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EFEM
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b71003a42d
Fix the increasing aligner angle out of range bug.
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1 year ago |
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LLs
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c3bef13a6e
Enhance Auto pump/vent algorithm.
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1 year ago |
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LPs
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8bb5f3f4f9
fixed loadport event notify;
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1 year ago |
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PMs
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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SMIF
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49815fb19f
add VCE Module in UI && fix bug in SE Cycle
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1 year ago |
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Schedulers
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
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TM
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6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能
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1 year ago |
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VCE
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e187642592
commit Venus SE TM IO and DeviceModel&& PM view.
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1 year ago |
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AutoCycle.cs
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4259958c23
Remove the Align angle definition in sequence and implement the Loadlock delay function.
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1 year ago |
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Autotransfer_LP_FA.cs
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8bb5f3f4f9
fixed loadport event notify;
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1 year ago |
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DVIDName.cs
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44fc6989ef
1、Remove FabConnect dll file;
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1 year ago |
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EntityTaskBase.cs
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5b037046f9
Add TM/LL modules.
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2 years ago |
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ManualTransfer.cs
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501997ac38
TM/EFEM robot single arm option.
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1 year ago |
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ResourceMonitor.cs
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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RouteManager.cs
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12eb71a75f
Redesign the Clean recipe algorithm and fix the throughput calculation bug.
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1 year ago |
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SEManualTransfer.cs
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0728fdc25a
Add Abort while SE Cycle, ReturnWafer, manual transfer && fix bug in SETM simulator && update UI in SE Operation,TM View
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1 year ago |
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SETMCycle.cs
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8436daeb68
Eliminate SE generation warning.
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1 year ago |
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TMCycle.cs
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68b4ba9640
1.添加mtorr与Pa切换功能
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1 year ago |
lixiang
6d6f659b77
1.Kepler2200 TM/PM控大压力10Pa，添加工艺结束，等待压力稳定(TM/PM压差满足要求)TM再Pick功能