lixiang a98efc8a0b 1.修改kepler2300 FDC 运行报错bug hai 1 ano
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EventDefine.cs a5245356d0 source files %!s(int64=2) %!d(string=hai) anos
Fdc.cs 17ae6db63c kepler2200/Kepler2300 添加FDC 功能 hai 1 ano
GasBoxLeakCheckRoutine.cs 945ce3c74c 1.Venus SE DE Add PressureControl hai 1 ano
GasFlowRoutine.cs c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function hai 1 ano
LLPickRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
LLPlaceRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
LoadLockLeakCheckRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
LoadLockPumpRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
LoadLockPurgeRoutine.cs bdcf0556c9 1.将kepler2200与其它项目配置文件分开 hai 1 ano
LoadLockVentRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
PMEntity.cs 4634f3f91a 1。设置log最大500M,超出分文件(解决文件太大,log打不开) hai 1 ano
PMGasVerificationRoutine.cs d4d56a3cf3 1.添加Recipe内部外部名称,chamberTYpe 比对 hai 1 ano
PMGaslinePurgeRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
PMHeatRoutine.cs c8af7de363 将kepler与Venus UI配置分开,添加Heat Routine hai 1 ano
PMHomeRoutine.cs c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function hai 1 ano
PMLeakCheckRoutine.cs 9de8ce9b11 Venus SE UI &&Venus DE pump,purge,start turbo routine update hai 1 ano
PMPartialPressureRoutine.cs 945ce3c74c 1.Venus SE DE Add PressureControl hai 1 ano
PMProcessRoutine.cs a98efc8a0b 1.修改kepler2300 FDC 运行报错bug hai 1 ano
PMProcess_FA.cs 774c804aa9 fixed pm event occurs carrierid is null hai 1 ano
PMPurgeRoutine.cs 9de8ce9b11 Venus SE UI &&Venus DE pump,purge,start turbo routine update hai 1 ano
PMRoutineBase.cs 945ce3c74c 1.Venus SE DE Add PressureControl hai 1 ano
PMVATPerformanceRoutine.cs 945ce3c74c 1.Venus SE DE Add PressureControl hai 1 ano
Process.cs 3cad102221 更新 RT %!s(int64=2) %!d(string=hai) anos
ProcessDefine.cs fedcc95273 1.Venus DE process enhance hai 1 ano
PumpDownRoutine.cs b0e5581d4e delete some item in SE Config && add WallChiller in DE && add ConfigItem for pump check ForelinePressure in every chambertype hai 1 ano
RFPowerSwitchRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
StartDryPumpRoutine.cs 03063bae6a Enhance the routine framework. hai 1 ano
StartTurboPumpRoutine.cs 9de8ce9b11 Venus SE UI &&Venus DE pump,purge,start turbo routine update hai 1 ano
VentRoutine.cs c332b95d39 venus se checkload, recipe save as function bugs fix, ui bugs fix, transfer auto open vce door ,abort job function hai 1 ano
VenusRecipeFileContext.cs 7d93bf0076 Job Clean function, not finished. hai 1 ano
VenusSequenceFileContext.cs a5542b5c2c add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule hai 1 ano
VirgoRecipeFileContext.cs 896c7407de 优化log功能 %!s(int64=2) %!d(string=hai) anos
VirgoSequenceFileContext.cs 896c7407de 优化log功能 %!s(int64=2) %!d(string=hai) anos