PumpDownRoutine.cs 4.8 KB

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  1. using System;
  2. using Aitex.Core.RT.Routine;
  3. using Aitex.Core.RT.SCCore;
  4. using Venus_RT.Devices;
  5. using MECF.Framework.Common.Routine;
  6. using Venus_Core;
  7. namespace Venus_RT.Modules.PMs
  8. {
  9. class PumpDownRoutine : PMRoutineBase, IRoutine
  10. {
  11. private enum PumpStep
  12. {
  13. kDelay_2s,
  14. kCloseISOValve,
  15. kSoftPump,
  16. kFastPump,
  17. kPVHe2,
  18. kISOValve,
  19. kTurboN2Purge,
  20. kVATValve,
  21. kOpenTurboPumpPurgeGasFinal,
  22. kFinalStep,
  23. kEnd,
  24. }
  25. //private int _ventTime;
  26. private int _pump_delay = 5000;
  27. private int _roughPumpPressure = 75000;
  28. private int _vHe2FlowPressure = 200;
  29. private int _basePressure = 10;
  30. private JetChamber jetChamber = JetChamber.None;
  31. public PumpDownRoutine(JetPMBase chamber) : base(chamber)
  32. {
  33. jetChamber = (JetChamber)SC.GetValue<int>($"{chamber.Name}.ChamberType");
  34. Name = "PumpDown";
  35. }
  36. public RState Start(params object[] objs)
  37. {
  38. if (CheckLid() &&
  39. CheckSlitDoor())
  40. {
  41. Reset();
  42. _chamber.CloseValves();
  43. _roughPumpPressure = SC.GetValue<int>($"{Module}.Pump.PumpCrossingPressure");
  44. _pump_delay = SC.GetValue<int>($"{Module}.Pump.PumpValveDelay") * 1000;
  45. _basePressure = (objs.Length >= 1) ? Convert.ToInt32(objs[0]) : SC.GetValue<int>($"{Module}.Pump.PumpBasePressure");
  46. _chamber.OpenValve(ValveType.PVN22, true);
  47. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  48. _chamber.TurnPendulumValve(false);
  49. if (jetChamber == JetChamber.Venus)
  50. {
  51. _chamber.OpenValve(ValveType.HeISO, false);
  52. _chamber.OpenValve(ValveType.PVHe3, false);
  53. }
  54. _vHe2FlowPressure = SC.GetValue<int>($"{Module}.Pump.PumpVHe2FlowPressure");
  55. return Runner.Start(Module, Name);
  56. }
  57. return RState.Failed;
  58. }
  59. public RState Monitor()
  60. {
  61. Runner.Delay(PumpStep.kDelay_2s, _delay_2s)
  62. .Run(PumpStep.kCloseISOValve, HOFs.WrapAction(_chamber.OpenValve, ValveType.TurboPumpPumping, false), _delay_2s)
  63. .Run(PumpStep.kSoftPump, HOFs.WrapAction(_chamber.OpenValve, ValveType.SoftPump, true), () => { return _chamber.ChamberPressure < _roughPumpPressure; })
  64. .Run(PumpStep.kFastPump, OpenFastPump, () => { return _chamber.ChamberPressure < _vHe2FlowPressure; })
  65. .Run(PumpStep.kPVHe2, OpenHe2Valve, _delay_2s)
  66. .Run(PumpStep.kISOValve, OpenISOValve, _delay_2s)
  67. .Run(PumpStep.kVATValve, OpenVATValve, _delay_5s)
  68. .Run(PumpStep.kOpenTurboPumpPurgeGasFinal, OpenTurboPumpPurgeGasFinalValve, _delay_3s)
  69. .Run(PumpStep.kFinalStep, FinalStep, () => { return _chamber.ChamberPressure < _basePressure; })
  70. .End(PumpStep.kEnd, NullFun, _delay_1s);
  71. return Runner.Status;
  72. }
  73. private bool OpenTurboPumpPurgeGasFinalValve()
  74. {
  75. _chamber.OpenValve(ValveType.TurboPumpPurge, true);
  76. _chamber.OpenValve(ValveType.GasFinal, true);
  77. return true;
  78. }
  79. private bool OpenFastPump()
  80. {
  81. _chamber.OpenValve(ValveType.SoftPump, false);
  82. _chamber.OpenValve(ValveType.FastPump, true);
  83. return true;
  84. }
  85. private bool OpenHe2Valve()
  86. {
  87. _chamber.OpenValve(ValveType.FastPump, false);
  88. _chamber.OpenValve(ValveType.PVHe2, true);
  89. return true;
  90. }
  91. private bool OpenISOValve()
  92. {
  93. _chamber.OpenValve(ValveType.PVHe2, false);
  94. // ISO Valve
  95. _chamber.OpenValve(ValveType.TurboPumpPumping, true);
  96. return true;
  97. }
  98. private bool OpenVATValve()
  99. {
  100. return _chamber.TurnPendulumValve(true);
  101. }
  102. private bool FinalStep()
  103. {
  104. _chamber.OpenValve(ValveType.Guage, true);
  105. //2023/04/25修改
  106. //_chamber.OpenValve(ValveType.TurboPumpPurge, true);
  107. //_chamber.OpenValve(ValveType.GasFinal, true);
  108. return true;
  109. }
  110. public void Abort()
  111. {
  112. CloseAllValves();
  113. }
  114. }
  115. }