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AdLinkEthercat
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ee26035034
1.添加Ethercat 励兆 Match DeviceData
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1 年之前 |
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EFEM
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0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
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11 月之前 |
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EPD
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c3ef1d5a6e
Wafer loadlock delay function.
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1 年之前 |
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EPDs
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4ffafb6001
EFEM界面优化
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1 年之前 |
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IODevices
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 月之前 |
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PreAligner
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cc04adb731
change the location of the PA from VPA to Aligner1
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11 月之前 |
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SMIF
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8436daeb68
Eliminate SE generation warning.
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1 年之前 |
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TM
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 月之前 |
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VCE
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7bf784cc5a
New routing algorithm for Venus SE/DE system.
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11 月之前 |
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AIRSYSChiller.cs
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6bbe2e529b
1.删除或注释 Venus ChamberType
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1 年之前 |
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AdTecRF.cs
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996eacc709
VenusDE recipe tolerance enhance
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11 月之前 |
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AdixenTurboPump.cs
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01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
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1 年之前 |
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CometRF.cs
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9a410e084a
fix exception:
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1 年之前 |
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DataDefine.cs
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12fa756895
1. SETM will be Init while While SETM Abort Homing
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1 年之前 |
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DeviceManager.cs
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9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
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11 月之前 |
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ESC5HighVoltage.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 月之前 |
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EdwardsPump.cs
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75dbbd4da8
添加KeplerSignaltower功能
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1 年之前 |
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FinsPlc.cs
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c457973fa2
1.添加Revtech Match
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1 年之前 |
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JetEPDBase.cs
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4ffafb6001
EFEM界面优化
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1 年之前 |
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JetEfem.cs
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5fc13b3f0c
New Efem design
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1 年之前 |
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JetKepler2200APM.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 月之前 |
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JetKepler2200BPM.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 月之前 |
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JetKepler2300PM.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 月之前 |
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JetPMBase.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 月之前 |
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JetVenusDEPM.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 月之前 |
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JetVenusSEPM.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 月之前 |
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JetVenusSEPMBase.cs
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56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
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1 年之前 |
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KeplerSignalTower.cs
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7a1faeac74
Redesign the EFEM module for thread safe issue.
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1 年之前 |
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LzMatch_Ethercat.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 年之前 |
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PendulumValve.cs
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608cf43d67
1.做工艺前pump down 根据底压确定是否执行
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11 月之前 |
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PlasmaController.cs
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75710d35d8
RF Match.
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2 年之前 |
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RevtechMatch.cs
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ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
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11 月之前 |
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SMCChiller.cs
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41c5b8a615
Remove the toleranceChecker in SMCChiler && SMCShareChiller
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1 年之前 |
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SMCChillerDrive.cs
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a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
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1 年之前 |
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SMCShareChiller.cs
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a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
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1 年之前 |
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SkyPump.cs
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4109b056f2
Fix exception caused by skypump recivemessage length && socket don't connect
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1 年之前 |
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TruPlasmaRF.cs
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c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
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11 月之前 |
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TruPlasmaRF_Ethercat.cs
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7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
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1 年之前 |
hecl
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs