| .. |
|
EFEMAlignRoutine.cs
|
c5ba2fb197
Transfer align angel from sequence to system configure and enable angle increasement by wafer.
|
1 vuosi sitten |
|
EfemEntity.cs
|
b71003a42d
Fix the increasing aligner angle out of range bug.
|
1 vuosi sitten |
|
EfemHomeRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 vuosi sitten |
|
EfemPickRoutine.cs
|
03063bae6a
Enhance the routine framework.
|
1 vuosi sitten |
|
EfemPlaceRoutine.cs
|
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug
|
1 vuosi sitten |
|
EfemSwapRoutine.cs
|
e61f018b66
Manual Return wafer while running cycle.
|
1 vuosi sitten |
lixiang
96661cadab
修复efem place ，tm同时有lp1与lp2 wafer时return wafer报错bug