Kepler-Release/Venus/Venus_RT/Modules/SystemDispatcher.cs

using System;
using System.Collections.Generic;
using System.Linq;
using System.Diagnostics;
using Aitex.Core.Common;
using Aitex.Core.RT.Routine;
using Aitex.Core.RT.SCCore;
using Aitex.Sorter.Common;
using Aitex.Core.RT.Log;
using Aitex.Core.Util;
using Aitex.Core.RT.DataCenter;
using Aitex.Core.RT.RecipeCenter;
using Aitex.Core.RT.Fsm;

using MECF.Framework.Common.Jobs;
using MECF.Framework.Common.Routine;
using MECF.Framework.Common.Equipment;
using MECF.Framework.Common.SubstrateTrackings;
using MECF.Framework.Common.Schedulers;
using MECF.Framework.Common.DBCore;

using Venus_Core;

using Venus_RT.Modules.Schedulers;
using Venus_RT.Scheduler;
using Venus_Unity;

namespace Venus_RT.Modules
{
    public class WaferTask
    {
        public ModuleName           sourceMod           { get; }
        public int                  sourceSlot          { get; }
        public ModuleName           destMod             { get; private set; }
        public int                  destSlot            { get; private set; }
        public ModuleName           currentMod          { get; private set; }
        public int                  currentSlot         { get; private set; }
        public ModuleName           nextMod             { get; private set; }
        public int                  nextSlot            { get; private set; }
        public ModuleName           routedMod           { get; private set; }
        public int                  routedSlot          { get; private set; }
        public Hand                 hand                { get; private set; }
        public SequenceLLInOutPath  llInOutPath         { get; }
        public string               processRecipe       { get; }
        public string               wtwCleanRecipe      { get; }
        public float                temperature         { get; }
        public Guid                 waferId             { get; }
        public int                  elapseTime          { get { return (int)(DateTime.Now - _scheduledTime).TotalSeconds; } }
        public int                  llDelayTime         { get; }
        public RState               pressureStatus      { get; private set; }
        public RState               temperatureStatus   { get; private set; }
        public RState               movingStatus        { get; private set; }

        public bool                 IsCompleted         { get { return movingStatus == RState.End && currentMod == destMod && currentSlot == destSlot; } }
        public bool                 IsTimeout           { get { return elapseTime > 600; } }
        public bool                 IsAligned           { get; set; }

        public bool IsWaitingAtmMoving
        {
            get
            {
                if (movingStatus != RState.Init)
                    return false;

                return !IsWaitingVacMoving;
            }
        }

        public bool IsWaitingVacMoving
        {
            get
            {
                if ( movingStatus == RState.Init &&
                    (ModuleHelper.IsPm(nextMod) ||
                     ModuleHelper.IsTMRobot(nextMod) ||
                     ModuleHelper.IsPm(currentMod) || 
                     ModuleHelper.IsTMRobot(currentMod)))
                    return true;

                return false;
            }
        }

        public delegate void WaferMoveHandler(WaferTask wafer, MoveItem item);
        public event WaferMoveHandler OnWaferArrived;
        public event WaferMoveHandler OnWaferLeaved;

        private DateTime _scheduledTime;

        public WaferTask(ModuleName source, int srcSlot, ModuleName dest, int dstSlot, float temp, Guid waferID, string recipeName, string wtwClean, SequenceLLInOutPath inOutPath, int LLDelay)
        {
            sourceMod = currentMod = nextMod = routedMod = source;
            sourceSlot = currentSlot = nextSlot = routedSlot = srcSlot;

            destMod = dest;
            destSlot = dstSlot;
            hand = Hand.None;
            temperature = temp;
            waferId = waferID;
            processRecipe = recipeName;
            wtwCleanRecipe = wtwClean;
            llInOutPath = inOutPath;
            llDelayTime = LLDelay;
            IsAligned = false;

            pressureStatus = RState.Init;
            temperatureStatus = RState.Init;
            movingStatus = RState.Init;
            _scheduledTime = DateTime.Now;
        }

        public RState Run()
        {
            if (movingStatus == RState.Running)
            {
                var wafer = WaferManager.Instance.GetWafer(nextMod, nextSlot);
                if (!wafer.IsEmpty && wafer.InnerId == waferId)
                {
                    LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Wafer {wafer.WaferOrigin} from  {currentMod}.{currentSlot + 1} move to {nextMod}.{nextSlot + 1}");
                    if (!ModuleHelper.IsTMRobot(currentMod) && !ModuleHelper.IsEFEMRobot(currentMod))
                    {
                        OnWaferLeaved(this, new MoveItem(currentMod, currentSlot, nextMod, nextSlot, hand));
                    }

                    if (!ModuleHelper.IsTMRobot(nextMod) && !ModuleHelper.IsEFEMRobot(nextMod))
                    {
                        wafer.NextSequenceStep++;
                        OnWaferArrived(this, new MoveItem(currentMod, currentSlot, nextMod, nextSlot, hand));
                    }

                    currentMod = nextMod;
                    currentSlot = nextSlot;
                    movingStatus = RState.End;
                }
            }

            if (ModuleHelper.IsPm(destMod) && temperatureStatus == RState.Init)
            {
                var pmScheduler = Singleton<TransferModule>.Instance.GetScheduler(destMod) as SchedulerPM;
                if (pmScheduler != null && pmScheduler.IsAvailable)
                {
                    pmScheduler.Preheating(temperature);
                    temperatureStatus = RState.Running;
                }
            }

            return RState.Running;
        }

        public void RouteTo(ModuleName mod, int slot)
        {
            routedMod = mod;
            routedSlot = slot;
            movingStatus = RState.Init;
        }

        public void MoveTo(ModuleName mod, int slot)
        {
            nextMod = mod;
            nextSlot = slot;
            movingStatus = RState.Running;
        }

        public void Return()
        {
            destMod = sourceMod;
            destSlot = sourceSlot;
            movingStatus = RState.End;
            pressureStatus = RState.End;
            temperatureStatus = RState.End;
        }
    }

    public enum ModuleStatus
    {
        Idle,
        WaitMove,
        Moving,
        NotReady,

        // PM Status
        WaitProcess,
        StartProcess,
        Processing,

        StartIdleClean,
        IdleClean,

        WaitPreJobClean,
        StartPreJobClean,
        PreJobClean,

        WaitPostJobClean,
        StartPostJobClean,
        PostJobClean,

        WaitWTWClean,
        StartWTWClean,
        WTWClean,

        // Align Status
        WaitAlign,
        StartAlign,
        Aligning,

        // Loadlock Status
        ExchangeWaferWithEFEM,
        ExchangeWaferWithTM,
    }

    public class ModuleTask
    {
        public ModuleName                   Module      { get; }
        public ModuleStatus                 Status      { get; set; }
        public SchedulerModule              Scheduler   { get; }
        public virtual int                  SlotNum     { get; protected set; }
        public virtual bool                 IsIdle      { get { return Status == ModuleStatus.Idle; } }

        private int     _currentActionTime = 0;

        public virtual int IdleTime
        {
            get
            {
                if (Status != ModuleStatus.Idle)
                    return 0;

                return (int)(DateTime.Now - _moduleTimer).TotalSeconds;
            }
        }

        public virtual int BusyTime
        {
            get 
            {
                if (Status == ModuleStatus.Idle)
                    return 0;

                return (int)(DateTime.Now - _moduleTimer).TotalSeconds;
            }
        }

        public virtual int BusyLastTime
        {
            get
            {
                if (Status == ModuleStatus.Idle)
                    return 0;

                return _currentActionTime - BusyTime;
            }
        }

        public virtual int TimeToReady
        {
            get 
            { 
                if(Scheduler.IsAvailable)
                    return 0;

                return int.MaxValue;
            }
        }

        protected DateTime _moduleTimer;

        public ModuleTask(ModuleName mod)
        {
            Module = mod;
            Scheduler = Singleton<TransferModule>.Instance.GetScheduler(mod);
            SlotNum = 1;
            _moduleTimer = DateTime.Now;
        }

        public virtual RState Run()
        {
            Status = Scheduler.IsAvailable ? ModuleStatus.Idle : ModuleStatus.NotReady;
            return RState.Running;
        }

        public virtual void WaferArrived(WaferTask wafer, int slot)
        {

        }

        public virtual void WaferLeaved(WaferTask wafer, int slot)
        {

        }
    }

    public class PMTask : ModuleTask
    {
        enum CleanType
        {
            IdleClean,
            PreJobClean,
            PostJobClean,
            WTWClean,
        }

        public override int TimeToReady
        {
            get 
            {
                switch(Status)
                {
                    case ModuleStatus.Idle:
                    case ModuleStatus.Processing:
                    case ModuleStatus.IdleClean:
                    case ModuleStatus.PreJobClean:
                        {
                            return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
                        }
                    case ModuleStatus.PostJobClean:
                    case ModuleStatus.WTWClean:
                        {
                            if(_pendingCleanTask.Count == 0)
                            {
                                return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000;
                            }
                        }
                        break;
                }

                return int.MaxValue;
            }
        }

        private WaferTask _wafer;
        private SchedulerPM _pmScheduler => Scheduler as SchedulerPM;

        private string _preJobCleanRecipe;
        private string _postJobCleanRecipe;
        private string _wtwCleanRecipe;
        private Queue<CleanType> _pendingCleanTask = new Queue<CleanType>();

        public PMTask(ModuleName pm) : base(pm)
        {
        }

        public override RState Run()
        {
            if(Scheduler.IsAvailable)
            {
                switch (Status)
                {
                    case ModuleStatus.Idle:
                        {
                            if(WaferManager.Instance.CheckNoWafer(Module, 0))
                            {
                                if (_pendingCleanTask.Count > 0)
                                {
                                    var cleanTask = _pendingCleanTask.Dequeue();
                                    if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
                                    {
                                        Status = ModuleStatus.WaitPostJobClean;
                                    }
                                    else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
                                    {
                                        Status = ModuleStatus.WaitPreJobClean;
                                    }
                                }
                                else if (_pmScheduler.RunIdleCleanTask())  // Check Idle Clean
                                {
                                    Status = ModuleStatus.StartIdleClean;
                                }
                            }
                        }
                        break;
                    case ModuleStatus.WaitProcess:
                        {
                            Scheduler.EventWaferArrived?.Invoke(this, new WaferMoveArgs(ModuleName.TMRobot, 0, Module, 0));
                            Status = ModuleStatus.StartProcess;
                        }
                        break;
                    case ModuleStatus.WaitPreJobClean:
                        {
                            if(WaferManager.Instance.CheckNoWafer(Module, 0))
                            {
                                if (_pmScheduler.RunJobCleanTask(_preJobCleanRecipe))
                                {
                                    Status = ModuleStatus.StartPreJobClean;
                                }
                                else
                                {
                                    LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Prejob clean recipe{_preJobCleanRecipe} failed");
                                    Status = ModuleStatus.Idle;
                                    _preJobCleanRecipe = string.Empty;
                                }
                            }
                        }
                        break;
                    case ModuleStatus.WaitPostJobClean:
                        {
                            if (WaferManager.Instance.CheckNoWafer(Module, 0))
                            {
                                if (_pmScheduler.RunJobCleanTask(_postJobCleanRecipe))
                                {
                                    Status = ModuleStatus.StartPostJobClean;
                                }
                                else
                                {
                                    LOG.Write(eEvent.WARN_ROUTER, Module, $"Run Postjob clean recipe{_postJobCleanRecipe} failed");
                                    Status = ModuleStatus.Idle;
                                    _postJobCleanRecipe = string.Empty;
                                }
                            }
                        }
                        break;
                    
                    case ModuleStatus.WaitWTWClean:
                        {
                            if (WaferManager.Instance.CheckNoWafer(Module, 0))
                            {if (_pmScheduler.RunJobCleanTask(_wtwCleanRecipe))
                                {
                                    Status = ModuleStatus.StartWTWClean;
                                }
                                else
                                {
                                    LOG.Write(eEvent.WARN_ROUTER, Module, $"Run WTW Wafer clean recipe{_wtwCleanRecipe} failed");
                                    Status = ModuleStatus.Idle;
                                    _wtwCleanRecipe = string.Empty;
                                }
                            }
                        }
                        break;
                    case ModuleStatus.Processing:
                        {
                            var wafer = WaferManager.Instance.GetWafer(Module, 0);
                            if(!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
                            {
                                _wafer.Return();
                                Status = ModuleStatus.Idle;
                            }
                        }
                        break;
                    case ModuleStatus.PreJobClean:
                        {
                            _preJobCleanRecipe = string.Empty;
                            Status = ModuleStatus.Idle;
                        }
                        break;
                    case ModuleStatus.PostJobClean:
                        {
                            _postJobCleanRecipe = string.Empty;
                            if (_pendingCleanTask.Count > 0)
                            {
                                var cleanTask = _pendingCleanTask.Dequeue();
                                if(cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
                                {
                                    Status = ModuleStatus.WaitPreJobClean;
                                    break;
                                }
                            }

                            Status = ModuleStatus.Idle;
                        }
                        break;
                    case ModuleStatus.WTWClean:
                        {
                            if(_pendingCleanTask.Count > 0)
                            {
                                var cleanTask = _pendingCleanTask.Dequeue();
                                if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
                                {
                                    Status = ModuleStatus.WaitPostJobClean;
                                }
                                else if (cleanTask == CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
                                {
                                    Status = ModuleStatus.WaitPreJobClean;
                                }
                            }
                            else
                            {
                                Status = ModuleStatus.Idle;
                            }

                            _wtwCleanRecipe = string.Empty;
                        }
                        break;
                    case ModuleStatus.IdleClean:
                        {
                            Status = ModuleStatus.Idle; 
                        }
                        break;
                }
            }
            else
            {
                switch(Status)
                {
                    case ModuleStatus.StartProcess:
                        Status = ModuleStatus.Processing;
                        break;
                    case ModuleStatus.StartIdleClean:
                        Status = ModuleStatus.IdleClean;
                        break;
                    case ModuleStatus.StartPreJobClean:
                        Status = ModuleStatus.PreJobClean;
                        break;
                    case ModuleStatus.StartPostJobClean:
                        Status = ModuleStatus.PostJobClean;
                        break;
                    case ModuleStatus.StartWTWClean:
                        Status = ModuleStatus.WTWClean;
                        break;
                }
            }

            return RState.Running;
        }

        public override void WaferArrived(WaferTask wafer, int slot)
        {
            _wafer = wafer;
            Status = ModuleStatus.WaitProcess;
        }

        public override void WaferLeaved(WaferTask wafer, int slot)
        {
            if(!string.IsNullOrWhiteSpace(_wafer.wtwCleanRecipe.Trim()))
            {
                Status = ModuleStatus.WaitWTWClean;
                _wtwCleanRecipe = _wafer.wtwCleanRecipe;
            }
            else if(_pendingCleanTask.Count > 0)
            {
                var cleanTask = _pendingCleanTask.Dequeue();
                if (cleanTask == CleanType.PostJobClean && !string.IsNullOrWhiteSpace(_postJobCleanRecipe))
                {
                    Status = ModuleStatus.WaitPostJobClean;
                }
                else if (cleanTask ==  CleanType.PreJobClean && !string.IsNullOrWhiteSpace(_preJobCleanRecipe))
                {
                    Status = ModuleStatus.WaitPreJobClean;
                }
            }

            _wafer = null;
        }

        public void InvokePreJobClean(string preJobClean)
        {
            _preJobCleanRecipe = preJobClean;
            _pendingCleanTask.Enqueue(CleanType.PreJobClean);
        }

        public bool IsPreJobCleanDone()
        {
            return !_pendingCleanTask.Contains(CleanType.PreJobClean) && string.IsNullOrWhiteSpace(_preJobCleanRecipe);
        }

        public void InvokePostJobClean(string postJobClean)
        {
            _postJobCleanRecipe = postJobClean;
            _pendingCleanTask.Enqueue(CleanType.PostJobClean);
        }

        public bool IsPostJobCleanDone()
        {
            return !_pendingCleanTask.Contains(CleanType.PostJobClean) && string.IsNullOrWhiteSpace(_postJobCleanRecipe);
        }
    }

    public class AlignerTask : ModuleTask
    {
        private WaferTask _wafer;
        public AlignerTask(ModuleName aligner) : base(aligner)
        {

        }

        public override RState Run()
        {
            var efemRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot) as SchedulerEfemRobot;
            if (efemRobot == null || !efemRobot.IsAvailable)
                return RState.Running;

            switch (Status)
            {
                case ModuleStatus.WaitAlign:
                    {                        
                        efemRobot.Align(0);
                        Status = ModuleStatus.Aligning;
                    }
                    break;
                case ModuleStatus.Aligning:
                    {
                        _wafer.IsAligned = true;
                        Status = ModuleStatus.Idle;
                    }
                    break;
            }

            return RState.Running;
        }

        public override void WaferArrived(WaferTask wafer, int slot)
        {
            _wafer = wafer;
            Status = ModuleStatus.WaitAlign;
        }

        public override void WaferLeaved(WaferTask wafer, int slot)
        {
            _wafer = null;
        }
    }

    public class LoadPortTask : ModuleTask
    {
        public LoadPortTask(ModuleName lp) : base(lp)
        {
            SlotNum = SC.GetValue<int>($"EFEM.LoadPort.SlotNumber");
        }

        public override RState Run()
        {
            return base.Run();
        }
    }

    public class TMRobotTask : ModuleTask
    {
        public TMRobotTask(ModuleName tmRobot) : base(tmRobot)
        {
            SlotNum = 2;
        }

        public override RState Run()
        {
            return base.Run();
        }
    }

    public class EFEMRobotTask : ModuleTask
    {
        public EFEMRobotTask(ModuleName efemRobot) : base(efemRobot)
        {
            SlotNum = 2;
        }

        public override RState Run()
        {
            return base.Run();
        }

        public bool PostMoveItems(MoveItem[] items)
        {
            Status = ModuleStatus.Moving;
            return (Scheduler as SchedulerEfemRobot).PostMoveItems(items);
        }
    }

    public class LoadlockTask : ModuleTask
    {
        public LoadlockTask(ModuleName ll) : base(ll)
        {
            SlotNum = SC.GetValue<int>($"{ll}.SlotNumber");
        }

        public override int TimeToReady
        {
            get { return Scheduler.IsAvailable ? 0 : (Scheduler.TimeToReady + 500) / 1000; }
        }

        public override void WaferArrived(WaferTask wafer, int slot)
        {
            Scheduler.WaferArrived(slot);
        }

        public bool PreVent()
        {
            if (Scheduler.IsAvailable && Scheduler.IsVac)
            {
                return (Scheduler as SchedulerLoadLock).PreVent();
            }

            return false;
        }

        public bool PrePump()
        {
            if (Scheduler.IsAvailable && Scheduler.IsAtm)
            {
                return (Scheduler as SchedulerLoadLock).PrePump();
            }

            return false;
        }
    }

    class SystemDispatcher : ICycle
    {
        private List<ControlJobInfo> _lstControlJobs = new List<ControlJobInfo>();
        private List<ProcessJobInfo> _lstProcessJobs = new List<ProcessJobInfo>();

        private List<WaferTask> _lstWaferTasks = new List<WaferTask>();
        private Dictionary<ModuleName, ModuleTask> _dictModuleTask = new Dictionary<ModuleName, ModuleTask>();
        private Queue<WaferInfo> _qeReturnWafers = new Queue<WaferInfo>();

        private Queue<List<MoveItem>> _efemSchdActions = new Queue<List<MoveItem>>();
        private Queue<List<MoveItem>> _tmSchdActions = new Queue<List<MoveItem>>();

        private List<MoveItem> _curEfemAction = new List<MoveItem>();
        private List<MoveItem> _curTmAction = new List<MoveItem>();
        

        private RState _efemRobotStatus { get { return (_dictModuleTask[ModuleName.EfemRobot].Scheduler as SchedulerEfemRobot).RobotStatus; } }
        private RState _tmRobotStatus { get { return (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerTMRobot).RobotStatus; } }

        private SchedulerFACallback _faCallback;
        private SchedulerDBCallback _dbCallback;

        private bool _isCycleMode;
        private int _cycleSetPoint = 0;
        private int _cycledCount = 0;
        private int _cycledWafer = 0;
        private float _throughput = 0.0f;

        private readonly int _LLASlotNumber = 4;
        private readonly int _LLBSlotNumber = 4;

        private int _efemRobotSingleArmOption = 0;
        private int _tmRobotSingleArmOption = 0;
        private Dictionary<ModuleName, int> _lpCycleWafer = new Dictionary<ModuleName, int>();
        private Dictionary<ModuleName, int> _lpCycleCount = new Dictionary<ModuleName, int>();
        private Stopwatch _cycleWatch = new Stopwatch();

        private SequenceLLInOutPath _LLInOutPath = SequenceLLInOutPath.DInDOut;

        public SequenceLLInOutPath LLInOutPath => _LLInOutPath; 

        public bool HasJobRunning => _lstControlJobs.Count > 0;

        private RState _cycleState = RState.Init;
        public RState CycleState => _cycleState;
        private Dictionary<string, ControlJobInfo> _loadportControlJobDic = new Dictionary<string, ControlJobInfo>();

        #region public interface
        public SystemDispatcher()
        {
            _faCallback = new SchedulerFACallback();
            _dbCallback = new SchedulerDBCallback();

            _efemRobotSingleArmOption = SC.GetValue<int>("EFEM.SingleArmOption");
            _tmRobotSingleArmOption = SC.GetValue<int>("TM.SingleArmOption");

            _LLASlotNumber = SC.GetValue<int>("LLA.SlotNumber");
            _LLBSlotNumber = SC.GetValue<int>("LLB.SlotNumber");

            InitModules();

            DATA.Subscribe("Scheduler.CycledCount", () => _cycledCount, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            DATA.Subscribe("Scheduler.CycledWafer", () => _cycledWafer, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            DATA.Subscribe("Scheduler.CycleSetPoint", () => _cycleSetPoint, SubscriptionAttribute.FLAG.IgnoreSaveDB);
            DATA.Subscribe("Scheduler.Throughput", () => _throughput, SubscriptionAttribute.FLAG.IgnoreSaveDB);


            DATA.Subscribe("Scheduler.PjIdList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.InnerId.ToString()).ToList());
            DATA.Subscribe("Scheduler.PjNameList", () => Array.ConvertAll(_lstProcessJobs.ToArray(), x => x.LotName.ToString()).ToList());

            for (int i = 1; i <= 3; i++)
            {
                _loadportControlJobDic[$"LP{i}"] = null;
                string lp = $"LP{i}";
                DATA.Subscribe($"{lp}.CurrentControlJob", () => _loadportControlJobDic[lp], SubscriptionAttribute.FLAG.IgnoreSaveDB);
            }
        }

        /// <summary>
        /// 获取lp当前的ControlJob
        /// </summary>
        /// <param name="lp"></param>
        /// <returns></returns>
        public ControlJobInfo GetLoadPortCurrentControlJob(ModuleName lp)
        {
            if(ModuleHelper.IsLoadPort(lp))
            {
                return _loadportControlJobDic.ContainsKey(lp.ToString()) ? _loadportControlJobDic[lp.ToString()] : null;
            }
            else
            {
                return null; 
            }
        }

        public RState Start(params object[] objs)
        {
            _efemRobotSingleArmOption   = SC.GetValue<int>("EFEM.SingleArmOption");
            _tmRobotSingleArmOption     = SC.GetValue<int>("TM.SingleArmOption");
            _isCycleMode                = SC.GetValue<bool>("System.IsCycleMode");
            _cycleSetPoint              = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;
            _cycledWafer                = 0;
            _cycledCount                = 0;
            _throughput                 = 0;

            _cycleWatch.Stop();
            _lpCycleWafer.Clear();
            _lpCycleCount.Clear();

            return RState.Running;
        }

        public RState Monitor()
        {
            prelude();

            RunWaferTask();
            RunModuleTasks();

            RoutingATMWafers();
            RoutingVacWafers();
           
            epilogue();

            return _cycleState;
        }

        public void Abort()
        {
        }



        public bool CreateJob(Dictionary<string, object> param, out string reason)
        {
            reason = "";
            _isCycleMode = SC.GetValue<bool>("System.IsCycleMode");
            _cycleSetPoint = _isCycleMode ? SC.GetValue<int>("System.CycleCount") : 0;


            string[] slotSequence = (string[])param["SlotSequence"];
            string jobId = (string)param["JobId"];
            string module = (string)param["Module"];
            if (string.IsNullOrEmpty(jobId))
            {
                jobId = "CJ_Local_" + module;
            }
            //bool autoStart        = (bool)param["AutoStart"];
            string lotId = jobId;
            if (param.ContainsKey("LotId"))
                lotId = (string)param["LotId"];

            string preCleanRecipe = param.ContainsKey("PreCleanRecipeName") ? (string)param["PreCleanRecipeName"] : string.Empty;
            string postCleanRecipe = param.ContainsKey("PostCleanRecipeName") ? (string)param["PostCleanRecipeName"] : string.Empty;

            if (slotSequence.Length != SC.GetValue<int>("EFEM.LoadPort.SlotNumber"))
            {
                reason = $"slot sequence parameter not valid, length is {slotSequence.Length}, should be {SC.GetValue<int>("EFEM.LoadPort.SlotNumber")}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            if (!ModuleHelper.IsLoadPort(ModuleHelper.Converter(module)))
            {
                reason = $"{module} should be LoadPort";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            if (_lstControlJobs.Exists(x => x.Name == jobId))
            {
                reason = $"{jobId} already created";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            ControlJobInfo cj = new ControlJobInfo();
            cj.Name = jobId;
            cj.Module = module;
            cj.LotName = lotId;
            cj.LotInnerId = Guid.NewGuid();
            cj.LotWafers = new List<WaferInfo>();
            cj.SetState(EnumControlJobState.WaitingForStart);
            cj.JetState = EnumJetCtrlJobState.Created;
            cj.PreJobClean = preCleanRecipe;
            cj.PostJobClean = postCleanRecipe;
            cj.SequenceNameList = slotSequence;

            Dictionary<string, bool[]> seqSlot = new Dictionary<string, bool[]>();
            Dictionary<string, List<Tuple<ModuleName, int>>> seqSlotWafers = new Dictionary<string, List<Tuple<ModuleName, int>>>();
            Dictionary<string, string> indexSequence = new Dictionary<string, string>();

            bool enableGroupBySequence = SC.GetValue<bool>("Scheduler.GroupWaferBySequence");
            for (int i = 0; i < SC.GetValue<int>("EFEM.LoadPort.SlotNumber"); i++)
            {
                if (string.IsNullOrEmpty(slotSequence[i]) || string.IsNullOrEmpty(slotSequence[i].Trim()))
                    continue;

                string groupName = enableGroupBySequence ? slotSequence[i].Trim() : i.ToString();
                indexSequence[groupName] = slotSequence[i];
                if (!seqSlot.ContainsKey(groupName))
                {
                    seqSlot[groupName] = new bool[SC.GetValue<int>("EFEM.LoadPort.SlotNumber")];
                }
                if (!seqSlotWafers.ContainsKey(groupName))
                {
                    seqSlotWafers[groupName] = new List<Tuple<ModuleName, int>>();
                }
                seqSlot[groupName][i] = true;

                if (!WaferManager.Instance.CheckHasWafer(module, i))
                {
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"job wafer: {module} slot {i + 1} not in the carrier");
                    return false;
                }
                if (!WaferManager.Instance.CheckWafer(ModuleHelper.Converter(module), i, WaferStatus.Normal))
                {
                    reason = $"job wafer: {module} slot {i + 1} status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Status}";
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }

                if (WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState != EnumWaferProcessStatus.Idle)
                {
                    reason = $"job wafer: {module} slot {i + 1} process status is {WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).ProcessState}";
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }
                //--- 2024-03-21 增加了waferinfo 相应的lotId信息 start---
                WaferInfo waferInfo = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i);
                cj.LotWafers.Add(waferInfo);
                waferInfo.SequenceName = slotSequence[i];
                waferInfo.LotId = lotId;
                //--- 2024-03-21 增加了waferinfo 相应的lotId信息 end---

                seqSlotWafers[groupName].Add(Tuple.Create(ModuleHelper.Converter(module), i));

                cj.JobWaferSize = WaferManager.Instance.GetWafer(ModuleHelper.Converter(module), i).Size;

                LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Assigned wafer job, wafer {module}.{i + 1}, sequence: {slotSequence[i]}");
            }

            if (seqSlotWafers.Count == 0)
            {
                reason = $"job has not assign wafer";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                _faCallback.JobCreateFailed(module, lotId, jobId, "");
                return false;
            }

            List<ProcessJobInfo> pjs = new List<ProcessJobInfo>();
            string[] seqs = seqSlot.Keys.ToArray();
            for (int i = 0; i < seqs.Length; i++)
            {
                ProcessJobInfo pj = new ProcessJobInfo();
                pj.Name = jobId + "_" + (i + 1);
                pj.Sequence = SequenceInfoHelper.GetInfo(indexSequence[seqs[i]]);
                if (pj.Sequence == null)
                {
                    reason = $"invalid sequence[{indexSequence[seqs[i]]}]";
                    return false;
                }
                pj.ControlJobName = cj.Name;
                pj.LotName = lotId;
                pj.SlotWafers = seqSlotWafers[seqs[i]];
                pj.SetState(EnumProcessJobState.Queued);

                if (!CheckSequencePmReady(pj.Sequence, out reason))
                {
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"no valid chamber for the {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }
                
                if (!RouteManager.IsATMMode && !CheckSequenceRecipeFileValid(pj.Sequence, out reason))
                {
                    LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"recipe file not valid in the sequence, {reason}");
                    _faCallback.JobCreateFailed(module, lotId, jobId, "");
                    return false;
                }

                pjs.Add(pj);
            }

            _dbCallback.LotUpdate(cj);
            foreach (var pj in pjs)
            {
                cj.ProcessJobNameList.Add(pj.Name);
                _lstProcessJobs.Add(pj);
            }

            _lstControlJobs.Add(cj);
            //AssociatedPMWithLP(cj);
            _loadportControlJobDic[cj.Module] = cj;

            _faCallback.JobCreated(cj, GetFirstProcessJob(cj));
            return true;
        }

        public bool CheckAllJobDone()
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Executing || cj.State == EnumControlJobState.Paused)
                    return false;
            }

            return true;
        }

        public bool CheckJobJustDone(out string sJobName)
        {
            foreach (var cj in _lstControlJobs)
            {
                if (cj.State == EnumControlJobState.Completed && !cj.BeenPosted)
                {
                    //LP;WaferSize;Lot;Number;Start;End;
                    sJobName = $"{cj.Module};{cj.JobWaferSize};{cj.LotName};{cj.LotWafers.Count};{cj.StartTime:T};{cj.EndTime:T}";
                    cj.BeenPosted = true;
                    return true;
                }
            }

            sJobName = "NULL";
            return false;
        }

        public ProcessJobInfo GetFirstProcessJob(ControlJobInfo cj)
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                    return pj;
            }

            return null;
        }

        public bool AbortJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"abort job rejected, not found job with id {jobName}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                return false;
            }

            List<ProcessJobInfo> pjAbortList = new List<ProcessJobInfo>();
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    pj.SetState(EnumProcessJobState.Aborting);
                    pjAbortList.Add(pj);

                    int unprocessed = 0;
                    int aborted = 0;
                    WaferInfo[] wafers = WaferManager.Instance.GetWaferByProcessJob(pj.Name);
                    foreach (var waferInfo in wafers)
                    {
                        waferInfo.ProcessJob = null;
                        waferInfo.NextSequenceStep = 0;
                        if (waferInfo.ProcessState != EnumWaferProcessStatus.Completed)
                            unprocessed++;
                    }
                    JobDataRecorder.EndPJ(pj.InnerId.ToString(), aborted, unprocessed);
                }
            }

            _faCallback.JobAborted(cj, GetFirstProcessJob(cj));
            _dbCallback.LotFinished(cj);
            foreach (var pj in pjAbortList)
            {
                _lstProcessJobs.Remove(pj);
            }

            _lstControlJobs.Remove(cj);
            if (_loadportControlJobDic.ContainsKey(cj.Module))
            {
                _loadportControlJobDic[cj.Module] = null;
            }
            return true;
        }

        public bool StopJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"stop job rejected, not found job with id {jobName}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                return false;
            }

            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    pj.SetState(EnumProcessJobState.Stopping);
                }
            }

            _faCallback.JobStopped(cj, GetFirstProcessJob(cj));
            _dbCallback.LotFinished(cj);
            if (_loadportControlJobDic.ContainsKey(cj.Module))
            {
                _loadportControlJobDic[cj.Module] = null;
            }
            return true;
        }

        public bool ResumeJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"resume job rejected, not found job with id {jobName}";
                //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"resume job rejected, not found job with id {jobName}");
                return false;
            }

            if (cj.State == EnumControlJobState.Paused)
            {
                cj.SetState(EnumControlJobState.Executing);
            }

            _faCallback.JobResumed(cj, GetFirstProcessJob(cj));
            _cycleState = RState.Running;
            return true;
        }

        public bool PauseJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"pause job rejected, not found job with id {jobName}";
                //LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"pause job rejected, not found job with id {jobName}");
                return false;
            }

            if (cj.State == EnumControlJobState.Executing)
            {
                cj.SetState(EnumControlJobState.Paused);
            }
            _faCallback.JobPaused(cj, GetFirstProcessJob(cj));


            if (!_lstControlJobs.Exists(job => job.State == EnumControlJobState.Executing))
                _cycleState = RState.Paused;
            return true;
        }


        public bool StartJob(string jobName, out string reason)
        {
            reason = "";
            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == jobName);
            if (cj == null)
            {
                reason = $"start job rejected, not found job with id {jobName}";
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, reason);
                return false;
            }
            if (RtInstance.ConfigType == ConfigType.Kepler2200)
            {
                if (!CheckSequenceKepler2200TemperatureReady(GetFirstProcessJob(cj).Sequence))
                {
                    return false;
                }
            }
            if (cj.State == EnumControlJobState.WaitingForStart)
            {
                cj.SetState(EnumControlJobState.Executing);
                //PreJobClean(cj);

                cj.JetState = EnumJetCtrlJobState.Quequed;

                cj.StartTime = DateTime.Now;

                _dbCallback.LotCreated(cj);
                _faCallback.JobStarted(cj, GetFirstProcessJob(cj));

                //if (!_blockingWatcher.IsRunning)
                //    _blockingWatcher.Restart();

                //ResetTraceFlag();
            }

            if (!_cycleWatch.IsRunning)
            {
                _cycleWatch.Restart();
            }

            if (!_lpCycleWafer.Keys.Contains(ModuleHelper.Converter(cj.Module)))
            {
                _lpCycleCount.Add(ModuleHelper.Converter(cj.Module), 0);
                _lpCycleWafer.Add(ModuleHelper.Converter(cj.Module), 0);
            }

            _cycleState = RState.Running;
            return true;
        }

        public void Clear()
        {
            foreach (var module in _dictModuleTask)
            {
                module.Value.Status = ModuleStatus.Idle;
                module.Value.Scheduler.ResetTask();
            }

            List<string> keys = _loadportControlJobDic.Keys.ToList();
            foreach (var key in keys)
            {
                _loadportControlJobDic[key] = null;
            }

            _lstWaferTasks.Clear();
            _tmSchdActions.Clear();
            _curTmAction.Clear();
            _efemSchdActions.Clear();
            _curEfemAction.Clear();
            _lstControlJobs.Clear();
            _lstProcessJobs.Clear();
            _cycleState = RState.End;
        }

        // manual return one wafer while system is auto running
        public bool ManualReturnWafer(object[] objs)
        {
            ModuleName SourceModule = (ModuleName)objs[0];
            int SourceSlot = (int)objs[1];

            if (!_dictModuleTask.Keys.Contains(SourceModule))
            {
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Invalid source module {SourceModule} for manual return wafer");
                return false;
            }

            if (WaferManager.Instance.CheckNoWafer(SourceModule, SourceSlot))
            {
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"Can not return wafer as {SourceModule} {SourceSlot} has no wafer");
                return false;
            }

            if (!_dictModuleTask[SourceModule].Scheduler.IsIdle)
            {
                LOG.Write(eEvent.WARN_ROUTER, ModuleName.System, $"The module: {SourceModule} is not ready for return wafer");
                return false;
            }

            var wafer = WaferManager.Instance.GetWafer(SourceModule, SourceSlot);
            LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Manual return  wafer: {wafer.WaferOrigin} at {SourceModule} {SourceSlot} while system is auto running");

            _qeReturnWafers.Enqueue(wafer);
            return true;
        }

        public RState CheckManualReturnWafer()
        {
            var pmWaferCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && WaferManager.Instance.CheckHasWafer(mod.Key, 0)).Count();
            var tmRobotWaferCount = (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 0) ? 1 : 0) + (WaferManager.Instance.CheckHasWafer(ModuleName.TMRobot, 1) ? 1 : 0);
            if (!_dictModuleTask[ModuleName.TMRobot].Scheduler.IsIdle && (pmWaferCount > 0 || tmRobotWaferCount > 0))
            {
                LOG.Write(eEvent.ERR_ROUTER, ModuleName.TMRobot, $"The TM Robot is not ready for return wafer.");
                return RState.Failed;
            }

            if (!_dictModuleTask[ModuleName.EfemRobot].Scheduler.IsIdle)
            {
                LOG.Write(eEvent.ERR_ROUTER, ModuleName.EfemRobot, $"The EFEM Robot is not ready for return wafer.");
                return RState.Failed;
            }

            foreach (var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsLoadPort(mod.Key))
                    continue;

                if (!mod.Value.Scheduler.IsIdle)
                {
                    LOG.Write(eEvent.ERR_ROUTER, mod.Key, $"{mod.Key} is not ready for return wafer.");
                    return RState.Failed;
                }

                int nSlotNumber = ModuleHelper.IsLoadLock(mod.Key) ? (mod.Key == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber) : (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsEFEMRobot(mod.Key) ? 2 : 1);
                for (int slot = 0; slot < nSlotNumber; slot++)
                {
                    var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
                    if (wafer.IsEmpty)
                        continue;

                    var destLP = (ModuleName)wafer.OriginStation;
                    if (!_dictModuleTask[destLP].Scheduler.IsAvailable)
                    {
                        LOG.Write(eEvent.ERR_ROUTER, destLP, $"The destination Loadport {destLP} is not ready for return wafer.");
                        return RState.Failed;
                    }
                }
            }

            Clear();
            return RState.Running;
        }

        public RState ReturnAllWafers()
        {
            int systemWaferCount = 0;
            foreach (var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsLoadPort(mod.Key))
                    continue;

                int nSlotNumber = ModuleHelper.IsLoadLock(mod.Key) ? (mod.Key == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber) : (ModuleHelper.IsTMRobot(mod.Key) || ModuleHelper.IsEFEMRobot(mod.Key) ? 2 : 1);
                for (int slot = 0; slot < nSlotNumber; slot++)
                {
                    var wafer = WaferManager.Instance.GetWafer(mod.Key, slot);
                    if (!wafer.IsEmpty)
                        systemWaferCount++;
                }
            }

            if (systemWaferCount == 0)
                return RState.End;

            ReturnVacWafers();
            ReturnAtmWafers();

            return RState.Running;
        }


        #endregion


        #region internal implementation
        private void InitModules()
        {
            foreach (var module in ModuleHelper.InstalledModules)
            {
                if (ModuleHelper.IsInstalled(module))
                {
                    if(ModuleHelper.IsPm(module))
                    {
                        _dictModuleTask[module] = new PMTask(module);
                    }
                    else if (ModuleHelper.IsLoadLock(module))
                    {
                        _dictModuleTask[module] = new LoadlockTask(module);
                    }
                    else if(ModuleHelper.IsLoadPort(module))
                    {
                        _dictModuleTask[module] = new LoadPortTask(module);
                    }
                    else if(ModuleHelper.IsTMRobot(module))
                    {
                        _dictModuleTask[module] = new TMRobotTask(module);
                    }
                    else if(ModuleHelper.IsEFEMRobot(module))
                    {
                        _dictModuleTask[module] = new EFEMRobotTask(module);
                    }
                    else if(ModuleHelper.IsAligner(module))
                    {
                        _dictModuleTask[module] = new AlignerTask(module);
                    }
                }
            }
        }

        private void prelude()
        {
            
        }

        private void epilogue()
        {
            UpdateProcessJobStatus();
            UpdateControlJobStatus();
            UpdateLLInOutPathProperty();
            PrepareLLPressure();

            CreateNewWaferTask();
            _lstWaferTasks.RemoveAll(item => ModuleHelper.IsLoadPort(item.destMod) && ModuleHelper.IsLoadPort(item.currentMod) && item.pressureStatus == RState.End);
        }

        private void RunWaferTask()
        {
            foreach (var task in _lstWaferTasks)
            {
                task.Run();
            }
        }

        private void RunModuleTasks()
        {
            foreach (var task in _dictModuleTask)
            {
                task.Value.Run();
            }
        }

        private bool CheckAllWaferReturned(ProcessJobInfo pj, bool checkAllProcessed)
        {
            bool allWaferReturn = true;
            foreach (var slot in pj.SlotWafers)
            {
                var wafer = WaferManager.Instance.GetWafer(slot.Item1, slot.Item2);
                if(wafer.IsEmpty || (wafer.ProcessState != EnumWaferProcessStatus.Completed && checkAllProcessed))
                {
                    allWaferReturn = false;
                    break;
                }
            }

            return allWaferReturn;
        }

        private void UpdateProcessJobStatus()
        {
            if (_efemRobotStatus == RState.Running || _tmRobotStatus == RState.Running)
                return;

            foreach (var pj in _lstProcessJobs)
            {
                if (CheckAllWaferReturned(pj, pj.State != EnumProcessJobState.Stopping))
                {
                    pj.SetState(EnumProcessJobState.ProcessingComplete);
                    JobDataRecorder.EndPJ(pj.InnerId.ToString(), 0, 0);
                }
            }
        }

        private void UpdateControlJobStatus()
        {
            if (_lstControlJobs.Count == 0 || _efemRobotStatus == RState.Running || _tmRobotStatus == RState.Running)
                return;

            bool allControlJobComplete = true;
            List<ControlJobInfo> cjRemoveList = new List<ControlJobInfo>();
            foreach (var cj in _lstControlJobs)
            {
                if (cj.JetState == EnumJetCtrlJobState.Quequed)  // active quequed control job: need prejob clean or don need prejob clean
                {
                    var runingJobs = _lstControlJobs.FindAll(job => IsCtrlJobRuning(job));
                    if (runingJobs.Count == 0 || (runingJobs.Count == 1 && IsCtrlJobEndingState(runingJobs.First())))
                    {
                        var quequedJobs = _lstControlJobs.FindAll(job => job.JetState == EnumJetCtrlJobState.Quequed);
                        var firstQuequeJob = quequedJobs.OrderBy(job => job.StartTime).First();
                        if (firstQuequeJob.InnerId == cj.InnerId)
                        {
                            if (IsCtrlJobNeedPreClean(cj))
                            {
                                cj.JetState = EnumJetCtrlJobState.PreJobClean;

                                var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
                                foreach (var pm in PMs)
                                {
                                    var pmTask = _dictModuleTask[pm] as PMTask;
                                    if(pmTask != null && pmTask.Scheduler.IsOnline)
                                    {
                                        pmTask.InvokePreJobClean(cj.PreJobClean);
                                    }
                                }
                            }
                            else
                            {
                                ActiveControlJob(cj);
                            }
                        }
                    }
                }
                else if (IsCtrlJobRuning(cj))
                {
                    if (cj.JetState == EnumJetCtrlJobState.PreJobClean)
                    {
                        if (IsPreJobCleanDone(cj))
                        {
                            ActiveControlJob(cj);
                        }
                    }
                    else
                    {
                        if (cj.JetState == EnumJetCtrlJobState.Processing && IsCtrlJobNeedPostClean(cj))  // active post job clean
                        {
                            if (IsAllJobWaferProcessedOrProcessing(cj))
                            {
                                cj.JetState = EnumJetCtrlJobState.PostJobClean;
                                var PMs = GetWaitPreCleanPMsByCtrlJob(cj);
                                foreach (var pm in PMs)
                                {
                                    var pmTask = _dictModuleTask[pm] as PMTask;
                                    if (pmTask != null && pmTask.Scheduler.IsOnline)
                                    {
                                        pmTask.InvokePostJobClean(cj.PostJobClean);
                                    }
                                }
                            }
                        }

                        // control job complete
                        if (IsAllProcessJobComplete(cj) && (!IsCtrlJobNeedPostClean(cj) || cj.JetState == EnumJetCtrlJobState.PostJobClean && IsPostJobCleanDone(cj)))
                        {
                            cj.JetState = EnumJetCtrlJobState.Completed;

                            cj.SetState(EnumControlJobState.Completed);
                            cj.EndTime = DateTime.Now;

                            _faCallback.JobFinished(cj, GetFirstProcessJob(cj));
                            _dbCallback.LotFinished(cj);

                            if (!(_isCycleMode && _cycledCount < _cycleSetPoint))
                                (Singleton<TransferModule>.Instance.GetScheduler(ModuleHelper.Converter(cj.Module)) as SchedulerLoadPort).NoteJobComplete();

                            _lpCycleCount[ModuleHelper.Converter(cj.Module)]++;
                        }
                    }

                    int countProcessed = 0;
                    foreach (var pjName in cj.ProcessJobNameList)
                    {
                        var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                        if (pj == null)
                        {
                            LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
                            continue;
                        }

                        // caculate process wafer by process
                        if (_isCycleMode && _cycledCount < (_isCycleMode ? _cycleSetPoint : 0))
                        {
                            foreach (var pjSlotWafer in pj.SlotWafers)
                            {
                                WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);
                                if (!wafer.IsEmpty && wafer.ProcessState == EnumWaferProcessStatus.Completed)
                                    countProcessed++;
                            }
                        }
                    }

                    int lpCycleWafer = _lpCycleCount[ModuleHelper.Converter(cj.Module)] * cj.LotWafers.Count + (cj.JetState == EnumJetCtrlJobState.Completed && cj.LotWafers.Count == countProcessed ? 0 : countProcessed);
                    if (_lpCycleCount[ModuleHelper.Converter(cj.Module)] != _cycledCount || lpCycleWafer != _lpCycleWafer[ModuleHelper.Converter(cj.Module)])
                    {
                        _lpCycleWafer[ModuleHelper.Converter(cj.Module)] = lpCycleWafer;
                    }

                }

                LoadportCassetteState state = (LoadportCassetteState)DATA.Poll($"{cj.Module}.CassetteState");
                if (cj.State == EnumControlJobState.Completed && state != LoadportCassetteState.Normal && cj.JetState == EnumJetCtrlJobState.Completed)
                {
                    cjRemoveList.Add(cj);
                }

                allControlJobComplete = allControlJobComplete && cj.State == EnumControlJobState.Completed;
            }

            if (_isCycleMode && _cycledCount < (_isCycleMode ? _cycleSetPoint : 0))
            {
                int totolCycleWafer = _lpCycleWafer.Sum(item => item.Value);
                if (totolCycleWafer != _cycledWafer || _lpCycleCount.Sum(item => item.Value) > 0 && _throughput < 0.01)  // refresh _throughput in time
                {
                    _cycledWafer = totolCycleWafer;
                    if (_cycledCount > 0 || allControlJobComplete)
                    {
                        _throughput = (float)(_cycledWafer / _cycleWatch.Elapsed.TotalHours);
                    }
                    else
                    {
                        _throughput = 0;
                    }
                }

                if (allControlJobComplete)
                {
                    _cycledCount++;

                    LOG.Write(eEvent.EV_ROUTER, ModuleName.System, $"Cycle Count: {_cycledCount}, Total Processed Wafer: {_cycledWafer}, Throughput: {_throughput}");
                    if (_cycledCount < _cycleSetPoint)
                    {
                        foreach (var cj in _lstControlJobs)
                        {
                            cj.SetState(EnumControlJobState.Executing);
                            cj.JetState = EnumJetCtrlJobState.Quequed;

                            cj.LotInnerId = Guid.NewGuid();

                            _dbCallback.LotCreated(cj);
                        }
                        foreach (var pj in _lstProcessJobs)
                        {
                            pj.SetState(EnumProcessJobState.Queued);
                            pj.InnerId = Guid.NewGuid();
                            foreach (var pjSlotWafer in pj.SlotWafers)
                            {
                                WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);

                                wafer.ProcessJob = null;
                                wafer.NextSequenceStep = 0;
                                wafer.ProcessState = EnumWaferProcessStatus.Idle;
                            }
                        }

                        _lstWaferTasks.Clear();
                    }
                    else
                        _cycleState = RState.End;
                }

            }

            foreach (var cj in cjRemoveList)
            {
                List<ProcessJobInfo> pjRemoveList = new List<ProcessJobInfo>();
                foreach (var pj in _lstProcessJobs)
                {
                    if (pj.ControlJobName == cj.Name)
                        pjRemoveList.Add(pj);
                }

                foreach (var pj in pjRemoveList)
                {
                    _lstProcessJobs.Remove(pj);
                }

                _lstControlJobs.Remove(cj);
            }
        }

        private bool ActiveProcessJob(ProcessJobInfo pj)
        {
            foreach (var pjSlotWafer in pj.SlotWafers)
            {
                WaferInfo wafer = WaferManager.Instance.GetWafer(pjSlotWafer.Item1, pjSlotWafer.Item2);

                wafer.ProcessJob = pj;
                wafer.NextSequenceStep = 0;

                WaferDataRecorder.SetPjInfo(wafer.InnerId.ToString(), pj.InnerId.ToString());
            }

            ControlJobInfo cj = _lstControlJobs.Find(x => x.Name == pj.ControlJobName);

            CarrierInfo carrier = CarrierManager.Instance.GetCarrier(cj.Module);
            JobDataRecorder.StartPJ(pj.InnerId.ToString(), carrier.InnerId.ToString(), cj.InnerId.ToString(), pj.Name, cj.Module, cj.Module, pj.SlotWafers.Count);

            pj.SetState(EnumProcessJobState.Processing);

            return true;
        }

        private bool ActiveControlJob(ControlJobInfo cj)
        {
            cj.JetState = EnumJetCtrlJobState.Processing;
            foreach (var pjName in cj.ProcessJobNameList)
            {
                var pj = _lstProcessJobs.Find(x => x.Name == pjName);
                if (pj == null)
                {
                    LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Not find pj named {pjName} in {cj.Name}");
                    continue;
                }

                if (pj.State == EnumProcessJobState.Queued)
                {
                    ActiveProcessJob(pj);
                }
            }

            return true;
        }

        private bool IsAllJobWaferProcessedOrProcessing(ControlJobInfo cj)
        {
            List<ModuleName> allModules = _dictModuleTask.Keys.ToList();
            int original = (int)ModuleHelper.Converter(cj.Module);
            foreach (var mod in allModules)
            {
                if (ModuleHelper.IsLoadPort(mod) && (int)mod != original)
                    continue;

                var wafers = WaferManager.Instance.GetWafers(mod);
                foreach (var wafer in wafers)
                {
                    if (wafer.IsEmpty || wafer.ProcessJob == null || wafer.ProcessJob.Sequence == null || wafer.ProcessJob.ControlJobName != cj.Name)
                        continue;

                    if (wafer.ProcessState != EnumWaferProcessStatus.Completed && wafer.ProcessState != EnumWaferProcessStatus.InProcess)
                        return false; ;
                }
            }

            return true;
        }

        private bool IsAllProcessJobComplete(ControlJobInfo cj)
        {
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name && pj.State != EnumProcessJobState.ProcessingComplete)
                {
                    return false;
                }
            }

            return true;
        }

        private bool IsCtrlJobRuning(ControlJobInfo cj)
        {
            return cj.JetState == EnumJetCtrlJobState.PreJobClean ||
                cj.JetState == EnumJetCtrlJobState.Processing ||
                cj.JetState == EnumJetCtrlJobState.PostJobClean;
        }

        private bool IsCtrlJobEndingState(ControlJobInfo cj)
        {
            return cj.JetState == EnumJetCtrlJobState.PostJobClean ||
                (cj.JetState == EnumJetCtrlJobState.Processing
                && IsAllJobWaferProcessedOrProcessing(cj)
                && !IsCtrlJobNeedPostClean(cj));
        }

        private bool IsCtrlJobNeedPreClean(ControlJobInfo cj)
        {
            return !string.IsNullOrWhiteSpace(cj.PreJobClean);
        }

        private bool IsCtrlJobNeedPostClean(ControlJobInfo cj)
        {
            return !string.IsNullOrWhiteSpace(cj.PostJobClean.Trim());
        }

        private List<ModuleName> GetWaitPreCleanPMsByCtrlJob(ControlJobInfo cj)
        {
            var pmlist = new List<ModuleName>();
            foreach (var pj in _lstProcessJobs)
            {
                if (pj.ControlJobName == cj.Name)
                {
                    foreach (var pm in pj.Sequence.PMs)
                    {
                        if (!pmlist.Contains(pm))
                            pmlist.Add(pm);
                    }
                }
            }

            return pmlist;
        }

        private bool IsPreJobCleanDone(ControlJobInfo cj)
        {
            var pms = GetWaitPreCleanPMsByCtrlJob(cj);
            foreach(var pm in pms)
            {
                var pmTask = _dictModuleTask[pm] as PMTask;
                if (pmTask.Scheduler.IsOnline && !pmTask.IsPreJobCleanDone())
                    return false;
            }

            return true;
        }

        private bool IsPostJobCleanDone(ControlJobInfo cj)
        {
            var pms = GetWaitPreCleanPMsByCtrlJob(cj);
            foreach (var pm in pms)
            {
                var pmTask = _dictModuleTask[pm] as PMTask;
                if (pmTask.Scheduler.IsOnline && !pmTask.IsPostJobCleanDone())
                    return false;
            }

            return true;
        }

        private void WaferArrived(WaferTask wafer, MoveItem item)
        {
            _dictModuleTask[item.DestinationModule].WaferArrived(wafer, item.DestinationSlot);
            //--2024-03-21 增加了PortJobWaferEnd 上报事件 start--
            if (ModuleHelper.IsLoadPort(item.DestinationModule))
            {
                ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.DestinationModule);
                if (currentControlJob != null)
                {
                    _faCallback.JobWaferEnd(currentControlJob, item.SourceSlot);
                }
            }
            //--2024-03-21 增加了PortJobWaferEnd 上报事件 end--
        }

        private void WaferLeaved(WaferTask wafer, MoveItem item)
        {
            _dictModuleTask[item.SourceModule].WaferLeaved(wafer, item.DestinationSlot);
            //--2024-03-21 增加了PortJobWaferStart 上报事件 start--
            if (ModuleHelper.IsLoadPort(item.SourceModule))
            {
                ControlJobInfo currentControlJob = GetLoadPortCurrentControlJob(item.SourceModule);
                if (currentControlJob != null)
                {
                    _faCallback.JobWaferStart(currentControlJob, item.SourceSlot);
                }
            }
            //--2024-03-21 增加了PortJobWaferStart 上报事件 end--
        }

        private ModuleName GetComingAvailablePM(ControlJobInfo cj)
        {
            var lstInProcessPMs = new List<ModuleName>();
            foreach (var wafer in cj.LotWafers)
            {
                if(!wafer.IsEmpty && wafer.NextSequenceStep == 0 && wafer.ProcessJob != null)
                {
                    foreach(var pm in wafer.ProcessJob.Sequence.PMs)
                    {
                        if (!lstInProcessPMs.Contains(pm))
                            lstInProcessPMs.Add(pm);
                    }
                }
            }

            Dictionary<ModuleName, int> pmAssociatedWaferCount = new Dictionary<ModuleName, int>();
            foreach (var mod in _dictModuleTask)
            {
                if (ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline && lstInProcessPMs.Contains(mod.Key))
                {
                    pmAssociatedWaferCount[mod.Key] = 0;
                }
            }

            var unprocessedWafer = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.destMod));
            foreach (var wafer in unprocessedWafer)
            {
                if (ModuleHelper.IsPm(wafer.destMod) && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && lstInProcessPMs.Contains(wafer.destMod))
                {
                    pmAssociatedWaferCount[wafer.destMod]++;
                }
            }

            var oderedPMCount = pmAssociatedWaferCount.OrderBy(p => p.Value).ToDictionary(p => p.Key, o => o.Value);
            if (oderedPMCount.Count > 0 && oderedPMCount.First().Value < 2)
                return oderedPMCount.First().Key;

            return ModuleName.System;
        }

        private void CreateNewWaferTask()
        {
            var cj = _lstControlJobs.Find(c => c.JetState == EnumJetCtrlJobState.PreJobClean || c.JetState == EnumJetCtrlJobState.Processing);
            if (cj != null)
            {
                var pm = GetComingAvailablePM(cj);
                if (pm != ModuleName.System)
                {
                    foreach (var wafer in cj.LotWafers)
                    {
                        if (wafer.IsEmpty || wafer.ProcessJob == null)
                            continue;

                        if (wafer.ProcessJob.Sequence.PMs.Contains(pm) && wafer.NextSequenceStep == 0 && !_lstWaferTasks.Exists(task => task.sourceMod == (ModuleName)wafer.OriginStation && task.sourceSlot == wafer.OriginSlot))
                        {
                            CreateWaferTasks(wafer, pm,  wafer.ProcessJob.Sequence.LLDelayTime);
                            return;
                        }
                    }
                }
            }
        }

        private void CreateWaferTasks(WaferInfo wafer, ModuleName pm, int LLDeayTime)
        {
            var recipeName = wafer.ProcessJob.Sequence.GetRecipe(pm);
            var recipeContent = RecipeFileManager.Instance.LoadRecipe(pm.ToString(), recipeName, false, RecipeType.Process.ToString());
            Recipe recipe = Recipe.Load(recipeContent);
            int temperature = 0;
            if(int.TryParse(recipe.Header.Temperature, out int temp))
            {
                temperature = temp;
            }
            
            var waferTask = new WaferTask((ModuleName)wafer.OriginStation,
                                            wafer.OriginSlot,
                                            pm,
                                            temperature,
                                            (float)Convert.ToDouble(recipe.Header.Temperature),
                                            wafer.InnerId,
                                            recipeName,
                                            wafer.ProcessJob.Sequence.WTWCleanRecipe,
                                            wafer.ProcessJob.Sequence.LLInOutPath, 
                                            LLDeayTime);

            waferTask.OnWaferArrived += WaferArrived;
            waferTask.OnWaferLeaved += WaferLeaved;

            _lstWaferTasks.Add(waferTask);
        }

        private bool ForwardATMWafers(ModuleName ll)
        {
            var waferStaus = GetLLReadyInOutSlots(ll);
            var atmWafers = _lstWaferTasks.Where(wafer => (wafer.movingStatus == RState.End ||wafer.movingStatus == RState.Init) && (ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod))).ToList();
            var notAlignedWafer = atmWafers.Where(wafer => !wafer.IsAligned).ToList();
            var readyInWafers = _lstWaferTasks.Where(wafer => ModuleHelper.IsLoadPort(wafer.currentMod) && wafer.movingStatus == RState.Init && wafer.pressureStatus == RState.Init).OrderBy(wafer => wafer.currentSlot).ToArray();
            var freeHands = GetEFEMFreeHand();

            if ((atmWafers.Count >= 2 && atmWafers.Count(wafer => !wafer.IsAligned) == 0) || freeHands.Count == 0 || readyInWafers.Length == 0)
                return false;

            // force all wafer aligned
            if (notAlignedWafer.Count > 0 && _lstWaferTasks.Count(wafer => ModuleHelper.IsAligner(wafer.currentMod)) == 0)
            {
                notAlignedWafer.First().RouteTo(ModuleName.Aligner1, 0);
                _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(notAlignedWafer.First().currentMod, notAlignedWafer.First().currentSlot, ModuleName.Aligner1, 0, (Hand)notAlignedWafer.First().currentSlot) });
            }
            // forward one wafer
            else if ((readyInWafers.Length > 0) && (atmWafers.Count == 0 || (atmWafers.Count == 1 && _lstWaferTasks.Count(wafer => ModuleHelper.IsAligner(wafer.currentMod)) == 0 && waferStaus.emptySlot.Count >= 2)))
            {
                readyInWafers[0].RouteTo(ModuleName.Aligner1, 0);

                // pick from LP
                _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyInWafers[0].currentMod, readyInWafers[0].currentSlot, ModuleName.EfemRobot, (int)freeHands[0], freeHands[0]) });

                // place to aligner
                _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.EfemRobot, (int)freeHands[0], ModuleName.Aligner1, 0, freeHands[0]) });
            }
            // forward aligner wafer
            else if (atmWafers.Count == 1 && waferStaus.emptySlot.Count >= 2 && ModuleHelper.IsAligner(atmWafers.First().currentMod) && freeHands.Count > 1)
            {
                atmWafers.First().RouteTo(ModuleName.EfemRobot, (int)freeHands[1]);

                _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(atmWafers.First().currentMod, atmWafers.First().currentSlot, ModuleName.EfemRobot, (int)freeHands[1], freeHands[1]) });
            }

            return _efemSchdActions.Count > 0;
        }

        private bool ExchangeWaferWithLL(ModuleName ll)
        {
            if (IsLLReservedByTM(ll))
                return false;

            var waferStaus = GetLLReadyInOutSlots(ll);
            var atmWafers = _lstWaferTasks.Where(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.IsAligned && (ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod))).ToList();
            var freeHands = GetEFEMFreeHand();

            var swapActions = new List<MoveItem>();
            var validHands = new List<Hand>();
            int placeCount = 0;
            if ( waferStaus.emptySlot.Count > 0 && 
                 freeHands.Count >= 1 && 
                 atmWafers.Count(wafer => ModuleHelper.IsAligner(wafer.currentMod)) == 1 && 
                (atmWafers.Count(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)) == 0 || waferStaus.emptySlot.Count >= 2))
            {
                var alignerWafer = atmWafers.Where(wafer => ModuleHelper.IsAligner(wafer.currentMod)).First();
                if(CanWaferGotoLL(alignerWafer, ll))
                {
                    alignerWafer.RouteTo(ll, waferStaus.emptySlot[placeCount]);

                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(alignerWafer.currentMod, alignerWafer.currentSlot, ModuleName.EfemRobot, (int)freeHands[0], freeHands[0]) });
                    swapActions.Add(new MoveItem(ModuleName.EfemRobot, (int)freeHands[0], ll, waferStaus.emptySlot[placeCount], freeHands[0]));
                    validHands.Add(freeHands[0]);
                    placeCount++;
                }
            }

            var armWafers = atmWafers.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)).ToArray();
            foreach(var wafer in armWafers)
            {
                if(CanWaferGotoLL(wafer, ll) && placeCount < waferStaus.emptySlot.Count)
                {
                    wafer.RouteTo(ll, waferStaus.emptySlot[placeCount]);

                    swapActions.Add(new MoveItem(wafer.currentMod, wafer.currentSlot, ll, waferStaus.emptySlot[placeCount], (Hand)wafer.currentSlot));
                    if(!validHands.Contains((Hand)wafer.currentSlot))
                        validHands.Add((Hand)wafer.currentSlot);
                         
                    placeCount++;
                }
            }

            if (!validHands.Contains(Hand.Blade1) && WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)Hand.Blade1) && _efemRobotSingleArmOption != 2)
                validHands.Add(Hand.Blade1);

            if (!validHands.Contains(Hand.Blade2) && WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, (int)Hand.Blade2) && _efemRobotSingleArmOption != 1)
                validHands.Add(Hand.Blade2);

            int pickCount = 0;
            var returnActions = new List<MoveItem>();
            foreach(var slot in waferStaus.outSlot)
            {
                if(pickCount < validHands.Count)
                {
                    var outWafer = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == ll && wafer.currentSlot == slot);
                    if(outWafer != null)
                    {
                        outWafer.RouteTo(outWafer.destMod, outWafer.destSlot);

                        swapActions.Add(new MoveItem(ll, waferStaus.outSlot[pickCount], ModuleName.EfemRobot, (int)validHands[pickCount], validHands[pickCount]));
                        returnActions.Add(new MoveItem(ModuleName.EfemRobot, (int)validHands[pickCount], outWafer.destMod, outWafer.destSlot, validHands[pickCount]));
                        pickCount++;
                    }
                }
            }
            
            if(swapActions.Count > 0)
            {
                _efemSchdActions.Enqueue(swapActions);
            }

            foreach(var action in returnActions)
            {
                _efemSchdActions.Enqueue(new List<MoveItem> { action });
            }

            return _efemSchdActions.Count > 0;
        }

        private void RoutingATMWafers()
        {
            if (_efemSchdActions.Count > 0 || _curEfemAction.Count > 0)
            {
                RunSchdEFEMActions();
                return;
            }

            if (_efemRobotStatus != RState.End)
                return;

            if(_LLASlotNumber == 2)
            {
                Routing2SlotATMSystem();
            }
            else if(_LLASlotNumber == 4)
            {
                Routing4SlotATMSystem();
            }
        }

        private void Routing4SlotATMSystem()
        {

            var atmWaferCount = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod)).Count();
            var efemRobotWafers = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)).ToList();
            if (LLInOutPath == SequenceLLInOutPath.AInBOut || LLInOutPath == SequenceLLInOutPath.BInAOut) // don need  check system wafer existence as no blocking risk 
            {
                var inLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLA : ModuleName.LLB;
                var outLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLB : ModuleName.LLA;
                var inLLWaferStatus = GetLLReadyInOutSlots(inLL);
                var outLLWaferStatus = GetLLReadyInOutSlots(outLL);
                if (efemRobotWafers.Count() >= 1)
                {
                    if (inLLWaferStatus.emptySlot.Count >= 2 && !IsLLReservedByTM(inLL)) // wait for in loadlock ready
                    {
                        if (_dictModuleTask[inLL].TimeToReady < 2)
                        {
                            ExchangeWaferWithLL(inLL);
                        }
                    }

                    if ((inLLWaferStatus.emptySlot.Count == 0 || (outLLWaferStatus.outSlot.Count >= 1 && _dictModuleTask[outLL].TimeToReady < 2)) && !IsLLReservedByTM(outLL)) // ready return wafer
                    {
                        ExchangeWaferWithLL(outLL);
                    }
                }
                else
                {
                    if (((outLLWaferStatus.outSlot.Count >= 2 && _dictModuleTask[outLL].TimeToReady < 10) ||
                        (outLLWaferStatus.outSlot.Count == 1 && _dictModuleTask[outLL].TimeToReady < 2)) && !IsLLReservedByTM(outLL))
                    {
                        ExchangeWaferWithLL(outLL);
                    }
                    else if (inLLWaferStatus.emptySlot.Count >= 2)
                    {
                        if (((_dictModuleTask[inLL].TimeToReady > 20 || _dictModuleTask[inLL].Scheduler.IsVac) && atmWaferCount < 2) || atmWaferCount == 0)
                        {
                            ForwardATMWafers(inLL);
                        }
                        else if (atmWaferCount >= 2 && !IsLLReservedByTM(inLL))
                        {
                            ExchangeWaferWithLL(inLL);
                        }
                    }
                }
            }
            else
            {
                RoutingSameLLInOutATMSystem();
            }
        }

        private void Routing2SlotATMSystem()
        {

            var atmWaferCount = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod)).Count();
            var efemRobotWafers = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod)).ToList();
            if (LLInOutPath == SequenceLLInOutPath.AInBOut || LLInOutPath == SequenceLLInOutPath.BInAOut) // don need  check system wafer existence as no blocking risk 
            {
                var inLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLA : ModuleName.LLB;
                var outLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLB : ModuleName.LLA;
                var inLLWaferStatus = GetLLReadyInOutSlots(inLL);
                var outLLWaferStatus = GetLLReadyInOutSlots(outLL);

                // whether can do double return in 5 second, single return with single arm option or LL under atm pressure
                if ((outLLWaferStatus.outSlot.Count == 2 && _dictModuleTask[outLL].TimeToReady < 5 && (atmWaferCount < 2 || !_dictModuleTask[outLL].Scheduler.IsAtm)) || 
                    (outLLWaferStatus.outSlot.Count == 1 && ((_dictModuleTask[outLL].TimeToReady < 2 && _dictModuleTask[outLL].Scheduler.IsAtm) 
                                                                || _efemRobotSingleArmOption != 0 
                                                                || _lstWaferTasks.Where(wt => ModuleHelper.IsLoadPort(wt.destMod)).Count() == 1)))
                {
                    if (ExchangeWaferWithLL(outLL))
                        return;
                }

                if(atmWaferCount == 0 || (atmWaferCount == 1 && inLLWaferStatus.emptySlot.Count == 2 && _efemRobotSingleArmOption == 0 && (outLLWaferStatus.outSlot.Count < 2 || _dictModuleTask[outLL].TimeToReady > 20)))
                {
                    if (ForwardATMWafers(inLL))
                        return;
                }

                if((inLLWaferStatus.emptySlot.Count == 2 || (inLLWaferStatus.emptySlot.Count == 1 && _efemRobotSingleArmOption != 0) && _dictModuleTask[inLL].TimeToReady < 2))
                {
                    ExchangeWaferWithLL(inLL);
                }
            }
            else
            {
                RoutingSameLLInOutATMSystem();
            }
        }

        private void RoutingSameLLInOutATMSystem()
        {
            var atmWaferCount = _lstWaferTasks.Where(wafer => ModuleHelper.IsEFEMRobot(wafer.currentMod) || ModuleHelper.IsAligner(wafer.currentMod)).Count();
            var vacWaferCount = _lstWaferTasks.Where(task => ModuleHelper.IsPm(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod) || ModuleHelper.IsLoadLock(task.currentMod)).Count();
            var preferWaferVacCount = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsOnline).Count() +
                                      (LLInOutPath == SequenceLLInOutPath.AInAOut ? _LLASlotNumber / 2 : (LLInOutPath == SequenceLLInOutPath.BInBOut ? _LLBSlotNumber / 2 : _LLASlotNumber));
            var inOutIndicator = vacWaferCount - preferWaferVacCount;
            if (inOutIndicator < 0)
            {
                // ready to push in 
                var readyLLs = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                        ((mod.Key == ModuleName.LLA && LLInOutPath != SequenceLLInOutPath.BInBOut) || (mod.Key == ModuleName.LLB && LLInOutPath != SequenceLLInOutPath.AInAOut)) &&
                        mod.Value.TimeToReady <= 10 &&
                        !IsLLReservedByTM(mod.Key) &&
                        GetLLReadyInOutSlots(mod.Key).emptySlot.Count >= 1).
                        OrderBy(mod => mod.Value.TimeToReady).ToList();

                if (atmWaferCount >= 1)
                {
                    foreach(var ll in readyLLs)
                    {
                        if (ExchangeWaferWithLL(ll.Key))
                            return;
                    }
                }

                // forward wafer to system
                if (atmWaferCount < 2)
                {
                    var targetLL = readyLLs.Count > 0 ? readyLLs.First().Key : (LLInOutPath == SequenceLLInOutPath.BInBOut ? ModuleName.LLB : ModuleName.LLA);
                    ForwardATMWafers(targetLL);
                }

                if (_efemSchdActions.Count == 0)
                {
                    var readyReturnLL = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                            ((mod.Key == ModuleName.LLA && LLInOutPath != SequenceLLInOutPath.BInBOut) || (mod.Key == ModuleName.LLB && LLInOutPath != SequenceLLInOutPath.AInAOut)) &&
                            mod.Value.TimeToReady <= 5 &&
                            !IsLLReservedByTM(mod.Key) &&
                            GetLLReadyInOutSlots(mod.Key).outSlot.Count >= 1).
                            OrderByDescending(mod => GetLLReadyInOutSlots(mod.Key).outSlot.Count).ToList();

                    foreach(var ll in readyReturnLL)
                    {
                        if (ExchangeWaferWithLL(readyReturnLL.First().Key))
                            return;
                    }
                }
            }
            else
            {
                // ready double return LL
                var readyDoubleReturnLL = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                        mod.Value.TimeToReady < 10 &&
                        !IsLLReservedByTM(mod.Key) &&
                        GetLLReadyInOutSlots(mod.Key).outSlot.Count > 1).
                        OrderBy(mod => mod.Value.TimeToReady).ToList();


                foreach(var ll in readyDoubleReturnLL)
                {
                    if (ExchangeWaferWithLL(ll.Key))
                        return;
                }

                // ready single return LL
                var readySingleReturnLL = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                        mod.Value.TimeToReady < 2 &&
                        !IsLLReservedByTM(mod.Key) &&
                        GetLLReadyInOutSlots(mod.Key).outSlot.Count == 1).
                        OrderBy(mod => mod.Value.TimeToReady).ToList();

                foreach (var ll in readySingleReturnLL)
                {
                    if (ExchangeWaferWithLL(ll.Key))
                        return;
                }

                if (atmWaferCount == 0)
                {
                    // ready to push in 
                    var readyLLs = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) &&
                            ((mod.Key != ModuleName.LLA && LLInOutPath == SequenceLLInOutPath.BInBOut) || (mod.Key != ModuleName.LLB && LLInOutPath == SequenceLLInOutPath.AInAOut)) &&
                            mod.Value.TimeToReady <= 10 &&
                            !IsLLReservedByTM(mod.Key) &&
                            GetLLReadyInOutSlots(mod.Key).emptySlot.Count > 1).
                            OrderBy(mod => mod.Value.TimeToReady).ToList();

                    foreach(var ll in readyLLs)
                    {
                        if (ForwardATMWafers(ll.Key))
                            return;
                    }
                }
            }
        }

        private bool isReturnActionsDone(List<MoveItem> items)
        {
            foreach(var item in items)
            {
                if (WaferManager.Instance.CheckHasWafer(item.SourceModule, item.SourceSlot) || WaferManager.Instance.CheckNoWafer(item.DestinationModule, item.DestinationSlot))
                    return false;
            }
            return true;
        }


        private bool IsMovingActionsDone(List<MoveItem> actions)
        {
            foreach(var ac in actions)
            {
                var task = _lstWaferTasks.Find(wafer => (wafer.currentMod == ac.SourceModule && wafer.currentSlot == ac.SourceSlot) || (wafer.currentMod == ac.DestinationModule && wafer.currentSlot == ac.DestinationSlot));
                if (task != null && task.movingStatus == RState.Running)
                    return false; ;
            }

            return true;
        }

        private bool IsLLReservedByTM(ModuleName ll)
        {
            foreach(var item in _curTmAction)
            {
                if (item.DestinationModule == ll || item.SourceModule == ll)
                    return true;
            }

            foreach(var action in _tmSchdActions)
            {
                foreach(var item in action)
                {
                    if (item.DestinationModule == ll || item.SourceModule == ll)
                        return true;
                }
            }

            return false;
        }

        private bool IsLLReservedByEFEM(ModuleName ll)
        {
            foreach (var item in _curEfemAction)
            {
                if (item.DestinationModule == ll || item.SourceModule == ll)
                    return true;
            }

            foreach (var action in _efemSchdActions)
            {
                foreach (var item in action)
                {
                    if (item.DestinationModule == ll || item.SourceModule == ll)
                        return true;
                }
            }

            return false;
        }

        private void RunSchdEFEMActions()
        {
            var efemRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot) as SchedulerEfemRobot;
            if (efemRobot == null || !efemRobot.IsAvailable)
                return;
   
            if (_dictModuleTask[ModuleName.EfemRobot].IsIdle)
            {
                if(_efemSchdActions.Count > 0 )
                {
                    if(_curEfemAction.Count == 0 || IsMovingActionsDone(_curEfemAction))
                    {
                        var nextActions = _efemSchdActions.First();
                        if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
                            return;

                        var nextModule = nextActions.First().Module;

                        if (ModuleHelper.IsLoadLock(nextModule) && !_dictModuleTask[nextModule].IsIdle)
                            return;

                        _curEfemAction = _efemSchdActions.Dequeue();
                        foreach (var action in _curEfemAction)
                        {
                            var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
                            waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);                            
                        }

                        (_dictModuleTask[ModuleName.EfemRobot].Scheduler as SchedulerEfemRobot).PostMoveItems(_curEfemAction.ToArray());
                    }
                }
                else if(_curEfemAction.Count >= 0 && IsMovingActionsDone(_curEfemAction)) // all scheduled actions done
                {
                    _curEfemAction.Clear();
                }
            }
        }

        private void RunSchdTMActions()
        {
            if (_dictModuleTask[ModuleName.TMRobot].IsIdle)
            {
                if (_tmSchdActions.Count > 0)
                {
                    if (_curTmAction.Count == 0 || IsMovingActionsDone(_curTmAction))
                    {
                        var nextActions = _tmSchdActions.First();
                        if (nextActions.Exists(action => !_lstWaferTasks.Exists(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot)))
                            return;

                        if (ModuleHelper.IsPm(nextActions.First().Module) && !_dictModuleTask[nextActions.First().Module].IsIdle)  /// wait PMTask status update to idle
                            return;

                        _curTmAction = _tmSchdActions.Dequeue();
                        foreach(var action in _curTmAction)
                        {
                            var waferTask = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
                            waferTask.MoveTo(action.DestinationModule, action.DestinationSlot);
                        }

                        (_dictModuleTask[ModuleName.TMRobot].Scheduler as SchedulerTMRobot).SendMoveItems(_curTmAction.ToArray());
                    }
                }
                else if (_curTmAction.Count >= 0 && IsMovingActionsDone(_curTmAction)) // all scheduled actions done
                {
                    _curTmAction.Clear();
                }
            }
        }

        private int TimeForNextModuleReady(WaferTask task)
        {
            if (ModuleHelper.IsPm(task.destMod) && (ModuleHelper.IsLoadLock(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod)))
                return _dictModuleTask[task.destMod].TimeToReady;

            var llbWaferStatus = GetLLReadyInOutSlots(ModuleName.LLB);
            var llaWaferStatus = GetLLReadyInOutSlots(ModuleName.LLA);

            if (ModuleHelper.IsLoadPort(task.destMod) && (ModuleHelper.IsPm(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod)))
            {
                if (task.llInOutPath == SequenceLLInOutPath.AInBOut || task.llInOutPath == SequenceLLInOutPath.BInBOut)
                {
                    if(llbWaferStatus.emptySlot.Count > 0)
                    {
                        return _dictModuleTask[ModuleName.LLB].TimeToReady;
                    }
                }
                else if(task.llInOutPath == SequenceLLInOutPath.BInAOut || task.llInOutPath == SequenceLLInOutPath.AInAOut)
                {
                    if(llaWaferStatus.emptySlot.Count > 0)
                    {
                        return _dictModuleTask[ModuleName.LLA].TimeToReady;
                    }
                }
                else if(task.llInOutPath == SequenceLLInOutPath.DInDOut)
                {
                    if(llaWaferStatus.emptySlot.Count > 0 && llbWaferStatus.emptySlot.Count > 0)
                    {
                        if (_dictModuleTask[ModuleName.LLA].TimeToReady == _dictModuleTask[ModuleName.LLB].TimeToReady)
                        {
                            return _dictModuleTask[ModuleName.LLA].TimeToReady;
                        }
                        else
                        {
                            return Math.Min(_dictModuleTask[ModuleName.LLA].TimeToReady, _dictModuleTask[ModuleName.LLB].TimeToReady);
                        }
                    }
                    else if(llaWaferStatus.emptySlot.Count > 0)
                    {
                        return _dictModuleTask[ModuleName.LLA].TimeToReady;
                    }
                    else if(llbWaferStatus.emptySlot.Count > 0)
                    {
                        return _dictModuleTask[ModuleName.LLB].TimeToReady;
                    }
                }
            }
            else if(ModuleHelper.IsPm(task.destMod) && (ModuleHelper.IsLoadLock(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod)))
            {
                if(_lstWaferTasks.Find(wafer => wafer.currentMod == task.destMod || wafer.routedMod == task.destMod) == null)
                {
                    return _dictModuleTask[task.destMod].TimeToReady;
                }
            }

            return int.MaxValue;
        }

        List<Hand> GetTMValidFreeHands(List<WaferTask> robotWafers, List<MoveItem> swapActions)
        {
            var hands = new List<Hand>();
            for(int i = 0; i < 2; i++)
            {
                if(_tmRobotSingleArmOption == 0 || _tmRobotSingleArmOption == i + 1)
                {
                    if ((!robotWafers.Exists(wafer => wafer.currentSlot == i) ||
                            ( robotWafers.Exists(wafer => wafer.currentSlot == i) &&
                              swapActions.Exists(item => item.SourceModule == ModuleName.TMRobot && item.SourceSlot == i))) &&
                        !swapActions.Exists(item => item.DestinationModule == ModuleName.TMRobot && item.DestinationSlot == i))
                        hands.Add((Hand)i);
                }
            }

            return hands;
        }

        (ModuleName llPath, List<MoveItem> swapActions) FindBestLLSwapPlan(ModuleName ll, List<WaferTask> robotWafers)
        {
            ModuleName path = ll == ModuleName.System ? ModuleName.System : ll;
            List<ModuleName> lls = ll == ModuleName.System ? new List<ModuleName> { ModuleName.LLA, ModuleName.LLB } : new List<ModuleName> { ll };
            List<MoveItem> actions = new List<MoveItem>();

            Dictionary<ModuleName, List<MoveItem>> llSwapActions = new Dictionary<ModuleName, List<MoveItem>>();
            foreach (var loadlock in lls)
            {
                llSwapActions[loadlock] = new List<MoveItem>();

                if (IsLLReservedByEFEM(loadlock))
                    continue;

                var llWaferStatus = GetLLReadyInOutSlots(loadlock);
                foreach(var wafer in robotWafers)
                {
                    if(_dictModuleTask[loadlock].TimeToReady == 0 && !IsLLReservedByEFEM(loadlock) && CanWaferGotoLL(wafer,loadlock) && llWaferStatus.emptySlot.Count > llSwapActions[loadlock].Count)
                    {
                        llSwapActions[loadlock].Add(new MoveItem(ModuleName.TMRobot, wafer.currentSlot, loadlock, llWaferStatus.emptySlot[llSwapActions[loadlock].Count], (Hand)wafer.currentSlot));
                    }
                }

                int prePickTime = 20;
                int prePickCount = 0;
                var hands = GetTMValidFreeHands(robotWafers, llSwapActions[loadlock]);
                foreach (var slot in llWaferStatus.inSlot)
                {
                    var wafer = _lstWaferTasks.Find(task => task.currentMod == loadlock && task.currentSlot == slot);
                    if (wafer != null && _dictModuleTask[wafer.destMod].TimeToReady <= prePickTime && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && hands.Count > prePickCount)
                    {
                        if(_lstWaferTasks.Exists(task => task.currentMod == wafer.destMod))
                        {
                            if( hands.Count == 2 && prePickCount == 0 && (_dictModuleTask.Count(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.TimeToReady < prePickTime && WaferManager.Instance.CheckNoWafer(mod.Key, 0)) == 0 || llWaferStatus.inSlot.Count == 1))
                            {
                                llSwapActions[loadlock].Add(new MoveItem(loadlock, slot, ModuleName.TMRobot, (int)hands[prePickCount], hands[prePickCount]));
                                prePickCount++;
                                break;
                            }
                        }
                        else
                        {
                            llSwapActions[loadlock].Add(new MoveItem(loadlock, slot, ModuleName.TMRobot, (int)hands[prePickCount], hands[prePickCount]));
                            prePickCount++;
                        }
                    }
                }
            }

            var validateActions = llSwapActions.Where(item => item.Value.Count > 0).ToDictionary(k => k.Key, v => v.Value);
            if(validateActions.Count == 1)
            {
                (path, actions) = (validateActions.First().Key, validateActions.First().Value);
            }
            else if(validateActions.Count == 2)
            {
                var sortedActions = validateActions.OrderByDescending(item => item.Value.Count + (_dictModuleTask[item.Key].Scheduler.IsVac ? 2 : 0)).ToDictionary(k => k.Key, v => v.Value);
                (path, actions) = (sortedActions.First().Key, sortedActions.First().Value);
            }

            return (path, actions);
        }

        (List<WaferTask> pmWafers, ModuleName destLL, List<MoveItem> swapAction) FindBestReturnWafersPlan(Hand[] freeHands)
        {
            Dictionary<ModuleName, List<WaferTask>> returnWafers = new Dictionary<ModuleName, List<WaferTask>>();
            Dictionary<ModuleName, List<MoveItem>> llSwapActions = new Dictionary<ModuleName, List<MoveItem>>();
            Dictionary<ModuleName, int> llValues = new Dictionary<ModuleName, int>();
            foreach(var ll in new List<ModuleName> { ModuleName.LLA, ModuleName.LLB})
            {
                var llWaferStatus = GetLLReadyInOutSlots(ll);
                returnWafers[ll] = new List<WaferTask>();
                llSwapActions[ll] = new List<MoveItem>();
                llValues[ll] = 0;

                if (IsLLReservedByEFEM(ll))
                    continue;

                var readyReturnWafers = _lstWaferTasks.Where( wafer => ModuleHelper.IsPm(wafer.currentMod) &&
                                                                ModuleHelper.IsLoadPort(wafer.destMod) &&
                                                                wafer.movingStatus == RState.End &&
                                                                _dictModuleTask[wafer.currentMod].TimeToReady <= 2 && 
                                                                CanWaferGotoLL(wafer, ll)).Take(Math.Min(freeHands.Length, llWaferStatus.emptySlot.Count)).ToList();

                int prePickTime = 10 * llSwapActions[ll].Count;
                int handIndex = 0;
                if(_dictModuleTask[ll].TimeToReady <= prePickTime)
                {
                    foreach (var wafer in readyReturnWafers)
                    {
                        if(handIndex < freeHands.Length)
                        {
                            returnWafers[ll].Add(wafer);
                            llSwapActions[ll].Add(new MoveItem(ModuleName.TMRobot, (int)freeHands[handIndex], ll, llWaferStatus.emptySlot[handIndex], freeHands[handIndex]));
                            handIndex++;
                        }
                    }

                    int prePickCount = 0;
                    handIndex = 0;
                    foreach (var slot in llWaferStatus.inSlot)
                    {
                        var wafer = _lstWaferTasks.Find(task => task.currentMod == ll && task.currentSlot == slot);
                        if (wafer != null && _dictModuleTask[wafer.destMod].TimeToReady <= prePickTime && _dictModuleTask[wafer.destMod].Scheduler.IsOnline && freeHands.Length > prePickCount)
                        {
                            if (_lstWaferTasks.Exists(task => task.currentMod == wafer.destMod))
                            {
                                if (freeHands.Length == 2 && prePickCount == 0 && (_dictModuleTask.Count(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.TimeToReady <= prePickTime && WaferManager.Instance.CheckNoWafer(mod.Key, 0)) == 0 || llWaferStatus.inSlot.Count == 1))
                                {
                                    llSwapActions[ll].Add(new MoveItem(ll, slot, ModuleName.TMRobot, (int)freeHands[prePickCount], freeHands[prePickCount]));
                                    prePickCount++;
                                    break;
                                }
                            }
                            else
                            {
                                llSwapActions[ll].Add(new MoveItem(ll, slot, ModuleName.TMRobot, (int)freeHands[prePickCount], freeHands[prePickCount]));
                                prePickCount++;
                            }
                        }
                    }

                    llValues[ll] = returnWafers[ll].Count * 2 + llSwapActions[ll].Count + (_dictModuleTask[ll].Scheduler.IsVac && returnWafers[ll].Count > 0 ? 2 : 0);
                }
            }

            var preferLL = llValues.OrderByDescending(v => v.Value).First().Key;
            return (returnWafers[preferLL], preferLL, llSwapActions[preferLL]);
        }

        void RoutingTMSwapActions(List<MoveItem> actions)
        {
            foreach (var action in actions)
            {
                if (ModuleHelper.IsTMRobot(action.SourceModule))
                {
                    var waferTask = _lstWaferTasks.Find(wafer => wafer.currentMod == ModuleName.TMRobot && wafer.currentSlot == action.SourceSlot);
                    waferTask.RouteTo(action.DestinationModule, action.DestinationSlot);
                }
                else
                {
                    var waferTask = _lstWaferTasks.Find(wafer => wafer.currentMod == action.SourceModule && wafer.currentSlot == action.SourceSlot);
                    waferTask.RouteTo(action.DestinationModule, action.DestinationSlot);
                }
            }
        }

        private bool ManaulReturnPMWafer()
        {
            var mReturnWafer = _qeReturnWafers.Peek();
            if (ModuleHelper.IsPm((ModuleName)mReturnWafer.Station))
            {
                var hands = GetTMValidFreeHands(_lstWaferTasks.Where(wt => ModuleHelper.IsTMRobot(wt.currentMod)).ToList(), new List<MoveItem>());
                var waferTask = _lstWaferTasks.Find(wt => wt.currentMod == (ModuleName)mReturnWafer.Station && wt.waferId == mReturnWafer.InnerId);
                if (waferTask != null && hands.Count > 0)
                {
                    waferTask.Return();
                    var outLL = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) && CanWaferGotoLL(waferTask, mod.Key) && GetLLReadyInOutSlots(mod.Key).emptySlot.Count > 0 && !IsLLReservedByEFEM(mod.Key));
                    if (outLL.Count() > 0)
                    {
                        var slot = GetLLReadyInOutSlots(outLL.First().Key).emptySlot.First();
                        waferTask.RouteTo(outLL.First().Key, slot);
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(waferTask.currentMod, 0, ModuleName.TMRobot, (int)hands.First(), hands.First()) });
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hands.First(), outLL.First().Key, slot, hands.First()) });
                        _qeReturnWafers.Dequeue();
                        return true;
                    }
                }
            }

            return false;
        }

        private void RoutingVacWafers()
        {
            if(_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
            {
                RunSchdTMActions();
                return;
            }

            if(_tmRobotStatus == RState.End)
            {
                // handle manual return wafer if exist
                if(_qeReturnWafers.Count > 0)
                {
                    if (ManaulReturnPMWafer())
                        return;
                }

                if(_LLASlotNumber == 2)
                {
                    Routing2SlotVacSystem();
                }
                else if(_LLASlotNumber == 4)
                {
                    Routing4SlotVacSystem();
                }
            }
        }

        private void Routing2SlotVacSystem()
        {
            var robotWafers = _lstWaferTasks.Where(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && ModuleHelper.IsTMRobot(wafer.currentMod)).OrderBy(wafer => TimeForNextModuleReady(wafer)).ToList();
            if (LLInOutPath == SequenceLLInOutPath.AInBOut || LLInOutPath == SequenceLLInOutPath.BInAOut)
            {
                var inLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLA : ModuleName.LLB;
                var outLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLB : ModuleName.LLA;
                var inLLWaferStatus = GetLLReadyInOutSlots(inLL);
                var outLLWaferStatus = GetLLReadyInOutSlots(outLL);

                if(robotWafers.Count == 2)
                {
                    int returnCount = 0;
                    foreach (var wafer in robotWafers)
                    {
                        if (ModuleHelper.IsPm(wafer.destMod))
                        {
                            if (_dictModuleTask[wafer.destMod].TimeToReady <= 5 &&
                                !_lstWaferTasks.Exists(waferT => waferT.currentMod == wafer.destMod) &&
                                !_lstWaferTasks.Exists(waferT => waferT.routedMod == wafer.destMod))
                            {
                                wafer.RouteTo(wafer.destMod, 0);
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, 0, (Hand)wafer.currentSlot) });
                            }
                        }
                        else
                        {
                            if (_dictModuleTask[outLL].TimeToReady <= 5 && !IsLLReservedByEFEM(outLL) && outLLWaferStatus.emptySlot.Count > returnCount)
                            {
                                wafer.RouteTo(outLL, outLLWaferStatus.emptySlot[returnCount]);
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, outLL, outLLWaferStatus.emptySlot[returnCount], (Hand)wafer.currentSlot) });
                                returnCount++;
                            }
                        }
                    }
                }
                else if(robotWafers.Count == 1)
                {
                    int freeHand = 1 - robotWafers.First().currentSlot;
                    if (ModuleHelper.IsPm(robotWafers.First().destMod))
                    {
                        if(_dictModuleTask[robotWafers.First().destMod].TimeToReady <= 5)
                        {
                            if(_lstWaferTasks.Exists(waferT => waferT.currentMod == robotWafers.First().destMod))
                            {
                                var pmActions = new List<MoveItem>();
                                var pmWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == robotWafers.First().destMod);
                                pmWafer.RouteTo(ModuleName.TMRobot, freeHand);
                                pmActions.Add(new MoveItem(pmWafer.currentMod, 0, ModuleName.TMRobot, freeHand, (Hand)freeHand));
                                pmActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, pmWafer.currentMod, 0, (Hand)robotWafers.First().currentSlot));
                                _tmSchdActions.Enqueue(pmActions);
                            }
                            else
                            {
                                robotWafers.First().RouteTo(robotWafers.First().destMod, 0);
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, robotWafers.First().destMod, 0, (Hand)robotWafers.First().currentSlot) });
                            }
                        }
                    }
                    else
                    {
                        if (_dictModuleTask[outLL].TimeToReady <= 5 && !IsLLReservedByEFEM(outLL) && outLLWaferStatus.emptySlot.Count > 0)
                        {
                            robotWafers.First().RouteTo(outLL, outLLWaferStatus.emptySlot[0]);
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, robotWafers.First().currentSlot, outLL, outLLWaferStatus.emptySlot[0], (Hand)robotWafers.First().currentSlot) });
                        }
                    }

                    if (_tmSchdActions.Count == 0 && _tmRobotSingleArmOption == 0)
                    {
                        // try push in one wafer
                        if (!IsLLReservedByEFEM(inLL) && _dictModuleTask[inLL].Scheduler.IsVac && inLLWaferStatus.inSlot.Count > 0)
                        {
                            foreach (var slot in inLLWaferStatus.inSlot)
                            {
                                var llWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == inLL && wafer.currentSlot == slot);
                                if (llWafer != null && !_lstWaferTasks.Exists(wt => wt.currentMod == llWafer.destMod) && _dictModuleTask[llWafer.destMod].TimeToReady < 15)
                                {
                                    llWafer.RouteTo(llWafer.destMod, 0);
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(inLL, slot, ModuleName.TMRobot, freeHand, (Hand)freeHand) });
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, freeHand, llWafer.destMod, 0, (Hand)freeHand) });
                                    return;
                                }
                            }
                        }

                        // try to return one wafer
                        if (!IsLLReservedByEFEM(outLL) && outLLWaferStatus.emptySlot.Count > 0)
                        {
                            var reayReturnWafer = _lstWaferTasks.Find(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod) && _dictModuleTask[wt.currentMod].TimeToReady <= 2);
                            if (reayReturnWafer != null)
                            {
                                reayReturnWafer.RouteTo(outLL, outLLWaferStatus.emptySlot[0]);
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(reayReturnWafer.currentMod, 0, ModuleName.TMRobot, freeHand, (Hand)freeHand) });
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, freeHand, outLL, outLLWaferStatus.emptySlot[0], (Hand)freeHand) });
                                return;
                            }
                        }
                    }
                }
                else // no wafer on robot arm
                {
                    var readyInPms = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && !_lstWaferTasks.Exists(wt => wt.currentMod == mod.Key) && mod.Value.Scheduler.IsOnline && mod.Value.TimeToReady <= 15);
                    var readyOutWafers = _lstWaferTasks.Where(wt => ModuleHelper.IsPm(wt.currentMod) && ModuleHelper.IsLoadPort(wt.destMod) && _dictModuleTask[wt.currentMod].TimeToReady <= 2).ToList() ;

                    if(_tmRobotSingleArmOption != 0)
                    {
                        var hands = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                        if (hands.Count == 0)
                            return;

                        if(!IsLLReservedByEFEM(inLL) && _dictModuleTask[inLL].TimeToReady <= 5 && inLLWaferStatus.inSlot.Count > 0 && readyInPms.Count() > 0)
                        {
                            foreach(var pm in readyInPms)
                            {
                                var llWafer = _lstWaferTasks.Find(wt => wt.currentMod == inLL && inLLWaferStatus.inSlot.Contains(wt.currentSlot) && wt.destMod == pm.Key);
                                if(llWafer != null)
                                {
                                    llWafer.RouteTo(llWafer.destMod, 0);
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(inLL, llWafer.currentSlot, ModuleName.TMRobot, (int)hands.First(), hands.First()) });
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hands.First(), llWafer.destMod, 0, hands.First()) });
                                    return;
                                }
                            }
                        }
                        
                        if(readyOutWafers.Count > 0 && !IsLLReservedByEFEM(outLL) && _dictModuleTask[outLL].TimeToReady < 50 && outLLWaferStatus.emptySlot.Count > 0)
                        {
                            var returnWafer = readyOutWafers.First();
                            returnWafer.RouteTo(outLL, outLLWaferStatus.emptySlot.First());
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(returnWafer.currentMod, 0, ModuleName.TMRobot, (int)hands.First(), hands.First()) });
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)hands.First(), outLL, outLLWaferStatus.emptySlot.First(), hands.First()) });
                            return;
                        }

                        return;
                    }

                    if(!IsLLReservedByEFEM(inLL) && _dictModuleTask[inLL].TimeToReady <= 5 && inLLWaferStatus.inSlot.Count > 0)
                    {
                        if(inLLWaferStatus.inSlot.Count == 2)
                        {
                            if(readyInPms.Count() > 0) // double move from LL to PM
                            {
                                int pickCount = 0;
                                var swapActions = new List<MoveItem>();
                                var singleActions = new List<MoveItem>();
                                foreach(var pm in readyInPms)
                                {
                                    var llWafer = _lstWaferTasks.Find(wt => wt.currentMod == inLL && inLLWaferStatus.inSlot.Contains(wt.currentSlot) && wt.destMod == pm.Key);
                                    if(llWafer != null)
                                    {
                                        llWafer.RouteTo(pm.Key, 0);
                                        swapActions.Add(new MoveItem(inLL, llWafer.currentSlot, ModuleName.TMRobot, pickCount, (Hand)pickCount));
                                        singleActions.Add(new MoveItem(ModuleName.TMRobot, pickCount, pm.Key, 0, (Hand)pickCount));
                                        pickCount++;
                                    }
                                }

                                if(pickCount == 1)
                                {
                                    int remainSlot = swapActions.First().SourceSlot == inLLWaferStatus.inSlot[0] ? inLLWaferStatus.inSlot[1] : inLLWaferStatus.inSlot[0];
                                    swapActions.Add(new MoveItem(inLL, remainSlot, ModuleName.TMRobot, 1, Hand.Blade2));
                                }

                                if(swapActions.Count > 0)
                                {
                                    _tmSchdActions.Enqueue(swapActions);
                                    foreach(var ac in singleActions)
                                    {
                                        _tmSchdActions.Enqueue(new List<MoveItem> { ac });
                                    }
                                }
                            }
                            else
                            {
                                foreach(var slot in inLLWaferStatus.inSlot)
                                {
                                    var llWafer = _lstWaferTasks.Find(wt => wt.currentMod == inLL && wt.currentSlot == slot);
                                    if (llWafer != null)
                                    {
                                        if(!_lstWaferTasks.Exists(wt => wt.currentMod == llWafer.destMod) && _dictModuleTask[llWafer.destMod].Scheduler.IsOnline)
                                        {
                                            var swapActions = new List<MoveItem>();
                                            swapActions.Add(new MoveItem(inLL, slot, ModuleName.TMRobot, 0, Hand.Blade1));
                                            int remainSlot = slot == inLLWaferStatus.inSlot[0] ? inLLWaferStatus.inSlot[1] : inLLWaferStatus.inSlot[0];
                                            swapActions.Add(new MoveItem(inLL, remainSlot, ModuleName.TMRobot, 1, Hand.Blade2));
                                            _tmSchdActions.Enqueue(swapActions);

                                            if (_dictModuleTask[llWafer.destMod].TimeToReady <= 30)
                                            {
                                                llWafer.RouteTo(llWafer.destMod, 0);
                                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, 0, llWafer.destMod, 0, Hand.Blade1) });
                                            }

                                            return;
                                        }
                                    }
                                }
                            }
                        }
                        else
                        {
                            var llWafer = _lstWaferTasks.Find(wt => wt.currentMod == inLL && wt.currentSlot == inLLWaferStatus.inSlot.First());
                            if (llWafer != null)
                            {
                                _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(inLL, inLLWaferStatus.inSlot.First(), ModuleName.TMRobot, 0, Hand.Blade1) });
                                if (!_lstWaferTasks.Exists(wt => wt.currentMod == llWafer.destMod) && _dictModuleTask[llWafer.destMod].TimeToReady < 15)
                                {
                                    llWafer.RouteTo(llWafer.destMod, 0);
                                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, 0, llWafer.destMod, 0, Hand.Blade1) });
                                }
                            }
                        }
                    }

                    if (_tmSchdActions.Count > 0)
                        return;

                    if(!IsLLReservedByEFEM(outLL) && outLLWaferStatus.emptySlot.Count > 0 && readyOutWafers.Count > 0)
                    {
                        if(readyOutWafers.Count >= 2 && outLLWaferStatus.emptySlot.Count == 2)
                        {
                            readyOutWafers[0].RouteTo(outLL, outLLWaferStatus.emptySlot[0]);
                            readyOutWafers[1].RouteTo(outLL, outLLWaferStatus.emptySlot[1]);
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyOutWafers[0].currentMod, readyOutWafers[0].currentSlot, ModuleName.TMRobot, 0, Hand.Blade1) });
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyOutWafers[1].currentMod, readyOutWafers[1].currentSlot, ModuleName.TMRobot, 1, Hand.Blade2) });
                            var swapActions = new List<MoveItem>();
                            swapActions.Add(new MoveItem(ModuleName.TMRobot, 0, outLL, outLLWaferStatus.emptySlot[0], Hand.Blade1));
                            swapActions.Add(new MoveItem(ModuleName.TMRobot, 1, outLL, outLLWaferStatus.emptySlot[1], Hand.Blade2));
                            _tmSchdActions.Enqueue(swapActions);
                        }
                        else
                        {
                            var freeHands = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                            readyOutWafers[0].RouteTo(outLL, outLLWaferStatus.emptySlot[0]);
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(readyOutWafers[0].currentMod, readyOutWafers[0].currentSlot, ModuleName.TMRobot, (int)freeHands[0], freeHands[0]) });
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, (int)freeHands[0], outLL, outLLWaferStatus.emptySlot[0], freeHands[0]) });
                        }
                    }
                }
            }
            else
            {
                if (robotWafers.Count == 2)
                {
                    foreach (var wafer in robotWafers)
                    {
                        if (wafer.movingStatus == RState.End &&
                            ModuleHelper.IsPm(wafer.destMod) &&
                            _dictModuleTask[wafer.destMod].TimeToReady == 0 &&
                            !_lstWaferTasks.Exists(waferT => waferT.currentMod == wafer.destMod) &&
                            !_lstWaferTasks.Exists(waferT => waferT.routedMod == wafer.destMod))
                        {
                            wafer.RouteTo(wafer.destMod, 0);
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, 0, (Hand)wafer.currentSlot) });
                        }
                    }

                    if (_tmSchdActions.Count == 0)
                    {
                        var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                        if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                        {
                            RoutingTMSwapActions(swapActions.swapActions);
                            _tmSchdActions.Enqueue(swapActions.swapActions);
                        }
                    }
                }
                else if (robotWafers.Count == 1)
                {
                    if (ModuleHelper.IsPm(robotWafers[0].destMod) && _dictModuleTask[robotWafers[0].destMod].TimeToReady == 0)
                    {
                        var pmActions = new List<MoveItem>();
                        var pmWafer = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == robotWafers[0].destMod && ModuleHelper.IsLoadPort(wafer.destMod));
                        if (pmWafer != null && string.IsNullOrWhiteSpace(pmWafer.wtwCleanRecipe))
                        {
                            int pickSlot = 1 - robotWafers[0].currentSlot;
                            pmWafer.RouteTo(ModuleName.TMRobot, pickSlot);
                            pmActions.Add(new MoveItem(pmWafer.currentMod, 0, ModuleName.TMRobot, pickSlot, (Hand)pickSlot));
                            pmActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers[0].currentSlot, pmWafer.currentMod, 0, (Hand)robotWafers[0].currentSlot));
                            _tmSchdActions.Enqueue(pmActions);
                            return;
                        }

                        if (!_lstWaferTasks.Exists(wafer => wafer.currentMod == robotWafers[0].destMod))
                        {
                            robotWafers[0].RouteTo(robotWafers[0].destMod, 0);
                            pmActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers[0].currentSlot, robotWafers[0].destMod, 0, (Hand)robotWafers[0].currentSlot));
                            _tmSchdActions.Enqueue(pmActions);
                            return;
                        }
                    }

                    // try to pick a wafer from LL
                    if (_tmSchdActions.Count == 0)
                    {
                        var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                        if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                        {
                            RoutingTMSwapActions(swapActions.swapActions);
                            _tmSchdActions.Enqueue(swapActions.swapActions);
                            return;
                        }
                    }

                    // try to return a wafer from PM
                    var freeHand = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                    var moveActions = FindBestReturnWafersPlan(freeHand.ToArray());
                    if (moveActions.pmWafers.Count > 0)
                    {
                        MoveItem placeAction = moveActions.swapAction.Find(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
                        moveActions.pmWafers.First().RouteTo(placeAction.DestinationModule, placeAction.DestinationSlot);
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(moveActions.pmWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand[0], freeHand[0]) });

                        MoveItem pickAction = moveActions.swapAction.Find(ac => ModuleHelper.IsLoadLock(ac.SourceModule));
                        if (pickAction != null)
                        {
                            var pickWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == pickAction.SourceModule && wafer.currentSlot == pickAction.SourceSlot);
                            pickWafer.RouteTo(pickAction.DestinationModule, pickAction.DestinationSlot);
                        }

                        _tmSchdActions.Enqueue(moveActions.swapAction);
                    }
                }
                else  // robot arm is empty
                {
                    // try return wafers from PM
                    var freeHand = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                    var moveActions = FindBestReturnWafersPlan(freeHand.ToArray());
                    if (moveActions.pmWafers.Count > 0)
                    {
                        int handIndex = 0;
                        var placeActions = moveActions.swapAction.Where(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
                        foreach (var action in placeActions)
                        {
                            moveActions.pmWafers[handIndex].RouteTo(action.DestinationModule, action.DestinationSlot);
                            _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(moveActions.pmWafers[handIndex].currentMod, 0, ModuleName.TMRobot, (int)freeHand[handIndex], freeHand[handIndex]) });
                            handIndex++;
                        }

                        var pickActions = moveActions.swapAction.Where(ac => ModuleHelper.IsLoadLock(ac.SourceModule)).ToList();
                        foreach (var ac in pickActions)
                        {
                            var llWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == ac.SourceModule && wafer.currentSlot == ac.SourceSlot);
                            llWafer.RouteTo(ac.DestinationModule, ac.DestinationSlot);
                        }

                        _tmSchdActions.Enqueue(moveActions.swapAction);
                    }

                    if (_tmSchdActions.Count == 0)
                    {
                        var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                        if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                        {
                            RoutingTMSwapActions(swapActions.swapActions);
                            _tmSchdActions.Enqueue(swapActions.swapActions);
                        }
                    }
                }
            }
            
        }

        private void Routing4SlotVacSystem()
        {
            var robotWafers = _lstWaferTasks.Where(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && ModuleHelper.IsTMRobot(wafer.currentMod)).OrderBy(wafer => TimeForNextModuleReady(wafer)).ToList();
            if (robotWafers.Count == 2)
            {
                foreach (var wafer in robotWafers)
                {
                    if (wafer.movingStatus == RState.End &&
                        ModuleHelper.IsPm(wafer.destMod) &&
                        _dictModuleTask[wafer.destMod].TimeToReady == 0 &&
                        !_lstWaferTasks.Exists(waferT => waferT.currentMod == wafer.destMod) &&
                        !_lstWaferTasks.Exists(waferT => waferT.routedMod == wafer.destMod))
                    {
                        wafer.RouteTo(wafer.destMod, 0);
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.TMRobot, wafer.currentSlot, wafer.destMod, 0, (Hand)wafer.currentSlot) });
                    }
                }

                if (_tmSchdActions.Count == 0)
                {
                    var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                    if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                    {
                        RoutingTMSwapActions(swapActions.swapActions);
                        _tmSchdActions.Enqueue(swapActions.swapActions);
                    }
                }
            }
            else if (robotWafers.Count == 1)
            {
                if (ModuleHelper.IsPm(robotWafers[0].destMod) && _dictModuleTask[robotWafers[0].destMod].TimeToReady == 0)
                {
                    var pmActions = new List<MoveItem>();
                    var pmWafer = _lstWaferTasks.Find(wafer => (wafer.movingStatus == RState.End || wafer.movingStatus == RState.Init) && wafer.currentMod == robotWafers[0].destMod && ModuleHelper.IsLoadPort(wafer.destMod));
                    if (pmWafer != null && string.IsNullOrWhiteSpace(pmWafer.wtwCleanRecipe))
                    {
                        int pickSlot = 1 - robotWafers[0].currentSlot;
                        pmWafer.RouteTo(ModuleName.TMRobot, pickSlot);
                        pmActions.Add(new MoveItem(pmWafer.currentMod, 0, ModuleName.TMRobot, pickSlot, (Hand)pickSlot));
                        pmActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers[0].currentSlot, pmWafer.currentMod, 0, (Hand)robotWafers[0].currentSlot));
                        _tmSchdActions.Enqueue(pmActions);
                        return;
                    }

                    if (!_lstWaferTasks.Exists(wafer => wafer.currentMod == robotWafers[0].destMod))
                    {
                        robotWafers[0].RouteTo(robotWafers[0].destMod, 0);
                        pmActions.Add(new MoveItem(ModuleName.TMRobot, robotWafers[0].currentSlot, robotWafers[0].destMod, 0, (Hand)robotWafers[0].currentSlot));
                        _tmSchdActions.Enqueue(pmActions);
                        return;
                    }
                }

                // try to pick a wafer from LL
                if (_tmSchdActions.Count == 0)
                {
                    var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                    if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                    {
                        RoutingTMSwapActions(swapActions.swapActions);
                        _tmSchdActions.Enqueue(swapActions.swapActions);
                        return;
                    }
                }

                // try to return a wafer from PM
                var freeHand = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                var moveActions = FindBestReturnWafersPlan(freeHand.ToArray());
                if (moveActions.pmWafers.Count > 0)
                {
                    MoveItem placeAction = moveActions.swapAction.Find(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
                    moveActions.pmWafers.First().RouteTo(placeAction.DestinationModule, placeAction.DestinationSlot);
                    _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(moveActions.pmWafers.First().currentMod, 0, ModuleName.TMRobot, (int)freeHand[0], freeHand[0]) });

                    MoveItem pickAction = moveActions.swapAction.Find(ac => ModuleHelper.IsLoadLock(ac.SourceModule));
                    if (pickAction != null)
                    {
                        var pickWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == pickAction.SourceModule && wafer.currentSlot == pickAction.SourceSlot);
                        pickWafer.RouteTo(pickAction.DestinationModule, pickAction.DestinationSlot);
                    }

                    _tmSchdActions.Enqueue(moveActions.swapAction);
                }
            }
            else  // robot arm is empty
            {
                // try return wafers from PM
                var freeHand = GetTMValidFreeHands(robotWafers, new List<MoveItem>());
                var moveActions = FindBestReturnWafersPlan(freeHand.ToArray());
                if (moveActions.pmWafers.Count > 0)
                {
                    int handIndex = 0;
                    var placeActions = moveActions.swapAction.Where(ac => ModuleHelper.IsLoadLock(ac.DestinationModule));
                    foreach (var action in placeActions)
                    {
                        moveActions.pmWafers[handIndex].RouteTo(action.DestinationModule, action.DestinationSlot);
                        _tmSchdActions.Enqueue(new List<MoveItem> { new MoveItem(moveActions.pmWafers[handIndex].currentMod, 0, ModuleName.TMRobot, (int)freeHand[handIndex], freeHand[handIndex]) });
                        handIndex++;
                    }

                    var pickActions = moveActions.swapAction.Where(ac => ModuleHelper.IsLoadLock(ac.SourceModule)).ToList();
                    foreach (var ac in pickActions)
                    {
                        var llWafer = _lstWaferTasks.Find(wafer => wafer.currentMod == ac.SourceModule && wafer.currentSlot == ac.SourceSlot);
                        llWafer.RouteTo(ac.DestinationModule, ac.DestinationSlot);
                    }

                    _tmSchdActions.Enqueue(moveActions.swapAction);
                }

                if (_tmSchdActions.Count == 0)
                {
                    var swapActions = FindBestLLSwapPlan(ModuleName.System, robotWafers);
                    if (swapActions.llPath != ModuleName.System && swapActions.swapActions.Count > 0)
                    {
                        RoutingTMSwapActions(swapActions.swapActions);
                        _tmSchdActions.Enqueue(swapActions.swapActions);
                    }
                }
            }
        }

        private List<Hand> GetTMFreeHand()
        {
            var lstHands = new List<Hand>();
            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 0) && _tmRobotSingleArmOption != 2)
                lstHands.Add(Hand.Blade1);

            if (WaferManager.Instance.CheckNoWafer(ModuleName.TMRobot, 1) && _tmRobotSingleArmOption != 1)
                lstHands.Add(Hand.Blade2);

            return lstHands;
        }

        private List<Hand> GetEFEMFreeHand()
        {
            var lstHands = new List<Hand>();
            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 0) && _efemRobotSingleArmOption != 2)
                lstHands.Add(Hand.Blade1);

            if (WaferManager.Instance.CheckNoWafer(ModuleName.EfemRobot, 1) && _efemRobotSingleArmOption != 1)
                lstHands.Add(Hand.Blade2);

            return lstHands;
        }

        private bool CanWaferGotoLL(WaferTask task, ModuleName ll)
        {
            bool bVacWafer = ModuleHelper.IsPm(task.currentMod) || ModuleHelper.IsTMRobot(task.currentMod);
            if (bVacWafer)
            {
                if (ModuleHelper.IsPm(task.destMod))
                    return false;

                switch (task.llInOutPath)
                {
                    case SequenceLLInOutPath.AInAOut:
                    case SequenceLLInOutPath.BInAOut:
                        return ll == ModuleName.LLA;
                    case SequenceLLInOutPath.AInBOut:
                    case SequenceLLInOutPath.BInBOut:
                        return ll == ModuleName.LLB;
                    case SequenceLLInOutPath.DInDOut:
                        return true;
                }
            }
            else
            {
                if (ModuleHelper.IsLoadPort(task.destMod))
                    return false;

                switch (task.llInOutPath)
                {
                    case SequenceLLInOutPath.AInAOut:
                    case SequenceLLInOutPath.AInBOut:
                        return ll == ModuleName.LLA;
                    case SequenceLLInOutPath.BInAOut:
                    case SequenceLLInOutPath.BInBOut:
                        return ll == ModuleName.LLB;
                    case SequenceLLInOutPath.DInDOut:
                        return true;
                }
            }

            return false;
        }

        private (List<int> inSlot, List<int> outSlot, List<int> emptySlot) GetLLReadyInOutSlots(ModuleName ll)
        {
            var readInSlots = new List<int>();
            var readyOutSlots = new List<int>();
            var emptySlots = new List<int>();
            for(int slot = 0; slot < (ll == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber); slot++)
            {
                if(WaferManager.Instance.CheckNoWafer(ll, slot) && !_lstWaferTasks.Exists(wafer => (wafer.routedMod == ll && wafer.routedSlot == slot) || (wafer.currentMod == ll && wafer.currentSlot == slot) || (wafer.nextMod == ll && wafer.nextSlot == slot)))
                {
                    emptySlots.Add(slot);
                }

                if(WaferManager.Instance.CheckHasWafer(ll, slot))
                {
                    Guid waferID = WaferManager.Instance.GetWafer(ll, slot).InnerId;
                    var waferTask = _lstWaferTasks.Find(wafer => wafer.waferId == waferID);
                    if(waferTask != null && waferTask.movingStatus == RState.End)
                    {
                        if (ModuleHelper.IsPm(waferTask.destMod))
                            readInSlots.Add(slot);
                        else if (_dictModuleTask[ll].Scheduler.WaferArrivedTicks(slot) > waferTask.llDelayTime * 1000)
                            readyOutSlots.Add(slot);
                    }
                }
            }

            return (readInSlots, readyOutSlots, emptySlots);
        }

        private (List<WaferInfo> wafers, List<int> emptySlots) GetLLWaferExistance(ModuleName ll)
        {
            var lstWafers = new List<WaferInfo>();
            var lstEmptySlots = new List<int>();

            for (int slot = 0; slot < (ll == ModuleName.LLA ? _LLASlotNumber : _LLBSlotNumber); slot++)
            {
                var wafer = WaferManager.Instance.GetWafer(ll, slot);
                if(wafer != null && !wafer.IsEmpty)
                {
                    lstWafers.Add(wafer);
                }
                else
                {
                    lstEmptySlots.Add(slot);
                }
            }
            
            return (lstWafers, lstEmptySlots);
        }

        private void PrepareLLPressure()
        {
            var preaparedLLs = new List<ModuleName>();
            var lls = _efemSchdActions.Where(acs => ModuleHelper.IsLoadLock(acs.First().Module)).Select(item => item.First().Module).ToList();
            if (_curEfemAction.Count == 0 && _efemSchdActions.Count > 0 && ModuleHelper.IsLoadLock(_efemSchdActions.First().First().Module))
                lls.Remove(_efemSchdActions.First().First().Module);

            foreach(var ll in lls)
            {
                if(_dictModuleTask[ll].Scheduler.IsAvailable && _dictModuleTask[ll].Scheduler.IsVac && !preaparedLLs.Contains(ll))
                {
                    (_dictModuleTask[ll].Scheduler as SchedulerLoadLock).PreVent();
                    preaparedLLs.Add(ll);
                }
            }

            lls = _tmSchdActions.Where(acs => ModuleHelper.IsLoadLock(acs.First().Module)).Select(item => item.First().Module).ToList();
            if(_curTmAction.Count == 0 && _tmSchdActions.Count > 0 && ModuleHelper.IsLoadLock(_tmSchdActions.First().First().Module))
                lls.Remove(_tmSchdActions.First().First().Module);

            foreach (var ll in lls)
            {
                if (_dictModuleTask[ll].Scheduler.IsAvailable && _dictModuleTask[ll].Scheduler.IsAtm && !preaparedLLs.Contains(ll))
                {
                    (_dictModuleTask[ll].Scheduler as SchedulerLoadLock).PrePump();
                    preaparedLLs.Add(ll);
                }
            }

            if (_efemSchdActions.Count > 0 || _curEfemAction.Count > 0 || _tmSchdActions.Count > 0 || _curTmAction.Count > 0)
                return;

            if (LLInOutPath == SequenceLLInOutPath.AInBOut || LLInOutPath == SequenceLLInOutPath.BInAOut)
            {
                var inLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLA : ModuleName.LLB;
                var outLL = LLInOutPath == SequenceLLInOutPath.AInBOut ? ModuleName.LLB : ModuleName.LLA;
                var inLLWaferCount = _lstWaferTasks.Where(wafer => wafer.currentMod == inLL).Count();
                var outLLWaferCount = _lstWaferTasks.Where(wafer => wafer.currentMod == outLL).Count();

                if (inLLWaferCount == 0 && !preaparedLLs.Contains(inLL))
                {
                    (_dictModuleTask[inLL] as LoadlockTask).PreVent();
                    preaparedLLs.Add(inLL);
                }
                else if(inLLWaferCount == (LLInOutPath == SequenceLLInOutPath.AInBOut ? _LLASlotNumber : _LLBSlotNumber) && !preaparedLLs.Contains(inLL))
                {
                    (_dictModuleTask[inLL] as LoadlockTask).PrePump();
                    preaparedLLs.Add(inLL);
                }

                if(outLLWaferCount == 0 && !preaparedLLs.Contains(outLL))
                {
                    (_dictModuleTask[outLL] as LoadlockTask).PrePump();
                    preaparedLLs.Add(outLL);
                }
                else if(outLLWaferCount == (LLInOutPath == SequenceLLInOutPath.BInAOut ? _LLASlotNumber : _LLBSlotNumber) && !preaparedLLs.Contains(outLL))
                {
                    (_dictModuleTask[outLL] as LoadlockTask).PreVent();
                    preaparedLLs.Add(outLL);
                }
            }
        }

        private void ReturnVacWafers()
        {
            if (_tmSchdActions.Count > 0 || _curTmAction.Count > 0)
            {
                RunSchdTMReturnActions();
                return;
            }

            if (_tmRobotStatus != RState.End)
                return;
            var hands = GetTMFreeHand();
            var lls = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) && !IsLLReservedByEFEM(mod.Key) && mod.Value.Scheduler.IsIdle && GetLLWaferExistance(mod.Key).emptySlots.Count > 0).OrderByDescending(mod => GetLLReadyInOutSlots(mod.Key).emptySlot.Count);
            if(lls.Count() > 0)
            {
                // return robot wafers
                int moveCount = 0;
                var llActions = new List<MoveItem>();
                var emptySlots = GetLLWaferExistance(lls.First().Key).emptySlots;
                for(int arm = 0; arm < 2; arm++)
                {
                    var wafer = WaferManager.Instance.GetWafer(ModuleName.TMRobot, arm);
                    if(wafer != null && !wafer.IsEmpty && moveCount < emptySlots.Count)
                    {
                        llActions.Add(new MoveItem(ModuleName.TMRobot, arm, lls.First().Key, emptySlots[moveCount], (Hand)arm));
                        moveCount++;
                    }
                }

                if(moveCount > 0)
                {
                    _tmSchdActions.Enqueue(llActions);
                    return;
                }

                // return PM wafers
                var PickActions = new List<MoveItem>();
                var hasWaferPMs = _dictModuleTask.Where(mod => ModuleHelper.IsPm(mod.Key) && mod.Value.Scheduler.IsIdle && WaferManager.Instance.CheckHasWafer(mod.Key, 0));
                foreach(var pm in hasWaferPMs)
                {
                    if (moveCount < hands.Count && moveCount < emptySlots.Count)
                    {
                        PickActions.Add(new MoveItem(pm.Key, 0, ModuleName.TMRobot, (int)hands[moveCount], hands[moveCount]));
                        llActions.Add(new MoveItem(ModuleName.TMRobot, (int)hands[moveCount], lls.First().Key, emptySlots[moveCount], hands[moveCount]));
                        moveCount++;
                    }
                }

                if(moveCount > 0)
                {
                    foreach(var ac in PickActions)
                    {
                        _tmSchdActions.Enqueue(new List<MoveItem> { ac });
                    }

                    _tmSchdActions.Enqueue(llActions);
                }
            }
        }

        private void ReturnAtmWafers()
        {
            if (_efemSchdActions.Count > 0 || _curEfemAction.Count > 0)
            {
                RunSchdEFEMReturnActions();
                return;
            }

            if (_efemRobotStatus != RState.End)
                return;

            // return Robot Wafer
            for(int i = 0; i < 2; i++)
            {
                var wafer = WaferManager.Instance.GetWafer(ModuleName.EfemRobot, i);
                if(wafer != null && !wafer.IsEmpty)
                {
                    _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.EfemRobot, i, (ModuleName)wafer.OriginStation, wafer.OriginSlot, (Hand)i) });
                }
            }

            if (_efemSchdActions.Count > 0)
                return;

            var hands = GetEFEMFreeHand();
            // return Aligner wafer
            var aligner = ModuleHelper.InstalledModules.Where(mod => ModuleHelper.IsAligner(mod)).ToList();
            if(aligner.Count > 0 && WaferManager.Instance.CheckHasWafer(aligner.First(), 0) && hands.Count > 0)
            {
                var wafer = WaferManager.Instance.GetWafer(aligner.First(), 0);
                _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(aligner.First(), 0, ModuleName.EfemRobot, (int)hands.First(), hands.First()) });
                _efemSchdActions.Enqueue(new List<MoveItem> { new MoveItem(ModuleName.EfemRobot, (int)hands.First(), (ModuleName)wafer.OriginStation, wafer.OriginSlot, hands.First()) });
                return;
            }

            // return Loadlock wafer
            var lls = _dictModuleTask.Where(mod => ModuleHelper.IsLoadLock(mod.Key) && !IsLLReservedByTM(mod.Key) && mod.Value.Scheduler.IsIdle && GetLLWaferExistance(mod.Key).wafers.Count > 0).OrderByDescending(mod => GetLLWaferExistance(mod.Key).wafers.Count);
            if(lls.Count() > 0)
            {
                int returnCount = 0;
                var llActions = new List<MoveItem>();
                var placActions = new List<MoveItem>();
                foreach(var wafer in GetLLWaferExistance(lls.First().Key).wafers)
                {
                    if(returnCount < hands.Count)
                    {
                        llActions.Add(new MoveItem(lls.First().Key, wafer.Slot, ModuleName.EfemRobot, (int)hands[returnCount], hands[returnCount]));
                        placActions.Add(new MoveItem(ModuleName.EfemRobot, (int)hands[returnCount], (ModuleName)wafer.OriginStation, wafer.OriginSlot, hands[returnCount]));
                        returnCount++;
                    }
                }

                if (returnCount > 0)
                {
                    _efemSchdActions.Enqueue(llActions);
                    foreach (var ac in placActions)
                    {
                        _efemSchdActions.Enqueue(new List<MoveItem> { ac });
                    }
                }
            }
        }

        private void RunSchdEFEMReturnActions()
        {
            var efemRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.EfemRobot) as SchedulerEfemRobot;
            if (efemRobot == null || !efemRobot.IsAvailable)
                return;

            if (_efemSchdActions.Count > 0)
            {
                if (_curEfemAction.Count == 0 || isReturnActionsDone(_curEfemAction))
                {
                    var nextActions = _efemSchdActions.First();

                    var nextModule = nextActions.First().Module;

                    if (ModuleHelper.IsLoadLock(nextModule) && !_dictModuleTask[nextModule].IsIdle)
                        return;

                    _curEfemAction = _efemSchdActions.Dequeue();

                    efemRobot.PostMoveItems(_curEfemAction.ToArray());
                }
            }
            else if (_curEfemAction.Count >= 0 && isReturnActionsDone(_curEfemAction)) // all scheduled actions done
            {
                _curEfemAction.Clear();
            }
        }

        private void RunSchdTMReturnActions()
        {
            var tmRobot = Singleton<TransferModule>.Instance.GetScheduler(ModuleName.TMRobot) as SchedulerTMRobot;
            if (tmRobot == null || !tmRobot.IsAvailable)
                return;

            if (_tmSchdActions.Count > 0)
            {
                if (_curTmAction.Count == 0 || isReturnActionsDone(_curTmAction))
                {
                    var nextActions = _tmSchdActions.First();

                    var nextModule = nextActions.First().Module;

                    if (ModuleHelper.IsLoadLock(nextModule) && !_dictModuleTask[nextModule].IsIdle)
                        return;

                    _curTmAction = _tmSchdActions.Dequeue();

                    tmRobot.SendMoveItems(_curTmAction.ToArray());
                }
            }
            else if (_curTmAction.Count >= 0 && isReturnActionsDone(_curTmAction)) // all scheduled actions done
            {
                _curTmAction.Clear();
            }
        }

        #endregion

        #region sequence/recipe operation

        private bool CheckSequencePmReady(SequenceInfo seq, out string reason)
        {
            reason = "";

            foreach(var pm in seq.PMs)
            {
                if (ModuleHelper.IsInstalled(pm) && (_dictModuleTask[pm].Scheduler.IsOnline || !Singleton<RouteManager>.Instance.IsAutoMode))
                    return true;
            }

            reason = $"Sequence {seq.Name} no valid PM, " + string.Join("|", seq.PMs);

            return false;
        }
        private bool CheckSequenceKepler2200TemperatureReady(SequenceInfo seq)
        {
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        string attr = $"{module}Recipe";
                        if (stepInfo.StepParameter.ContainsKey(attr)
                            && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
                        {
                            var recipeName = (string)stepInfo.StepParameter[attr];
                            var recipeContent =
                                    RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
                            var recipe = Recipe.Load(recipeContent);
                            float currentChamberTemperature;
                            switch (module)
                            {
                                case ModuleName.PMA:
                                    currentChamberTemperature = Singleton<RouteManager>.Instance.PMA.ChamberTemperature;
                                    break;
                                case ModuleName.PMB:
                                    currentChamberTemperature = Singleton<RouteManager>.Instance.PMB.ChamberTemperature;
                                    break;
                                case ModuleName.PMC:
                                    currentChamberTemperature = Singleton<RouteManager>.Instance.PMC.ChamberTemperature;
                                    break;
                                case ModuleName.PMD:
                                    currentChamberTemperature = Singleton<RouteManager>.Instance.PMD.ChamberTemperature;
                                    break;
                                default:
                                    currentChamberTemperature = 0;
                                    break;
                            }
                            if (recipe.Header.Temperature!=null && recipe.Header.Temperature!="" && (currentChamberTemperature > Convert.ToSingle(recipe.Header.Temperature) + 10 || currentChamberTemperature < Convert.ToSingle(recipe.Header.Temperature) - 10))
                            {
                                LOG.Write(eEvent.ERR_ROUTER, ModuleName.System, $"Start job失败,由于{module}腔体温度{currentChamberTemperature}与{recipeName} Recipe温度{recipe.Header.Temperature}不匹配");
                                return false;
                            }
                        }
                    }

                }
            }
            return true;
        }

        private bool CheckSequenceRecipeFileValid(SequenceInfo seq, out string reason)
        {
            for (int i = 0; i < seq.Steps.Count; i++)
            {
                SequenceStepInfo stepInfo = seq.Steps[i];
                foreach (var module in stepInfo.StepModules)
                {
                    if (ModuleHelper.IsPm(module))
                    {
                        string attr = $"{module}Recipe";
                        if (stepInfo.StepParameter.ContainsKey(attr)
                            && !string.IsNullOrWhiteSpace((string)stepInfo.StepParameter[attr]))
                        {
                            var recipeName = (string)stepInfo.StepParameter[attr];
                            if (!string.IsNullOrWhiteSpace(recipeName))
                            {
                                var recipeContent =
                                    RecipeFileManager.Instance.LoadRecipe($"{module}", recipeName, false, "Process");
                                if (string.IsNullOrWhiteSpace(recipeContent))
                                {
                                    reason = $"Can not find recipe file{recipeName}";
                                    return false;
                                }
                            }
                        }
                    }
                }
            }

            reason = "";
            return true;
        }

        private void UpdateLLInOutPathProperty()
        {
            if (_lstControlJobs.Count == 0)
                return;

            var inOutPaths = new List<SequenceLLInOutPath>(); 
            foreach(var wt in _lstWaferTasks)
            {
                if (!inOutPaths.Contains(wt.llInOutPath))
                    inOutPaths.Add(wt.llInOutPath);
            }

            if (inOutPaths.Count == 1)
            {
                _LLInOutPath = inOutPaths[0];
            }
            else
                _LLInOutPath = SequenceLLInOutPath.DInDOut;
        }

        #endregion
    }
}