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EventDefine.cs
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a5245356d0
source files
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3 years ago |
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GasBoxLeakCheckRoutine.cs
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6a29fad5f9
update for unload/PMleakcheck bugs
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2 years ago |
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GasFlowRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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LLPickRoutine.cs
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d49b8f65dd
fix the RouteManager instance initialize bug.
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2 years ago |
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LLPlaceRoutine.cs
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d49b8f65dd
fix the RouteManager instance initialize bug.
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2 years ago |
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LoadLockLeakCheckRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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LoadLockPumpRoutine.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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LoadLockPurgeRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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LoadLockVentRoutine.cs
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a4b75ecb2e
1.每个Chamber做成可配，默认PMA Venus，PMB Kepler2300
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2 years ago |
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PMEntity.cs
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379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
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2 years ago |
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PMGasVerificationRoutine.cs
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93b4531b7b
robot 不能home问题提交
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2 years ago |
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PMGaslinePurgeRoutine.cs
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6a29fad5f9
update for unload/PMleakcheck bugs
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2 years ago |
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PMHomeRoutine.cs
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8f80478982
1.添加IoSwitch
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2 years ago |
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PMLeakCheckRoutine.cs
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6a29fad5f9
update for unload/PMleakcheck bugs
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2 years ago |
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PMPartialPressureRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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PMProcessRoutine.cs
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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2 years ago |
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PMProcess_FA.cs
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987f0abae5
1.Slove TuroN2Flow don't show problem
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2 years ago |
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PMPurgeRoutine.cs
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6a29fad5f9
update for unload/PMleakcheck bugs
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2 years ago |
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PMRoutineBase.cs
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124b11b9f3
1.kepler2300 添加三个chiller功能（模拟器功能暂无）
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2 years ago |
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PMVATPerformanceRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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Process.cs
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3cad102221
更新 RT
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3 years ago |
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ProcessDefine.cs
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76a22f462f
1.根据tps提供sequence 添加控压功能
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2 years ago |
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PumpDownRoutine.cs
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cb91599d02
修复recipe Ui信息显示
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2 years ago |
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RFPowerSwitchRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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StartDryPumpRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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StartTurboPumpRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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VentRoutine.cs
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de406b964e
1.添加EFEM等ui界面
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2 years ago |
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VenusRecipeFileContext.cs
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2b930e56b9
Log output for exception.
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2 years ago |
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VenusSequenceFileContext.cs
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2b930e56b9
Log output for exception.
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2 years ago |
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VirgoRecipeFileContext.cs
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896c7407de
优化log功能
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3 years ago |
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VirgoSequenceFileContext.cs
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896c7407de
优化log功能
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3 years ago |
