hecl 10 months ago
parent
commit
1a56dd552c

+ 2 - 3
Venus/Venus_RT/Devices/JetPMBase.cs

@@ -223,8 +223,7 @@ namespace Venus_RT.Devices
             //DATA.Subscribe($"{Name}.ProcessLowPressure", () => ProcessLowPressure,SubscriptionAttribute.FLAG.IgnoreSaveDB);
             DATA.Subscribe($"{Name}.CalculationPressure", () => CalculationPressure, SubscriptionAttribute.FLAG.IgnoreSaveDB);
             DATA.Subscribe($"{Name}.ChamberPressure", () => ChamberPressure);
-            DATA.Subscribe($"{Name}.ProcessPressure", () => ProcessPressure);
-            DATA.Subscribe($"{Name}.ESCHePressure", () => ESCHePressure);
+            DATA.Subscribe($"{Name}.ProcessPressure", () => ProcessPressure);          
             //DATA.Subscribe($"{Name}.LoadlockPressure", () => LoadlockPressure);
 
             DATA.Subscribe($"{Name}.IsATM", () => IsATM, SubscriptionAttribute.FLAG.IgnoreSaveDB);
@@ -252,7 +251,7 @@ namespace Venus_RT.Devices
 
             DATA.Subscribe($"{Name}.GetPVPosition", () => GetPVPosition());
 
-            DATA.Subscribe($"{Name}.ESCHV.Temp", () => CoolantOutletTempFB);
+           
             DATA.Subscribe($"{Name}.Chiller.Temp", () => CoolantInletTempFB);
             DATA.Subscribe($"{Name}.WallChiller.Temp", () => CoolantInletWallTempFB,SubscriptionAttribute.FLAG.IgnoreSaveDB);
             //DATA.Subscribe($"{Name}.Chiller.IsOn", () => ChillerIsRunning, SubscriptionAttribute.FLAG.IgnoreSaveDB);

+ 3 - 0
Venus/Venus_RT/Devices/JetVenusDEPM.cs

@@ -129,6 +129,8 @@ namespace Venus_RT.Devices
         public JetVenusDEPM(ModuleName moduleName) : base(moduleName)
         {
             Module = moduleName;
+            DATA.Subscribe($"{Name}.ESCHV.Temp", () => CoolantOutletTempFB);
+            DATA.Subscribe($"{Name}.ESCHePressure", () => ESCHePressure);
             _Lid = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.Lid}");
             _LiftPin = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LiftPin}");
             _linerDoor = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LinerDoor}");
@@ -891,6 +893,7 @@ namespace Venus_RT.Devices
 
         public async override void CloseValves(int? delayTime = null)
         {
+
             _PVN21Valve.TurnValve(false, out _);
             //_PVN22Valve.TurnValve(false, out _);
             _PV11Valve.TurnValve(false, out _);

+ 2 - 0
Venus/Venus_RT/Devices/JetVenusSEPM.cs

@@ -152,6 +152,8 @@ namespace Venus_RT.Devices
         #region 构造函数
         public JetVenusSEPM(ModuleName moduleName) : base(moduleName)
         {
+            DATA.Subscribe($"{Name}.ESCHV.Temp", () => CoolantOutletTempFB);
+            DATA.Subscribe($"{Name}.ESCHePressure", () => ESCHePressure);
             Module = moduleName;
             _Lid = DEVICE.GetDevice<IoLid>($"{Module}.{VenusDevice.Lid}");
             _LiftPin = DEVICE.GetDevice<IoCylinder>($"{Module}.{VenusDevice.LiftPin}");

+ 1 - 1
Venus/Venus_RT/Modules/RouteManager.cs

@@ -477,7 +477,7 @@ namespace Venus_RT.Modules
                 return ModuleHelper.IsInstalled((ModuleName)args[0]);
             });
             OP.Subscribe("System.SETMCycle", (cmd, args) => CheckToPostMessage((int)MSG.SETMCycle, args));
-            OP.Subscribe("System.CreateSEJob", (cmd, args) => CheckToPostMessage((int)MSG.CreateSEJob, args));
+            OP.Subscribe("System.CreateSEJob", (cmd, args) => CheckToPostMessage((int)MSG.CreateJob, args));
             OP.Subscribe("System.StartSEJob", (cmd, args) => CheckToPostMessage((int)MSG.StartJob, args));
             OP.Subscribe("System.ReturnAllSEWafer", (cmd, args) => CheckToPostMessage((int)MSG.ReturnAllWafer, args));
             OP.Subscribe("System.SEAbort", (cmd, args) => CheckToPostMessage((int)MSG.ABORT, args));

+ 1 - 2
Venus/Venus_RT/Modules/TM/VenusEntity/SEMFPMPickRoutine.cs

@@ -139,9 +139,8 @@ namespace Venus_RT.Modules.TM.VenusEntity
         {
             if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
             {
+                double PMPressure = _pmModule.ChamberPressure;
                 double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
-                //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
-                double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
                 double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
                 if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
                 {

+ 1 - 2
Venus/Venus_RT/Modules/TM/VenusEntity/SEMFPMPlaceRoutine.cs

@@ -140,9 +140,8 @@ namespace Venus_RT.Modules.TM.VenusEntity
         {
             if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
             {
+                double PMPressure = _pmModule.ChamberPressure;
                 double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
-                //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
-                double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
                 double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
                 if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
                 {

+ 1 - 2
Venus/Venus_RT/Modules/TM/VenusEntity/SEMFPMSwapRoutine.cs

@@ -162,9 +162,8 @@ namespace Venus_RT.Modules.TM.VenusEntity
         {
             if (Singleton<RouteManager>.Instance.GetPM(_targetModule).IsOnline)
             {
+                double PMPressure = _pmModule.ChamberPressure;
                 double ControlPressure = SC.GetValue<int>($"{_targetModule}.ControlPressureSetPoint");
-                //double PMPressure = Singleton<RouteManager>.Instance.GetPM(_targetModule).ChamberPressure;
-                double PMPressure = (double)DATA.Poll($"{_targetModule}.ChamberPressure");
                 double range = SC.GetValue<int>($"{_targetModule}.ControlPressureOffset");
                 if ((PMPressure >= (ControlPressure - range)) && (PMPressure <= (ControlPressure + range)))
                 {