| .. |
|
EFEM
|
8020492bf4
fix action list buffer not reset while swap wafer.
|
2 years ago |
|
LLs
|
d49b8f65dd
fix the RouteManager instance initialize bug.
|
2 years ago |
|
LPs
|
aaff066e93
EFEM Align UI RT 更新
|
2 years ago |
|
PMs
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
2 years ago |
|
Schedulers
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
2 years ago |
|
TM
|
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能
|
2 years ago |
|
VCE
|
a980a39acf
add read delay in IoCylinder && add unknown error codes with VPA driver && add VceEntity
|
2 years ago |
|
AutoCycle.cs
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
2 years ago |
|
Autotransfer_LP_FA.cs
|
60e9a04892
Simulator LP3 Update
|
2 years ago |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 years ago |
|
ManualTransfer.cs
|
9ba5d70aff
fix abort manual transfer bug.
|
2 years ago |
|
RouteManager.cs
|
a88d0012df
fix some AutoCycle/manualMove/ReturnWafer/Abort bugs.
|
2 years ago |
|
TMCycle.cs
|
9ba5d70aff
fix abort manual transfer bug.
|
2 years ago |
lixiang
379fe79c7b
1.根据tps sequence修改tm/ll vent/pump等功能