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- using Aitex.Core.Common;
- using Aitex.Core.RT.DataCenter;
- using Aitex.Core.RT.Fsm;
- using Aitex.Core.RT.Log;
- using Aitex.Core.RT.RecipeCenter;
- using Aitex.Core.RT.Routine;
- using Aitex.Core.RT.SCCore;
- using Aitex.Core.Util;
- using Aitex.Sorter.Common;
- using MECF.Framework.Common.Equipment;
- using MECF.Framework.Common.Jobs;
- using MECF.Framework.Common.Schedulers;
- using MECF.Framework.Common.SubstrateTrackings;
- using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Robot;
- using System;
- using System.Collections.Generic;
- using System.Diagnostics;
- using System.Linq;
- using System.Text;
- using System.Threading.Tasks;
- using Venus_Core;
- using Venus_RT.Modules.Schedulers;
- using Venus_RT.Scheduler;
- using static Aitex.Core.Util.SubscriptionAttribute;
- namespace Venus_RT.Modules
- {
- public class SETMCycle : ModuleRoutineBase, IRoutine
- {
- enum TMCycleStep
- {
- Start,
- ReturnBack,
- Cycling,
- End,
- }
- private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
- private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();
- private Dictionary<ModuleName, SchedulerModule> dictSchedulers = new Dictionary<ModuleName, SchedulerModule>();
- private List<ModuleName> tmCycleRoutine = new List<ModuleName>()
- {
- ModuleName.VCE1,
- ModuleName.PMA,
- ModuleName.PMB,
- ModuleName.PMC,
- ModuleName.VCE1
- };
- private int CycleNum = 0;
- private bool _isCycleMode;
- private ModuleName _sourceModule = ModuleName.VCE1;
- private ModuleName _destinationModule = ModuleName.VCE1;
- private int _sourceSlotNumber = 25;
- //private int _destinationSlotNumber = 25;
- private SchedulerSETMRobot _TMRobot = (SchedulerSETMRobot)Singleton<TransferModule>.Instance.GetScheduler(ModuleName.SETM);
- private SchedulerFACallback _faCallback;
- private SchedulerDBCallback _dbCallback;
- //private readonly int INVALID_SLOT = -1;
-
- private Queue<MoveItem> _runningItems = new Queue<MoveItem>();
- private Queue<MoveItem> _CycleWafers = new Queue<MoveItem>();
- private RState _cycleState = RState.Init;
- private Stopwatch _cycleWatch = new Stopwatch();
- private List<MoveItem> _moveQueue = new List<MoveItem>();
- private List<MovingStatus> movingStatus = new List<MovingStatus>();
- private double _throughput = 0;
- private DateTime _starttime;
- public int? CycleIndex;
- private int CycledWafer => _currentWafer + _pastWafer;
- private int _currentWafer;
- private int _pastWafer;
- private bool _IsFirstLot = true;
- private bool IsSequenceCycle = false; //判断是否跑货
- #region 构造函数
- public SETMCycle(ModuleName module) : base(module)
- {
- Name = "TM Cycle";
- void _initMoudle(ModuleName name, SchedulerModule sche)
- {
- if (ModuleHelper.IsInstalled(name))
- {
- dictSchedulers[name] = sche;
- }
- }
- _initMoudle(ModuleName.VCE1, new SchedulerVCE(ModuleName.VCE1));
- _initMoudle(ModuleName.PMA, new SchedulerPM(ModuleName.PMA));
- _initMoudle(ModuleName.PMB, new SchedulerPM(ModuleName.PMB));
- _initMoudle(ModuleName.PMC, new SchedulerPM(ModuleName.PMC));
- _initMoudle(ModuleName.PMD, new SchedulerPM(ModuleName.PMD));
- _faCallback = new SchedulerFACallback();
- _dbCallback = new SchedulerDBCallback();
- _currentWafer = 0;
- _pastWafer = 0;
- DATA.Subscribe("SEScheduler.CycledWafer", ()=> CycledWafer );
- DATA.Subscribe("SEScheduler.CycleSetPoint", ()=> CycleNum);
- DATA.Subscribe("SEScheduler.CycleCount", ()=> CycleIndex);
- DATA.Subscribe("SEScheduler.ThroughPut", ()=> _throughput);
- DATA.Subscribe("Scheduler.CurrentRecipeList", ()=> _lstProcessJobs);
- }
- #endregion
- #region Cycle
- //run货模式
- public RState StartJob(string jobName)
- {
- if (_TMRobot.IsVCESlitDoorClosed)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"VCE SlitDoor is Close cannot run!");
- return RState.Failed;
- }
- if (RouteManager.IsATMMode)
- {
- if (!Singleton<RouteManager>.Instance.seTM.TMIsATM)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"TM is not atm, Please vent it first!");
