| .. |
|
AdLinkEthercat
|
ee26035034
1.添加Ethercat 励兆 Match DeviceData
|
1 年間 前 |
|
EFEM
|
0bea20360b
add LeakCheckRoutine in DE,VCE && add online for TM,VCE && fix bug in PM-PartialPressure && add LP in VCE && add sensor in VCE from TM
|
11 ヶ月 前 |
|
EPD
|
c3ef1d5a6e
Wafer loadlock delay function.
|
1 年間 前 |
|
EPDs
|
4ffafb6001
EFEM界面优化
|
1 年間 前 |
|
IODevices
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 ヶ月 前 |
|
PreAligner
|
cc04adb731
change the location of the PA from VPA to Aligner1
|
11 ヶ月 前 |
|
SMIF
|
8436daeb68
Eliminate SE generation warning.
|
1 年間 前 |
|
TM
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 ヶ月 前 |
|
VCE
|
7bf784cc5a
New routing algorithm for Venus SE/DE system.
|
11 ヶ月 前 |
|
AIRSYSChiller.cs
|
6bbe2e529b
1.删除或注释 Venus ChamberType
|
1 年間 前 |
|
AdTecRF.cs
|
996eacc709
VenusDE recipe tolerance enhance
|
11 ヶ月 前 |
|
AdixenTurboPump.cs
|
01dafac8f1
1.Kepler2200 添加Home 设备断开重连功能
|
1 年間 前 |
|
CometRF.cs
|
9a410e084a
fix exception:
|
1 年間 前 |
|
DataDefine.cs
|
12fa756895
1. SETM will be Init while While SETM Abort Homing
|
1 年間 前 |
|
DeviceManager.cs
|
9b93f58d68
Add Venus DE OperationView && add the compatibility of the TM&VCE between SETM&DETM
|
11 ヶ月 前 |
|
ESC5HighVoltage.cs
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 ヶ月 前 |
|
EdwardsPump.cs
|
75dbbd4da8
添加KeplerSignaltower功能
|
1 年間 前 |
|
FinsPlc.cs
|
c457973fa2
1.添加Revtech Match
|
1 年間 前 |
|
JetEPDBase.cs
|
4ffafb6001
EFEM界面优化
|
1 年間 前 |
|
JetEfem.cs
|
5fc13b3f0c
New Efem design
|
1 年間 前 |
|
JetKepler2200APM.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 ヶ月 前 |
|
JetKepler2200BPM.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 ヶ月 前 |
|
JetKepler2300PM.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 ヶ月 前 |
|
JetPMBase.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 ヶ月 前 |
|
JetVenusDEPM.cs
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 ヶ月 前 |
|
JetVenusSEPM.cs
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 ヶ月 前 |
|
JetVenusSEPMBase.cs
|
56f7c900fe
add VenusSEPM class and IODefine && Set the pressure value in the simulation to always be no less than 0
|
1 年間 前 |
|
KeplerSignalTower.cs
|
7a1faeac74
Redesign the EFEM module for thread safe issue.
|
1 年間 前 |
|
LzMatch_Ethercat.cs
|
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
|
1 年間 前 |
|
PendulumValve.cs
|
608cf43d67
1.做工艺前pump down 根据底压确定是否执行
|
11 ヶ月 前 |
|
PlasmaController.cs
|
75710d35d8
RF Match.
|
2 年 前 |
|
RevtechMatch.cs
|
ecd991d2f4
1.修复kepler 气缸开关信号只读on或者off bug
|
11 ヶ月 前 |
|
SMCChiller.cs
|
41c5b8a615
Remove the toleranceChecker in SMCChiler && SMCShareChiller
|
1 年間 前 |
|
SMCChillerDrive.cs
|
a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
|
1 年間 前 |
|
SMCShareChiller.cs
|
a0f20d03ac
add ChillerCheck and Interval to 1s && SE DE Chamber can operate TurboPump freely && fix the bug in GasLeakCheck && close PVN22 after PMPumpDown
|
1 年間 前 |
|
SkyPump.cs
|
4109b056f2
Fix exception caused by skypump recivemessage length && socket don't connect
|
1 年間 前 |
|
TruPlasmaRF.cs
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 ヶ月 前 |
|
TruPlasmaRF_Ethercat.cs
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 年間 前 |
hecl
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs