 			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
    2052. 

  2052. 			<config default="30" name="LoadLockPurgeCycleCount" description="LoadLock Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
    2053. 

  2053. 			<config default="120" name="LoadLockPurgePumpTime" description="LoadLock Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    2054. 

  2054. 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    2055. 

  2055. 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    2056. 

  2056. 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    2057. 

  2057. 		</configs>
    2058. 

  2058. 		<configs name="Purge" nameView="Purge" >
    2059. 

  2059. 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
    2060. 

  2060. 			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2061. 

  2061. 			<config default="75" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2062. 

  2062. 			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2063. 

  2063. 			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2064. 

  2064. 			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2065. 

  2065. 			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    2066. 

  2066. 			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
    2067. 

  2067. 			<config default="5" name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
    2068. 

  2068. 			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
    2069. 

  2069. 		</configs>
    2070. 

  2070. 		<configs name="HeaterChamber" nameView="Heater Substrate" >
    2071. 

  2071. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2072. 

  2072. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2073. 

  2073. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2074. 

  2074. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2075. 

  2075. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2076. 

  2076. 

  2077. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2078. 

  2078. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2079. 

  2079. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2080. 

  2080. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2081. 

  2081. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2082. 

  2082. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2083. 

  2083. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2084. 

  2084. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2085. 

  2085. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2086. 

  2086. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2087. 

  2087. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2088. 

  2088. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2089. 

  2089. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2090. 

  2090. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2091. 

  2091. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2092. 

  2092. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2093. 

  2093. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2094. 

  2094. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2095. 

  2095. 		</configs>
    2096. 

  2096. 

  2097. 		<configs name="WallHeater" nameView="Heater Wall" >
    2098. 

  2098. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2099. 

  2099. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2100. 

  2100. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2101. 

  2101. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2102. 

  2102. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2103. 

  2103. 

  2104. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2105. 

  2105. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2106. 

  2106. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2107. 

  2107. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2108. 

  2108. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2109. 

  2109. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2110. 

  2110. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2111. 

  2111. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2112. 

  2112. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2113. 

  2113. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2114. 

  2114. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2115. 

  2115. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2116. 

  2116. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2117. 

  2117. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2118. 

  2118. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2119. 

  2119. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2120. 

  2120. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2121. 

  2121. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2122. 

  2122. 		</configs>
    2123. 

  2123. 

  2124. 		<configs name="ForelineHeater" nameView="Heater Foreline" >
    2125. 

  2125. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2126. 

  2126. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2127. 

  2127. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2128. 

  2128. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2129. 

  2129. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2130. 

  2130. 

  2131. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2132. 

  2132. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2133. 

  2133. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2134. 

  2134. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2135. 

  2135. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2136. 

  2136. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2137. 

  2137. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2138. 

  2138. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2139. 

  2139. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2140. 

  2140. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2141. 

  2141. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2142. 

  2142. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2143. 

  2143. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2144. 

  2144. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2145. 

  2145. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2146. 

  2146. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2147. 

  2147. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2148. 

  2148. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2149. 

  2149. 		</configs>
    2150. 

  2150. 

  2151. 		<configs name="ValveHeater" nameView="Valve Heater" >
    2152. 

  2152. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2153. 

  2153. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2154. 

  2154. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2155. 

  2155. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2156. 

  2156. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2157. 

  2157. 

  2158. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2159. 

  2159. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2160. 

  2160. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2161. 

  2161. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2162. 

  2162. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2163. 

  2163. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2164. 

  2164. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2165. 

  2165. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2166. 

  2166. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2167. 

  2167. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2168. 

  2168. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2169. 

  2169. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2170. 

  2170. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2171. 

  2171. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2172. 

  2172. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2173. 

  2173. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2174. 

  2174. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2175. 

  2175. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2176. 

  2176. 		</configs>
    2177. 

  2177. 		<configs name="PendulumHeater" nameView="Heater Pendulum" >
    2178. 

  2178. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2179. 

  2179. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2180. 

  2180. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2181. 

  2181. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2182. 

  2182. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2183. 

  2183. 

  2184. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2185. 

  2185. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2186. 

  2186. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2187. 

  2187. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2188. 

  2188. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2189. 

  2189. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2190. 

  2190. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2191. 

  2191. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2192. 

  2192. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2193. 

  2193. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2194. 

  2194. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2195. 

  2195. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2196. 

  2196. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2197. 

  2197. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2198. 

  2198. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2199. 

  2199. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2200. 

  2200. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2201. 

  2201. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2202. 

  2202. 		</configs>
    2203. 

  2203. 

  2204. 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
    2205. 

  2205. 			<config default="COM17" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
    2206. 

  2206. 		</configs>
    2207. 

  2207. 		<configs name="TurboPump" nameView="Turbo Pump">
    2208. 

  2208. 			<config default="COM3" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
    2209. 

  2209. 			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    2210. 

  2210. 			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    2211. 

  2211. 		</configs>
    2212. 

  2212. 		<configs name="PendulumValve" nameView="Pendulum Valve">
    2213. 

  2213. 			<config default="COM77" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
    2214. 

  2214. 			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2215. 

  2215. 			<config default="750"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2216. 

  2216. 			<config default="600"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2217. 

  2217. 			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    2218. 

  2218. 		</configs>
    2219. 

  2219. 

  2220. 		<!--Clean-->
    2221. 

  2221. 		<configs name="IdleClean" nameView="Idle Clean" visible="false">
    2222. 

  2222. 			<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    2223. 

  2223. 			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Idle Clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    2224. 

  2224. 			<config default="10" name="IdleCleanTime" nameView="Idle Clean Time(Hours)" description="Chamber Idle Time(hours) which trigger Idle Clean" max="720" min="1" paramter="" tag="" unit="h" type="Integer" />
    2225. 

  2225. 			<config default="100" name="IdleCleanWaferCount" nameView="Idle Clean Wafer Count" description="Wafer Count which trigger Idle Clean" max="100000" min="1" paramter="" tag="" unit="pcs" type="Integer" />
    2226. 

  2226. 			<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="Wafer Count Since Last Runing Clean" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
    2227. 

  2227. 			<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="The Time Chamber Last Run Wafer" max="" min="" paramter="" tag="" unit="" type="String" />
    2228. 

  2228. 		</configs>
    2229. 

  2229. 

  2230. 		<configs name="EPD" nameView="EPD Setting">
    2231. 

  2231. 			<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2232. 

  2232. 			<config default="0" name="ChannelNumber" nameView="EPD Channel Number"  description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    2233. 

  2233. 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
    2234. 

  2234. 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    2235. 

  2235. 		</configs>
    2236. 

  2236. 

  2237. 		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
    2238. 

  2238. 			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2239. 

  2239. 			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2240. 

  2240. 			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2241. 

  2241. 			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2242. 

  2242. 			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2243. 

  2243. 			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2244. 

  2244. 			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2245. 

  2245. 			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2246. 

  2246. 			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2247. 

  2247. 			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2248. 

  2248. 			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2249. 

  2249. 

  2250. 		</configs>
    2251. 

  2251. 	</configs>
    2252. 

  2252. 

  2253. 	<!--PMD-->
    2254. 

  2254. 	<configs name="PMD" nameView="PMD" >
    2255. 

  2255. 		<config default="5" name="ChamberType"  nameView="Chamber Type" description="0=>Venus,1=>Kepler2300,2=>Kepler2200A,3=>Kepler2200B" max="5" min="1" paramter="" tag=""  unit="" type="Integer" visible="false"/>
    2256. 

  2256. 		<config default="100" name="TurboN2FlowSetPoint" nameView="TurboN2SetPoint" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Double" />
    2257. 

  2257. 		<config default="120" name="PrepareTransferTimeout" nameView="Prepare Transfer Timeout" description="prepare transfer time out" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    2258. 

  2258. 		<config default="120" name="TransferWaferTimeout" nameView="Transfer Wafer Timeout" description="Transfer Wafer Timeout" max="99999" min="1" paramter="" tag="" unit="s" type="Integer" />
    2259. 

  2259. 		<config default="1" name="OpenGasValveTimeout" nameView="Open Gas Valve Timeout" description="开阀超时" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2260. 

  2260. 		<config default="1" name="TimeLimitOfCloseGasValve" nameView="Time Limit Of Close Gas Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2261. 

  2261. 		<config default="1" name="OpenCloseSlitValveTimeout" nameView="Open Close Slit Valve Timeout" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2262. 

  2262. 		<config default="100" name="GasFlowPressureAlarmRange" nameView="Process Pressure Alarm Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    2263. 

  2263. 		<config default="60" name="GasFlowPressureAlarmTime" nameView="Process Pressure Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    2264. 

  2264. 		<config default="100" name="GasFlowPressureWarningRange" nameView="Process Pressure Warning Range" description="" max="760000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    2265. 

  2265. 		<config default="60" name="GasFlowPressureWarningTime" nameView="Process Pressure Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Double" />
    2266. 

  2266. 		<config default="true" name="EnableThrottleValve" nameView="Enable Throttle Valve" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2267. 

  2267. 		<config default="150" name="ValveHeaterSetPointLimit" nameView="Valve Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    2268. 

  2268. 		<config default="140" name="ForeLineHeaterSetPointLimit" nameView="ForeLine Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    2269. 

  2269. 		<config default="120" name="CheckSubstrateTempTimeout" nameView="Check Substrate Temp Timeout" description="" max="3600" min="0" paramter="" tag="" unit="" type="Integer" />
    2270. 

  2270. 		<config default="90" name="CheckATMTimeout" nameView="Check ATM Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    2271. 

  2271. 		<config default="2000" name="OverVentTime" nameView="Over Vent Time Delay" description="" max="60000" min="0" paramter="" tag="" unit="s" type="Integer" />
    2272. 

  2272. 		<config default="780000" name="ChamberBasePressureThreshold" nameView="Chamber Base Pressure Threshold" description="" max="1000000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    2273. 

  2273. 		<config default="120" name="ChamberBaseTemperatureThreshold" nameView="Chamber Base Temperature Threshold" description="" max="1000" min="0" paramter="" tag="" unit="°C" type="Double" />
    2274. 

  2274. 		<config default="10" name="ProcessPressureOffset" nameView="Process Pressure Offset" description="" max="100" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    2275. 

  2275. 		<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL" visible="false" type="Double" />
    2276. 

  2276. 		<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    2277. 

  2277. 		<config default="9" name="TargetPressureInMFCVerification" nameView="MFC verification中的目标压力" max="100" min="0" paramter="" tag="" unit="Torr" visible="false" type="Double" />
    2278. 

  2278. 		<config default="180" name="GasFlowTimeInMFCVerification" nameView="MFC verification中的目标时间" max="1000" min="0" paramter="" tag="" unit="second" visible="false" type="Double" />
    2279. 

  2279. 		<config default="0" name="PickDelayTime" nameView="Pick Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    2280. 

  2280. 		<config default="0" name="PlaceDelayTime" nameView="Place Delay Time before retract robot arm(ms)" description="" max="10000" min="0" paramter="" tag="" unit="ms" type="Integer" />
    2281. 

  2281. 		<config default="Strip" name="ChamberLabel"  nameView="Chamber Label" description="Chamber名称" max="" min="" paramter="" tag=""  unit="" type="String" />
    2282. 

  2282. 		<config default="30" name="MaxDeviationInMFCVerification" nameView="MFC verification允许的最大偏差值（%）" max="100000" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    2283. 

  2283. 		<config default="150" name="WallHeaterSetPointLimit" nameView="Wall Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    2284. 

  2284. 		<config default="false" name="EnableWallHeater" nameView="Enable Chamber Wall Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2285. 

  2285. 		<config default="false" name="EnableGridHeater" nameView="Enable Chamber Grid Heater" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2286. 

  2286. 		<config default="5" name="RecipeToleranceIgnoreTime" nameView="Ignore Time Before Check Recipe Step Tolerance" description="" max="60" min="0" paramter="" tag="" unit="s" type="Integer" />
    2287. 

  2287. 		<config default="1" name="RecipeRunningMode" nameView="0, only run current recipe; 1, include chuck/dechuck recipe" description="" max="5" min="0" paramter="" tag="" unit="" type="Integer" />
    2288. 

  2288. 		<config default="751" name="ForelineInterlockPressure" nameView="Foreline Interlock Pressure" description="" max="2000" min="500" paramter="" tag="" unit="°C" type="Double" />
    2289. 

  2289. 		<config default="150" name="PendulumHeaterSetPointLimit" nameView="Pendulum Heater Set Point Limit" description="" max="500" min="0" paramter="" tag="" unit="" type="Integer" />
    2290. 

  2290. 		<config default="false" name="IsEnableRecipeExtension" nameView="Is Enable Recipe Extension"  description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2291. 

  2291. 		<config default="80"  name="ControlPressureSetPoint"   nameView="Control Pressure SetPoint"   description="PM Chamber 控压 设定值" max="2000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    2292. 

  2292. 		<config default="300"  name="ControlPressureN2FlowSetPoint"   nameView="Control Pressure N2 Flow SetPoint"   description="PM Chamber 控压 设定值" max="500" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2293. 

  2293. 		<configs name="MFCVerification" nameView="MFC Verification" >
    2294. 

  2294. 			<config default="1" name="BasePressure" nameView="开始条件：腔体压力达到时开始流气" max="100" min="1" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    2295. 

  2295. 			<config default="180" name="PumpingTime" nameView="抽气时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    2296. 

  2296. 			<config default="10" name="GasFlowTime" nameView="结束条件：流气多长时间" max="600" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    2297. 

  2297. 			<config default="180" name="HoldTime" nameView="Hold 时间" max="7200" min="0" paramter="" tag="" unit="second" visible="true" type="Integer" />
    2298. 

  2298. 			<config default="7500" name="ChamberVolume" nameView="Chamber Volume" max="100000" min="0" paramter="" tag="" unit="mL"  visible="false" type="Double" />
    2299. 

  2299. 			<config default="25" name="GasTemperature" nameView="Gas Temperature" max="1000" min="-1000" paramter="" tag="" unit="℃" visible="false" type="Double" />
    2300. 

  2300. 			<config default="9" name="TargetPressure" nameView="结束条件：腔体压力达到的最大值" max="100" min="0" paramter="" tag="" unit="Torr" visible="true" type="Double" />
    2301. 

  2301. 

  2302. 			<config default="30" name="MaxDeviation" nameView="结果检查：最大偏差，超过该值报警" max="100000" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    2303. 

  2303. 			<config default="20" name="PressureStableTolerance" nameView="稳定条件：压力1秒内的最大变化范围" max="100000" min="0" paramter="" tag="" unit="mTorr" visible="true" type="Double" />
    2304. 

  2304. 			<config default="20" name="FlowStableTolerance" nameView="稳定条件：流量设定值和反馈值允许的最大偏差" max="100" min="0" paramter="" tag="" unit="%" visible="true" type="Double" />
    2305. 

  2305. 			<config default="5" name="CheckStableTimeout" nameView="稳定条件：在多长时间内处于稳定状态" max="100" min="0" paramter="" tag="" unit="%" visible="false" type="Double" />
    2306. 

  2306. 		</configs>
    2307. 

  2307. 

  2308. 		<configs name="Chiller" nameView="Chiller" >
    2309. 

  2309. 			<config default="true" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    2310. 

  2310. 			<config default="false" name="ChillerSameWithPMA" nameView="Chiller Same With PMA" description="enable chiller same with PMA or not" max="1" min="0" tag="" unit="" type="Bool" />
    2311. 

  2311. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2312. 

  2312. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2313. 

  2313. 			<config default="COM27" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    2314. 

  2314. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    2315. 

  2315. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    2316. 

  2316. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    2317. 

  2317. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2318. 

  2318. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2319. 

  2319. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2320. 

  2320. 		</configs>
    2321. 

  2321. 		<configs name="InnerChiller" nameView="InnerChiller" >
    2322. 

  2322. 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    2323. 

  2323. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2324. 

  2324. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2325. 

  2325. 			<config default="COM45" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    2326. 

  2326. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    2327. 

  2327. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    2328. 

  2328. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    2329. 

  2329. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2330. 

  2330. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2331. 

  2331. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2332. 

  2332. 		</configs>
    2333. 

  2333. 		<configs name="OuterChiller" nameView="OuterChiller" >
    2334. 

  2334. 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    2335. 

  2335. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2336. 

  2336. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2337. 

  2337. 			<config default="COM46" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    2338. 

  2338. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    2339. 

  2339. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    2340. 

  2340. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    2341. 

  2341. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2342. 

  2342. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2343. 

  2343. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2344. 

  2344. 		</configs>
    2345. 

  2345. 		<configs name="TopChiller" nameView="TopChiller" >
    2346. 

  2346. 			<config default="false" name="EnableChiller" nameView="Enable Chiller" description="enable chiller or not" max="1" min="0" tag="" unit="" type="Bool" />
    2347. 

  2347. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:SMC; 2, AIRSYS" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2348. 

  2348. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2349. 

  2349. 			<config default="COM47" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    2350. 

  2350. 			<config default="10" name="ChillerTemperatureOffset" nameView="Chiller Temperature Offset" description="" max="100" min="0" paramter="" tag="" unit="degree" type="Double" />
    2351. 

  2351. 			<config default="300" name="SetPointLimitMax" nameView="Chiller Set Point Limit Max" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    2352. 

  2352. 			<config default="0" name="SetPointLimitMin" nameView="Chiller Set Point Limit Min" description="" max="500" min="0" paramter="" tag="" unit="degree" type="Double" />
    2353. 

  2353. 			<config default="true" name="EnableToleranceAlarm" nameView="Enable Tolerance Alarm" description="Enable Tolerance Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2354. 

  2354. 			<config default="20" name="ToleranceAlarmRange" nameView="Tolerance Alarm Range" description="Tolerance Alarm Range" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2355. 

  2355. 			<config default="60" name="ToleranceAlarmTime" nameView="Tolerance Alarm Time" description="Tolerance Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2356. 

  2356. 		</configs>
    2357. 

  2357. 		<configs name="DryPump" nameView="Dry Pump" >
    2358. 

  2358. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:Sky; 2:Edwards" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2359. 

  2359. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2360. 

  2360. 			<config default="COM29" name="Port" nameView="Port" description="serial port name of pump" max="" min="" paramter="" tag="" unit="" type="String" />
    2361. 

  2361. 			<config default="1000" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    2362. 

  2362. 			<config default="20" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    2363. 

  2363. 		</configs>
    2364. 

  2364.     <configs name="Magnet" nameView="Magnet" visible="false">
    2365. 

  2365.       <config default="1" name="Magnetwareform" nameView="Magnet wareform" description="厂商, 0:SIN,1:Squre,2:Single" max="2" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    2366. 

  2366.       <config default="0.25" name="MagentFieldRatio" nameView="Magent Field Ratio" description="" max="1" min="0" paramter="" tag="" unit="" type="Integer" visible="true"/>
    2367. 

  2367.       <config default="4s" name="Magnetcycleperiod" nameView="Magnet cycle period" description="serial port name of pump" max="10" min="0" paramter="" tag="" unit="s" type="String" visible="true"/>
    2368. 

  2368.       <config default="50" name="Magnet 1A output full scale" nameView="Magnet 1A output full scale" description="" max="100" min="50" paramter="" tag="" unit="gs" type="Double" visible="true"/>
    2369. 

  2369.       <config default="50" name="Magnet 1B output full scale" nameView="Magnet 1B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    2370. 

  2370.       <config default="50" name="Magnet 2A output full scale" nameView="Magnet 2A output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    2371. 

  2371.       <config default="50" name="Magnet 2B output full scale" nameView="Magnet 2B output full scale" description="" max="100" min="0" paramter="" tag="" unit="gs" type="Integer" visible="true" />
    2372. 

  2372.       <config default="3" name="Min Magnet Coil current" nameView="Min Magnet Coil current" description="" max="100" min="0" paramter="" tag="" unit="A" type="Integer" visible="true" />
    2373. 

  2373.     </configs>
    2374. 

  2374. 		<configs name="Rf" nameView="Source RF" >
    2375. 

  2375. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2376. 

  2376. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2377. 

  2377. 			<config default="COM50" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    2378. 

  2378. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    2379. 

  2379. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    2380. 

  2380. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    2381. 

  2381. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    2382. 

  2382. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    2383. 

  2383. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    2384. 

  2384. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    2385. 

  2385. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    2386. 

  2386. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    2387. 

  2387. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2388. 

  2388. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2389. 

  2389. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2390. 

  2390. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2391. 

  2391. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    2392. 

  2392. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    2393. 

  2393. 			<config default="3" name="RFTurnOnTimeout" nameView="RF Turn On Timeout" description="" max="10" min="0" paramter="" tag="" unit="S" type="Integer" />
    2394. 

  2394. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    2395. 

  2395. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    2396. 

  2396. 		</configs>
    2397. 

  2397. 		<configs name="Match" nameView="Source Match" >
    2398. 

  2398. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    2399. 

  2399. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2400. 

  2400. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2401. 

  2401. 			<config default="COM51" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    2402. 

  2402. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    2403. 

  2403. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2404. 

  2404. 			<config default="false" name="EnableC1C2Position" nameView="Enable Source C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2405. 

  2405. 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2406. 

  2406. 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2407. 

  2407. 		</configs>
    2408. 

  2408. 		<configs name="RFBox" nameView="RF Box" >
    2409. 

  2409. 			<config default="false" name="EnableMatch" nameView="Enable Source Match" description="enable match or not" max="1" min="0" tag="" unit="" type="Bool" />
    2410. 

  2410. 			<config default="1" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2411. 

  2411. 			<config default="1" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2412. 

  2412. 			<config default="COM40" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    2413. 

  2413. 			<config default="192.168.10.21:502" name="IPAddress" nameView="IP Address" description="Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    2414. 

  2414. 		</configs>
    2415. 

  2415. 		<configs name="BiasRf" nameView="Bias RF" >
    2416. 

  2416. 			<config default="true" name="EnableBiasRF" nameView="Enable Bias RF" description="enable bias RF or not" max="1" min="0" tag="" unit="" type="Bool" />
    2417. 

  2417. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2418. 

  2418. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2419. 

  2419. 			<config default="COM14" name="Port" nameView="Port" description="serial port name of RFG" max="" min="" paramter="" tag="" unit="" type="String" />
    2420. 

  2420. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias RF IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    2421. 

  2421. 			<config default="500" name="PowerAlarmRange" nameView="Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    2422. 

  2422. 			<config default="10" name="PowerAlarmTime" nameView="Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    2423. 

  2423. 			<config default="500" name="PowerWarningRange" nameView="Power Warning Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    2424. 

  2424. 			<config default="10" name="PowerWarningTime" nameView="Power Warning Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    2425. 

  2425. 			<config default="1" name="ReflectPowerAlarmRange" nameView="Reflect Power Alarm Range" description="" max="1000" min="0" paramter="" tag="" unit="" type="Double" />
    2426. 

  2426. 			<config default="1" name="ReflectPowerAlarmTime" nameView="Reflect Power Alarm Time" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    2427. 

  2427. 			<config default="3000" name="PowerRange" nameView="Power Range" description="" max="30000" min="0" paramter="" tag="" unit="" type="Double" />
    2428. 

  2428. 			<config default="1" name="Coefficient" nameView="Coefficient" description="" max="10" min="0" paramter="" tag="" unit="" type="Double" />
    2429. 

  2429. 			<config default="false" name="EnablePulsingFunction" nameView="Enable Pulsing Function" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2430. 

  2430. 			<config default="false" name="EnableReflectPower" nameView="Enable Reflect Power" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2431. 

  2431. 			<config default="false" name="EnableVoltageCurrent" nameView="Enable Voltage Current" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2432. 

  2432. 			<config default="1" name="PowerRegulationFactor" nameView="Power Regulation Factor" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2433. 

  2433. 			<config default="1000" name="RfPowerAlarmRange" nameView="RF Power Alarm Range" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    2434. 

  2434. 			<config default="3000" name="RfPowerAlarmTime" nameView="RF Power Alarm Time" description="" max="10000" min="0" paramter="" tag="" unit="" type="Integer" />
    2435. 

  2435. 			<config default="false" name="EnableCalibration" nameView="是否校准" max="" min="" paramter="" tag="" unit="" visible="true" type="Bool" />
    2436. 

  2436. 			<config default="100#100;200#200;" name="CalibrationTable" nameView="校准表" max="" min="0" paramter="" tag="" unit="" visible="false" type="String" />
    2437. 

  2437. 		</configs>
    2438. 

  2438. 		<configs name="BiasMatch" nameView="Bias Match" >
    2439. 

  2439. 			<config default="false" name="EnableBiasMatch" nameView="Enable Bias Match" description="enable bias match or not" max="1" min="0" tag="" unit="" type="Bool" />
    2440. 

  2440. 			<config default="2" name="MFG" nameView="MFG" description="厂商, 1:AdTec; 2:Comet; 3:Revtech" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2441. 

  2441. 			<config default="2" name="CommunicationType" nameView="Communication Type" description="0:Analogue; 1:RS232; 2:Ethernet" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2442. 

  2442. 			<config default="COM15" name="Port" nameView="Port" description="serial port name of match" max="" min="" paramter="" tag="" unit="" type="String" />
    2443. 

  2443. 			<config default="127.0.0.1:502" name="IPAddress" nameView="IP Address" description="Bias Match IP,default 127.0.0.1:502" max="" min="" paramter="" tag="" unit="" type="String" />
    2444. 

  2444. 			<config default="1" name="MatchMode" nameView="Match Mode" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2445. 

  2445. 			<config default="false" name="EnableBiasC1C2Position" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2446. 

  2446. 			<config default="false" name="EnableC1C2StepOffset" nameView="Enable Bias C1 C2 Position" description="" max="10" min="0" paramter="" tag="" unit="" type="Bool" />
    2447. 

  2447. 			<config default="1"     name="C1C2StepOffsetValue"  nameView="Bias C1 C2 Step Offset Value" description="" max="10" min="0" paramter="" tag="" unit="" type="Integer" />
    2448. 

  2448. 		</configs>
    2449. 

  2449. 		<configs name="MfcGas1" nameView="MFC Gas1" >
    2450. 

  2450. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 1 or not" tag="" unit="" type="Bool" />
    2451. 

  2451. 			<config default="O2" name="GasName" nameView="Gas Name" description="Name of NO.1 gas stick" tag="" unit="" type="String" />
    2452. 

  2452. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2453. 

  2453. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2454. 

  2454. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2455. 

  2455. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2456. 

  2456. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2457. 

  2457. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2458. 

  2458. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2459. 

  2459. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2460. 

  2460. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2461. 

  2461. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2462. 

  2462. 

  2463. 		</configs>
    2464. 

  2464. 		<configs name="MfcGas2" nameView="MFC Gas2" >
    2465. 

  2465. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 2 or not" tag="" unit="" type="Bool" />
    2466. 