- return RState.Failed;
- }
- if (!Singleton<RouteManager>.Instance.seTM.VCEIsATM)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"VCE is not atm, Please vent it first!");
- return RState.Failed;
- }
- }
- //sequenceCycle
- CycleIndex = 0;
- _pastWafer = 0;
- _currentWafer = 0;
- CycleNum = SC.GetValue<int>("System.CycleCount");
- _CycleWafers.Clear();
- IsSequenceCycle = true;
- ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
- if (cj == null)
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"start job rejected, not found job with id {jobName}");
- return RState.Failed;
- }
- if (cj.State == EnumControlJobState.WaitingForStart)
- {
- cj.SetState(EnumControlJobState.Executing);
- //PreJobClean(cj);
- cj.JetState = EnumJetCtrlJobState.Quequed;
- cj.StartTime = DateTime.Now;
- if (_IsFirstLot)
- {
- _dbCallback.LotCreated(cj);
- _IsFirstLot = false;
- }
- _faCallback.JobStarted(cj, GetFirstProcessJob(cj));
- int maxslot = 0;
- cj.LotWafers.ForEach(x => maxslot = x.OriginSlot > maxslot ? x.OriginSlot : maxslot);
- //waiting status means no use
- movingStatus = new List<MovingStatus>();
- movingStatus.AddRange(new MovingStatus[maxslot + 1]);
- for (int i = 0; i < movingStatus.Count; i++)
- movingStatus[i] = MovingStatus.Waiting;
- foreach (var wafer in cj.LotWafers)
- {
- WaferInfo currentWafer = WaferManager.Instance.GetWafer((ModuleName)wafer.OriginStation, wafer.OriginSlot);
- WaferManager.Instance.UpdateWaferProcessStatus((ModuleName)wafer.OriginStation, wafer.OriginSlot, EnumWaferProcessStatus.Idle);
- currentWafer.ProcessJob = _lstProcessJobs.Find(x => x.Sequence.Name == wafer.SequenceName);
- if (currentWafer.ProcessJob.Sequence.Steps[0].StepParameter.ContainsValue("VPA"))
- movingStatus[wafer.OriginSlot] = MovingStatus.WaitAlign;
- else
- movingStatus[wafer.OriginSlot] = MovingStatus.WaitProcess;
- }
- }
- if (!_cycleWatch.IsRunning)
- {
- _cycleWatch.Restart();
- }
- _starttime = DateTime.Now;
- _cycleState = RState.Running;
- return _cycleState;
- }
- //processJob(sequence num) ControlJob(1)
- public void CreateJob(Dictionary<string, object> param)
- {
- _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
- CycleNum = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
- string[] slotSequence = (string[])param["SlotSequence"];
- string jobId = (string)param["JobId"];
- string module = (string)param["Module"];
- string lotId = jobId;
- if (param.ContainsKey("LotId"))
- lotId = (string)param["LotId"];
- if (!ModuleHelper.IsVCE(ModuleHelper.Converter(module)))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{module} should be VCE");
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return;
- }
- if (string.IsNullOrEmpty(jobId))
- {
- jobId = "CJ_Local_" + module;
- }
- if (_lstControlJobs.Exists(x => x.Name == jobId))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"{jobId} already created");
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return;
- }
- ControlJobInfo cj = new ControlJobInfo();
- cj.Name = jobId;
- cj.Module = module;
- cj.LotName = lotId;
- cj.LotInnerId = Guid.NewGuid();
- cj.LotWafers = new List<WaferInfo>();
- cj.SetState(EnumControlJobState.WaitingForStart);
- cj.JetState = EnumJetCtrlJobState.Created;
- Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
- Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
- Dictionary<string, string> indexSequence = new Dictionary<string, string>();
- bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
- for (int i = 0; i < SC.GetValue<int>("VCE1.SlotNumber"); i++)
- {
- if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
- continue;
- string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
- indexSequence[groupName] = slotSequence[i];
- if (!seqSlot.ContainsKey(groupName))
- {
- seqSlot[groupName] = new bool[SC.GetValue<int>("VCE1.SlotNumber")];
- }
- if (!seqSlotWafers.ContainsKey(groupName))
- {
- seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
- }
- seqSlot[groupName][i] = true;
- if (!WaferManager.Instance.CheckHasWafer(module, i))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
- return;
- }
- if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}");
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return;
- }
- if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}");
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return;
- }
- cj.LotWafers.Add(WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i));
- WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).SequenceName = slotSequence[i];
- seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));
- cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;
- LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
- }
- if (seqSlotWafers.Count == 0)
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job has not assign wafer");
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return;
- }
- List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
- string[] seqs = seqSlot.Keys.ToArray();
- for (int i = 0; i < seqs.Length; i++)
- {
- ProcessJobInfo pj = new ProcessJobInfo();
- pj.Name = jobId + "_" + (i + 1);
- pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
- pj.ControlJobName = cj.Name;
- pj.LotName = lotId;
- pj.SlotWafers = seqSlotWafers[seqs[i]];
- pj.SetState(EnumProcessJobState.Queued);
- if (!CheckSequencePmReady(pj.Sequence, null, out _, out string reason))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return;
- }
- if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
- {
- LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
- _faCallback.JobCreateFailed(module, lotId, jobId, "");
- return;
- }
- pjs.Add(pj);
- }
- _dbCallback.LotUpdate(cj);
- foreach (var pj in pjs)
- {
- cj.ProcessJobNameList.Add(pj.Name);
- _lstProcessJobs.Add(pj);
- }
- _lstControlJobs.Add(cj);
- }
- public void AbortJob(string jobName)
- {
- }
- public RState Start(params object[] objs)
- {
- if (_TMRobot.IsVCESlitDoorClosed)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"VCE SlitDoor is Close cannot run!");
- return RState.Failed;
- }
- //普通Cycle
- if (objs.Length == 2)
- {
- var modules = ((string[])objs[0]).ToList();
- if (modules.Count >= 2)
- tmCycleRoutine.Clear();
- foreach (var mod in modules)
- {
- try
- {
- ModuleName module = ModuleHelper.Converter(mod);
- tmCycleRoutine.Add(module);
- }
- catch (Exception ex)
- {
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Invalid module string: {mod}, Exception:{ex}");
- return RState.Failed;
- }
- }
- CycleNum = (int)objs[1];
- CycleNum = SC.GetValue<int>("System.CycleCount");
- _CycleWafers.Clear();
- CycleIndex = 0;
- for (int i = 0; i < _sourceSlotNumber; i++)
- {
- if (WaferManager.Instance.CheckHasWafer(_sourceModule, i))
- _CycleWafers.Enqueue(new MoveItem(_sourceModule, i, _destinationModule, i, Hand.None));
- }
- IsSequenceCycle = false;
- _cycleState = RState.Running;
- }
- else if (objs.Length == 0)
- {
- IsSequenceCycle = true;
- _cycleState = RState.Running;
- }
- else
- {
- LOG.Write(eEvent.ERR_TM, Module, "Invalid parameter for cycle!");
- _cycleState = RState.Failed;
- }
- return _cycleState;
- }
- public RState Monitor()
- {
- if (_cycleState == RState.Running)
- {
- //run sequence
- if (IsSequenceCycle)
- {
- CheckCycleDone();
- SETMRobotTask();
- SERunTMRobotTask();
- SEPMTask();
- }
- //only TMCycle
- else
- {
- Cycling();
- //PMProcess();
- }
- }
- return _cycleState;
- }
- #endregion
- #region 推进|检查|计数
- private void CheckCycleDone()
- {
- //how to calculate current wafer? => _currentWafer
- //1. wafer in vce
- //2. wafer is Idle
- _currentWafer = 0;
- for (int index = 0; index < movingStatus.Count;++index)
- {
- if(WaferManager.Instance.CheckHasWafer(ModuleName.VCE1,index) && movingStatus[index] == MovingStatus.Idle)
- _currentWafer ++;
- }
- //throughput = CycledWafer/time, time(h)
- _throughput = Math.Round(CycledWafer / (DateTime.Now - _starttime).TotalSeconds * 3600,2);
- //how to confirm a sequence is over?
