.. |
EventDefine.cs
|
a5245356d0
source files
|
%!s(int64=2) %!d(string=hai) anos |
Fdc.cs
|
17ae6db63c
kepler2200/Kepler2300 添加FDC 功能
|
hai 1 ano |
GasBoxLeakCheckRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
hai 1 ano |
GasFlowRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
hai 1 ano |
LLPickRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
hai 1 ano |
LLPlaceRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
hai 1 ano |
LoadLockLeakCheckRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
hai 1 ano |
LoadLockPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
hai 1 ano |
LoadLockPurgeRoutine.cs
|
bdcf0556c9
1.将kepler2200与其它项目配置文件分开
|
hai 1 ano |
LoadLockVentRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
hai 1 ano |
PMEntity.cs
|
4634f3f91a
1。设置log最大500M,超出分文件(解决文件太大,log打不开)
|
hai 1 ano |
PMGasVerificationRoutine.cs
|
d4d56a3cf3
1.添加Recipe内部外部名称,chamberTYpe 比对
|
hai 1 ano |
PMGaslinePurgeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
hai 1 ano |
PMHeatRoutine.cs
|
c8af7de363
将kepler与Venus UI配置分开,添加Heat Routine
|
hai 1 ano |
PMHomeRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
hai 1 ano |
PMLeakCheckRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
hai 1 ano |
PMPartialPressureRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
hai 1 ano |
PMProcessRoutine.cs
|
a98efc8a0b
1.修改kepler2300 FDC 运行报错bug
|
hai 1 ano |
PMProcess_FA.cs
|
774c804aa9
fixed pm event occurs carrierid is null
|
hai 1 ano |
PMPurgeRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
hai 1 ano |
PMRoutineBase.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
hai 1 ano |
PMVATPerformanceRoutine.cs
|
945ce3c74c
1.Venus SE DE Add PressureControl
|
hai 1 ano |
Process.cs
|
3cad102221
更新 RT
|
%!s(int64=2) %!d(string=hai) anos |
ProcessDefine.cs
|
fedcc95273
1.Venus DE process enhance
|
hai 1 ano |
PumpDownRoutine.cs
|
b0e5581d4e
delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype
|
hai 1 ano |
RFPowerSwitchRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
hai 1 ano |
StartDryPumpRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
hai 1 ano |
StartTurboPumpRoutine.cs
|
9de8ce9b11
Venus SE UI &&Venus DE pump,purge,start turbo routine update
|
hai 1 ano |
VentRoutine.cs
|
c332b95d39
venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function
|
hai 1 ano |
VenusRecipeFileContext.cs
|
7d93bf0076
Job Clean function, not finished.
|
hai 1 ano |
VenusSequenceFileContext.cs
|
a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
|
hai 1 ano |
VirgoRecipeFileContext.cs
|
896c7407de
优化log功能
|
%!s(int64=2) %!d(string=hai) anos |
VirgoSequenceFileContext.cs
|
896c7407de
优化log功能
|
%!s(int64=2) %!d(string=hai) anos |