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EFEMAlignRoutine.cs
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c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
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1 year ago |
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EfemEntity.cs
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7862a9be38
solve the sync problem while set signal tower light.
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1 year ago |
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EfemHomeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 year ago |
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EfemPickRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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1 year ago |
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EfemPlaceRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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1 year ago |
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EfemSwapRoutine.cs
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8f537a79cb
Pause/Resume function and enhance duplicated function while transfer wafer timeout.
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1 year ago |
sangwq
7862a9be38
solve the sync problem while set signal tower light.