- //3、wafer is all in vce
- //2、all status is over => idle
- //1、TMRobot and PM is available
- if (_TMRobot.IsAvailable && AllPMIsAvailable() && ALLStatusIsOver() && WaferAllInVCE())
- {
- ++CycleIndex;
- if (CycleIndex >= CycleNum)
- {
- _lstControlJobs.Find(lcj => lcj.State == EnumControlJobState.Executing).SetState(EnumControlJobState.WaitingForStart);
- _cycleState = RState.End;
- }
- else
- {
- _pastWafer += _currentWafer;
- ControlJobInfo cj = _lstControlJobs.Find(lcj => lcj.State == EnumControlJobState.Executing);
- _currentWafer = 0;
-
- int maxslot = 0;
- cj.LotWafers.ForEach(x => maxslot = x.OriginSlot > maxslot ? x.OriginSlot : maxslot);
- //waiting status means no use
- movingStatus = new List<MovingStatus>();
- movingStatus.AddRange(new MovingStatus[maxslot + 1]);
- for (int i = 0; i < movingStatus.Count; i++)
- movingStatus[i] = MovingStatus.Waiting;
- foreach (var wafer in cj.LotWafers)
- {
- WaferInfo currentWafer = WaferManager.Instance.GetWafer((ModuleName)wafer.OriginStation, wafer.OriginSlot);
- WaferManager.Instance.UpdateWaferProcessStatus((ModuleName)wafer.OriginStation, wafer.OriginSlot, EnumWaferProcessStatus.Idle);
- currentWafer.ProcessJob = _lstProcessJobs.Find(x => x.Sequence.Name == wafer.SequenceName);
- if (currentWafer.ProcessJob.Sequence.Steps[0].StepParameter.ContainsValue("VPA"))
- movingStatus[wafer.OriginSlot] = MovingStatus.WaitAlign;
- else
- movingStatus[wafer.OriginSlot] = MovingStatus.WaitProcess;
- }
- }
-
- }
- }
- //movingStatus is all Idle or no use
- private bool ALLStatusIsOver()
- {
- bool flag = true;
- movingStatus.ForEach(x => flag = (x == MovingStatus.Idle || x == MovingStatus.Waiting) && flag) ;
- return flag;
- }
- private bool WaferAllInVCE()
- {
- ControlJobInfo cj = _lstControlJobs.Find(lcj => lcj.State == EnumControlJobState.Executing);
- bool flag = true;
- cj.LotWafers.ForEach(wafer => flag = WaferManager.Instance.CheckHasWafer((ModuleName)wafer.OriginStation, wafer.OriginSlot) && flag);
- return flag;
- }
- private bool AllPMIsAvailable()
- {
- foreach (KeyValuePair<ModuleName,SchedulerModule> pair in dictSchedulers)
- if (ModuleHelper.IsPm(pair.Key) && !pair.Value.IsAvailable)
- return false;
- return true;
- }
- private void SERunTMRobotTask()
- {
- if (_TMRobot.IsAvailable)
- {
- if (_moveQueue.Count > 0 &&_TMRobot.PostMoveItems(_moveQueue.ToArray()))
- {
- foreach (var item in _moveQueue)
- {
- var wafer = WaferManager.Instance.GetWafer(item.SourceModule, item.SourceSlot);
- if (wafer.IsEmpty)
- {
- // post alarm
- _cycleState = RState.Failed;
- LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Cannot run TM moving task as Get {item.SourceModule}{item.SourceModule} Wafer Info failed");
- return;
- }
- }
- _moveQueue.Clear();
- }
- }
- }
- private void SERunPMTask()
- {
-
- }
- private void SETMRobotTask()
- {
- //tm is free
- if (_TMRobot.IsAvailable)
- {
- CheckWaferFromVceNeedAlign();
- PrepareWaferOnRBToPM();
- GetBackWafer();
- GetNextWaferPickFromVCE();
- }
- }
- private void SEPMTask()
- {
- //foreach all pms and the wafer's receipe
- foreach (KeyValuePair<ModuleName,SchedulerModule> dict in dictSchedulers)
- {
- //pm has wafer && pm is available => find the wafer's receipe
- if (ModuleHelper.IsPm(dict.Key))
- {
- if (dict.Value.IsAvailable)
- {
- foreach (var ctrljob in _lstControlJobs)
- {
- //Port is run
- if (ctrljob.State == EnumControlJobState.Executing)
- {
- if (WaferManager.Instance.CheckHasWafer(dict.Key, 0))
- {
- WaferInfo currentWafer = WaferManager.Instance.GetWafer(dict.Key, 0);
- switch (movingStatus[currentWafer.OriginSlot])
- {
- case MovingStatus.WaitProcess:
- dict.Value.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, dict.Key, 0));
- movingStatus[currentWafer.OriginSlot] = MovingStatus.StartProcess;
- break;
- case MovingStatus.Processing:
- movingStatus[currentWafer.OriginSlot] = MovingStatus.Idle;
- break;
- case MovingStatus.StartProcess:
- movingStatus[currentWafer.OriginSlot] = MovingStatus.Processing;
- break;
- default:
- break;
- }
- }
-
- }
- }
- }
-
- }
- }
- }
- //get the wafer need back
- private void GetBackWafer()
- {
- //find
- foreach (KeyValuePair<ModuleName, SchedulerModule> dict in dictSchedulers)
- {
- //pm has wafer && pm is available => find the wafer's receipe
- if (ModuleHelper.IsPm(dict.Key) && WaferManager.Instance.CheckHasWafer(dict.Key, 0) && WaferManager.Instance.CheckNoWafer(ModuleName.VPA, 0))
- {
- WaferInfo currentWafer = WaferManager.Instance.GetWafer(dict.Key, 0);
- //if the wafer has been processed, we need to pickfrom it.