  2466. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of NO.2 gas stick" tag="" unit="" type="String" />
    2467. 

  2467. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2468. 

  2468. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2469. 

  2469. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2470. 

  2470. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2471. 

  2471. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2472. 

  2472. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2473. 

  2473. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2474. 

  2474. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2475. 

  2475. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2476. 

  2476. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2477. 

  2477. 

  2478. 		</configs>
    2479. 

  2479. 		<configs name="MfcGas3" nameView="MFC Gas3" >
    2480. 

  2480. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 3 or not" tag="" unit="" type="Bool" />
    2481. 

  2481. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.3 gas stick" tag="" unit="" type="String" />
    2482. 

  2482. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2483. 

  2483. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2484. 

  2484. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2485. 

  2485. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2486. 

  2486. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2487. 

  2487. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2488. 

  2488. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2489. 

  2489. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2490. 

  2490. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2491. 

  2491. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2492. 

  2492. 

  2493. 		</configs>
    2494. 

  2494. 		<configs name="MfcGas4" nameView="MFC Gas4" >
    2495. 

  2495. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 4 or not" tag="" unit="" type="Bool" />
    2496. 

  2496. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.4 gas stick" tag="" unit="" type="String" />
    2497. 

  2497. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2498. 

  2498. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2499. 

  2499. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2500. 

  2500. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2501. 

  2501. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2502. 

  2502. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2503. 

  2503. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2504. 

  2504. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2505. 

  2505. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2506. 

  2506. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2507. 

  2507. 

  2508. 		</configs>
    2509. 

  2509. 		<configs name="MfcGas5" nameView="MFC Gas5" >
    2510. 

  2510. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 5 or not" tag="" unit="" type="Bool" />
    2511. 

  2511. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.5 gas stick" tag="" unit="" type="String" />
    2512. 

  2512. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2513. 

  2513. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2514. 

  2514. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2515. 

  2515. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2516. 

  2516. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2517. 

  2517. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2518. 

  2518. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2519. 

  2519. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2520. 

  2520. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2521. 

  2521. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2522. 

  2522. 

  2523. 		</configs>
    2524. 

  2524. 		<configs name="MfcGas6" nameView="MFC Gas6" >
    2525. 

  2525. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 6 or not" tag="" unit="" type="Bool" />
    2526. 

  2526. 			<config default="AR" name="GasName" nameView="Gas Name" description="Name of NO.6 gas stick" tag="" unit="" type="String" />
    2527. 

  2527. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2528. 

  2528. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2529. 

  2529. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2530. 

  2530. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2531. 

  2531. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2532. 

  2532. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2533. 

  2533. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2534. 

  2534. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2535. 

  2535. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2536. 

  2536. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2537. 

  2537. 

  2538. 		</configs>
    2539. 

  2539. 		<configs name="MfcGas7" nameView="MFC Gas7" >
    2540. 

  2540. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 7 or not" tag="" unit="" type="Bool" />
    2541. 

  2541. 			<config default="Gas4" name="GasName" nameView="Gas Name" description="Name of NO.7 gas stick" tag="" unit="" type="String" />
    2542. 

  2542. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2543. 

  2543. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2544. 

  2544. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2545. 

  2545. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2546. 

  2546. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2547. 

  2547. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2548. 

  2548. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2549. 

  2549. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2550. 

  2550. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2551. 

  2551. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2552. 

  2552. 

  2553. 		</configs>
    2554. 

  2554. 		<configs name="MfcGas8" nameView="MFC Gas8" >
    2555. 

  2555. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 8 or not" tag="" unit="" type="Bool" />
    2556. 

  2556. 			<config default="Gas5" name="GasName" nameView="Gas Name" description="Name of NO.8 gas stick" tag="" unit="" type="String" />
    2557. 

  2557. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2558. 

  2558. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2559. 

  2559. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2560. 

  2560. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2561. 

  2561. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2562. 

  2562. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2563. 

  2563. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2564. 

  2564. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2565. 

  2565. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2566. 

  2566. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2567. 

  2567. 

  2568. 		</configs>
    2569. 

  2569. 		<configs name="MfcGas9" nameView="MFC Gas9" >
    2570. 

  2570. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 9 or not" tag="" unit="" type="Bool" />
    2571. 

  2571. 			<config default="Gas6" name="GasName" nameView="Gas Name" description="Name of NO.9 gas stick" tag="" unit="" type="String" />
    2572. 

  2572. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2573. 

  2573. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2574. 

  2574. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2575. 

  2575. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2576. 

  2576. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2577. 

  2577. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2578. 

  2578. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2579. 

  2579. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2580. 

  2580. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2581. 

  2581. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2582. 

  2582. 		</configs>
    2583. 

  2583. 		<configs name="MfcGas10" nameView="MFC Gas10" >
    2584. 

  2584. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 10 or not" tag="" unit="" type="Bool" />
    2585. 

  2585. 			<config default="Gas7" name="GasName" nameView="Gas Name" description="Name of NO.10 gas stick" tag="" unit="" type="String" />
    2586. 

  2586. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2587. 

  2587. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2588. 

  2588. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2589. 

  2589. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2590. 

  2590. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2591. 

  2591. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2592. 

  2592. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2593. 

  2593. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2594. 

  2594. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2595. 

  2595. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2596. 

  2596. 		</configs>
    2597. 

  2597. 		<configs name="MfcGas11" nameView="MFC Gas8" >
    2598. 

  2598. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 11 or not" tag="" unit="" type="Bool" />
    2599. 

  2599. 			<config default="Gas8" name="GasName" nameView="Gas Name" description="Name of NO.11 gas stick" tag="" unit="" type="String" />
    2600. 

  2600. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2601. 

  2601. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2602. 

  2602. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2603. 

  2603. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2604. 

  2604. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2605. 

  2605. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2606. 

  2606. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2607. 

  2607. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2608. 

  2608. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2609. 

  2609. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2610. 

  2610. 		</configs>
    2611. 

  2611. 		<configs name="MfcGas12" nameView="MFC Gas12" >
    2612. 

  2612. 			<config default="true" name="Enable" nameView="Enable" description="Enable gas 12 or not" tag="" unit="" type="Bool" />
    2613. 

  2613. 			<config default="Gas9" name="GasName" nameView="Gas Name" description="Name of NO.12 gas stick" tag="" unit="" type="String" />
    2614. 

  2614. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2615. 

  2615. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2616. 

  2616. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2617. 

  2617. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2618. 

  2618. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2619. 

  2619. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2620. 

  2620. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2621. 

  2621. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2622. 

  2622. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2623. 

  2623. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2624. 

  2624. 		</configs>
    2625. 

  2625. 		<configs name="MfcN2" nameView="MFC N2" >
    2626. 

  2626. 			<config default="true" name="Enable" nameView="Enable" description="Enable N2 or not" tag="" unit="" type="Bool" />
    2627. 

