zhouhr b0e5581d4e delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype 1 jaar geleden
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EFEM 7862a9be38 solve the sync problem while set signal tower light. 1 jaar geleden
LLs 6d393bb86d new routing algorithm with prediction. 1 jaar geleden
LPs 8bb5f3f4f9 fixed loadport event notify; 1 jaar geleden
PMs b0e5581d4e delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype 1 jaar geleden
SMIF 49815fb19f add VCE Module in UI && fix bug in SE Cycle 1 jaar geleden
Schedulers c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function 1 jaar geleden
TM 8f537a79cb Pause/Resume function and enhance duplicated function while transfer wafer timeout. 1 jaar geleden
VCE c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function 1 jaar geleden
AutoCycle.cs 2f30fa17c4 1、修复了Wafer_Left_Position上报数据; 1 jaar geleden
Autotransfer_LP_FA.cs 774c804aa9 fixed pm event occurs carrierid is null 1 jaar geleden
DVIDName.cs 44fc6989ef 1、Remove FabConnect dll file; 1 jaar geleden
EntityErrorRaiseTrigger.cs d35b997884 1.优化RevtechMatch状态机 1 jaar geleden
EntityTaskBase.cs 5b037046f9 Add TM/LL modules. 2 jaren geleden
ManualTransfer.cs 1b2d4bb89d fix the manual move wafer bug while single arm option bigger than 2. 1 jaar geleden
ResourceMonitor.cs 8436daeb68 Eliminate SE generation warning. 1 jaar geleden
RouteManager.cs c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function 1 jaar geleden
SEManualTransfer.cs c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function 1 jaar geleden
SETMCycle.cs b3a13fc6c7 1.IoMagnet device Logical supplement 1 jaar geleden
SystemDispatcher.cs 1b2d4bb89d fix the manual move wafer bug while single arm option bigger than 2. 1 jaar geleden
TMCycle.cs 68b4ba9640 1.添加mtorr与Pa切换功能 1 jaar geleden