- if (dict.Value.IsAvailable && movingStatus[currentWafer.OriginSlot] == MovingStatus.Idle && _TMRobot.IsAvailable)
- {
- _moveQueue.Add(new MoveItem(dict.Key,0, (ModuleName)currentWafer.OriginStation, currentWafer.OriginSlot,0));
- //one hand has wafer
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0)
- && movingStatus[WaferManager.Instance.GetWafer(ModuleName.TMRobot, 0).OriginSlot] == MovingStatus.WaitProcess
- && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, 0);
- if (wafer.ProcessJob.Sequence.PMs.Contains(dict.Key))
- {
- _moveQueue.Add(new MoveItem(ModuleName.TMRobot,0,dict.Key,0,0));
- }
- }
- else if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1)
- && movingStatus[WaferManager.Instance.GetWafer(ModuleName.TMRobot, 1).OriginSlot] == MovingStatus.WaitProcess
- && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0))
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, 1);
- if (wafer.ProcessJob.Sequence.PMs.Contains(dict.Key))
- {
- _moveQueue.Add(new MoveItem(ModuleName.TMRobot, 1, dict.Key, 0, (Hand)1));
- }
- }
- return;
- }
- }
- }
- }
- //get the wafer need Pick From vce
- private void GetNextWaferPickFromVCE()
- {
- if (_TMRobot.IsAvailable)
- {
- Dictionary<int, ModuleName> nextslot = new Dictionary<int, ModuleName>();
- foreach (var ctrljob in _lstControlJobs)
- {
- //Port is run
- if (ctrljob.State == EnumControlJobState.Executing)
- {
- bool nohastowaitpm = false;
- foreach (WaferInfo wafer in ctrljob.LotWafers)
- {
- //if need pm available =>pick 2
- if (!wafer.IsEmpty
- && SequenceNeedPMsAvailable(_lstProcessJobs.Find(x => x.Sequence.Name == wafer.SequenceName).Sequence.PMs)
- && ModuleHelper.IsVCE((ModuleName)wafer.OriginStation)
- && (movingStatus[wafer.OriginSlot] == MovingStatus.WaitProcess))
- {
- nohastowaitpm = true;
- ModuleName _destination = SearchPM(_lstProcessJobs.Find(x => x.Sequence.Name == wafer.SequenceName).Sequence.PMs, nextslot);
- nextslot.Add(wafer.OriginSlot, _destination);
- _moveQueue.Add(new MoveItem(ModuleName.VCE1, wafer.OriginSlot, _destination, 0, 0));
- if (nextslot.Count >= 2 || _moveQueue.Count >= 4)
- {
- return;
- }
- }
- //if need align available => pick 2
- if (!wafer.IsEmpty
- && WaferManager.Instance.CheckNoWafer(ModuleName.VPA, 0)
- && ModuleHelper.IsVCE((ModuleName)wafer.OriginStation)
- && SequenceNeedPMsAvailable(_lstProcessJobs.Find(x => x.Sequence.Name == wafer.SequenceName).Sequence.PMs)
- && (movingStatus[wafer.OriginSlot] == MovingStatus.WaitAlign))
- {
- nohastowaitpm = true;
- ModuleName _destination = ModuleName.TMRobot;
- //double pick
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1))
- {
- nextslot.Add(wafer.OriginSlot, _destination);
- _moveQueue.Add(new MoveItem(ModuleName.VCE1, wafer.OriginSlot, _destination, 0, 0));
- }
- if (nextslot.Count >= 2 || _moveQueue.Count >= 4)
- {
- return;
- }
- }
- }
- //if all need PM unavailable =>pick 1 wait for swap
- //or 1 can input pm => pick 2, A in pm ,B wait for swap
- if (nextslot.Count == 0 || nohastowaitpm && nextslot.Count == 1
- && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot,0)
- && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot,1)
- && WaferManager.Instance.CheckNoWafer(ModuleName.VPA, 0))
- {
- foreach (WaferInfo wafer in ctrljob.LotWafers)
- {
- if (wafer.NextSequenceStep == 0 && !wafer.IsEmpty
- && ModuleHelper.IsVCE((ModuleName)wafer.SourceStation))
- {
- ModuleName _destination = _lstProcessJobs.Find(x => x.Sequence.Name == wafer.SequenceName).Sequence.PMs[0];
- nextslot.Add(wafer.SourceSlot, _destination);
- foreach (KeyValuePair<int, ModuleName> slot in nextslot)
- {
- _moveQueue.Add(new MoveItem(ModuleName.VCE1, slot.Key, slot.Value, 0, 0));
- }
- return;
- }
- if (movingStatus[wafer.OriginSlot] == MovingStatus.WaitAlign && !wafer.IsEmpty