  2627. 			<config default="N2" name="GasName" nameView="Gas Name" description="Name of N2 stick" tag="" unit="" type="String" />
    2628. 

  2628. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2629. 

  2629. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2630. 

  2630. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2631. 

  2631. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2632. 

  2632. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2633. 

  2633. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2634. 

  2634. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2635. 

  2635. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2636. 

  2636. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2637. 

  2637. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2638. 

  2638. 

  2639. 		</configs>
    2640. 

  2640. 		<configs name="MfcHe" nameView="MFC He" >
    2641. 

  2641. 			<config default="true" name="Enable" nameView="Enable" description="Enable He or not" tag="" unit="" type="Bool" />
    2642. 

  2642. 			<config default="He" name="GasName" nameView="Gas Name" description="Name of He stick" tag="" unit="" type="String" />
    2643. 

  2643. 			<config default="100" name="MfcN2Scale" nameView="MFC N2 Scale" description="Max scale by N2 tuning" max="10000" min="0" tag="" unit="sccm" type="Integer" />
    2644. 

  2644. 			<config default="1" name="MfcScaleFactor" nameView="MFC Scale Factor" description="Scale factor" max="10" min="0" tag="" unit="sccm" type="Double" />
    2645. 

  2645. 			<config default="100" name="DefaultSetPoint" nameView="Default Set Point" description="default setpoint" max="1000" min="0" tag="" unit="sccm" type="Integer" />
    2646. 

  2646. 			<config default="1" name="FlowRegulationFactor" nameView="Flow Regulation Factor" description="flow regulation factor" max="10" min="0" tag="" unit="sccm" type="Integer" />
    2647. 

  2647. 			<config default="true" name="MfcEnableAlarm" nameView="MFC Enable Alarm" description="Mfc Enable Alarm" max="1" min="0" paramter="" tag="" unit="" type="Bool" />
    2648. 

  2648. 			<config default="10" name="MfcAlarmRange" nameView="MFC Alarm Range" description="Mfc Alarm Range" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2649. 

  2649. 			<config default="10" name="MfcAlarmTime" nameView="MFC Alarm Time" description="Mfc Alarm Time" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2650. 

  2650. 			<config default="10" name="MfcWarningRange" nameView="MFC Warning Range" description="" max="200" min="0" paramter="" tag="" unit="sccm" type="Integer" />
    2651. 

  2651. 			<config default="10" name="MfcWarningTime" nameView="MFC Warning Time" description="" max="60" min="0" paramter="" tag="" unit="second" type="Integer" />
    2652. 

  2652. 			<config default="0" name="MFCWriteMode" nameView="MFCWriteMode" description=" 0:Flow; 1:Percent" max="1" min="0" paramter="" tag="" unit="" type="Integer" />
    2653. 

  2653. 

  2654. 		</configs>
    2655. 

  2655. 		<configs name="Pump" nameView="Pump" >
    2656. 

  2656. 			<config default="30" name="LeakRate" nameView="Leak Rate" description="" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    2657. 

  2657. 			<config default="300" name="LeakCheckPumpingTime" nameView="Leak Check Pumping Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    2658. 

  2658. 			<config default="180" name="LeakCheckHoldTime" nameView="Leak Check Hold Time" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    2659. 

  2659. 			<config default="10" name="PumpBasePressure" nameView="Pump Base Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    2660. 

  2660. 			<config default="1" name="LeakCheckBasePressure" nameView="Leak Check Base Pressure" description="" max="100" min="0" paramter="" tag="" unit="mTorr" type="Double" />
    2661. 

  2661. 			<config default="1,2,3,4,5,6,7,8" name="LeakCheckGasLineNums" nameView="LeakCheck GasLineNums" description="GasLine numbers for Leak Check" tag="" unit="" type="String" />
    2662. 

  2662. 			<config default="120" name="PumpTimeLimit" nameView="Pump Time Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Double" />
    2663. 

  2663. 			<config default="5" name="PumpValveDelay" nameView="Pump Valve Delay" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    2664. 

  2664. 			<config default="75000" name="PumpCrossingPressure" description="PM Rough Pumping Pressure" max="200000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    2665. 

  2665. 			<config default="200" name="PumpVHe2FlowPressure" nameView="He2 Flow Pressure" description="" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    2666. 

  2666. 			<config default="100" name="LoadLockPumpBasePressure" description="LoadLock Pump Base Pressure" max="756000" min="0" paramter="" tag="" unit="mTorr" type="Integer" />
    2667. 

  2667. 			<config default="120" name="LoadLockPumpTimeLimit" description="LoadLock Pump Time Limit" max="3000" min="0" paramter="" tag="" unit="second" type="Integer" />
    2668. 

  2668. 			<config default="10" name="LoadLockPurgeVentPressure" description="LoadLock Purge Vent Pressure" max="760" min="0" paramter="" tag="" unit="Torr" type="Integer" />
    2669. 

  2669. 			<config default="30" name="LoadLockPurgeCycleCount" description="LoadLock Purge Cycle Count" max="200" min="0" paramter="" tag="" unit="" type="Integer" />
    2670. 

  2670. 			<config default="120" name="LoadLockPurgePumpTime" description="LoadLock Purge Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    2671. 

  2671. 			<config default="180" name="LoadLockLeakCheckPumpTime" description="LoadLock Leak Check Pump Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    2672. 

  2672. 			<config default="300" name="LoadLockLeakCheckWaitTime" description="LoadLock Leak Check Wait Time" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    2673. 

  2673. 			<config default="30" name="LoadLockLeakRate" description="LoadLock Leak Rate" max="756000" min="0" paramter="" tag="" unit="mTorrPerMin" type="Double" />
    2674. 

  2674. 		</configs>
    2675. 

  2675. 		<configs name="Purge" nameView="Purge" >
    2676. 

  2676. 			<config default="30" name="PurgeCycleCount" nameView="Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
    2677. 

  2677. 			<config default="1000" name="PurgeVentPressure" nameView="Purge Vent Pressure" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2678. 

  2678. 			<config default="75" name="PurgePumpPressure" nameView="Purge Pump Pressure" description="" max="200" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2679. 

  2679. 			<config default="60" name="PurgeVentTimeLimit" nameView="Purge Vent Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2680. 

  2680. 			<config default="60" name="PurgePumpTimeLimit" nameView="Purge Pump Time Limit" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2681. 

  2681. 			<config default="10" name="PurgeVentStableTime" nameView="Purge Vent Stable Time" description="" max="600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2682. 

  2682. 			<config default="60" name="PurgePumpTime" nameView="Purge Pump Time" description="" max="7200" min="0" paramter="" tag="" unit="second" type="Integer" />
    2683. 

  2683. 			<config default="30" name="GasPurgeCycleCount" nameView="Gas Purge Cycle Count" description="" max="200" min="0" paramter="" tag="" unit="times" type="Integer" />
    2684. 

