| .. |
|
EFEM
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
1 vuosi sitten |
|
LLs
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 vuosi sitten |
|
LPs
|
8bb5f3f4f9
fixed loadport event notify;
|
1 vuosi sitten |
|
PMs
|
2cbab729fb
添加小标题 home/online/offineInclude/Exclude功能
|
1 vuosi sitten |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 vuosi sitten |
|
Schedulers
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
1 vuosi sitten |
|
TM
|
d331213da1
1.SETM Pressure Control update
|
1 vuosi sitten |
|
VCE
|
d0f35564a3
1.Venus SE VCE&TM change to Single signal mode(NO VAC signal)
|
1 vuosi sitten |
|
AutoCycle.cs
|
7ff42d4eca
1.添加 Process 切换step Match/BiasMatch设置值 offset功能，c1/c2小于offset不设置
|
1 vuosi sitten |
|
Autotransfer_LP_FA.cs
|
8bb5f3f4f9
fixed loadport event notify;
|
1 vuosi sitten |
|
DVIDName.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 vuosi sitten |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 vuotta sitten |
|
ManualTransfer.cs
|
501997ac38
TM/EFEM robot single arm option.
|
1 vuosi sitten |
|
ResourceMonitor.cs
|
8436daeb68
Eliminate SE generation warning.
|
1 vuosi sitten |
|
RouteManager.cs
|
12eb71a75f
Redesign the Clean recipe algorithm and fix the throughput calculation bug.
|
1 vuosi sitten |
|
SEManualTransfer.cs
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 vuosi sitten |
|
SETMCycle.cs
|
136a0d3727
Add VCE OpenDoor while Dash Wafer Error && fix bug in SE Cycle && Add PickOffset while Pick From PA && Add Check ATM by Pressure && Add PM ChamberPressure from PendulumValve.
|
1 vuosi sitten |
|
TMCycle.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 vuosi sitten |
lixiang
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug