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EventDefine.cs
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a5245356d0
source files
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2 anni fa |
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GasBoxLeakCheckRoutine.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 anno fa |
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GasFlowRoutine.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 anno fa |
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LLPickRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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LLPlaceRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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LoadLockLeakCheckRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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LoadLockPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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LoadLockPurgeRoutine.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 anno fa |
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LoadLockVentRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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PMControlPressureRoutine.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 anno fa |
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PMEntity.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 anno fa |
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PMGasVerificationRoutine.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 anno fa |
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PMGaslinePurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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PMHomeRoutine.cs
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818383115c
UI优化
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1 anno fa |
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PMLeakCheckRoutine.cs
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bdcf0556c9
1.将kepler2200与其它项目配置文件分开
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1 anno fa |
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PMPartialPressureRoutine.cs
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4338503e2a
1.添加霍庭格RF Device
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1 anno fa |
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PMProcessRoutine.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 anno fa |
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PMProcess_FA.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 anno fa |
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PMPurgeRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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PMRoutineBase.cs
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 anno fa |
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PMVATPerformanceRoutine.cs
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818383115c
UI优化
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1 anno fa |
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Process.cs
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3cad102221
更新 RT
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2 anni fa |
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ProcessDefine.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 anno fa |
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PumpDownRoutine.cs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 anno fa |
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RFPowerSwitchRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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StartDryPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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StartTurboPumpRoutine.cs
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03063bae6a
Enhance the routine framework.
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1 anno fa |
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VentRoutine.cs
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33ba42d9ef
1.添加RT关闭同时关闭钟摆阀和RF的功能
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1 anno fa |
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VenusRecipeFileContext.cs
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7d93bf0076
Job Clean function, not finished.
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1 anno fa |
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VenusSequenceFileContext.cs
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a5542b5c2c
add SETMCycle|SESequence|SE Swap| => UI+RT && Update the Config items' visible by PM.ChamberType, item keyword of "typeflag" and InstalledModule
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1 anno fa |
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VirgoRecipeFileContext.cs
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896c7407de
优化log功能
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2 anni fa |
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VirgoSequenceFileContext.cs
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896c7407de
优化log功能
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2 anni fa |