  2684. 			<config default="5" name="GasPurgeFlowTime" nameView="Gas Purge Flow Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
    2685. 

  2685. 			<config default="10" name="GasPurgePumpTime" nameView="Gas Purge Pump Time" description="" max="300" min="0" paramter="" tag="" unit="second" type="Integer" />
    2686. 

  2686. 		</configs>
    2687. 

  2687. 		<configs name="HeaterChamber" nameView="Heater Substrate" >
    2688. 

  2688. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2689. 

  2689. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2690. 

  2690. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2691. 

  2691. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2692. 

  2692. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2693. 

  2693. 

  2694. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2695. 

  2695. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2696. 

  2696. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2697. 

  2697. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2698. 

  2698. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2699. 

  2699. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2700. 

  2700. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2701. 

  2701. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2702. 

  2702. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2703. 

  2703. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2704. 

  2704. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2705. 

  2705. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2706. 

  2706. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2707. 

  2707. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2708. 

  2708. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2709. 

  2709. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2710. 

  2710. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2711. 

  2711. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2712. 

  2712. 		</configs>
    2713. 

  2713. 

  2714. 		<configs name="WallHeater" nameView="Heater Wall" >
    2715. 

  2715. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2716. 

  2716. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2717. 

  2717. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2718. 

  2718. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2719. 

  2719. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2720. 

  2720. 

  2721. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2722. 

  2722. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2723. 

  2723. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2724. 

  2724. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2725. 

  2725. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2726. 

  2726. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2727. 

  2727. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2728. 

  2728. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2729. 

  2729. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2730. 

  2730. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2731. 

  2731. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2732. 

  2732. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2733. 

  2733. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2734. 

  2734. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2735. 

  2735. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2736. 

  2736. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2737. 

  2737. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2738. 

  2738. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2739. 

  2739. 		</configs>
    2740. 

  2740. 

  2741. 		<configs name="ForelineHeater" nameView="Heater Foreline" >
    2742. 

  2742. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2743. 

  2743. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2744. 

  2744. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2745. 

  2745. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2746. 

  2746. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2747. 

  2747. 

  2748. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2749. 

  2749. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2750. 

  2750. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2751. 

  2751. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2752. 

  2752. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2753. 

  2753. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2754. 

  2754. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2755. 

  2755. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2756. 

  2756. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2757. 

  2757. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2758. 

  2758. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2759. 

  2759. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2760. 

  2760. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2761. 

  2761. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2762. 

  2762. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2763. 

  2763. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2764. 

  2764. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2765. 

  2765. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2766. 

  2766. 		</configs>
    2767. 

  2767. 

  2768. 		<configs name="ValveHeater" nameView="Valve Heater" >
    2769. 

  2769. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2770. 

  2770. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2771. 

  2771. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2772. 

  2772. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2773. 

  2773. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2774. 

  2774. 

  2775. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2776. 

  2776. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2777. 

  2777. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2778. 

  2778. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2779. 

  2779. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2780. 

  2780. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2781. 

  2781. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2782. 

  2782. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2783. 

  2783. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2784. 

  2784. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2785. 

  2785. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2786. 

  2786. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2787. 

  2787. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2788. 

  2788. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2789. 

  2789. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2790. 

  2790. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2791. 

  2791. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2792. 

  2792. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2793. 

  2793. 		</configs>
    2794. 

  2794. 		<configs name="PendulumHeater" nameView="Heater Pendulum" >
    2795. 

  2795. 			<config default="false" name="HeaterEnableTolerance" nameView="Enable Heater Deviation Check" description="" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2796. 

  2796. 			<config default="200" name="HeaterAlarmRange" nameView="Heater deviation Alarm Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2797. 

  2797. 			<config default="10" name="HeaterAlarmTime" nameView="Heater deviation Alarm Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2798. 

  2798. 			<config default="100" name="HeaterWarningRange" nameView="Heater deviation Warning Range" description="" max="200" min="0" paramter="" tag="" unit="℃" type="Integer" />
    2799. 

  2799. 			<config default="10" name="HeaterWarningTime" nameView="Heater deviation Warning Time" description="" max="3600" min="0" paramter="" tag="" unit="second" type="Integer" />
    2800. 

  2800. 

  2801. 			<config name="TempOffsetPoint_1" nameView="Temp Offset Point 1" description="温度补偿点 1" unit="degree" type="Integer" max="300" min="0" />
    2802. 

  2802. 			<config name="OffsetValue_1" nameView="Offset Value 1" description="补偿值 1" unit="degree" type="Double" max="300" min="0" />
    2803. 

  2803. 			<config name="TempOffsetPoint_2" nameView="Temp Offset Point 2" description="温度补偿点 2" unit="degree" type="Integer" max="300" min="0" />
    2804. 

  2804. 			<config name="OffsetValue_2" nameView="Offset Value 2" description="补偿值 2" unit="degree" type="Double" max="300" min="0" />
    2805. 

  2805. 			<config name="TempOffsetPoint_3" nameView="Temp Offset Point 3" description="温度补偿点 3" unit="degree" type="Integer" max="300" min="0" />
    2806. 

  2806. 			<config name="OffsetValue_3" nameView="Offset Value 3" description="补偿值 3" unit="degree" type="Double" max="300" min="0" />
    2807. 

  2807. 			<config name="TempOffsetPoint_4" nameView="Temp Offset Point 4" description="温度补偿点 4" unit="degree" type="Integer" max="300" min="0" />
    2808. 

  2808. 			<config name="OffsetValue_4" nameView="Offset Value 4" description="补偿值 4" unit="degree" type="Double" max="300" min="0" />
    2809. 

  2809. 			<config name="TempOffsetPoint_5" nameView="Temp Offset Point 5" description="温度补偿点 5" unit="degree" type="Integer" max="300" min="0" />
    2810. 

  2810. 			<config name="OffsetValue_5" nameView="Offset Value 5" description="补偿值 5" unit="degree" type="Double" max="300" min="0" />
    2811. 

  2811. 			<config name="TempOffsetPoint_6" nameView="Temp Offset Point 6" description="温度补偿点 6" unit="degree" type="Integer" max="300" min="0" />
    2812. 

  2812. 			<config name="OffsetValue_6" nameView="Offset Value 6" description="补偿值 6" unit="degree" type="Double" max="300" min="0" />
    2813. 

  2813. 			<config name="TempOffsetPoint_7" nameView="Temp Offset Point 7" description="温度补偿点 7" unit="degree" type="Integer" max="300" min="0" />
    2814. 

  2814. 			<config name="OffsetValue_7" nameView="Offset Value 7" description="补偿值 7" unit="degree" type="Double" max="300" min="0" />
    2815. 

  2815. 			<config name="TempOffsetPoint_8" nameView="Temp Offset Point 8" description="温度补偿点 8" unit="degree" type="Integer" max="300" min="0" />
    2816. 

