| .. |
|
EFEM
|
a4f8a29122
1.Kepler2200 Gas 改造，六路变八路
|
11 mēneši atpakaļ |
|
LLs
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
11 mēneši atpakaļ |
|
LPs
|
9e9459c927
efem界面按钮功能优化
|
11 mēneši atpakaļ |
|
PMs
|
2136e3b838
1.分开kepler与Venus 漏气检测ui，删除多余代码
|
11 mēneši atpakaļ |
|
SMIF
|
49815fb19f
add VCE Module in UI && fix bug in SE Cycle
|
1 gadu atpakaļ |
|
Schedulers
|
da0e19a78e
enhance the error handling routine while PM offline.
|
11 mēneši atpakaļ |
|
TM
|
01f4eaa5de
fix the bug in SEMFSwapRoutine
|
11 mēneši atpakaļ |
|
VCE
|
01f4eaa5de
fix the bug in SEMFSwapRoutine
|
11 mēneši atpakaļ |
|
AutoCycle.cs
|
2f30fa17c4
1、修复了Wafer_Left_Position上报数据；
|
1 gadu atpakaļ |
|
Autotransfer_LP_FA.cs
|
8cf03142ec
Add the PreClean,PostClean in SequenceInfo && Add DESequenceFormat.xml for Sequence && Add Venus DETM IO && fix VCEA pump Open in UI
|
11 mēneši atpakaļ |
|
DVIDName.cs
|
44fc6989ef
1、Remove FabConnect dll file;
|
1 gadu atpakaļ |
|
EntityErrorRaiseTrigger.cs
|
d35b997884
1.优化RevtechMatch状态机
|
1 gadu atpakaļ |
|
EntityTaskBase.cs
|
5b037046f9
Add TM/LL modules.
|
2 gadi atpakaļ |
|
ManualTransfer.cs
|
1b2d4bb89d
fix the manual move wafer bug while single arm option bigger than 2.
|
1 gadu atpakaļ |
|
ResourceMonitor.cs
|
8436daeb68
Eliminate SE generation warning.
|
1 gadu atpakaļ |
|
RouteManager.cs
|
1a56dd552c
fix bugs
|
11 mēneši atpakaļ |
|
SEManualTransfer.cs
|
3c1ae4babb
add abort for VenusDE && fix bug in UI && add AbortJob,StopJob
|
11 mēneši atpakaļ |
|
SETMCycle.cs
|
c1ae6b6ea1
1.Fix Chamber DE recipe process bugs
|
11 mēneši atpakaļ |
|
SystemDispatcher.cs
|
1b11b89cd6
handle the Scheduler wafers while destination PM unexpected offline.
|
11 mēneši atpakaļ |
|
TMCycle.cs
|
68b4ba9640
1.添加mtorr与Pa切换功能
|
1 gadu atpakaļ |
|
VenusDispatcher.cs
|
9d5c9aa491
Reset PMTask while after system abort.
|
11 mēneši atpakaļ |
sangwq
1b11b89cd6
handle the Scheduler wafers while destination PM unexpected offline.