- && WaferManager.Instance.CheckHasWafer((ModuleName)wafer.OriginStation, wafer.OriginSlot)
- && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0)
- && WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1)
- && _moveQueue.Count == 0
- )
- {
- //ModuleName _destination = ModuleName.TMRobot;
- _moveQueue.Add(new MoveItem((ModuleName)wafer.OriginStation, wafer.OriginSlot, ModuleName.TMRobot, 0, 0));
- return;
- }
- }
- }
- }
- }
- return;
- }
-
- }
- private void PrepareWaferOnRBToPM()
- {
- //tm robot has wafer and wait for process which means have to go to PM
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0)
- && movingStatus[WaferManager.Instance.GetWafer(ModuleName.TMRobot, 0).OriginSlot] == MovingStatus.WaitProcess
- )
- {
- //find PM has no wafer
- WaferInfo wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, 0);
- if (SequenceNeedPMsAvailable(wafer.ProcessJob.Sequence.PMs))
- {
- ModuleName _destination = SearchPM(wafer.ProcessJob.Sequence.PMs, new Dictionary<int, ModuleName>());
- if (ModuleHelper.IsPm(_destination) && _TMRobot.IsAvailable)
- {
- _moveQueue.Add(new MoveItem(ModuleName.TMRobot, 0, _destination, 0, 0));
- SERunTMRobotTask();
- return;
- }
- }
- }
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1)
- && movingStatus[WaferManager.Instance.GetWafer(ModuleName.TMRobot, 1).OriginSlot] == MovingStatus.WaitProcess)
- {
- WaferInfo wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, 1);
- if (SequenceNeedPMsAvailable(wafer.ProcessJob.Sequence.PMs))
- {
- ModuleName _destination = SearchPM(wafer.ProcessJob.Sequence.PMs, new Dictionary<int, ModuleName>());
- if (ModuleHelper.IsPm(_destination) && _TMRobot.IsAvailable)
- {
- _moveQueue.Add(new MoveItem(ModuleName.TMRobot, 1, _destination, 0, (Hand)1));
- SERunTMRobotTask();
- return;
- }
- }
- }
- }
- private void CheckWaferFromVceNeedAlign()
- {
- //if has wafer and need align and align is empty => goto PA
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot,0)
- && movingStatus[WaferManager.Instance.GetWafer(ModuleName.TMRobot, 0).OriginSlot] == MovingStatus.WaitAlign
- && WaferManager.Instance.CheckNoWafer(ModuleName.VPA, 0)
- &&_TMRobot.IsAvailable)
- {
- _moveQueue.Add(new MoveItem(ModuleName.TMRobot, 0,ModuleName.VPA, 0, 0));
- movingStatus[WaferManager.Instance.GetWafer(ModuleName.TMRobot, 0).OriginSlot] = MovingStatus.StartAlign;
- SERunTMRobotTask();
- return;
- }
- if (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1)
- && movingStatus[WaferManager.Instance.GetWafer(ModuleName.TMRobot, 1).OriginSlot] == MovingStatus.WaitAlign
- && WaferManager.Instance.CheckNoWafer(ModuleName.VPA, 0)
- && _TMRobot.IsAvailable)
- {
- _moveQueue.Add(new MoveItem(ModuleName.TMRobot, 1, ModuleName.VPA, 0, (Hand)1));
- movingStatus[WaferManager.Instance.GetWafer(ModuleName.TMRobot, 1).OriginSlot] = MovingStatus.StartAlign;
- SERunTMRobotTask();
- return;
- }
- //PA has wafer need align =>
- if (WaferManager.Instance.CheckHasWafer(ModuleName.VPA, 0) && _TMRobot.IsAvailable)
- {
- WaferInfo currentwafer = WaferManager.Instance.GetWafer(ModuleName.VPA, 0);
- switch (movingStatus[currentwafer.OriginSlot])
- {
- case MovingStatus.StartAlign:
- if(_TMRobot.IsAvailable)
- {
- float angle = float.Parse(currentwafer.ProcessJob.Sequence.Steps[0].StepParameter["AlignAngle"].ToString());
- _TMRobot.Align(angle);
- movingStatus[currentwafer.OriginSlot] = MovingStatus.Aligning;
- SERunTMRobotTask();
- return;
- }
- break;
- case MovingStatus.Aligning:
- movingStatus[currentwafer.OriginSlot] = MovingStatus.WaitProcess;
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _TMRobot.IsAvailable)
- {
- _moveQueue.Add(new MoveItem(ModuleName.VPA, 0, ModuleName.TMRobot, 0, 0));
- SERunTMRobotTask();
- return;
- }
- if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _TMRobot.IsAvailable)
- {
- _moveQueue.Add(new MoveItem(ModuleName.VPA, 0, ModuleName.TMRobot, 1, (Hand)1));
- SERunTMRobotTask();
- return;
- }
- break;
- }
- }
- }
- private void PrepareTMMoveitems()
- {
-
- }
- private void Cycling()
- {
- //所有的PM都Idle TM都空闲的情况
- if (IsAllNeedPMsAvailabe() && IsModuleAvailable(_destinationModule) && IsModuleAvailable(_sourceModule) && _TMRobot.IsAvailable)
- {
- //如果PM没有wafer tm也闲置 但Cycle数量未达到目标
- if (!PMsHasWafers() && _TMRobot.IsAvailable && _CycleWafers.Count == 0)
- {
- ++CycleIndex;
- if (CycleIndex < CycleNum)
- {
- for (int i = 0; i < _sourceSlotNumber; i++)
- {
- if (WaferManager.Instance.CheckHasWafer(_sourceModule, i))
- _CycleWafers.Enqueue(new MoveItem(_sourceModule, i, _destinationModule, i, Hand.None));
- }
- }
- else
- {
- _cycleState = RState.End;
- return;
- }
-
- }
-
- //wafer返回
- if (PMsHasWafers())
- {
- var pmSlots = GetReadyOutPMs();
- //var inSlots = GetReadyInSlot(_destinationModule, _destinationSlotNumber);
- for (int i = 0; i < pmSlots.Count ; i++)
- {
- WaferInfo _endwafer = WaferManager.Instance.GetWafer(pmSlots[i], 0);
- int _endslot = _endwafer.OriginSlot;
- _runningItems.Enqueue(new MoveItem(pmSlots[i], 0, _destinationModule, _endslot, Hand.Both));
- }
- }
- else
- {
- //进腔环节 可在此处根据PM的角度 增加进入角度
- //三个腔体的进入方式
- var InPMs = GetReadyInPMs();
- if (_CycleWafers.Count > 0 && InPMs.Count >= 1)
- {
- var item = _CycleWafers.Dequeue();
- _runningItems.Enqueue(new MoveItem(item.SourceModule, item.SourceSlot, InPMs[0], 0, Hand.Both));
- }
- if (_CycleWafers.Count > 0 && InPMs.Count >= 2)
- {
- var item = _CycleWafers.Dequeue();
- _runningItems.Enqueue(new MoveItem(item.SourceModule, item.SourceSlot, InPMs[1], 0, Hand.Both));
- }
- if (_CycleWafers.Count > 0 && InPMs.Count >= 3)
- {
- var item = _CycleWafers.Dequeue();
- _runningItems.Enqueue(new MoveItem(item.SourceModule, item.SourceSlot, InPMs[2], 0, Hand.Both));
- }
- }
- if (_runningItems.Count > 0)
- {
- if (_TMRobot.PostMoveItems(_runningItems.ToArray()))
- _runningItems.Clear();
- }
- }
- //存在PM可用
- //else if (IsExistPMsAvailabe() && IsModuleAvailable(_destinationModule) && IsModuleAvailable(_sourceModule) && _TMRobot.IsAvailable)
- //{
- // //获得可以用的chamber 向里面传片
- //}
- }
- private void PMProcess()
- {
- //foreach (ModuleName chamber in tmCycleRoutine)
- //{
- // if (ModuleHelper.IsPm(chamber) && WaferManager.Instance.CheckHasWafer(chamber, 0) && ModuleHelper.IsInstalled(chamber))
- // {
- // WaferInfo info = WaferManager.Instance.GetWafer(chamber, 0);
- //
- // dictSchedulers[chamber].EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, chamber, 0));
- // }
- //}
- }
- public void Abort()
- {
- CycleIndex = null;
- _runningItems.Clear();
- _CycleWafers.Clear();
- _moveQueue.Clear();
- movingStatus.Clear();
- foreach(var cj in _lstControlJobs.FindAll(x => x.State == EnumControlJobState.Executing))
- cj.SetState(EnumControlJobState.WaitingForStart);
- _TMRobot._entityTaskToken = (int)FSM_MSG.NONE;
- _cycleState = RState.End;
- }
- #endregion
- #region 搜索函数
- //回到的槽位确认 采用补进方式即自底向上填
- private List<int> GetReadyInSlot(ModuleName module, int slotCount)
- {
- List<int> slots = new List<int>();
- for (int i = 0; i < slotCount; i++)
- {
- if (WaferManager.Instance.CheckNoWafer(module, i))
- slots.Add(i);
- if (slots.Count >= 2)
- return slots;
- }
- return slots;
- }
- //确认
- private List<int> GetReadyOutSlot(ModuleName module, int slotCount)
- {
- List<int> slots = new List<int>();
- for (int i = 0; i < slotCount; i++)
- {
- if (WaferManager.Instance.CheckHasWafer(module, i))
- slots.Add(i);
- if (slots.Count >= 2)
- return slots;
- }
- return slots;
- }
- //确认PM是否可用 且没有wafer
- private List<ModuleName> GetReadyInPMs()
- {
- List<ModuleName> inpm = new List<ModuleName>();