  2816. 			<config name="OffsetValue_8" nameView="Offset Value 8" description="补偿值 8" unit="degree" type="Double" max="300" min="0" />
    2817. 

  2817. 			<config name="TempOffsetPoint_9" nameView="Temp Offset Point 9" description="温度补偿点 9" unit="degree" type="Integer" max="300" min="0" />
    2818. 

  2818. 			<config name="OffsetValue_9" nameView="Offset Value 9" description="补偿值 9" unit="degree" type="Double" max="300" min="0" />
    2819. 

  2819. 		</configs>
    2820. 

  2820. 

  2821. 		<configs name="ElectrostaticVoltageSource" nameView="Electrostatic Voltage Source">
    2822. 

  2822. 			<config default="COM56" name="Port" nameView="Port" description="serial port name of ElectrostaticVoltageSource" max="" min="" paramter="" tag="" unit="" type="String" />
    2823. 

  2823. 		</configs>
    2824. 

  2824. 		<configs name="TurboPump" nameView="Turbo Pump">
    2825. 

  2825. 			<config default="COM5" name="Port" nameView="Port" description="serial port name of TurboPump" max="" min="" paramter="" tag="" unit="" type="String" />
    2826. 

  2826. 			<config default="500" name="ChamberForelinePressureThreshold" nameView="Chamber Foreline Pressure Threshold" description="" max="10000" min="0" paramter="" tag="" unit="mtorr" type="Double" />
    2827. 

  2827. 			<config default="30" name="ChamberForelinePressureTimeout" nameView="Chamber Foreline Pressure Timeout" description="" max="3000" min="0" paramter="" tag="" unit="s" type="Integer" />
    2828. 

  2828. 		</configs>
    2829. 

  2829. 		<configs name="PendulumValve" nameView="Pendulum Valve">
    2830. 

  2830. 			<config default="COM80" name="Port" nameView="Port" description="serial port name of PendulumValve" max="" min="" paramter="" tag="" unit="" type="String" />
    2831. 

  2831. 			<config default="400" name="PressureFullRange" nameView="PressureFullRange" description="Pressure Full Range of PendulumValve" max="100000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2832. 

  2832. 			<config default="750"  name="ForelinePressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2833. 

  2833. 			<config default="600"  name="ChamberPressureLimit" nameView="ForelinePressureLimit" description="" max="3000" min="0" paramter="" tag="" unit="mtorr" type="Integer" />
    2834. 

  2834. 			<config default="100"  name="TurboPumpSpeedLimit"  nameView="Turbo PumpSpeed Limit" description="" max="3000" min="0" paramter="" tag="" unit="" type="Integer" />
    2835. 

  2835. 		</configs>
    2836. 

  2836. 

  2837. 		<!--Clean-->
    2838. 

  2838. 		<configs name="IdleClean" nameView="Idle Clean" visible="false">
    2839. 

  2839. 			<config default="0" name="Option" nameView="Idle Clean Option" description="0, disable; 1, By Idle Time; 2, By Wafer Count" max="2" min="0" paramter="" tag="" unit="" type="Integer" />
    2840. 

  2840. 			<config default="" name="IdleCleanRecipe" nameView="Idle Clean Recipe" description="Idle Clean recipe name" max="" min="" paramter="" tag="" unit="" type="String" />
    2841. 

  2841. 			<config default="10" name="IdleCleanTime" nameView="Idle Clean Time(Hours)" description="Chamber Idle Time(hours) which trigger Idle Clean" max="720" min="1" paramter="" tag="" unit="h" type="Integer" />
    2842. 

  2842. 			<config default="100" name="IdleCleanWaferCount" nameView="Idle Clean Wafer Count" description="Wafer Count which trigger Idle Clean" max="100000" min="1" paramter="" tag="" unit="pcs" type="Integer" />
    2843. 

  2843. 			<config default="0" name="WaferCountSinceLastClean" nameView="Wafer Count Since Last Clean" description="Wafer Count Since Last Runing Clean" max="100000" min="0" paramter="" tag="" unit="pcs" type="Integer" />
    2844. 

  2844. 			<config default="" name="LastRunTime" nameView="The Time Chamber Last Run Wafer" description="The Time Chamber Last Run Wafer" max="" min="" paramter="" tag="" unit="" type="String" />
    2845. 

  2845. 		</configs>
    2846. 

  2846. 

  2847. 		<configs name="EPD" nameView="EPD Setting">
    2848. 

  2848. 			<config default="true" name="IsEnabled" nameView="Is Enabled" description="IsEnabled" max="0" min="0" paramter="" tag="" unit="" type="Bool" />
    2849. 

  2849. 			<config default="0" name="ChannelNumber" nameView="EPD Channel Number"  description="channel number" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    2850. 

  2850. 			<config default="127.0.0.1:1102" name="IPAddress" nameView="IP Address" description="EPD IP、端口设置;default 10.0.0.100:13000" max="" min="" paramter="" tag="" unit="" type="String" />
    2851. 

  2851. 			<config default="0" name="EPDType" nameView="EPD Type" description="EPD type, 0) by socket, 1) by WCF" max="32" min="0" paramter="" tag="" unit="" type="Integer" />
    2852. 

  2852. 		</configs>
    2853. 

  2853. 		<configs name="HighTemperatureHeater" nameView="HighTemperatureHeater" >
    2854. 

  2854. 			<config default="60" name="LiftServoPosition1"    nameView="Lift Servo Position1"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2855. 

  2855. 			<config default="60" name="LiftServoPosition2"    nameView="Lift Servo Position2"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2856. 

  2856. 			<config default="60" name="LiftServoPosition3"    nameView="Lift Servo Position3"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2857. 

  2857. 			<config default="60" name="LiftServoPosition4"    nameView="Lift Servo Position4"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2858. 

  2858. 			<config default="60" name="LiftServoPosition5"    nameView="Lift Servo Position5"     description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2859. 

  2859. 			<config default="60" name="OriginSearchHighSpeed" nameView="Origin Search High Speed" description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2860. 

  2860. 			<config default="60" name="OriginSearchLowSpeed"  nameView="Origin Search Low Speed"  description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2861. 

  2861. 			<config default="60" name="AbsMoveSpeed"          nameView="Abs Move Speed"           description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2862. 

  2862. 			<config default="60" name="MaximusMoveSpeed"      nameView="Maximus Move Speed"       description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2863. 

  2863. 			<config default="60" name="SoftDownLimit"         nameView="Soft Down Limit"          description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2864. 

  2864. 			<config default="60" name="SoftUpLimit"           nameView="Soft Up Limit"            description="Lift Servo Position1" max="600" min="-600" paramter="" tag="" unit="mm" type="Double" />
    2865. 

  2865. 

  2866. 		</configs>
    2867. 

  2867. 	</configs>
    2868. 

  2868. </root>
    2869.