- foreach (var module in tmCycleRoutine)
- {
- if (ModuleHelper.IsPm(module))
- {
- if (IsModuleAvailable(module) && WaferManager.Instance.CheckNoWafer(module, 0))
- {
- inpm.Add(module);
- if (inpm.Count >= 3)
- break;
- }
- }
- }
- return inpm;
- }
- private List<ModuleName> GetReadyOutPMs()
- {
- List<ModuleName> outpm = new List<ModuleName>();
- foreach (var module in tmCycleRoutine)
- {
- if (ModuleHelper.IsPm(module))
- {
- if (IsModuleAvailable(module) && WaferManager.Instance.CheckHasWafer(module, 0))
- {
- outpm.Add(module);
- if (outpm.Count >= 3)
- break;
- }
- }
- }
- return outpm;
- }
- //PM有wafer
- private bool PMsHasWafers()
- {
- foreach (var module in tmCycleRoutine)
- {
- if (ModuleHelper.IsPm(module) && ModuleHelper.IsInstalled(module))
- {
- if (WaferManager.Instance.CheckHasWafer(module, 0))
- return true;
- }
- }
- return false;
- }
- //PM全可用
- private bool IsAllNeedPMsAvailabe()
- {
- foreach (var module in tmCycleRoutine)
- {
- if (ModuleHelper.IsPm(module) && ModuleHelper.IsInstalled(module))
- {
- if (!IsModuleAvailable(module))
- return false;
- }
- }
- return true;
- }
- //PM存在可用
- private bool SequenceNeedPMsAvailable(List<ModuleName> needPMs)
- {
- foreach (var module in needPMs)
- {
- if (ModuleHelper.IsPm(module) && ModuleHelper.IsInstalled(module))
- {
- if (IsModuleAvailable(module) && WaferManager.Instance.CheckNoWafer(module,0))
- return true;
- }
- }
- return false;
- }
- private ModuleName SearchPM(List<ModuleName> needPMs,Dictionary<int,ModuleName> PMsChoice)
- {
- foreach (var module in needPMs)
- {
- if (ModuleHelper.IsPm(module) && ModuleHelper.IsInstalled(module))
- {
- if (IsModuleAvailable(module) && !PMsChoice.ContainsValue(module) && WaferManager.Instance.CheckNoWafer(module,0))
- return module;
- }
- }
- return ModuleName.TMRobot;
- }
- private bool IsModuleAvailable(ModuleName module)
- {
- return dictSchedulers.Keys.Contains(module) && dictSchedulers[module].IsAvailable;
- }
- //检查需要使用的pm
- private bool CheckSequencePmReady(SequenceInfo seq, List<ModuleName> pmOccupied, out List<ModuleName> pmUsed, out string reason)
- {
- pmUsed = new List<ModuleName>();
- reason = "";
- bool pmIsReady = true;
- for (int i = 0; i < seq.Steps.Count; i++)
- {
- SequenceStepInfo stepInfo = seq.Steps[i];
- bool hasPm = false;
- foreach (var module in stepInfo.StepModules)
- {
- if (!ModuleHelper.IsPm(module))
- {
- hasPm = true;
- break;
- }
- if (ModuleHelper.IsInstalled(module) && (pmOccupied == null || !pmOccupied.Contains(module)))
- {
- hasPm = true;
- }
- if (!pmUsed.Contains(module))
- pmUsed.Add(module);
- }
- if (pmIsReady && !hasPm)
- {
- reason = $"Step {i + 1} no valid PM, " + string.Join("|", stepInfo.StepModules);
- pmIsReady = false;
- }
- }
- return pmIsReady;
- }
- //检查是否又对应PM的recipe
- private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
- {
- for (int i = 0; i < seq.Steps.Count; i++)
- {
- SequenceStepInfo stepInfo = seq.Steps[i];
- foreach (var module in stepInfo.StepModules)
- {
- if (ModuleHelper.IsPm(module))
- {
- string attr = $"{module}Recipe";
- if (stepInfo.StepParameter.ContainsKey(attr)
- && !string.IsNullOrEmpty((string)stepInfo.StepParameter[attr]))
- {
- var recipeName = (string)stepInfo.StepParameter[attr];
- if (!string.IsNullOrEmpty(recipeName))
- {
- var recipeContent =
- RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
- if (string.IsNullOrEmpty(recipeContent))
- {
- reason = $"Can not find recipe file{recipeName}";
- return false;
- }
- }
- }
- }
- }
- }
- reason = "";
- return true;
- }
- //找到对应sequence
- public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
- {
- foreach (var pj in _lstProcessJobs)
- {
- if (pj.ControlJobName == cj.Name)
- return pj;
- }
- return null;
- }
- #endregion
- }
- }
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